CN104698766B - Gravity compensation device - Google Patents

Gravity compensation device Download PDF

Info

Publication number
CN104698766B
CN104698766B CN201310670339.8A CN201310670339A CN104698766B CN 104698766 B CN104698766 B CN 104698766B CN 201310670339 A CN201310670339 A CN 201310670339A CN 104698766 B CN104698766 B CN 104698766B
Authority
CN
China
Prior art keywords
piston
gravity
compensated device
sheath
flexible link
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310670339.8A
Other languages
Chinese (zh)
Other versions
CN104698766A (en
Inventor
廖飞红
戴乐薇
朱岳彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN201310670339.8A priority Critical patent/CN104698766B/en
Publication of CN104698766A publication Critical patent/CN104698766A/en
Application granted granted Critical
Publication of CN104698766B publication Critical patent/CN104698766B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Actuator (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

The invention discloses a gravity compensation device for supporting a micropositioner of a workpiece stage and a mask stage in a lithography machine. The gravity compensation device comprises a base, a piston, a sheath, a swinging mechanism, an air bag structure and a load board, wherein an air chamber is arranged in the base for supporting the piston positioned at the top part of the air chamber; the sheath is arranged on the piston in a sleeving manner and is in rigid connection with the base; the air bag structure is connected between the piston and the sheath and is connected with the swinging mechanism in series; and the swinging mechanism is connected between the load board and the piston. According to the gravity compensation device, the swinging mechanism is additionally arranged between the load board and the piston, the gravity loaded on the load board is transmitted to the piston by the swinging mechanism; the rigidity of two serially connected springs is less than that of any one of spring according to the spring series-connection principle, the swinging mechanism and the air bag structure are interconnected, and low rigidity of the gravity compensation device in vertical and horizontal directions can be achieved.

