CN104748876A - High-temperature thin-film thermocouple temperature sensor - Google Patents
High-temperature thin-film thermocouple temperature sensor Download PDFInfo
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- CN104748876A CN104748876A CN201310746109.5A CN201310746109A CN104748876A CN 104748876 A CN104748876 A CN 104748876A CN 201310746109 A CN201310746109 A CN 201310746109A CN 104748876 A CN104748876 A CN 104748876A
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- film
- thermocouple
- temperature sensor
- high temperature
- thermopair
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Abstract
The invention relates to a high-temperature thin-film thermocouple temperature sensor manufactured by the vacuum film technology. The high-temperature thin-film thermocouple temperature sensor is that the part of which the temperature is to be detected is selected from a high-temperature detecting material; the specific shape of a Pt thermocouple electrode and a PtRh thermocouple electrode; then the processes of processing a metal mask, preparing an Al2O3 insulating layer, preparing a Pt thermocouple film, preparing a PtRh thermocouple and preparing an Al2O3 insulating protecting layer are sequentially carried out to prepare the micron or submicron thin-film thermocouple temperature sensors employing the Pt material and the PtRh material. Compared with the prior art, the high-temperature thin-film thermocouple temperature sensor has the advantages of being reasonable in structure, convenient to operate, long in service life, fast to respond in temperature detection, and high in temperature detection accuracy, and the upper limit of temperature detection is up to 1200 DEG C.
Description
Technical field
The invention belongs to the manufacture technology field of temperature measuring equipment, relate to the pyrometer couple temperature sensor, particularly a kind of high temperature film thermocouple temperature sensor utilizing vacuum diaphragm fabrication techniques of a kind of micron of being made up of two kinds of metallic films or submicron-scale.
Background technology
High-temperature structural material is generally all operated in the hot environment of temperatures as high more than 1000 DEG C, to the temperature survey of these high-temperature structural materials, the hyperthermia radiation thermometry that the many employings of traditional measuring method are contactless, but there is the shortcomings such as temperature measurement accuracy is low, the response time is slow in this thermometry, is unfavorable for online high temperature measurement.Current known online real time temperature measurement mainly adopts and a kind ofly perforating is imbedded in the material structural type wire form thermocouple temperature sensor can carry out the method for online real time temperature measurement, this thermocouple temperature sensor is made up of the metallic thermocouple wire bond of two kinds of unlike materials together, but the shortcoming adopting this structural type wire form thermocouple temperature sensor to carry out thermometric existence needs to destroy material structure, this not only can affect material performance at high temperature, and the thermometric response time is slow, so the adaptability of this structural type wire form thermocouple temperature sensor thermometric is not high.A kind of online real time temperature measurement method is also had to be adopt wire form to be welded on sheet metal by thermocouple temperature sensor at present, the method again sheet metal being pasted onto material surface carries out temperature survey, and the shortcoming of this thermometry is: because the thermal expansivity of sheet metal and structured material is inconsistent, at high temperature, in high temperature rise rate situation, glue-line between sheet metal with structured material can produce larger thermal stress, come unglued even obscission in easy generation local, make point for measuring temperature floating, thus badly influence thermometric accuracy, the thermometric response time is there is too slow when adopting this wire form thermocouple temperature sensor to carry out thermometric in addition, the problem that the thermometric upper limit is low.
Summary of the invention
The object of the invention is to solve prior art Problems existing, so a kind of rational in infrastructure, easy to operate, long service life is provided, the thermometric response time is fast, accuracy is high and the thermometric upper limit is better than the high temperature film thermocouple temperature sensor of conventional junction configuration wire form thermopair product greatly.
