CN104713857A - Thermal-insulation and rotary integrated loading device for use in measurement of high-temperature photo-thermal properties of material - Google Patents

Thermal-insulation and rotary integrated loading device for use in measurement of high-temperature photo-thermal properties of material Download PDF

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CN104713857A
CN104713857A CN201510160845.1A CN201510160845A CN104713857A CN 104713857 A CN104713857 A CN 104713857A CN 201510160845 A CN201510160845 A CN 201510160845A CN 104713857 A CN104713857 A CN 104713857A
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thermal
high temperature
radiation reflective
reflective screen
supporting seat
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CN104713857B (en
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艾青
李平川
胡振文
夏新林
刘梦
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention provides a thermal-insulation and rotary integrated loading device for use in measurement of high-temperature photo-thermal properties of a material and relates to the thermal-insulation and rotary integrated loading device. According to the thermal-insulation and rotary integrated loading device, the problem that measurement precision of the photo-thermal properties of the material is limited because an existing loading device cannot rotate in the measurement process of the high-temperature photo-thermal properties of the material and the thickness of a thermal insulation layer of the loading device is overlarge is solved. The thermal-insulation and rotary integrated loading device comprises a metal plate, a radiation reflection screen, a regulating ring, support pillars, a thermal insulation plate, a support seat, a spring, a rotating shaft, a magnetic sealing device and a servo motor. According to the thermal-insulation and rotary integrated loading device, the horizontal 360-degree controllable rotation of a to-be-measured sample can be realized. The invention acquires the thermal-insulation and rotary integrated loading device for use in measurement of high-temperature photo-thermal properties of the material.

Description

A kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses
Technical field
The present invention relates to heat insulation rotating integrated formula carrying apparatus.
Background technology
The major function of the sample stage under hot conditions is can withstand high temperatures keep the levelness of sample, support specimen material under the high temperature conditions, and effectively insulating loading integration can be realized, in limited short distance, realize hot environment completely cutting off to normal temperature; Meanwhile, requirement can realize sealing function.Traditional hot test platform adopts aluminium oxide or zirconia as heat-barrier material, and the restriction of the heat-barrier material fusing points such as oxidated aluminium and physical strength, the measuring tempeature of high temperature measurement room generally lower than 1800 DEG C, therefore also will just limit the temperature range of the material photo-thermal character that can measure.And the general thickness of thermofin is generally greater than 300mm, insulation thickness is excessive, limits the precision that Photothermal characterisation is measured.Simultaneously, traditional high temp samples objective table is usually in heat-barrier material upper end, and namely heat-barrier material upper surface is objective table, causes objective table not move or to rotate, and because the heat-barrier material planarizations such as aluminium oxide are poor, be difficult to ensure levelness required in the measurement of photo-thermal character.
Summary of the invention
The carrying apparatus that the object of the invention is when will solve existing measurement material at high temperature photo-thermal character can not rotate, the insulation thickness of carrying apparatus is excessive, limit the problem of the precision measuring material Photothermal characterisation, and provide a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses.
A kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses comprise sheet metal, radiation reflective screen, regulating ring, support column, thermal insulation board, supporting seat, spring, rotating shaft, magnetic sealing device and servomotor;
Described sheet metal, radiation reflective screen, regulating ring, support column, thermal insulation board, supporting seat, spring and magnetic sealing device are all arranged on high temperature furnace inside;
The top of described supporting seat is provided with thermal insulation board, and the top of thermal insulation board is provided with regulating ring and radiation reflective screen, and regulating ring and radiation reflective screen are arranged alternately; The top of radiation reflective screen is provided with two pieces of sheet metals;
The two ends of two pieces of described sheet metals, radiation reflective screen and thermal insulation board all have two through holes; The two ends of supporting seat have circular trough, and two pieces of sheet metals of the circular trough of supporting seat and phase the same side, radiation reflective shield and the axial line of the through hole of thermal insulation board overlaps; Support column runs through the through hole of two pieces of sheet metals, the through hole of radiation reflective screen, regulating ring, the through hole of thermal insulation board and the circular trough of supporting seat successively, two pieces of sheet metals, radiation reflective screen, regulating ring, thermal insulation board is fixedly connected with supporting seat;
The lower end of described supporting seat is provided with rotating shaft, and spring is equipped with in the front end of rotating shaft, and magnetic sealing device is equipped with at the middle part of rotating shaft, and the bottom of rotating shaft passes high temperature furnace, and is connected with servomotor.
