CN104696217B - Vortex dry vacuum pump and its manufacture method, vacuum system - Google Patents
Vortex dry vacuum pump and its manufacture method, vacuum system Download PDFInfo
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- CN104696217B CN104696217B CN201410437016.9A CN201410437016A CN104696217B CN 104696217 B CN104696217 B CN 104696217B CN 201410437016 A CN201410437016 A CN 201410437016A CN 104696217 B CN104696217 B CN 104696217B
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Abstract
The invention belongs to pumping equipment field, and in particular to vortex dry vacuum pump and its manufacture method, vacuum system.The vortex dry vacuum pump includes the fixed scroll (2) and orbiter (10) being oppositely arranged, the fixed scroll (2), which includes static vortex, the orbiter (10), includes dynamic vortex body, wherein, the molded line of the molded line of the static vortex and the dynamic vortex body uses Archimedes's vortex lines, there is 180 ° of phase difference, the dynamic vortex body can engage to form compression chamber with the static vortex in motion between the dynamic vortex body and the static vortex.Vortex dry vacuum pump in the present invention, by being innovated to core part orbiter, the scroll molded line of fixed scroll and gasket structure and its corresponding processing method, overall construction design and processing, assembling simultaneously also to motor is improved, on the premise of vavuum pump self performance and use requirement is met, difficulty of processing and production cost are reduced.
Description
Technical field
The invention belongs to pumping equipment field, and in particular to a kind of vortex dry vacuum pump and its manufacture method, true
Empty set is united.
Background technology
The operation principle of vortex dry vacuum pump was vortexed from Frenchman Leno Creux in 1905 with reversible
The patent that expanding machine is applied for topic.The vortex dry vacuum pump is that, using a fixation, what another was rotated has continuous
Separation, a kind of vortex engine of " uniform pitch involute " research and development of continuous closing performance, but due to processing and manufacturing water at that time
It is flat limited, and in the research and manufacture work of vortex dry vacuum pump, because its dynamic and static vortex disk shape is special, to part
Material, heat treatment, the assembling of processing scheme and component, sealing, positioning requirement it is all very high, cause to produce the swirl vacuum
Pump has a very big technical difficulty, and the cost of processing is also higher, therefore the commercialization time is very late, and only top true in the world
Sky, which obtains equipment manufacturer, can reach quality requirement, and be produced.
Therefore, how by optimizing the structure design and processing scheme of product, in reduction difficulty of processing and processing cost
Under the premise of, the performance and use requirement of vortex dry vacuum pump are met, as technical problem urgently to be resolved hurrily at present.
The content of the invention
The technical problems to be solved by the invention are to be vortexed to do there is provided one kind for above shortcomings in the prior art
Formula vavuum pump and its manufacture method, vacuum system, the vortex dry vacuum pump are meeting vavuum pump self performance and use requirement
On the premise of, reduce difficulty of processing and production cost.
It is the vortex dry vacuum pump to solve the technical scheme that is used of present invention problem, including be oppositely arranged it is quiet
Scroll plate 2 and orbiter 10, the fixed scroll 2, which includes static vortex, the orbiter 10, includes dynamic vortex body, its
In, the molded line of the molded line of the static vortex and the dynamic vortex body uses Archimedes's vortex lines, the dynamic vortex body
There is 180 ° of phase difference, the dynamic vortex body can be nibbled with the static vortex between the molded line of molded line and the static vortex
Conjunction forms compression chamber.
Preferably, the molded line of the molded line of the static vortex and the dynamic vortex body is using Archimedes's vortex lines
With the mating connection of secondary Archimedes's vortex lines, head uses secondary Archimedes's vortex lines, and afterbody is using Yi A Ji meter
The junction of moral vortex lines, Archimedes's vortex lines and secondary Archimedes's vortex lines has continuous first order derivative and two
Subderivative.
Preferably, the dynamic vortex body be arranged in parallel with the static vortex, the dynamic vortex body and the quiet vortex
The depth of parallelism between body is less than or equal to 0.005mm.
Preferably, gap is reserved between the static vortex and the dynamic vortex body, the gap is inside by outer ring
Circle gradually successively decreases, and interior ring gap keeps definite value.
