CN104777331A - Quartz tuning fork-based near-field optical microscope scanning imaging system - Google Patents
Quartz tuning fork-based near-field optical microscope scanning imaging system Download PDFInfo
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- CN104777331A CN104777331A CN201510179862.XA CN201510179862A CN104777331A CN 104777331 A CN104777331 A CN 104777331A CN 201510179862 A CN201510179862 A CN 201510179862A CN 104777331 A CN104777331 A CN 104777331A
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Abstract
The invention discloses a quartz tuning fork-based near-field optical microscope scanning imaging system. The system comprises a quartz tuning fork, a piezoelectric ceramic scanning table, a lock-in amplifier, a photomultiplier, a laser device, a control cabinet and a computer, wherein the quartz tuning fork is fixed on the piezoelectric ceramic scanning table through a round head screw; a port 1 and a port 2 of the lock-in amplifier are connected with the two ends of the quartz tuning fork through a PCB board; the input end of the photomultiplier is connected with a collecting optical fiber probe through a filter pack; the output end of the laser device is connected with an exciting optical fiber probe; one port of the control cabinet is connected with the output end of the photomultiplier, the other port is connected with a port 3 of the lock-in amplifier, and another port 3 is connected with the piezoelectric ceramic scanning table; the input end of the computer is connected with a port 4 of the control cabinet. The quartz tuning fork-based near-field optical microscope scanning imaging system disclosed by the invention can improve the sensitivity of the existing near-field optical microscope.
Description
Technical field
The present invention relates to microscopy imaging system technical field, refer to a kind of optical microscope for scanning near field imaging system based on quartz tuning-fork especially
Background technology
Nanometer technology has become one of important technology of world today's development in science and technology, explores tera incognita have great impetus to the mankind.The high-resolution instrument such as atomic force microscope and scanning electron microscope has become the important tool of field of nanometer technology research.But atomic force microscope can only measure the shape characteristic of sample, the composition information comprised sample is helpless, although to have resolution high, easy to use for scanning electron microscope, the advantages such as imaging time is short, but it has the weakness identical with atomic force microscope.
As everyone knows, according to Rayleigh criterion, the resolution R >=0.61 λ/NA of optical imaging system, wherein λ is the wavelength of light wave, and NA=n sin θ is the numerical aperture of optical imaging system.In traditional optical imaging system, putting forward high-resolution method has following several: 1. use shorter optical wavelength; 2. the numerical aperture of optical system is increased.But these two kinds of ways can only improve the resolution of system in limited scope.Along with going deep into of people's research, occurred a kind of microscope one Near-field Optical Microscope that can break through optical diffraction limit, its appearance solves the optical microscope resolution problem of long-standing problem people.What Near-field Optical Microscope detected is hidden the die field of local on sample surface, and it by the restriction of traditional optical diffraction limit, therefore can not detect the information that conventional optical microscope can not detect.At present, the control technology that Near-field Optical Microscope adopts, substantially all based on quartz tuning-fork probe, instead of the micro-cantilever of atomic force microscope with quartz tuning-fork.But also there is its weak point in this near-field optical microscope system.General Near-field Optical Microscope uses a kind of quartz tuning-fork probe, it is that the optical fiber probe epoxy resin of 100nm is adhesive on a free vibration arm of quartz tuning-fork by needle point size, then by driving quartz tuning-fork to vibrate at its resonant frequency place, thus drive optical fiber probe to vibrate at sample surfaces, thus obtain required sample message.But because optical fiber probe is pasted onto on a shaker arm of tuning fork, this additional quality makes the effective mass of quartz tuning-fork and elastic constant change, thus the quality factor of tuning fork are acutely reduced, and quality factor directly affects the sensitivity of probe, therefore, the sensitivity of typical near-field optical microscope is very low.And, the optical fiber probe being 100nm by a most advanced and sophisticated size is pasted onto on a shaker arm of quartz tuning-fork, this needs very meticulous physical construction to go to regulate installation, otherwise the optical fiber probe of the band tuning fork obtained is very likely defective, waste the conical fiber probe obtained through kinds of processes, add the cost of system, limit its widespread use.
Summary of the invention
The object of the invention is to propose a kind of optical microscope for scanning near field imaging system based on quartz tuning-fork, to improve the sensitivity of existing Near-field Optical Microscope.
In order to achieve the above object, the present invention proposes a kind of optical microscope for scanning near field imaging system based on quartz tuning-fork, this system comprises:
One quartz tuning-fork;
One piezoelectric ceramics scan table, described quartz tuning-fork cheese head screw is fixed on piezoelectric ceramics scan table:
One lock-in amplifier, its port one, port 2 are connected with the two ends of quartz tuning-fork by pcb board;
One photomultiplier, its input end is connected with collection optical fiber probe by a filter set;
One laser instrument, its output terminal is connected with an excitation fiber probe;
One control box, its port is connected with the output terminal of photomultiplier, and its port is connected with the port 3 of lock-in amplifier, and its port 3 is connected with piezoelectric ceramics scan table;
One computer, its input end is connected with the port 4 of control box.