For achieving the above object and research and development high temperature film thermocouple temperature sensor be a kind of micron order of Pt and PtRh two kinds of unlike materials or thin-film thermocouple temperature sensor of submicron order of utilizing vacuum diaphragm fabrication techniques, its method for making comprises following processing step:
1, according to completed by the concrete condition of thermometric object make high temperature film thermocouple probes position, shape, size design drawing;
2, mask plate is processed---according to layout design, adopt machining mode at thickness be 1.5 ~ 3.0mm sheet metal on cutting produce the mask plate that two pieces are respectively Pt thermocouple probes figure and PtRh thermocouple probes figure, to use respectively when making the two poles of the earth of film thermocouple;
3, Al is prepared
2o
3insulation course---will polishing be carried out by position thermometric object preparing make high temperature film thermocouple temperature sensor and after cleaning, utilize the vapour deposition process of vacuum coating technology to be coated with about 1 ~ 2 μm of thick Al thereon
2o
3insulation course;
4, Pt thermopair film is prepared---at Al
2o
3insulation course covers the mask plate of the Pt thermocouple probes figure made according to aforementioned 2nd processing step, utilize the vapour deposition process of vacuum coating technology at Al
2o
3surface of insulating layer is coated with 1 ~ 2 μm of thick Pt thermopair film;
5, PtRh thermopair film is prepared---change the mask plate of the PtRh thermocouple probes figure of another block made according to aforementioned 1.2nd processing step, utilize vacuum coating technology vapour deposition process at Al
2o
3surface of insulating layer is coated with 1 ~ 2 μm of thick PtRh thermopair film, and two kinds of thermopair membrane materials are connected by binding site, thus forms film thermocouple;
6, Al is prepared
2o
3insulating protective layer---utilize vacuum coating technology vapour deposition process to be coated with the thick Al of one deck 1 ~ 2 μm on the surface of the thermopair film made
2o
3insulating protective layer, forms final high temperature film thermocouple temperature sensor.
Further technical solution of the present invention is also: prepare Al in this high temperature film thermocouple temperature sensor method for making
2o
3the processing step of insulation course is: just carried out polishing by position thermometric object preparing make high temperature film thermocouple temperature sensor, then with alcohol, acetone and deionized water, polished surface is cleaned, dry, by the method for reaction magnetocontrol sputtering, utilize the matrix surface sputtering sedimentation plated film 90 ~ 120 minutes that power 200W, argon oxygen are being dried than the parameter of 20:1, pressure 1Pa, sputter temperature is 400 DEG C, and obtained thickness is 1 ~ 2 μm of thick Al
2o
3insulation course.
Further technical solution of the present invention is also: the processing step preparing Pt thermopair film in this high temperature film thermocouple temperature sensor method for making is: at Al
2o
3insulation course covers the mask plate of Pt thermopair figure, by the method for rf magnetron sputtering, utilize the parameter of power 100W, pressure 0.5Pa at Al
2o
3surface of insulating layer sputtering sedimentation plated film 90 ~ 120 minutes, sputter temperature is 700 DEG C, and obtained thickness is the Pt thermopair film of 1 ~ 2 μm.
Further technical solution of the present invention is also: the processing step preparing PtRh thermopair film in this high temperature film thermocouple temperature sensor method for making is: preparing the Al of Pt thermopair film
2o
3insulation course covers the mask plate of PtRh thermocouple probes figure, by the method for rf magnetron sputtering, utilize the parameter of power 100W, pressure 0.5Pa at Al
2o
3surface of insulating layer sputtering sedimentation plated film 90 ~ 120 minutes, sputter temperature is 700 DEG C, and obtained thickness is the PtRh thermopair film of 1 ~ 2 μm, and two kinds of thermopair membrane materials are connected by binding site, forms high temperature film thermopair.
Further technical solution of the present invention is also: prepare Al in this high temperature film thermocouple temperature sensor method for making
2o
3the processing step of insulating protective layer is: by the method for reaction magnetocontrol sputtering; utilize power 200W, argon oxygen than the parameter of 20:1, pressure 1Pa film thermocouple surface sputtering deposition plating 90 ~ 120 minutes; sputter temperature is 400 DEG C, and obtained thickness is the Al of 1 ~ 2 μm
2o
3insulating protective layer, forms final high temperature film thermocouple temperature sensor, and the thermometric upper limit of this high temperature film thermocouple temperature sensor can reach 1200 DEG C.
Compared with prior art, the advantage that has of the present invention is as described below:
One, high temperature film thermocouple temperature sensor of the present invention is that the micron order film of the two kinds of unlike materials utilizing vacuum coating technology to make combines, substitute the metal thermoelectric thermo wires of existing two kinds of unlike materials welded together, its feature is that the thermopair volume made is little, lightweight, do not need again punching in measured material, at random can design, make according to by the structure of thermometric object, shape, the most I of physical dimension is at the thermopair of sub-micrometer scale;
Two, the thermometric upper limit of high temperature film thermocouple temperature sensor of the present invention can reach 1200 DEG C, and the film to make due to vacuum coating technology is fine and close, firm, thickness is in the magnitude of micron or sub-micron, so the thermal capacity of thermopair is very little, there is the advantages such as response time very short, long service life, this product can the high temperature of real-time online measuring transition, well can be applied in field of aerospace technology.
