CN104792197A - High-efficiency cooling system - Google Patents
High-efficiency cooling system Download PDFInfo
- Publication number
- CN104792197A CN104792197A CN201510230320.0A CN201510230320A CN104792197A CN 104792197 A CN104792197 A CN 104792197A CN 201510230320 A CN201510230320 A CN 201510230320A CN 104792197 A CN104792197 A CN 104792197A
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- Prior art keywords
- cooling
- cooler pan
- cooling system
- driven pump
- temperature
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Abstract
The invention provides a high-efficiency cooling system, and relates to the technical field of high-temperature liquid cooling. The high-efficiency cooling system mainly comprises a cooling liquid storing device (8) used for storing cooling liquid, a cooling liquid pipeline (9), a pneumatic pump (10) used for supplying power for the cooling system and a cooling disc (12). The cooling liquid storing device (8) is connected with the pneumatic pump (10) through the cooling liquid pipeline (9), and the cooling liquid can flow into the pneumatic pump (10) from the cooling liquid storing device (8) through the cooling liquid pipeline (9); a cooling pipe (16) on the cooling disc (12) is connected with the pneumatic pump (10) through the cooling pipeline (9), and the cooling liquid can flow into the cooling pipe (16) through the pneumatic pump (10); the cooling liquid storing device (8) is connected with the cooling disc (12) through the cooling pipeline (9), and the cooling liquid can flow into the cooling liquid storing device (8) through the cooling disc (12), so that the purpose of fast cooling is achieved, the liquid cooling waiting time can be shortened, the production efficiency can be improved, and the potential safety hazards can be eliminated.
Description
Technical field
The present invention relates to high-temp liquid cooling technology field, be specifically related to a kind of efficient cooling system.
Background technology
In semiconductor chip manufacturing, multiple working procedure needs to use that chemical liquid carries out etching, cleaning treatment, but partial chemical liquid temperature in process for preparation can sharply rise to more than 200 DEG C, and technological temperature requires to remain between 60-70 DEG C, therefore, need for enhancing productivity to carry out fast cooling to liquid.
Existing part washing apparatus does not configure cooling device, and solution cooling adopts nature cooling; Also have the way manually taking the beaker filling cold water to put into liquid to be cooled in addition, this kind of cooling effect shortens more natural cool time to some extent.
The way manually taking the beaker filling cold water to put into liquid to be cooled to carry out cooling, although can shorten cool time, effect is unsatisfactory, and there is potential safety hazard.
Summary of the invention
(1) technical problem solved
For the deficiencies in the prior art, the invention provides a kind of efficient cooling system that can reduce fluid temperature fast, make liquid to be cooled can reduce solution temperature fast.
(2) technical scheme
For realizing above object, the present invention is achieved by the following technical programs:
The invention provides a kind of efficient cooling system, comprise cooler pan, coolant duct, for store cooling fluid coolant storage and for providing the air driven pump of power for cooling system;
Preferably, described coolant storage is connected with air driven pump by coolant duct, and cooling fluid can flow into air driven pump by coolant storage through coolant duct;
Cooling tube on described cooler pan is connected by cooling pipe with air driven pump, and cooling fluid can flow into cooling tube by air driven pump;
Described coolant storage is connected with cooler pan by cooling pipe, and cooling fluid can flow into coolant storage by cooler pan.
Preferably, described cooler pan comprises handle for picking and placeing cooler pan, for cooling cooling tube, the cooling tube fixed disk for fixing cooling tube, the cooler pan base of liquid to be cooled.
Preferably, the cooling tube on described cooler pan is a bending pipeline or has common at least two pipelines imported and exported.
Preferably, described cooler pan is made up of the material of corrosion-and high-temp-resistant.
Preferably, described cooling system also comprises automaton.
Preferably, described automaton comprises, temperature controller, power supply, PLC, magnetic valve, alarm lamp, compressed air, cooling fluid operated pneumatic valve.
Preferably, gauge tap automaton established.
Preferably, described cooling fluid is water or alcohol.
(3) beneficial effect
The invention provides a kind of efficient cooling system, by the design to cooling tube, cooling tube fully can be contacted with liquid to be cooled, thus reach the object of fast cooling, the liquid cooling stand-by period can be shortened, enhance productivity.
Because the present invention have also been devised automaton, solution temperature to be cooled can be detected in real time, thus the flowing of controlled cooling model liquid, realize the automatic control to cooling, also be provided with alarm simultaneously, after solution to be cooled reaches design temperature, stop cooling action, give the alarm, remind staff to carry out operation.
Meanwhile, owing to have also been devised the handle for picking and placeing cooler pan in the present invention, facilitating the operation of staff, increasing work efficiency.