Description

Gravity-compensated device
Technical field
The present invention relates to IC manufacturing field, particularly to a kind of gravity-compensated device.
Background technology
In litho machine, the micropositioner of work stage and mask platform to be supported using low rigid gravity-compensated device, permissible Avoid the violent heating causing using motor support, isolation simultaneously is delivered to the vibration of micropositioner, improves the positioning accurate of micropositioner Degree.
At present, the micropositioner that a kind of bellows gravity-compensated device of employing supports, comprising: air chamber, piston, gripper shoe and Pneumatic operated valve, wherein, described air chamber is used for supporting described piston, and described gripper shoe is used for supporting micropositioner, on described piston Side, and be fixedly connected with described piston；Described pneumatic operated valve is connected with the first air chamber, adjusts the first air chamber air pressure.This device has There is low cost, vertical highly low, but its horizontal direction rigidity be larger there is following technical problem:
1., when the frequency of fine motion plate is less than 150hz, ry and rz cannot realize closed loop, subsequently remodifies fine motion plate, must One stage structure frequency must be brought up to 320hz, just enable the normal closed loop of ry and rz, increase design cost；
2. rigidity counter-force is excessive, leads to rz motor thrust not enough, the stroke of rz does not reach index, needs gravity treatment motor；
3. the motor of high thrust increases the quality of micropositioner, reduces the structural modal frequency of micropositioner.
Content of the invention
The present invention provides a kind of gravity-compensated device, to overcome gravity-compensated device level in prior art larger to rigidity Problem.
For solving above-mentioned technical problem, the present invention provides a kind of gravity-compensated device, for supporting work stage in litho machine Micropositioner with mask platform, comprising: base, piston, sheath, swinging mechanism, airbag structure and load board；Wherein, in described base It is provided with air chamber, for supporting the piston being located at described plenum roof；Sheath is set on piston and is rigidly connected with base；Described Airbag structure is connected between piston and sheath, connects with described swinging mechanism；Described swinging mechanism be connected to load board and piston it Between.
Preferably, described swinging mechanism includes rigid rod, flexible link and connecting plate；Wherein, described load board passes through rigidity Bar is connected with described connecting plate, and described connecting plate is connected with piston by flexible link.
Preferably, described connecting plate is circular.
Preferably, described rigid rod is provided with 3～4, it is symmetricly set on same circumference.
Preferably, described flexible link is provided with 3～4, it is symmetricly set on same circumference.
Preferably, described flexible link and rigid rod are disposed on same circumference.
Preferably, the diameter range of described flexible link is 0.5mm～10mm.
Preferably, described flexible link adopts stainless steel or spring steel.
Preferably, the supporting surface of described airbag structure is perpendicular or parallel with the direction of motion of piston.
Preferably, being provided with sealing ring between described base and sheath.
The present invention also provides a kind of gravity-compensated device, for supporting the micropositioner of work stage and mask platform in litho machine, Including: base, piston, sheath, swinging mechanism, airbag structure and load board；Wherein, it is provided with air chamber, for supporting in described base Piston positioned at described plenum roof；Sheath is set on piston and is rigidly connected with base；Described airbag structure is connected to work Between plug and sheath；Described swinging mechanism includes rigid rod, flexible link and connecting plate, wherein, described load board pass through rigid rod with Described connecting plate connects, and described connecting plate is connected with piston by flexible link.
Compared with prior art, the invention has the advantages that the present invention is additionally arranged pendulum machine between load board and piston Structure, for being delivered to piston by the gravity of load by swinging mechanism；According to spring tandem principle, the rigidity of two serial springs Less than the rigidity of wherein any one spring, therefore, swinging mechanism is interconnected with airbag structure, the weight of the present invention can be realized simultaneously The vertical and horizontal direction Low rigidity of force compensating device.
Brief description
Fig. 1 is the schematic perspective view of gravity-compensated device in the embodiment of the invention；
Fig. 2 is the profile of gravity-compensated device in the embodiment of the invention；
Fig. 3～4 are respectively the relation schematic diagram of airbag structure and piston and sheath in the embodiment of the invention.
Specific embodiment
Understandable for enabling the above objects, features and advantages of the present invention to become apparent from, below in conjunction with the accompanying drawings to the present invention Specific embodiment be described in detail.It should be noted that, accompanying drawing of the present invention is all in the form of simplifying and all using non-essence Accurate ratio, only in order to purpose that is convenient, lucidly aiding in illustrating the embodiment of the present invention.
As shown in Fig. 1～2, the gravity-compensated device that the present invention provides, for supporting work stage and mask platform in litho machine Micropositioner, comprising: base 100, piston 200, sheath 300, swinging mechanism 500, airbag structure 600 and load board 400；Wherein, It is provided with air chamber 110, for supporting the piston 200 being located at described air chamber 110 top in described base 100；Sheath 300 is set in work It is rigidly connected on plug 200 and with base 100；Described airbag structure 600 is connected between piston 200 and sheath 300, with described pendulum Mechanism 500 connects；Described swinging mechanism 500 is connected between load board 400 and piston 200.By in load board 400 and piston It is additionally arranged swinging mechanism 500, for the gravity of load is delivered to piston 200 by swinging mechanism 500 between 200；According to spring Tandem principle, the rigidity of two serial springs is less than the rigidity of wherein any one spring, therefore, by swinging mechanism 500 and air bag Structure 600 interconnects, and can realize the vertical and horizontal direction Low rigidity of the gravity-compensated device of the present invention simultaneously.