Preferably, between the static vortex and the dynamic vortex body reserve unilateral interstice coverage for 0.03mm~
0.02mm。
Preferably, the end face seal between the fixed scroll and the orbiter is sealed by sealing strip 13, institute
The top for stating static vortex and the dynamic vortex body corresponds to open up fluted respectively, and the sealing strip is respectively arranged at the quiet whirlpool
In the groove for revolving body and the dynamic vortex body.
Preferably, the sealing strip 13 includes the first sublayer 131 and is arranged at the of the lower section of first sublayer 131
Two sublayers 132, first sublayer 131 uses ultra-high molecular weight polyethylene, and second sublayer 132 uses fretting map rubber bullet
Property body, first sublayer 131 is connected with second sublayer 132 by adhesive.
Preferably, the molecular weight ranges of ultra-high molecular weight polyethylene are 4,500,000~5,500,000 in first sublayer 131,
Fretting map rubber elastomer is the mixture of buna and neoprene in second sublayer 132, the fretting map rubber
Density range is 160 kg/m3~230kg/m3。
Preferably, the sealing strip 13 is formed using impact style.
Preferably, air inlet 5 is arranged on the outer ring end of the orbiter 10, and gas outlet 1 is arranged on described quiet
The center of scroll plate 2, the air inlet 5 can be connected by mechanical interface with the vacuum chamber outside vacuum system, or, it is described enter
Gas port 5 can be connected by pipe method with the gas outlet of next stage pump in vacuum system.
Preferably, the vortex dry vacuum pump includes motor and contiguous block 3, anti-rotation component 12, the motor
With eccentric motor axle 9, the orbiter 10 is arranged on the eccentric motor axle 9;The contiguous block 3 is arranged on motor casing
On body 6, the fixed scroll 2 is arranged on the contiguous block 3;The anti-rotation component 12 and the orbiter 10 and described
Contiguous block 3 is connected simultaneously, and the anti-rotation component 12 causes the orbiter 10 energy under the drive of the eccentric motor axle 9
Translational motion is done with the Circular test of the eccentric throw formation of eccentric motor axle 9 relative to the fixed scroll 2.
Preferably, the contiguous block 3 is fixed on the electric machine casing 6 by interference fits, the fixed scroll 2
It is fixed on by alignment pin on contiguous block 3, the eccentric motor axle 9 is engaged place with the fixed scroll 2 and the contiguous block 3
Reference plane perpendicularity within 0.005mm;The anti-rotation component 12 includes three anti-rotation parts, three anti-rotations
One end of part is uniformly set up separately on the orbiter 10, the other end is arranged on the contiguous block 3.
Preferably, the theoretical barycenter of the orbiter 10 is on rotation centerline;Vortex dry vacuum pump includes flat
Weigh component 11, and the balanced component 11 includes two pieces of balance weights, and two pieces of balance weights set up separately close in the eccentric motor axle 9
Contiguous block 3 and the region close to back end cover for motor 7.
Preferably, the plug wire of the outside interface of the motor uses seal socket;The vortex dry vacuum pump is also wrapped
The turnover airgun controller part for controlling vacuum chamber and vavuum pump working chamber whether to link up is included, the turnover airgun controller part is used
Electromagnet assembly 4, the electromagnet assembly 4 includes electromagnet, iron core and spring, and the electromagnet and the spring are used to control
The stretching of the iron core is rebounded, the motor when not working the iron core stretch out, isolated vacuum room and vavuum pump working chamber
Link up;The iron core delay is rebounded during the electrical power, links up vacuum chamber and vavuum pump working chamber;The motor power-off when institute
State iron core to stretch out at once, the communication of cut-out vacuum chamber and vavuum pump working chamber.
Preferably, in addition to base assembly 8, the lower section of base assembly 8 is provided with fan, and the fixed scroll is set
Have a fan housing, the fan and the motor synchronous averaging, for by the fan housing by wind water conservancy diversion to the end of the fixed scroll 2
Face is to be radiated;The fan is tube-axial fan.