Embodiment
One embodiment of the present of invention scheme is a kind of micron-sized thin-film thermocouple temperature sensor utilizing Pt and PtRh two kinds of unlike materials of vacuum diaphragm fabrication techniques, and its method for making comprises following processing step.
The first step, according to the actual needs of testee, exotic material SiC selects the position preparing thermometric, designs the concrete shape of Pt and PtRh two kinds of thermocouple probes, and complete design drawing.
Second step, processing metal mask plate
According to layout design, adopt wire cutting method, the stainless steel thin slice being about 2mm at thickness cuts out the figure of thermocouple probes, making two pieces is respectively the stainless steel thin slice mask plate of Pt thermocouple probes figure and PtRh thermocouple probes figure altogether, use respectively for when making the two poles of the earth of film thermocouple, and in two kinds of figures, have overlapped part for the formation of the contact of thermopair.
3rd step, preparation Al
2o
3insulation course
By one piece of exotic material SiC (by thermometric object) surperficial strict polishing, then polishing position is cleaned with alcohol, acetone and deionized water, dries, by the method for reaction magnetocontrol sputtering, utilize power 200W, argon oxygen than the parameter of 20:1, pressure 1Pa exotic material matrix surface (substrate) sputtering sedimentation plated film 90 ~ 120 minutes, sputter temperature is 400 DEG C, and obtained thickness is 1 ~ 2 μm of thick Al
2o
3insulation course.
4th step, preparation Pt thermopair film
At Al
2o
3insulation course covers the mask plate of Pt thermocouple probes figure, by the method for rf magnetron sputtering, utilize the parameter of power 100W, pressure 0.5Pa at Al
2o
3surface of insulating layer sputtering sedimentation plated film 90 ~ 120 minutes, sputter temperature is 700 DEG C, and obtained thickness is the Pt thermopair film of 1 ~ 2 μm.
5th step, preparation PtRh thermopair film
Preparing the Al of Pt thermopair film
2o
3insulation course covers the mask plate of PtRh thermocouple probes figure, by the method for rf magnetron sputtering, utilize the parameter of power 100W, pressure 0.5Pa at Al
2o
3surface of insulating layer sputtering sedimentation plated film 90 ~ 120 minutes, sputter temperature is 700 DEG C, and obtained thickness is the PtRh thermopair film of 1 ~ 2 μm, and two kinds of thermopair membrane materials are connected by binding site, forms high temperature film thermopair.。
6th step, preparation Al
2o
3insulating protective layer
By the method for reaction magnetocontrol sputtering, utilize power 200W, argon oxygen than the parameter of 20:1, pressure 1Pa film thermocouple surface sputtering deposition plating 90 ~ 120 minutes, sputter temperature is 400 DEG C, and obtained thickness is the Al of 1 ~ 2 μm
2o
3insulating protective layer, forms final high temperature film thermocouple temperature sensor, and the thermometric upper limit of this high temperature film thermocouple temperature sensor can reach 1200 DEG C.
Claims (5)
1. a high temperature film thermocouple temperature sensor, it is characterized in that described high temperature film thermocouple temperature sensor is a kind of micron order of Pt and PtRh two kinds of unlike materials or thin-film thermocouple temperature sensor of submicron order of utilizing vacuum diaphragm fabrication techniques, its method for making comprises following processing step:
1.1 according to the design drawing being completed making high temperature film thermocouple probes position, shape, size by the concrete condition of thermometric object;
1.2 processing mask plates---according to layout design, adopt machining mode at thickness be 1.5 ~ 3.0mm sheet metal on cutting produce the mask plate that two pieces are respectively Pt thermocouple probes figure and PtRh thermocouple probes figure;
1.3 preparation Al
2o
3insulation course---will polishing be carried out by position thermometric object preparing make high temperature film thermocouple temperature sensor and after cleaning, utilize the vapour deposition process of vacuum coating technology to be coated with about 1 ~ 2 μm of thick Al thereon
2o
3insulation course;
1.4 preparation Pt thermopair films---at Al
2o
3insulation course covers the mask plate of the Pt thermocouple probes figure made according to aforementioned 1.2nd processing step, utilize the vapour deposition process of vacuum coating technology at Al
2o
3surface of insulating layer is coated with 1 ~ 2 μm of thick Pt thermopair film;
1.5 preparation PtRh thermopair films---change the mask plate of the PtRh thermocouple probes figure of another block made according to aforementioned 1.2nd processing step, utilize vacuum coating technology vapour deposition process at Al
2o
3surface of insulating layer is coated with 1 ~ 2 μm of thick PtRh thermopair film, and two kinds of thermopair membrane materials are connected by binding site, thus forms film thermocouple;
1.6 preparation Al
2o
3insulating protective layer---utilize vacuum coating technology vapour deposition process to be coated with the thick Al of one deck 1 ~ 2 μm on the surface of the thermopair film made
2o
3insulating protective layer, forms final high temperature film thermocouple temperature sensor.