In addition, select high temperature resistant with the pipe fitting of liquid comes into contact to be cooled in the present invention, the material of acid-alkali-corrosive-resisting is made, and therefore cooling system provided by the present invention can be applied to the cooling of acid, alkali or neutral liquid, has wide range of applications.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structure chart of efficient cooling system;
Fig. 2 is the cooler pan front view in the first embodiment;
Fig. 3 is the top view of the cooler pan in the first embodiment;
Fig. 4 is the cooler pan front view in the second embodiment;
Fig. 5 is the cooler pan top view in the second embodiment;
Wherein, 1-temperature controller, 2-power supply, 3-PLC controller, 4-magnetic valve, 5-alarm lamp, 6-compressed air, 7-cooling fluid operated pneumatic valve, 8-coolant storage, 9-coolant duct, 10-air driven pump, 11-quartz cylinder, 12-cooler pan, 13-temperature sensor, 14-handle, 15-cooling tube, 16-telophragma, 17-cooler pan base, 18-exports conflux ring, 19-inlet tube, 20-cooling tube, 21-inlet distribution ring, 22-outlet, 100-automaton.
Detailed description of the invention
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The embodiment of the present invention provides a kind of efficient cooling system, wherein, comprise the coolant storage 8 for storing cooling fluid, coolant duct 9, for providing the air driven pump 10 of power, the cooler pan 12 for fixing cooling tube for cooling system;
Described coolant storage 8 is connected with air driven pump 10 by coolant duct 9, and cooling fluid can flow into air driven pump 10 by coolant storage 8 through coolant duct 9;
Cooling tube 15 on described cooler pan 12 is connected with air driven pump 10, and cooling fluid can flow into cooling tube 16 by air driven pump 10;
Described coolant storage 8 is connected with cooler pan 12 by cooling pipe 9, and cooling fluid can flow into coolant storage 8 by cooler pan 12;
In embodiments of the present invention, the cooling fluid in coolant storage 8 can enter air driven pump 10 by coolant duct 9 under the effect of air driven pump 10, then flows into the cooling tube 16 on cooler pan 12 through coolant duct 9; Due to the bend pipe that cooling tube is a continuous U, cooling fluid and liquid to be cooled can be made to carry out heat transfer better, while cooling fluid flows back to coolant storage 8, take away a part of heat, thus reached the object of fast cooling.
The cooling system of the embodiment of the present invention also comprises automaton 100, comprising: temperature controller 1, power supply 2, PLC 3, magnetic valve 4, alarm lamp 5, compressed air 6, cooling fluid operated pneumatic valve 7, after cooling system switch is opened, PLC 3 controls indicator lamp 5 and is in closed condition, and controls air driven pump 10 by Controlling solenoid valve 4 and work, and opens cooling fluid operated pneumatic valve 7, and cooling fluid, under the effect of air driven pump 10, circulates, temperature sensor 13 can pass to temperature controller 1 the fluid temperature to be cooled detected in real time, temperature controller 1 is by obtaining the process of sensor signal and showing the temperature of solution to be cooled, and temperature signal is passed to PLC 3, measured temperature and design temperature compare by PLC 3, if survey fluid temperature to be cooled higher than design temperature, continue to lower the temperature to cooling fluid, if survey the temperature that liquid temp to be cooled reaches set, it is bright that PLC 3 controls alarm lamp 5, and instruction is sent to magnetic valve 4, control air driven pump 10 quit work and close cooling fluid operated pneumatic valve 7, cooling system is quit work.
Embodiment 1:
Fig. 1, Fig. 2, Fig. 3 is first embodiment of the embodiment of the present invention, and whole cooling system comprises coolant storage 8, coolant duct 9, air driven pump 10, cooler pan 12, temperature sensor 13, handle 14, cooling tube 15, telophragma 16, cooler pan base 17, automaton 100 as shown in Figure 1; Wherein, cooling tube 15, handle 14, cooler pan base 17 are made up of PTFE material.Cooler pan base 17 and telophragma 16 are fixed together by support, and cooler pan base 17 is bolted on the bottom of handle 14.Cooling tube 15 is one and bends to continuous U-shaped and be fixed on the pipe on cooler pan 12.