A kind of vacuum system, including vavuum pump, wherein, the vavuum pump uses above-mentioned vortex dry vacuum pump.
A kind of manufacture method of vortex dry vacuum pump, including processing form the fixed scroll and orbiter being oppositely arranged
The step of, the fixed scroll, which includes static vortex, the orbiter, includes dynamic vortex body, wherein, the static vortex
The molded line of molded line and the dynamic vortex body uses Archimedes's vortex lines, molded line and the static vortex of the dynamic vortex body
Molded line between there is 180 ° of phase difference;Archimedes's vortex lines of the static vortex and the dynamic vortex body use milling
Processing is formed, and milling cutter is to rotate to be main motion during Milling Machining, and feed motion is rotated and milling machine by the working shaft of rotary table
The working shaft movement of horizontal table is realized.
Preferably, during Archimedes's vortex lines of the static vortex or the dynamic vortex body are processed, rotation
The working shaft of revolving worktable remains forward or reverse, and the working shaft of milling machine horizontal table is only realized in a direction movement
Feed motion;During Archimedes's vortex lines of the static vortex or the dynamic vortex body are finished, rotary work
The working shaft commutation of platform is once.
Preferably, the Milling Machining of the static vortex and the dynamic vortex body also includes, and is detected by laser interferometer
And compensation level workbench working shaft and rotary table working shaft positioning, wherein positioning precision be 0.005mm, repeat
Positioning precision is 0.003mm;The positioning precision of the working shaft of rotary table is 7 ", and repetitive positioning accuracy is 4 ".
Preferably, the vortex dry vacuum pump includes motor, and the motor has eccentric shaft;The manufacture method is also wrapped
The assembling of the fixed scroll and the orbiter is included, the fixed scroll is assemblied on electric machine casing by contiguous block, institute
Orbiter is stated to be assemblied on the eccentric shaft.
Preferably, the contiguous block is fitted together with electric machine casing by interference fits, and the eccentric motor axle leads to
Cross bearing block to fit together with back end cover for motor, the bearing of the eccentric motor axle and the contiguous block is connected as outside and connected
Connect, the bearing outside diameter that the eccentric motor axle is connected with the contiguous block is more than the eccentric motor axle and the back end cover for motor
Bearing outside diameter, the axiality of the bearing hole between the eccentric motor axle and the contiguous block and bearing block 0.02mm with
It is interior.
Preferably, the bearing hole between rear end cap and the eccentric motor axle is first axle bearing bore, the clutch shaft bearing
Hole embeds steel bushing;The bearing hole that the eccentric motor axle is connected with the contiguous block is second bearing hole, the first axle bearing bore
Process to be formed using boring with the second bearing hole, the knife bar material of the boring cutter is hard alloy.
Preferably, the external diameter of the first axle bearing bore is less than the external diameter in the second bearing hole;The first axle bearing bore
After processing, continue to process the second bearing hole by the way of manual tool changing, manual tool changing keeps X, Y of processing stand position
Coordinate is constant, only change Z coordinate value, and the axiality in the first axle bearing bore and the second bearing hole is within 0.02mm.
Preferably, the positioning hole when fixed scroll is assembled with contiguous block is symmetrically arranged two, described in two
The line of positioning holes center is by the center line and two positioning holes in the second bearing hole relative to the second bearing
The center line in hole is symmetrical.
Preferably, two positioning holes are beforehand with frock so that the line of two positioning holes centers is relative to X
Axle is parallel, and carries out X-axis interpolation, then carries out the processing of two positioning holes, and the symmetry of two positioning holes is
Within 0.01mm.
The beneficial effects of the invention are as follows:Vortex dry vacuum pump in the present invention, by the orbiter to its core, quiet
The scroll molded line and gasket structure and its corresponding processing method of scroll plate are innovated, while the entirety also to motor
Structure design, processing method and assembly method are improved, on the premise of vavuum pump self performance and use requirement is met,
Reduce difficulty of processing and production cost.