Advantage of the present invention:
The present invention a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses be sample stage under a kind of hot conditions, the material photo-thermal nature parameters be applied under hot conditions is measured; This device adopts regulating ring and radiation reflective to shield the structure be arranged alternately under sheet metal, and effect of heat insulation is remarkable; Can realize effectively heat insulation to the hot environment of measuring chamber less than 2000 DEG C; By means of only radiation reflective screen and thermal insulation board, radiation reflective screen and the gross thickness of thermal insulation board are that 65mm to 90mm just can to realize in high temperature furnace 2000 DEG C and arrives the heat insulation of external environment 50 DEG C; Adopt magnetic sealing device to carry out effective sealing, and allow the rotation of rotating shaft; Drive axis of rotation by servomotor, thus realize sheet metal 360 ° of rotations in the horizontal direction; The material of sheet metal is tungsten, metal tantalum or metal molybdenum, and sheet metal, as sample bearing plate, can ensure higher level degree required in photo-thermal test.
Principle of work of the present invention:
The transfer mode of heat has heat conduction, convection current and radiation heat transfer these three kinds, and general material photothermal measurement is all carry out in the condition of normal temperature, and environment temperature is lower, and fix density of radiate heat exchange is little, generally can ignore; And under the high temperature conditions, environment temperature is very high, be directly proportional to the biquadratic of temperature by this known fix density of radiate heat exchange of fence-Boltzmann (Stefan-Boltzmann) law of making a mistake, therefore based on radiation heat transfer under hot conditions; In order to carry out effectively heat insulation to high temperature measurement room and the external world, adopting effective thermal design structure to carry out suppression to radiation heat transfer becomes a kind of effective method;
The present invention adopts the structure that multilayer radiation reflective shields and regulating ring replaces, and significantly increases heat transfer resistance, realizes heat insulating function; Radiation reflective screen adopts metal molybdenum, metal tantalum or tungsten to process; The fusing point of metal molybdenum, tantalum and tungsten is higher, can the hot conditions of withstand harsh; Because the capacity of heat transmission of metal is strong, for reducing the heat conduction amount of metal, increase thermal conduction resistance, require radiation reflective screen more Bao Yuehao, and due to the restriction of mechanical strength, require that the thickness of radiation reflective screen can not be less than certain value, the thickness of final application claims radiation reflective screen is that 0.5mm ~ 1mm is thick; Adjacent two layers radiation reflective screen is completely cut off by regulating ring, adopt the regulating ring of different-thickness can regulate the spacing of adjacent two layers radiation reflective screen, if reducing atmosphere environment, the thickness of regulating and controlling ring, to suppress the flowing of gas, reaches the object suppressing convection heat transfer; Meanwhile, the coefficient of heat conductivity of reducing atmosphere or inert gas is lower, and thermal conduction resistance is large, suppresses heat conduction; Good effect of heat insulation can be played; The thermal insulation board that low-temperature space after the structure that multilayer radiation reflective screen and regulating ring replace adopts the ceramic insulating materials such as traditional aluminium oxide or zirconia to process carries out effectively heat insulation;
Consider to install and HIGH TEMPERATURE DEFORMATION OF MATERIALS, radiation reflective screen need have certain thickness gap with tweer, forms " L " type slit of many turnovers in the present invention between device and furnace wall; Because heat insulation rotating integrated formula carrying apparatus upper and lower temperature difference is comparatively large, if under there is atmospheric condition, gas density changes greatly, if vertical masonry joint easily forms thermal convection; And this device adopts " L " type slit thermal design structure of many turnovers greatly can increase the resistance to flow of gas, suppress air current flow; Because Measurement of Gas Thermal Conductivity is little, thermal conduction resistance is large, can play the effect of good slit sealing;
The present invention adopts rotating shaft and magnetic sealing device to coordinate; Servomotor drives rotating shaft to rotate, rotating shaft drives supporting seat, supporting seat drives support column, support column drives thermal insulation board, radiation reflective screen, regulating ring rotates together with sheet metal, finally realize the present invention a kind of for measuring material at high temperature photo-thermal character time the rotation of heat insulation rotating integrated formula carrying apparatus that uses; Magnetic sealing device ensures the sealing under the condition of axis of rotation; The present invention a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses can realize sample level 360 ° of orientation angle controllable rotatings.