2. high temperature film thermocouple temperature sensor according to claim 1, is characterized in that preparing Al in this high temperature film thermocouple temperature sensor method for making
2o
3the processing step of insulation course is: carry out polishing by by position thermometric object preparing make high temperature film thermocouple temperature sensor, then with alcohol, acetone and deionized water, polished surface is cleaned, dry, by the method for reaction magnetocontrol sputtering, utilize the matrix surface sputtering sedimentation plated film 90 ~ 120 minutes that power 200W, argon oxygen are being dried than the parameter of 20:1, pressure 1Pa, sputter temperature is 400 DEG C, and obtained thickness is 1 ~ 2 μm of thick Al
2o
3insulation course.
3. high temperature film thermocouple temperature sensor according to claim 1, is characterized in that the processing step preparing Pt thermopair film in this high temperature film thermocouple temperature sensor method for making is: at Al
2o
3insulation course covers the mask plate of Pt thermocouple probes figure, by the method for rf magnetron sputtering, utilize the parameter of power 100W, pressure 0.5Pa at Al
2o
3surface of insulating layer sputtering sedimentation plated film 90 ~ 120 minutes, sputter temperature is 700 DEG C, and obtained thickness is the Pt thermopair film of 1 ~ 2 μm.
4. high temperature film thermocouple temperature sensor according to claim 1, is characterized in that the processing step preparing PtRh thermopair film in this high temperature film thermocouple temperature sensor method for making is: preparing the Al of Pt thermopair film
2o
3insulation course covers the mask plate of PtRh thermocouple probes figure, by the method for rf magnetron sputtering, utilize the parameter of power 100W, pressure 0.5Pa at Al
2o
3surface of insulating layer sputtering sedimentation plated film 90 ~ 120 minutes, sputter temperature is 700 DEG C, and obtained thickness is the PtRh thermopair film of 1 ~ 2 μm, and two kinds of thermopair membrane materials are connected by binding site, forms high temperature film thermopair.
5. high temperature film thermocouple temperature sensor according to claim 1, is characterized in that preparing Al in this high temperature film thermocouple temperature sensor method for making
2o
3the processing step of insulating protective layer is: by the method for reaction magnetocontrol sputtering; utilize power 200W, argon oxygen than the parameter of 20:1, pressure 1Pa film thermocouple surface sputtering deposition plating 90 ~ 120 minutes; sputter temperature is 400 DEG C, and obtained thickness is the Al of 1 ~ 2 μm
2o
3insulating protective layer, forms final high temperature film thermocouple temperature sensor.