Brief description of the drawings
Fig. 1 is the structural representation of mesoscale eddies dry vacuum pump of the embodiment of the present invention;
Fig. 2 is the positive cut-away view of Fig. 1 mesoscale eddies dry vacuum pumps;
Fig. 3 is that orbiter after processing in Fig. 1 is outer, inner side profile error schematic diagram;
Fig. 4 tangentially leaks schematic diagram for orbiter, fixed scroll in Fig. 1;
Fig. 5 is the overall assembling schematic diagram of Fig. 1 mesoscale eddies dry vacuum pumps, wherein:
(a) is the positive cut-away view of assembling of vortex dry vacuum pump in Fig. 5;
(b) is the A of (a) in Fig. 5 to schematic diagram in Fig. 5;
Fig. 6 is bearing hole machining locus schematic diagram;
Fig. 7 is the sealing schematic diagram between orbiter, fixed scroll;
Fig. 8 is sealing strip flow process chart;
In reference:
1- air inlets;2- fixed scrolls;3- contiguous blocks;4- electromagnet assemblies;5-gas outlet;6- electric machine casings;
7- back end cover for motor;8- base assemblies;9- eccentric motor axles;10- orbiters;11- balanced components;The anti-rotations of 12-
Component;13-sealing strip;The sublayers of 131- first;The sublayers of 132- second.
Embodiment
To make those skilled in the art more fully understand technical scheme, below in conjunction with the accompanying drawings and specific embodiment party
Formula is described in further detail to vortex dry vacuum pump of the present invention and its manufacture method, vacuum system.
The present embodiment provides a kind of vortex dry vacuum pump, as shown in Figure 1 and Figure 2, and the vortex dry vacuum pump includes quiet whirlpool
Capstan 2, contiguous block 3, electromagnet assembly 4, electric machine casing 6, back end cover for motor 7, base assembly 8, eccentric motor axle 9, dynamic vortex
The part such as disk 10, balanced component 11 and anti-rotation component 12, sealing strip 13 (not identified in Fig. 1, Fig. 2, refer to Fig. 4).Below
It will be described in detail for above-mentioned each part.
The vortex dry vacuum pump includes the fixed scroll 2 and orbiter 10 being oppositely arranged, and fixed scroll 2 includes quiet
Vortex, orbiter 10 include dynamic vortex body, wherein, the molded line of static vortex and the molded line of dynamic vortex body use A Ji meter
Moral vortex lines, the phase difference between the molded line of dynamic vortex body and the molded line of static vortex with 180 °, dynamic vortex body is vortexed with quiet
Body can engage to form compression chamber.The vortex dry vacuum pump by optimize the molded line of static vortex and dynamic vortex body design and
Processing scheme, on the premise of reduction difficulty of processing and processing cost, meets the performance of vortex dry vacuum pump product and uses
It is required that.
Preferably, the molded line of the molded line of the static vortex of the present embodiment mesoscale eddies dry vacuum pump and dynamic vortex body is used
The mating connection of Archimedes's vortex lines and secondary Archimedes's vortex lines, head uses secondary Archimedes's vortex lines,
Afterbody is using Archimedes's vortex lines, and the junction of Archimedes's vortex lines and secondary Archimedes's vortex lines has
Continuous first order derivative and second derivative.
In the present embodiment, the involute of circle of the prior art is replaced to design dynamic vortex using Archimedes's vortex lines
Disk 10, the molded line of fixed scroll 2 are based on following reasons:Realizing the necessary condition of scroll vacuum pump normal work in theory is, moves
Scroll plate 10 can be engaged with the vortex of fixed scroll 2 in compression chamber, i.e., the static vortex of fixed scroll 2 is in compression chamber
Certain point, must have a little corresponding to therewith on the dynamic vortex body of orbiter 10, and realize instant contact, Archimedes is vortexed
Line and its equal space line can meet the requirement;Simultaneously, it is contemplated that orbiter 10, the processing of the molded line of fixed scroll 2, it is final to determine
The scroll molded line of orbiter 10, fixed scroll 2 is set up using Archimedes's vortex lines.