Accompanying drawing explanation
Fig. 1 for a kind of described in embodiment one for measuring material at high temperature photo-thermal character time the structural representation of heat insulation rotating integrated formula carrying apparatus that uses.
Embodiment
Embodiment one: present embodiment be a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses comprise sheet metal 1, radiation reflective screen 2, regulating ring 3, support column 4, thermal insulation board 5, supporting seat 6, spring 7, rotating shaft 8, magnetic sealing device 9 and servomotor 10;
Described sheet metal 1, radiation reflective screen 2, regulating ring 3, support column 4, thermal insulation board 5, supporting seat 6, spring 7 and magnetic sealing device 9 are all arranged on high temperature furnace inside;
The top of described supporting seat 6 is provided with thermal insulation board 5, and the top of thermal insulation board 5 is provided with regulating ring 3 and radiation reflective screen 2, and regulating ring 3 and radiation reflective screen 2 are arranged alternately; The top of radiation reflective screen 2 is provided with two pieces of sheet metals 1;
The two ends of two pieces of described sheet metals 1, radiation reflective screen 2 and thermal insulation board 5 all have two through holes; The two ends of supporting seat 6 have circular trough, and two pieces of sheet metals 1 of the circular trough of supporting seat 6 and phase the same side, radiation reflective shield 2 and the axial line of through hole of thermal insulation board 5 overlap; Support column 4 runs through the through hole of two pieces of sheet metals 1, the through hole of radiation reflective screen 2, regulating ring 3, the through hole of thermal insulation board 5 and the circular trough of supporting seat 6 successively, two pieces of sheet metals 1, radiation reflective screen 2, regulating ring 3, thermal insulation board 5 is fixedly connected with supporting seat 6;
The lower end of described supporting seat 6 is provided with rotating shaft 8, and spring 7 is equipped with in the front end of rotating shaft 8, and magnetic sealing device 9 is equipped with at the middle part of rotating shaft 8, and the bottom of rotating shaft 8 passes high temperature furnace, and is connected with servomotor 10.
Fig. 1 for a kind of described in embodiment one for measuring material at high temperature photo-thermal character time the structural representation of heat insulation rotating integrated formula carrying apparatus that uses; In Fig. 1,1 is sheet metal, and 2 is radiation reflective screen, and 3 is regulating ring, and 4 is support column, and 5 is thermal insulation board, and 6 is supporting seat, and 7 is spring, and 8 is rotating shaft, and 9 is magnetic sealing device, and 10 is servomotor, and 11 is furnace wall.
The advantage of present embodiment:
Present embodiment a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses be sample stage under a kind of hot conditions, the material photo-thermal nature parameters be applied under hot conditions is measured; The structure that this device adopts for 1 time regulating ring 3 and radiation reflective screen 2 to be arranged alternately at sheet metal, effect of heat insulation is remarkable; Can realize effectively heat insulation to the hot environment of measuring chamber less than 2000 DEG C; By means of only radiation reflective screen 2 and thermal insulation board 5, the gross thickness of radiation reflective screen 2 and thermal insulation board 5 is that 65mm to 90mm just can to realize in high temperature furnace 2000 DEG C and arrives the heat insulation of external environment 50 DEG C; Adopt magnetic sealing device 9 to carry out effective sealing, and allow the rotation of rotating shaft 8; Drive rotating shaft 8 to rotate by servomotor 10, thus realize sheet metal 1 360 ° of rotations in the horizontal direction; The material of sheet metal 1 is tungsten, metal tantalum or metal molybdenum, and sheet metal 1, as sample bearing plate, can ensure higher level degree required in photo-thermal test.