With the 511 (H newly prepared
2sO
4: H
2o
2: H
2o=5:1:1) solution is liquid to be cooled, take water as cooling fluid is example, when cooling 511 solution, by handle 14, cooler pan is put into solution, opening power 2, and setting chilling temperature, opens the switch in PLC 3; PLC 3 Controlling solenoid valve 4 opens cooling fluid operated pneumatic valve 7; Simultaneously PLC 3 Controlling solenoid valve 4 controls air driven pump 10 and starts working, under the effect of air driven pump 10, cooling water in coolant storage 8 through cooling fluid operated pneumatic valve 7, air driven pump 10, flow to the cooling tube 15 of the continuous U-shaped in cooler pan 12, under heat conducting effect, cooling water temperature raises, the temperature of 511 solution declines, and when cooling water flows back to coolant storage 8, has taken away the partial heat of 511 solution.
Simultaneously, temperature sensor 13 detects the temperature signal of 511 solution in real time, and temperature signal is passed to temperature controller 1, temperature controller 1 is by obtaining the process of temperature signal and showing the temperature of 511 solution, then temperature signal is passed to PLC 3, measured temperature and design temperature compare by PLC 3, if survey fluid temperature to be cooled higher than design temperature, continue to lower the temperature to cooling fluid; If survey the temperature that 511 solution temperatures reach set, it is bright that PLC 3 controls alarm lamp 5, and send instruction to magnetic valve 4, controls air driven pump 10 and quit work and close cooling fluid operated pneumatic valve 7, cooling system is quit work.
Embodiment 2:
Fig. 1, Fig. 4, Fig. 5 is second embodiment of the embodiment of the present invention, as shown in Figure 1 whole cooling system comprise coolant storage 8, coolant duct 9, air driven pump 10, cooler pan 12, temperature sensor 13, handle 14, cooling tube 20, telophragma 16, cooler pan base 17, automaton 100 handle 14, inlet distribution ring 21, outlet conflux ring 18, inlet tube 19, outlet 22; Wherein, cooling tube 20, handle 14, inlet distribution ring 21, outlet conflux ring 18, inlet tube 19, outlet 22, cooler pan base 17 are made up of high temperature-resistant acid-resistant caustic corrosion material.Telophragma 16 is fixed together by support bracket bolt and handle 14, and cooler pan base 17 is bolted on the bottom of handle 14, and inlet tube 19 and inlet distribution ring 21 are threaded connection; Cooling tube 20 is at least two cooling tubes 20, one end and the inlet distribution ring 21 of cooling tube 20 are threaded connection, the other end is threaded connection with outlet conflux ring 18, and inlet distribution ring 21 is positioned at the lower end of cooler pan, and outlet conflux ring 18 is positioned at the upper end of cooler pan; The internal diameter of inlet tube and outlet is all greater than the internal diameter of cooling tube.
With the 2:1 (H newly prepared
2sO
4: H
2o
2=2:1) solution is liquid to be cooled, take alcohol as cooling fluid is example, when cooling liquid, by handle 14, cooler pan is put into solution, opening power 2, setting chilling temperature, opens the switch in PLC 3, PLC 3 Controlling solenoid valve 4 opens cooling fluid operated pneumatic valve 7, simultaneously PLC 3 Controlling solenoid valve 4 controls air driven pump 10 and starts working, under the effect of air driven pump 10, alcohol in coolant storage 8 is through cooling fluid operated pneumatic valve 7, air driven pump 10, flow in the inlet distribution ring 21 in cooler pan, alcohol through inlet distribution ring 21 enters in each cooling tube respectively, under heat conducting effect, alcohol temperature raises, the temperature of 2:1 solution declines, when alcohol flows back to coolant storage 8, take away the partial heat of 2:1 solution, connect due to multiple cooling tube, the contact area of cooling tube and solution to be cooled is increased, and also increased by the coolant rate of solution in the unit interval, can fully carry out heat transfer and take away more heat.
Simultaneously, temperature sensor 13 detects the temperature signal of 2:1 solution in real time, and temperature signal is passed to temperature controller 1, temperature controller 1 is by obtaining the process of temperature signal and showing the temperature of 2:1 solution, then temperature signal is passed to PLC 3, measured temperature and design temperature compare by PLC 3, if survey fluid temperature to be cooled higher than design temperature, continue to lower the temperature to cooling fluid; If survey the temperature that 2:1 solution temperature reaches set, it is bright that PLC 3 controls alarm lamp 5, and send instruction to magnetic valve 4, controls air driven pump 10 and quit work and close cooling fluid operated pneumatic valve 7, cooling system is quit work.
The embodiment of the present invention has following beneficial effect in sum:
The embodiment of the present invention, by the design to cooling tube, makes cooling tube can fully contact with liquid to be cooled, thus reaches the object of fast cooling, can shorten the liquid cooling stand-by period, enhance productivity.
Because the embodiment of the present invention have also been devised automaton, solution temperature to be cooled can be detected in real time, thus the flowing of controlled cooling model liquid, realize the automatic control to cooling, also be provided with alarm simultaneously, give the alarm after solution to be cooled reaches design temperature, remind staff to carry out operation, realize automatical and efficient cooling.