When vortex dry vacuum pump is run, although orbiter 10, fixed scroll 2 need to realize instant contact in theory, but
Due to mismachining tolerance, rigging error etc. exist, in actual motion orbiter 10, fixed scroll 2 instant contact it is impossible
Realize, thus a slot reservation number be the factor for reaching that this index of its final vacuum is the most key, gap is excessive, can cause
Its final vacuum is difficult to reach;And gap is too small, can occur friction even between orbiter 10, fixed scroll 2 during operation
Occlusion, causes temperature to steeply rise, is greatly reduced the efficiency of vortex dry vacuum pump, or destruction orbiter 10, quiet whirlpool
Wall between capstan 2, cause vortex dry vacuum pump kills failure.
Consider, the scroll molded line that orbiter 10, fixed scroll 2 are finally used in the present embodiment is not to enter
The Archimedes's vortex lines and its equal space line of row instantaneous touch, but select the Archimedes's vortex lines and two for being adapted to processing
Secondary Archimedes's vortex lines replace its equal space line.Because the gap change of the initial segment is generally than larger, it may appear that gap is zero very
The possibility most born;Also, because head is in the initial segment of scroll molded line, it is easy to produce the knife that allows of stress deformation and cutter
Phenomenon, need to thicken and correct, and be used cooperatively using secondary Archimedes's vortex lines;Tail radius is than larger, therefore radius of curvature
Change is smaller, is used cooperatively using Archimedes's vortex lines, and Archimedes's vortex lines and secondary Archimedes are vortexed
The junction of line need to ensure once to lead and it is secondary lead it is all continuous.
Wherein, gap is reserved between static vortex and dynamic vortex body, gap is gradually successively decreased from outer ring to inner ring, and inner ring
Gap keeps definite value.It may further be preferable that the unilateral interstice coverage reserved between static vortex and dynamic vortex body is 0.03mm
~0.02mm, namely the unilateral gap of the inner ring of centremost inner ring and subcenter is about 0.02mm.
Orbiter 10, the vortex of fixed scroll 2 can not possibly be substantially parallel, and be with orbiter 10 during due to operation
Central axis as benchmark, the nonparallelism of outermost end can be bigger than middle, therefore the reserved gap of outermost end is maximum, inwardly
Gradually successively decrease;And during due to operation, center section temperature rise ratio is very fast, heat affecting is the two of the inside in innermost end than larger
Ring gap is no longer reduced, and keeps constant value, by theoretical calculation and verification experimental verification, the pre- allowance in unilateral gap 0.02mm~
It is the most suitable between 0.03mm.Therefore, static vortex and dynamic vortex body finally using Archimedes's vortex lines and secondary Ah
Base Mead vortex lines are used cooperatively, and reserved gap is maximum in outmost turns, inwardly gradually successively decreases, unilateral gap is also by extroversion
Inside gradually successively decrease, such as unilateral interstice coverage changes between 0.03mm~0.02mm.
According to the operation principle of vavuum pump, closing chamber (namely compression chamber) is transported with orbiter 10, fixed scroll 2
Formed when dynamic, therefore orbiter 10, fixed scroll 2 are the core parts of scroll vacuum pump, with higher morpheme essence
Degree and dimension precision requirement.In the prior art, the processing to orbiter 10, fixed scroll 2 is substantially setting with costliness
Processed for such as millions of specialized working machine tool of machine, to ensure its precision.
As it was previously stated, the vortex dry vacuum pump includes motor and contiguous block 3, anti-rotation component 12, motor has inclined
Electrocardio arbor 9, orbiter 10 is arranged on eccentric motor axle 9, compared with prior art in pass through eccentric stiffener (such as bent axle)
To form the mode of eccentric drive shaft, the drive shaft of the motor of the present embodiment is machined directly to eccentric shaft so that assembly difficulty is big
It is big to decline.Contiguous block 3 is arranged on electric machine casing 6, and fixed scroll 2 is arranged on contiguous block 3;Anti- rotation component 12 and dynamic whirlpool
Capstan 10 and contiguous block 3 are connected simultaneously, and anti-rotation component 12 causes orbiter 10 can be relative under the drive of eccentric motor axle 9
Translational motion is done with the Circular test of the eccentric throw formation of eccentric motor axle 9 in fixed scroll 2.