The principle of work of present embodiment:
The transfer mode of heat has heat conduction, convection current and radiation heat transfer these three kinds, and general material photothermal measurement is all carry out in the condition of normal temperature, and environment temperature is lower, and fix density of radiate heat exchange is little, generally can ignore; And under the high temperature conditions, environment temperature is very high, be directly proportional to the biquadratic of temperature by this known fix density of radiate heat exchange of fence-Boltzmann (Stefan-Boltzmann) law of making a mistake, therefore based on radiation heat transfer under hot conditions; In order to carry out effectively heat insulation to high temperature measurement room and the external world, adopting effective thermal design structure to carry out suppression to radiation heat transfer becomes a kind of effective method;
The structure that present embodiment adopts multilayer radiation reflective screen 2 and regulating ring 3 to replace, significantly increases heat transfer resistance, realizes heat insulating function; Radiation reflective screen 2 adopts metal molybdenum, metal tantalum or tungsten to process; The fusing point of metal molybdenum, tantalum and tungsten is higher, can the hot conditions of withstand harsh; Because the capacity of heat transmission of metal is strong, for reducing the heat conduction amount of metal, increase thermal conduction resistance, require that Bao Yuehao got over by radiation reflective screen 2, and due to the restriction of mechanical strength, require that the thickness of radiation reflective screen 2 can not be less than certain value, final present embodiment requires that the thickness of radiation reflective screen 2 is that 0.5mm ~ 1mm is thick; Adjacent two layers radiation reflective screen 2 is completely cut off by regulating ring 3, adopt the regulating ring 3 of different-thickness that adjacent two layers radiation reflective can be regulated to shield the spacing of 2, if reducing atmosphere environment, the thickness of regulating and controlling ring 3, to suppress the flowing of gas, reaches the object suppressing convection heat transfer; Meanwhile, the coefficient of heat conductivity of reducing atmosphere or inert gas is lower, and thermal conduction resistance is large, suppresses heat conduction; Good effect of heat insulation can be played; The thermal insulation board 5 that low-temperature space after the structure that multilayer radiation reflective screen 2 and regulating ring 3 replace adopts the ceramic insulating materials such as traditional aluminium oxide or zirconia to process carries out effectively heat insulation;
Consider to install and HIGH TEMPERATURE DEFORMATION OF MATERIALS, between radiation reflective screen 2 and furnace wall 11, needed certain thickness gap, in present embodiment, between device and furnace wall 11, form " L " type slit of transferring more; Because heat insulation rotating integrated formula carrying apparatus upper and lower temperature difference is comparatively large, if under there is atmospheric condition, gas density changes greatly, if vertical masonry joint easily forms thermal convection; And this device adopts " L " type slit thermal design structure of many turnovers greatly can increase the resistance to flow of gas, suppress air current flow; Because Measurement of Gas Thermal Conductivity is little, thermal conduction resistance is large, can play the effect of good slit sealing;
Present embodiment adopts rotating shaft 8 and magnetic sealing device 9 to coordinate; Servomotor 10 drives rotating shaft 8 to rotate, rotating shaft 8 drives supporting seat 6, supporting seat 6 drives support column 4, support column 4 drives that thermal insulation board 5, radiation reflective shield 2, regulating ring 3 rotates together with sheet metal 1, finally realize present embodiment a kind of for measuring material at high temperature photo-thermal character time the rotation of heat insulation rotating integrated formula carrying apparatus that uses; Magnetic sealing device 9 ensures the sealing under the condition that rotating shaft 8 is rotated; Present embodiment a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses can realize sample level 360 ° of orientation angle controllable rotatings.
Embodiment two: present embodiment and embodiment one difference are: described supporting seat 6 is riveted together with rotating shaft 8.Other steps are identical with embodiment one.
Embodiment three: one of present embodiment and embodiment one or two difference is: the material of described sheet metal 1 is metal molybdenum, metal tantalum or tungsten.Other steps are identical with embodiment one or two.
In present embodiment, the material of sheet metal 1 is metal molybdenum, metal tantalum or tungsten, and the fusing point of these metals is higher, can the hot conditions of withstand harsh.