Continue referring to Fig. 1～2, described swinging mechanism 500 includes rigid rod 510, flexible link 530 and connecting plate 520；Its In, described load board 400 is connected with described connecting plate 520 by rigid rod 510, described connecting plate 520 pass through flexible link 530 with Piston 200 connects.Specifically, load is using being threaded in load board 400.The gravity of load is transmitted by rigid rod 510 To on connecting plate 520, the gravity of connecting plate 520 is hanging on piston 200 by flexible link 530.Load weight on piston 200 Power is supported on the pressure-air of airbag structure 600 sealing.
Please emphasis with reference to Fig. 3～4, airbag structure 600 is arranged between sheath 300 and piston 200, realizes air chamber 110 Sealing.Described airbag structure 600 has two kinds of set-up modes with piston 200.A kind of as shown in figure 3, described airbag structure 600 Support face is parallel with the direction of motion of piston 200, and now gravity-compensated device has larger radius.Another kind is as shown in figure 4, incite somebody to action The supporting surface of airbag structure 600 is vertical with the supporting surface of piston 200, and the level that can reduce gravity-compensated device is to size.
It is full of pressure-air inside air chamber 110, airbag structure 600 expands and forms corrugated, realizes the vertical of piston 200 Motion guide.In inflated condition, to having higher rigidity, vertical had airbag structure 600 level by increasing chamber volume There is relatively low rigidity, vertical structural modal is within 5hz.The level of swinging mechanism 500 is relatively low to rigidity, and vertical stiffness is big, its Horizontal direction structural modal is less than 5hz.According to spring tandem principle, the rigidity of two serial springs is less than wherein any one bullet The rigidity of spring.So, using the scheme of airbag structure 600 and swinging mechanism 500 series connection, the vertical of gravity-compensated device and water are realized Put down to Low rigidity.
Preferably, being provided with sealing ring 700 between described base 100 and sheath 300, realize fully sealing of air chamber 110. Further, described base 100 is additionally provided with air inlet 120, external air source is inflated to air chamber 110 by this air inlet 120.
By increasing the volume of air chamber 110, the vertical Low rigidity of achievable gravity-compensated device.The meter of its vertical stiffness Calculating formula is:
k v = κ · a 2 · p v
Assume that each parameter is respectively as follows:
κ=1.41(heat transfer ratio)
a=0.00159m2(Area of bearing of piston 200)
P=2.62bar(air pressure)
The cumulative volume of v=2.23*10-4m3(air chamber 110)
M=42.5kg(supports the quality of load)
Thus, vertical stiffness k can be calculatedv=5.8×103N/m, therefore the vertical intrinsic frequency under this kind of operating mode is:
f v = 1 2 π k v m = 1.86 hz
In the present embodiment, the level of gravity-compensated device is limited by swinging mechanism 500 to rigidity.In piston 200 and connecting plate Between 520, multiple flexible link 530 of design, circumferentially symmetrically, that is, are distributed on same circumference, the present embodiment selects 3 Root or 4 flexible link 530, are used for realizing horizontal direction Low rigidity.The level of single flexible bar 530 to Rigidity Calculation formula is:
k h = mg l + 12 ei l 3
Assume that parameter is:
e=2.1×1011(elastic modelling quantity)
(i is the rotary inertia of flexible link 530, and d is the diameter of flexible link 530)
The bar length of l=85mm(flexible link 530)
M=42.5kg(load quality)
Take d=2mm, be then calculated kh=14.5×103N/m, therefore horizontal direction intrinsic frequency is under this kind of operating mode:
f h = 1 2 π k h m = 2.9 hz
Bar by increase flexible link 530 is long, and reduces the diameter of flexible link 530, achievable horizontal direction Low rigidity.Enter One step, the diameter range of described flexible link 530 is 0.5mm～10mm.
Therefore, by way of above-mentioned, it is possible to achieve the vertical and horizontal direction structural modal frequency of gravity-compensated device Less than 3hz.
Preferably, described connecting plate 520 is circular, it is enclosed within base 100 around；Described rigid rod 510 is provided with 3～ 4, it is symmetricly set on same circumference；Described flexible link 530 is provided with 3～4, is symmetricly set on same circumference.Further , rigid rod 510 and flexible link 530 can also be arranged on same circumference, thus reducing the volume of whole device.
Preferably, the material of described flexible link 530 is steel, preferably stainless steel or spring steel.
In sum, the gravity-compensated device that the present invention provides, for supporting the micro- of work stage and mask platform in litho machine Dynamic platform, comprising: base 100, piston 200, sheath 300, swinging mechanism 500, airbag structure 600 and load board 400；Wherein, described It is provided with air chamber 110, for supporting the piston 200 being located at described air chamber 110 top in base 100；Sheath 300 is set in piston It is rigidly connected on 200 and with base 100；Described airbag structure 600 is connected between piston 200 and sheath 300, with described pendulum machine Structure 500 is connected；Described swinging mechanism 500 is connected between load board 400 and piston 200.By in load board 400 and piston 200 Between be additionally arranged swinging mechanism 500, for the gravity of load is delivered to piston 200 by swinging mechanism 500；Connected according to spring Principle, the rigidity of two serial springs is less than the rigidity of wherein any one spring, therefore, by swinging mechanism 500 and airbag structure 600 interconnections, can realize the vertical and horizontal direction Low rigidity of the gravity-compensated device of the present invention simultaneously.
Obviously, those skilled in the art can carry out the various changes and modification spirit without deviating from the present invention to invention And scope.So, if these modifications of the present invention and modification belong to the claims in the present invention and its equivalent technologies scope it Interior, then the present invention is also intended to including these changes and modification.