In the vortex dry vacuum pump, the theoretical barycenter of orbiter 10 is on rotation centerline;And the vortex dry type is true
Empty pump includes balanced component 11, and balanced component 11 includes two pieces of independent balance weights, and two pieces of balance weights set up separately in eccentric motor axle 9
Close to contiguous block 3 and close to the region of back end cover for motor 7.In vacuum pump operation, orbiter 10 is kept in motion, therefore
Orbiter 10 itself need to keep balance, and scroll molded line is asymmetric, therefore can pass through when designing orbiter 10
Remove non-usage facestock material method so that the theoretical barycenter of orbiter 10 at the center line on.Because orbiter 10 is pacified
Mounted in the eccentric position of eccentric motor axle 9, static unbalance and unbalancing value are very big, therefore also devise two pieces of balances simultaneously
Block, to realize static unbalance and the unbalance dynamic of fixed scroll 2 and orbiter 10, but due to the presence of mismachining tolerance, in dress
Dynamic balancing is done with also needing to simulate the real motion of eccentric motor axle 9, orbiter 10 and balance weight with special frock before
Experiment, standard need to reach G6.3 grades.
The present embodiment is while the structure of the vortex dry vacuum pump is provided, in order to more clearly introduce related keyword
The forming process of structure, has also correspondingly provided a kind of manufacture method of vortex dry vacuum pump.
The manufacture method of the vortex dry vacuum pump includes processing and forms the fixed scroll 2 and orbiter 10 being oppositely arranged
The step of, fixed scroll 2, which includes static vortex, orbiter 10, includes dynamic vortex body, the molded line and dynamic vortex body of static vortex
Molded line use Archimedes's vortex lines, there is 180 ° of phase between the molded line of dynamic vortex body and the molded line of static vortex
Difference;Wherein, Archimedes's vortex lines of static vortex and dynamic vortex body are formed using Milling Machining, and during Milling Machining milling cutter to revolve
Switch to main motion, feed motion is moved and realized by the working shaft rotation of rotary table and the working shaft of milling machine horizontal table.
Wherein, during Archimedes's vortex lines of processing static vortex and dynamic vortex body, the work of rotary table
Forward or reverse is remained as axle, the working shaft of milling machine horizontal table only realizes feed motion in a direction movement;
During the Archimedes's vortex lines for finishing static vortex or dynamic vortex body, the working shaft commutation of rotary table is once.
To be further ensured that machining accuracy, the Milling Machining of static vortex and dynamic vortex body also includes, and is detected and mended by laser interferometer
The positioning of the working shaft of horizontal table and the working shaft of rotary table is repaid, wherein positioning precision is 0.005mm, resetting
Precision is 0.003mm;The positioning precision of the working shaft of rotary table is 7 ", and repetitive positioning accuracy is 4 ".
Specifically, in the present embodiment vortex dry vacuum pump, orbiter 10, fixed scroll 2 are as a result of A Ji meter
Moral vortex lines, and Archimedes's vortex lines performances of itself determines that scroll plate milling cutter in finishing can be transported based on rotation
Dynamic, feed motion is the rotation of C axles and the mobile realization of milling machine X or Y workbench by circular table, and the synthesis of the two motions is with regard to shape
Into Archimedes's vortex lines.In the prior art, round involute determines that scroll plate when using Four-axis milling, can only make
Fitted with Archimedes's vortex lines come.And the processing method that the present embodiment scroll vacuum pump is used is, adopted during processing vortex
It is that (Y workbench need to carry the weight of X workbench to the rotation of C axles below X workbench with X workbench with four-axle linked lathe
Amount, ratio of inertias X workbench is big, and positioning precision etc. is also lower than X) mobile realization, and can be matched with vortex lines design, it is to avoid adopt
The reversing error (this application condition of high precision machine tool is small) produced with X, Y interpolation, the lathe used is domestic lathe (such as knob
Prestige VM903H lathes), the accuracy class of this lathe key position in the fabrication process is improved, because the processing method of use is only used
To X-axis and C axles, detected by laser interferometer and X-axis positioning precision 0.005mm, repetitive positioning accuracy 0.003mm after compensating,
Additional Taiwan high precision turntable is as C axles, and positioning precision is 7 ", and repetitive positioning accuracy is 4 ", and uses suitable processing technology
Method, processes the part for meeting required precision.