Embodiment four: one of present embodiment and embodiment one to three difference is: the lower thickness limit of described sheet metal 1 is 4mm.Other steps are identical with embodiment one to three.
In present embodiment, the thickness of sheet metal 1 is thicker, can provide higher support strength, and effectively can suppress the thermal deformation under high temperature, ensures the levelness of carrying sample.
Embodiment five: one of present embodiment and embodiment one to four difference is: the material of described radiation reflective screen 2 is metal molybdenum, metal tantalum or tungsten; The thickness of described radiation reflective screen 2 is 0.5mm ~ 1mm, and the surface working of radiation reflective screen 2 becomes minute surface.Other steps are identical with embodiment one to four.
In present embodiment, the material of radiation reflective screen 2 is that metal molybdenum, metal tantalum or tungsten process, thickness is 0.5mm ~ 1mm, surface working becomes minute surface, radiation reflective screen 2 is thinner, the structure of multilayer radiation reflective screen 2 is adopted mainly to carry out effective higher order reflection to high temperature heat radiation, strengthen radiant heat transfer thermal resistance, effectively suppress radiant heat transfer, and there is certain physical strength can carry high-temperature hot stress.
Embodiment six: one of present embodiment and embodiment one to five difference is: described regulating ring 3 is becket.Other steps are identical with embodiment one to five.
In present embodiment, the thickness of regulating ring 3 can regulate, the spacing between adjacent radiation radiation shield 2 is regulated by the thickness of adjustment regulating ring 3, this distance is on the basis considering 2 self thermal deformation of radiation reflective screen, to the gas flowing also needing under reducing atmosphere or inert atmosphere conditions to consider to suppress between adjacent radiation radiation shield 2.
Embodiment seven: one of present embodiment and embodiment one to six difference is: the material of described support column 4 is metal, and character is cylindrical.Other steps are identical with embodiment one to six.
In present embodiment, support column 4 is metal cylinder, mainly plays and connects and fixing effect, connection metal plate 1, radiation reflective screen 2, regulating ring 3, thermal insulation board 5 and supporting seat 6.
Embodiment eight: one of present embodiment and embodiment one to seven difference is: the material of described thermal insulation board 5 is aluminium oxide ceramics or zirconia ceramics, the thickness of described thermal insulation board 5 is 15mm ~ 20mm.Other steps are identical with embodiment one to seven.
In present embodiment, thermal insulation board 5 is processed by aluminium oxide ceramics or zirconia ceramics, and the thickness of plate is 15mm ~ 20mm, and thermal insulation board 5 is placed in the below of radiation reflective screen 2, is mainly used in the heat insulation of the low-temperature zone after radiation reflective screen 2.
Embodiment nine: one of present embodiment and embodiment one to eight difference is: the material of described supporting seat 6 is metal.Other steps are identical with embodiment one to eight.
In present embodiment, supporting seat 6 mainly plays a supportive role.
Embodiment ten: one of present embodiment and embodiment one to nine difference is: the two ends of described radiation reflective screen 2 and furnace wall 11 and between gap be 3mm ~ 5mm.Other steps are identical with embodiment one to nine.
In present embodiment, furnace wall 11 and radiation reflective shields 2 and leave gap, form " L " type slit of many turnovers, substantially increase the resistance to flow of gas, because Measurement of Gas Thermal Conductivity is little, play the effect that good slit seals.