Claims (9)

1. a kind of gravity-compensated device, for supporting the micropositioner of work stage and mask platform in litho machine it is characterised in that wrapping Include: base, piston, sheath, swing mechanism, airbag structure and load board；Wherein, it is provided with air chamber, for supporting in described base Piston positioned at described plenum roof；Sheath is set on piston and is rigidly connected with base；Described airbag structure is connected to work Between plug and sheath, connect with described swing mechanism；Described swing mechanism includes rigid rod, flexible link and connecting plate, described negative Support plate is connected with described connecting plate by rigid rod, and described connecting plate is connected with piston by flexible link, and described swing mechanism is even It is connected between load board and piston.
2. gravity-compensated device as claimed in claim 1 is it is characterised in that described connecting plate is circular.
3. gravity-compensated device as claimed in claim 1, it is characterised in that described rigid rod is provided with 3～4, is symmetrical arranged On same circumference.
4. gravity-compensated device as claimed in claim 1, it is characterised in that described flexible link is provided with 3～4, is symmetrical arranged On same circumference.
5. gravity-compensated device as claimed in claim 1 is it is characterised in that described flexible link and rigid rod are disposed on together On one circumference.
6. gravity-compensated device as claimed in claim 1 it is characterised in that described flexible link diameter range be 0.5mm～ 10mm.
7. gravity-compensated device as claimed in claim 1 is it is characterised in that described flexible link adopts stainless steel or spring steel.
8. gravity-compensated device as claimed in claim 1 is it is characterised in that the fortune of the supporting surface of described airbag structure and piston Dynamic direction is perpendicular or parallel.
9. gravity-compensated device as claimed in claim 1 is it is characterised in that be provided with sealing between described base and sheath Circle.
CN201310670339.8A 2013-12-10 2013-12-10 Gravity compensation device Active CN104698766B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310670339.8A CN104698766B (en) 2013-12-10 2013-12-10 Gravity compensation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310670339.8A CN104698766B (en) 2013-12-10 2013-12-10 Gravity compensation device

Publications (2)

Publication Number Publication Date
CN104698766A CN104698766A (en) 2015-06-10
CN104698766B true CN104698766B (en) 2017-01-18

Family

ID=53346037

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310670339.8A Active CN104698766B (en) 2013-12-10 2013-12-10 Gravity compensation device

Country Status (1)