It can be seen that, the most key part of the processing method is that requirement C axles infinitely angle can rotate, i.e., C axles are in processing one
Forward or reverse is remained during the vortex lines of side, during whole vortex is finished, X-axis or C axles can not be kept away
Once, the error produced through the C axles commutation that converts is smaller than X-axis for the need commutation exempted from, therefore selection C axle commutations.In order to avoid model
Error is produced when being converted between software, scroll plate is modeled using UG and nc program is generated, due to this processing
Y-axis can not be contained in program, therefore the establishment and post processing of program have sizable difficulty.The program track of establishment need to be carried out
Modification and optimize, what is now generated is X, Y interpolation and without the cls files of post processing, with VC++6.0 software programmings generate X,
The post processing program of C interpolations processing, is converted into radius and angle, due to this four axles lathe by the position coordinates in cls files
It is that the control program rotated with A axles is transformed, therefore C must be replaced to recognize with A in NC programs.It is vortexed in only processing
Body, on the premise of not considering that design of part causes deformation, as shown in figure 3, being the orbiter 10 after lathe four axis processing
Outer, inner side profile error schematic diagram, it is seen then that the wheel of on the outside of the orbiter processed using the processing method and inner side
In the measurement of wide degree, the profile error in outside is 0.01mm, and the profile error of inner side is 0.009mm.
Using the processing method, not only scroll plate machining accuracy is high, and production cost substantially reduces that (lathe used is total
Price is less than 600,000 yuan).
In the vortex dry vacuum pump, dynamic vortex body be arranged in parallel with static vortex, between dynamic vortex body and static vortex
The depth of parallelism be less than or equal to 0.005mm.As it was previously stated, the vortex dry vacuum pump includes motor, motor has eccentric motor axle
9;Contiguous block 3 is fitted together with electric machine casing 6 by interference fits, eccentric motor axle 9 by bearing and back end cover for motor 7,
Contiguous block 3 is fitted together, and eccentric motor axle 9 is connected as outside with the bearing of contiguous block 3 and is connected, and eccentric motor axle 9 is with being connected
The bearing outside diameter that block 3 is connected is more than the bearing outside diameter of eccentric motor axle 9 and back end cover for motor 7, eccentric motor axle 9 and contiguous block 3
The axiality of bearing hole (uses automatic tool changer mode, axiality is basic within 0.02mm between back end cover for motor 7 before improving
It is extremely difficult to 0.03mm).
The manufacture method also includes the assembling of fixed scroll 2 and orbiter 10, and fixed scroll 2 is assembled by contiguous block 3
On electric machine casing 6, orbiter 10 is assemblied on eccentric motor axle 9.For ease of mechanically connecting, contiguous block 3 and electric machine casing 6
Between bearing hole be first axle bearing bore, first axle bearing bore embeds steel bushing;The bearing hole that eccentric motor axle 9 is connected with contiguous block 3
For second bearing hole, first axle bearing bore and second bearing hole are formed using boring cutter, and the knife bar material of boring cutter is hard alloy.
Processed for the ease of boring cutter, the external diameter of first axle bearing bore is less than the external diameter in second bearing hole;Specific processed
Cheng Zhong, after first axle bearing bore is formed, continuously forms second bearing hole by the way of manual tool changing, and processing is kept during manual tool changing
The point X of position, Y-coordinate are constant, only change Z coordinate value, the axiality in first axle bearing bore and second bearing hole 0.02mm with
It is interior.
In addition, (fixed scroll 2 is set positioning hole when fixed scroll 2 is assembled with contiguous block 3 with corresponding on contiguous block 3
Put) it is symmetrically arranged two, the line of two positioning holes centers passes through the center line in second bearing hole and two positioning hole phases
It is symmetrical for the center line in second bearing hole.In specific process, two positioning holes are beforehand with frock so that two fixed
The line at Wei Kong centers is parallel relative to X-axis, and carries out X-axis interpolation, then carries out the processing of two positioning holes, two positioning holes
Symmetry be 0.01mm within.