Claims (10)

1. the heat insulation rotating integrated formula carrying apparatus used time for measuring material at high temperature photo-thermal character, it is characterized in that a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses comprise sheet metal (1), radiation reflective screen (2), regulating ring (3), support column (4), thermal insulation board (5), supporting seat (6), spring (7), rotating shaft (8), magnetic sealing device (9) and servomotor (10);
Described sheet metal (1), radiation reflective screen (2), regulating ring (3), support column (4), thermal insulation board (5), supporting seat (6), spring (7) and magnetic sealing device (9) are all arranged on high temperature furnace inside;
The top of described supporting seat (6) is provided with thermal insulation board (5), the top of thermal insulation board (5) is provided with regulating ring (3) and radiation reflective screen (2), and regulating ring (3) and radiation reflective screen (2) are arranged alternately; The top of radiation reflective screen (2) is provided with two pieces of sheet metals (1);
The two ends that two pieces of described sheet metals (1), radiation reflective shield (2) and thermal insulation board (5) all have two through holes; The two ends of supporting seat (6) have circular trough, and the axial line that two pieces of sheet metals (1) of the circular trough of supporting seat (6) and phase the same side, radiation reflective shield the through hole of (2) and thermal insulation board (5) overlaps; Support column (4) runs through the through hole of two pieces of sheet metals (1), the radiation reflective screen through hole of (2), regulating ring (3), the through hole of thermal insulation board (5) and the circular trough of supporting seat (6) successively, two pieces of sheet metals (1), radiation reflective screen (2), regulating ring (3), thermal insulation board (5) is fixedly connected with supporting seat (6);
The lower end of described supporting seat (6) is provided with rotating shaft (8), spring (7) is equipped with in the front end of rotating shaft (8), magnetic sealing device (9) is equipped with at the middle part of rotating shaft (8), the bottom of rotating shaft (8) passes high temperature furnace, and is connected with servomotor (10).
2. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, it is characterized in that described supporting seat (6) and rotating shaft (8) are riveted together.
3. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, it is characterized in that the material of described sheet metal (1) is metal molybdenum, metal tantalum or tungsten.
4. the heat insulation rotating integrated formula carrying apparatus used when a kind of according to claim 1 or 3 is for measuring material at high temperature photo-thermal character, is characterized in that the lower thickness limit of described sheet metal (1) is 4mm.
5. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, it is characterized in that the material of described radiation reflective screen (2) is metal molybdenum, metal tantalum or tungsten; The thickness of described radiation reflective screen (2) is 0.5mm ~ 1mm, and the surface working of radiation reflective screen (2) becomes minute surface.
6. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, it is characterized in that described regulating ring (3) is becket.
7. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, it is characterized in that the material of described support column (4) is metal, character is cylindrical.
8. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, the material that it is characterized in that described thermal insulation board (5) is aluminium oxide ceramics or zirconia ceramics, and the thickness of described thermal insulation board (5) is 15mm ~ 20mm.
9. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, it is characterized in that the material of described supporting seat (6) is metal.
10. according to claim 1 a kind of for measuring material at high temperature photo-thermal character time the heat insulation rotating integrated formula carrying apparatus that uses, it is characterized in that the two ends of described radiation reflective screen (2) and furnace wall (11) and between gap be 3mm ~ 5mm.
CN201510160845.1A 2015-04-07 2015-04-07 It is a kind of to be used to measure the heat-insulated rotating integrated formula carrying apparatus used during material at high temperature photo-thermal property Active CN104713857B (en)

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CN107834757A (en) * 2017-11-21 2018-03-23 安徽同华新能源动力股份有限公司 Machine shaft
CN109799246A (en) * 2018-12-28 2019-05-24 长沙晶优新材料科技有限公司 Workpiece cushion cap and heating device for reflection index of wave suction material test

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CN202994643U (en) * 2012-12-17 2013-06-12 深圳市普康电子有限公司 Biochemical analyzer with height adjusting mechanism
CN104213103A (en) * 2014-09-24 2014-12-17 深圳市捷佳伟创新能源装备股份有限公司 Heat preservation heat insulation device of MOCVD reaction chamber

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CN101003024A (en) * 2006-09-19 2007-07-25 东北大学 High temperature energy ball grinder
CN101195927A (en) * 2007-04-20 2008-06-11 余建军 Method for producing large area polysilicon
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CN107834757A (en) * 2017-11-21 2018-03-23 安徽同华新能源动力股份有限公司 Machine shaft
CN109799246A (en) * 2018-12-28 2019-05-24 长沙晶优新材料科技有限公司 Workpiece cushion cap and heating device for reflection index of wave suction material test
CN109799246B (en) * 2018-12-28 2021-11-09 长沙晶优新材料科技有限公司 Workpiece bearing platform and heating device for testing reflectivity of wave-absorbing material

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