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| CN201310746109.5A CN104748876A (en) | 2013-12-30 | 2013-12-30 | High-temperature thin-film thermocouple temperature sensor |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105300544A (en) * | 2015-11-12 | 2016-02-03 | 西安交通大学 | Oxide film thermocouple and preparation method thereof |
| CN105509914A (en) * | 2015-11-10 | 2016-04-20 | 深圳市国创新能源研究院 | Insulating thermocouple resistant to electromagnetic field |
| CN106595894A (en) * | 2016-12-19 | 2017-04-26 | 美的集团股份有限公司 | Thin film thermocouple and temperature sensing device equipped with thin film thermocouple |
| CN107190565A (en) * | 2017-06-08 | 2017-09-22 | 重庆大学 | A kind of modified insulating paper, its preparation method and oil-immersed insulating paper dielectric |
| CN110220605A (en) * | 2019-06-28 | 2019-09-10 | 华能国际电力股份有限公司丹东电厂 | A kind of preparation method, measuring system and the measurement method of tube wall temperature measuring system |
| CN110285889A (en) * | 2018-03-19 | 2019-09-27 | 美的集团股份有限公司 | Household electrical appliance and preparation method |
| WO2020016636A1 (en) | 2018-07-19 | 2020-01-23 | Bosch Car Multimedia Portugal S.a. | Thermal sensor for monitoring pcb soldering temperature and respective pcb, manufacturing and monitoring method thereof |
| CN110857886A (en) * | 2018-08-23 | 2020-03-03 | 广东美的白色家电技术创新中心有限公司 | Thermocouple, preparation method thereof and household appliance |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4969956A (en) * | 1989-12-19 | 1990-11-13 | The United States Of America As Represented By The Secretary Of Commerce | Transparent thin film thermocouple |
| JPH06104494A (en) * | 1992-09-18 | 1994-04-15 | Fujitsu Ltd | Thin film thermocouple element and manufacture thereof |
| CN1357930A (en) * | 2000-12-08 | 2002-07-10 | 中国科学院长春光学精密机械与物理研究所 | New-type thermocouple produced by means of photoetching techn and gas-phase deposition techn |
| CN102636282A (en) * | 2012-04-20 | 2012-08-15 | 上海理工大学 | High-frequency response thin-film thermode temperature sensor and preparation method thereof |
| CN103017922A (en) * | 2011-09-26 | 2013-04-03 | 中国电子科技集团公司第四十八研究所 | Quick-response film-thermocouple temperature sensor and manufacturing method thereof |
-
2013
- 2013-12-30 CN CN201310746109.5A patent/CN104748876A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4969956A (en) * | 1989-12-19 | 1990-11-13 | The United States Of America As Represented By The Secretary Of Commerce | Transparent thin film thermocouple |
| JPH06104494A (en) * | 1992-09-18 | 1994-04-15 | Fujitsu Ltd | Thin film thermocouple element and manufacture thereof |
| CN1357930A (en) * | 2000-12-08 | 2002-07-10 | 中国科学院长春光学精密机械与物理研究所 | New-type thermocouple produced by means of photoetching techn and gas-phase deposition techn |
| CN103017922A (en) * | 2011-09-26 | 2013-04-03 | 中国电子科技集团公司第四十八研究所 | Quick-response film-thermocouple temperature sensor and manufacturing method thereof |
| CN102636282A (en) * | 2012-04-20 | 2012-08-15 | 上海理工大学 | High-frequency response thin-film thermode temperature sensor and preparation method thereof |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509914A (en) * | 2015-11-10 | 2016-04-20 | 深圳市国创新能源研究院 | Insulating thermocouple resistant to electromagnetic field |
| CN105300544A (en) * | 2015-11-12 | 2016-02-03 | 西安交通大学 | Oxide film thermocouple and preparation method thereof |
| CN105300544B (en) * | 2015-11-12 | 2018-11-23 | 西安交通大学 | A kind of sull type thermocouple and preparation method thereof |
| CN106595894A (en) * | 2016-12-19 | 2017-04-26 | 美的集团股份有限公司 | Thin film thermocouple and temperature sensing device equipped with thin film thermocouple |
| CN107190565A (en) * | 2017-06-08 | 2017-09-22 | 重庆大学 | A kind of modified insulating paper, its preparation method and oil-immersed insulating paper dielectric |
| CN107190565B (en) * | 2017-06-08 | 2019-10-18 | 重庆大学 | A kind of modified insulating paper, preparation method and oil-immersed insulating paper dielectric |
| CN110285889A (en) * | 2018-03-19 | 2019-09-27 | 美的集团股份有限公司 | Household electrical appliance and preparation method |
| WO2020016636A1 (en) | 2018-07-19 | 2020-01-23 | Bosch Car Multimedia Portugal S.a. | Thermal sensor for monitoring pcb soldering temperature and respective pcb, manufacturing and monitoring method thereof |
| CN110857886A (en) * | 2018-08-23 | 2020-03-03 | 广东美的白色家电技术创新中心有限公司 | Thermocouple, preparation method thereof and household appliance |
| CN110220605A (en) * | 2019-06-28 | 2019-09-10 | 华能国际电力股份有限公司丹东电厂 | A kind of preparation method, measuring system and the measurement method of tube wall temperature measuring system |
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Application publication date: 20150701 |