Meanwhile, owing to have also been devised the handle for picking and placeing cooler pan in the embodiment of the present invention, facilitating the operation of staff, increasing work efficiency.
In addition, select high temperature resistant with the pipe fitting of liquid comes into contact to be cooled in the embodiment of the present invention, the material of acid-alkali-corrosive-resisting is made, and therefore cooling system provided by the present invention can be applied to the cooling of acid, alkali, neutral liquid, has wide range of applications.
The cooling liquid used in the present invention can be water, alcohol or other cooling fluids, includes but not limited to water, alcohol mentioned in the embodiment of the present invention.
It should be noted that, in this article, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
Above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (8)
1. an efficient cooling system, comprise coolant duct (9), cooler pan (12), for providing the air driven pump of power (10) and the coolant storage (8) for storing cooling fluid for cooling system;
It is characterized in that: described coolant storage (8) is connected with air driven pump (10) by coolant duct (9), cooling fluid can flow into air driven pump (10) by coolant storage (8) through coolant duct (9);
Cooling tube (16) on described cooler pan (12) is connected by cooling pipe (9) with air driven pump (10), and cooling fluid can flow into cooling tube (16) by air driven pump (10);
Described coolant storage (8) is connected with cooler pan (12) by cooling pipe (9), and cooling fluid can flow into coolant storage (8) by cooler pan (12).
2. cooling system as claimed in claim 1, is characterized in that: described cooler pan (12) comprise handle (14) for picking and placeing cooler pan (12), for cool liquid to be cooled cooling tube (15), for the cooling tube fixed disk (16) of fixing cooling tube (15) with for fixing cooler pan (12) cooler pan base (17).
3. cooling system as claimed in claim 2, is characterized in that: the cooling tube (15) on described cooler pan (12) is a bending pipeline.
4. cooling system as claimed in claim 2, is characterized in that: described cooler pan (12) is provided with common at least two cooling tubes (15) imported and exported.
5. cooling system as claimed in claim 1, is characterized in that: described cooler pan (12) is made up of the material of corrosion-and high-temp-resistant.
6. cooling system as claimed in claim 1, is characterized in that: described cooling system also comprises automaton (100).
7. cooling system as claimed in claim 6, it is characterized in that: described automaton (100) comprises, temperature controller (1), power supply (2), PLC (3), magnetic valve (4), alarm lamp (5), compressed air (6) and cooling fluid operated pneumatic valve (6).
8. cooling system as claimed in claim 1, is characterized in that: described cooling fluid is water or alcohol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510230320.0A CN104792197A (en) | 2015-05-07 | 2015-05-07 | High-efficiency cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510230320.0A CN104792197A (en) | 2015-05-07 | 2015-05-07 | High-efficiency cooling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104792197A true CN104792197A (en) | 2015-07-22 |
Family
ID=53557206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510230320.0A Pending CN104792197A (en) | 2015-05-07 | 2015-05-07 | High-efficiency cooling system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106354195A (en) * | 2015-07-17 | 2017-01-25 | 沈阳芯源微电子设备有限公司 | Cooling disk device of semiconductor device |
| CN109369003A (en) * | 2018-12-28 | 2019-02-22 | 江苏通鼎光棒有限公司 | A kind of inlet duct and its air inlet method of the sintering of preform female rod |
| CN110940910A (en) * | 2019-12-17 | 2020-03-31 | 广东利扬芯片测试股份有限公司 | Carrying disc cooling system and wafer testing equipment |
| CN113556926A (en) * | 2021-07-16 | 2021-10-26 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and cooling assembly and cooling method thereof |
-
2015
- 2015-05-07 CN CN201510230320.0A patent/CN104792197A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106354195A (en) * | 2015-07-17 | 2017-01-25 | 沈阳芯源微电子设备有限公司 | Cooling disk device of semiconductor device |
| CN106354195B (en) * | 2015-07-17 | 2017-12-08 | 沈阳芯源微电子设备有限公司 | A kind of semiconductor equipment cooler pan device |
| CN109369003A (en) * | 2018-12-28 | 2019-02-22 | 江苏通鼎光棒有限公司 | A kind of inlet duct and its air inlet method of the sintering of preform female rod |
| CN110940910A (en) * | 2019-12-17 | 2020-03-31 | 广东利扬芯片测试股份有限公司 | Carrying disc cooling system and wafer testing equipment |
| CN113556926A (en) * | 2021-07-16 | 2021-10-26 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and cooling assembly and cooling method thereof |
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Application publication date: 20150722 |