The invention has the beneficial effects as follows:
1, a kind of optical microscope for scanning near field imaging system based on quartz tuning-fork of the present invention's proposition, adopting is placed on quartz tuning-fork by testing sample, the change flowing through quartz tuning-fork electric current when approaching sample by detector probe controls the distance of probe and sample, it is little that this system has volume, structure is simple, the features such as cost is low.
2, a kind of optical microscope for scanning near field imaging system based on quartz tuning-fork of the present invention's proposition, adopts optical fiber probe and the discrete method opened of quartz tuning-fork, improves the quality factor of system, enhance the sensitivity of system.
Accompanying drawing explanation
In order to further illustrate content of the present invention and feature, in conjunction with the following drawings and embodiment be described in detail, wherein:
Fig. 1 is the structural representation of a kind of optical microscope for scanning near field imaging system based on quartz tuning-fork that the present invention designs.
Fig. 2 is the amplification vertical view of scanner part in Fig. 1.
Embodiment
As shown in Figures 1 and 2, a kind of optical microscope for scanning near field imaging system based on quartz tuning-fork that the present invention proposes, this system comprises:
One quartz tuning-fork 1, wherein quartz tuning-fork 1 for removing the cylindrical encapsulation of metal shell, vibration frequency is the quartz crystal oscillator of 32.768kHz, having two shaker arms, is U-shaped;
One piezoelectric ceramics scan table 2, described quartz tuning-fork 1 cheese head screw 3 is fixed on piezoelectric ceramics scan table 2, and wherein piezoelectric ceramics scan table 2 is high-precision three-dimensional piezoelectric ceramics scan table;
One lock-in amplifier 4, it is two-phase digital lock-in amplifier, port one, port 2 are connected with the two ends of quartz tuning-fork 1 by pcb board 10 (in Fig. 2), the sinusoidal signal of port one output 32.768kHz is added in one end of quartz tuning-fork 1, quartz tuning-fork 1 is vibrated at its natural frequency place, port 2 detects and flows through the electric current of quartz tuning-fork 1, and converts thereof into voltage signal and export from port 3;
One photomultiplier 5, its input end is connected with collection optical fiber probe 12 by a filter set 9; There is a window side of described photomultiplier 5; Described filter set 9 is fixed on the window of photomultiplier 5, and this filter set 9 comprises the first optical filter and the second optical filter, and the logical optical wavelength of the first optical filter is 500-800nm, and the logical optical wavelength of the second optical filter is 300-680nm; The transfer efficiency of filter set 9 should be greater than 90%, optical density value is greater than 5, and according to the difference of laser instrument 6 wavelength used, the logical optical wavelength of filter set 9 also should be different;
Wherein the two pins of quartz tuning-fork 1 is welded on pcb board 10, pcb board 10 is fixed on piezoelectric ceramics scan table 2 by cheese head screw 3, a shaker arm of quartz tuning-fork 1 places testing sample, quartz tuning-fork 1 is as the sensor of power, for detecting the distance of collecting between optical fiber probe 12 and sample, quartz tuning-fork 1 is as load sample platform simultaneously, carries out scanning imagery for carrying sample; Collecting optical fiber probe 12 described in it is the conical fiber probes adopting etch obtained; The logical optical wavelength of described collection optical fiber probe 12 is 4001000nm, and throughput is greater than 10
-5, its tip size is less than 100nm;
One laser instrument 6, its output terminal is connected with an excitation fiber probe 11, and wherein laser instrument 6 is wavelength is 473nm, and output power is less than the semiconductor laser of 10mW;
One control box 7, its port one is connected with the output terminal of photomultiplier 5, and its port 2 is connected with the output terminal of lock-in amplifier 4, and its port 3 is connected with piezoelectric ceramics scan table 2;
One computer 8, its input end is connected with the port 4 of control box 7, by lock-in amplifier described in software control 4 and control box 7;
During system works, sample is placed on a shaker arm of quartz tuning-fork 1, when collecting optical fiber probe 12 and slowly approaching sample, lock-in amplifier 4 detects the curent change of quartz tuning-fork 1, the port 3 of control box 7 controls the Z axis of piezoelectric ceramics scan table 2, makes the electric current of quartz tuning-fork 1 remain on a steady state value, drives piezoelectric ceramics scan table 2, make it drive quartz tuning-fork 1 and sample at X, Y-direction is moved.On the one hand, obtain the X rays topographs of testing sample in the displacement of Z-direction according to piezoelectric ceramics scan table 2.On the other hand, laser instrument 6 excites testing sample, collects the near field optical information that optical fiber probe 12 collects sample, converts it into the port one that electric signal sends into control 7 casees, obtain the near field optic picture of testing sample through photomultiplier 5.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1., based on an optical microscope for scanning near field imaging system for quartz tuning-fork, this system comprises:
One quartz tuning-fork;
One piezoelectric ceramics scan table, described quartz tuning-fork cheese head screw is fixed on piezoelectric ceramics scan table;
One lock-in amplifier, its port one, port 2 are connected with the two ends of quartz tuning-fork by pcb board;
One photomultiplier, its input end is connected with collection optical fiber probe by a filter set;
One laser instrument, its output terminal is connected with an excitation fiber probe;
One control box, its port is connected with the output terminal of photomultiplier, and its port is connected with the port 3 of lock-in amplifier, and its port 3 is connected with piezoelectric ceramics scan table;
One computer, its input end is connected with the port 4 of control box.
2. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 1, wherein quartz tuning-fork has two shaker arms, is U-shaped.
3. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 1, wherein testing sample is placed on a shaker arm of quartz tuning-fork; Quartz tuning-fork is as the sensor of power, and for detecting the distance of collecting between optical fiber probe and sample, quartz tuning-fork is as load sample platform simultaneously, carries out scanning imagery for carrying sample.
4. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 3, wherein collecting optical fiber probe is a conical fiber probe adopting etch obtained.
5. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 4, the logical optical wavelength of wherein collecting optical fiber probe is 400-1000nm, and throughput is greater than 10
-5, tip size is less than 100nm.
6. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 1, wherein there is a window side of photomultiplier.
7. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 6, wherein filter set is fixed on the window of photomultiplier.
8. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 7, wherein filter set comprises the first optical filter and the second optical filter.
9. the optical microscope for scanning near field imaging system based on quartz tuning-fork according to claim 8, wherein the logical optical wavelength of the first optical filter is 500-800nm, and the logical optical wavelength of the second optical filter is 300-680nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510179862.XA CN104777331B (en) | 2015-04-16 | 2015-04-16 | Optical microscope for scanning near field imaging system based on quartz tuning-fork |
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| CN201510179862.XA CN104777331B (en) | 2015-04-16 | 2015-04-16 | Optical microscope for scanning near field imaging system based on quartz tuning-fork |
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| CN104777331A true CN104777331A (en) | 2015-07-15 |
| CN104777331B CN104777331B (en) | 2017-03-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110596428A (en) * | 2019-08-20 | 2019-12-20 | 电子科技大学 | Scanning area plane inclination correction method applied to near-field scanning microwave microscope |
Citations (5)
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|---|---|---|---|---|
| US5886532A (en) * | 1995-10-04 | 1999-03-23 | Uva Patent Foundation | Nanometer distance regulation using electromechanical power dissipation |
| US5939623A (en) * | 1996-02-20 | 1999-08-17 | Seiko Instruments Inc. | Scanning type near field interatomic force microscope |
| CN101329247A (en) * | 2008-02-19 | 2008-12-24 | 中国科学院物理研究所 | Combined microscope for scanning atomic force and tunnel current under atmosphere |
| CN102662086A (en) * | 2012-04-20 | 2012-09-12 | 中国科学院半导体研究所 | Multiple-degree-of-freedom near-field optical microscope based on micro-nano motion arm |
| CN103528798A (en) * | 2013-10-22 | 2014-01-22 | 中国科学院半导体研究所 | Method for testing light transmittance performance of optical waveguide |
-
2015
- 2015-04-16 CN CN201510179862.XA patent/CN104777331B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5886532A (en) * | 1995-10-04 | 1999-03-23 | Uva Patent Foundation | Nanometer distance regulation using electromechanical power dissipation |
| US5939623A (en) * | 1996-02-20 | 1999-08-17 | Seiko Instruments Inc. | Scanning type near field interatomic force microscope |
| CN101329247A (en) * | 2008-02-19 | 2008-12-24 | 中国科学院物理研究所 | Combined microscope for scanning atomic force and tunnel current under atmosphere |
| CN102662086A (en) * | 2012-04-20 | 2012-09-12 | 中国科学院半导体研究所 | Multiple-degree-of-freedom near-field optical microscope based on micro-nano motion arm |
| CN103528798A (en) * | 2013-10-22 | 2014-01-22 | 中国科学院半导体研究所 | Method for testing light transmittance performance of optical waveguide |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110596428A (en) * | 2019-08-20 | 2019-12-20 | 电子科技大学 | Scanning area plane inclination correction method applied to near-field scanning microwave microscope |
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