Country Link
CN (1) CN104698766B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108646519B (en) * 2018-05-09 2019-05-07 哈尔滨工业大学 A kind of high permanent gravity-compensated device of acceleration reciprocating motion
EP3670958A1 (en) 2018-12-21 2020-06-24 ASML Netherlands B.V. Positioning device, stiffness reduction device and electron beam apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1803963A1 (en) * 2005-12-30 2007-07-04 Integrated Dynamics Engineering GmbH Hybrid stiffness modul for vibration isolation
CN201436604U (en) * 2009-05-27 2010-04-07 上海微电子装备有限公司 Gravity compensator
CN102141733A (en) * 2010-01-28 2011-08-03 上海微电子装备有限公司 Vibration absorption device and photolithographic device using same
CN102486215A (en) * 2010-12-02 2012-06-06 上海微电子装备有限公司 Gravity compensation device
CN103034065A (en) * 2011-09-29 2013-04-10 上海微电子装备有限公司 Magnetic suspension gravity compensator and lithographic device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004176851A (en) * 2002-11-28 2004-06-24 Fujikura Rubber Ltd Vibration isolation table
US20080013058A1 (en) * 2004-03-01 2008-01-17 Nikon Corporation Pneumatic Spring Apparatus, Vibration-Proof Apparatus, Stage Apparatus and Exposure Apparatus
US8282281B2 (en) * 2007-02-14 2012-10-09 Integrated Dynamics Engineering Gmbh Air bearing with consideration of high-frequency resonances

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1803963A1 (en) * 2005-12-30 2007-07-04 Integrated Dynamics Engineering GmbH Hybrid stiffness modul for vibration isolation
CN201436604U (en) * 2009-05-27 2010-04-07 上海微电子装备有限公司 Gravity compensator
CN102141733A (en) * 2010-01-28 2011-08-03 上海微电子装备有限公司 Vibration absorption device and photolithographic device using same
CN102486215A (en) * 2010-12-02 2012-06-06 上海微电子装备有限公司 Gravity compensation device
CN103034065A (en) * 2011-09-29 2013-04-10 上海微电子装备有限公司 Magnetic suspension gravity compensator and lithographic device

Also Published As

Publication number Publication date
CN104698766A (en) 2015-06-10

Similar Documents

Publication Publication Date Title
CN102507065B (en) Device for reducing thrust and vibration at pipeline ends
CN104698766B (en) Gravity compensation device
CN102141733B (en) Vibration absorption device and photolithographic device using same
CN109470492A (en) A kind of vehicle bridge endurance test device
CN109569900B (en) Self-balancing device of geotechnical centrifuge
CN206748718U (en) A kind of gypsum sheet material edge banding apparatus
CN105667283B (en) Pure electric automobile front deck modularization integrates arrangement
CN109869298A (en) A kind of air-cooled air compressor machine
CN102072275A (en) Pneumatic spring vibration isolator of air flotation type forward and backward swing concatenation mechanism based on ball head connecting rod
CN104908547B (en) A kind of can the Mecanum wheel apparatus that push of independence self-adapting
CN107884264A (en) A kind of crank-type road-surface accelerating and loading test device
CN107607255A (en) It is provided with the crash-proof pressure gauge of bezel, cluster
CN104438781B (en) Environment protection-type shaping mould
CN206633031U (en) A kind of battery handling device
CN109230414A (en) A kind of TV mould group tipping arrangement
CN207889971U (en) A kind of dual-purpose undercarriage of unmanned plane
CN204437157U (en) A kind of pneumatic spring that aircraft can be made to suspend
CN210590193U (en) Cooling device is used in polyurethane foam processing
CN207994397U (en) A kind of electric power cabinet with bumper and absorbing shock function
CN113879949A (en) Blade clamping unit and blade hoisting tool
CN215908308U (en) Electronic equipment damping device
CN207139744U (en) A kind of electronic product assembly line
CN110425380A (en) A kind of mechanical equipment damping base
CN209519328U (en) A kind of adjustable type inflating whole body target
CN207709604U (en) A kind of subway shape tube tubing press bending apparatus

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd

Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee before: Shanghai Micro Electronics Equipment Co., Ltd.

CP01 Change in the name or title of a patent holder