Specifically, as shown in figure 4, the vortex of orbiter 10, fixed scroll 2 needs parallel, such as quiet vortex after mounting
The vortex of disk 2 and orbiter 10 is not parallel, then between the engagement place molded line that can cause orbiter 10, fixed scroll 2
Radial clearance half becomes big half and diminished, and change can then cause tangentially to leak, diminish greatly, is possible to that orbiter 10 can be caused, quiet
The mutual frictional heat of scroll plate 2 causes deformation or even is engaged, and causes product not run normally.In order that orbiter 10,
The depth of parallelism need to then need to ensure that motor has assembled rear eccentric motor the vortex of fixed scroll 2 within 0.005mm after mounting
Axle 9 is vertical with fixed scroll 2 and contiguous block 3 reference plane for being engaged place, and perpendicularity must be within 0.005mm, namely requires
After motor has been assembled, the axiality between two holes of two bearing block dress bearings need to be reached within 0.02mm.According to existing skill
The conventional assembly method of art, having assembled rear axiality can have 0.05mm just all well and good.Back end cover for motor 7, motor in so Fig. 1
The machining accuracy of housing 6 and contiguous block 3 particularly coaxial accuracy requires very high, and this brings very big difficulty to processing.
General electric machine structure is in order to dust-proof etc., and bearing is all mounted in the inner side of motor, and the size being just as, due to two
Bearing hole is not to process together, therefore coaxial accuracy between the two is not very high, does not reach vavuum pump institute
The requirement used.
During bore hole, the diameter for the cutter head of the boring cutter of processing need to be consistent with the size in the hole to be processed.Through
Cross and consider, the vortex dry vacuum pump of the present embodiment uses assembling mode as shown in Figure 5, because right side also needs to install
Other parts, therefore position of bearings direction can be designed to outwards, and pass through and select bearing not of uniform size, it is ensured that follow-up
Production in can use overall processing method, guarantee to be processed and formed at one time with this, the bearing rib diameter (example of right-hand member
Such as Ф 46) it is more than the bearing that left end is used (such as external diameter is Ф 40).It therefore, it can after structure as shown in Figure 5 has been assembled,
Further play the bearing hole (Ф 40) of processing left end and for the end for the peaceful right-hand member in hole such as (Ф 52) for assembling orbiter
Face, the problem of interference is not present due to this processing mode, therefore can preferably ensure axiality, perpendicularity etc., and also
Other holes for having axiality requirement to the hole for assembling orbiter can be processed together, for example:For fixed scroll 2 and contiguous block
3 assembling bearing hole (such as 2- Ф 6) and the assembling bearing hole (such as 3- Ф 19) for anti-rotation component 12 and contiguous block 3,
Meet requirement used in vavuum pump.Further, since assembling eccentric motor axle 9 etc. is also needed, therefore after mounting before overall processing
Also need with dowel hole is beaten, to reach the purpose of resetting.
During using assembling mode as shown in Figure 5, during overall processing is carried out, because the holes of Ф 40 have embedded steel
Set, and have 200mm deep away from right side, the rigidity of boring cutter need to be especially good during this hole of boring, therefore selects BIG boring cutter, and knife bar material is
Hard alloy, to avoid because rigid deficiency causes knife bar to tremble during processing, influences machining accuracy.Due to the Hes of Ф 40
The sizes of Ф 52 are different, therefore need tool changing during this holes of boring, according to the mode of automatic tool changer, that is, refer to first boring Ф 40 and Ф
The knife in 52 holes is all first attached in the tool magazine of lathe, and automatic tool changer, the rear holes of boring Ф 52 are controlled by machine tool program behind the complete holes of Ф 40 of boring.
As shown in fig. 6, must arrive during due to lathe automatic tool changer the position specified could tool changing, therefore behind the complete holes of Ф 40 of boring, pass through
Walk X, Y to be incorporated into up to tool changing point, changed after knife and returned to the holes of processing stand position boring Ф 52, the repetition that such a method is related to lathe is determined
Position precision, it is 0.03mm or so that the axiality of holes is measured after processing.It is preferred to use the complete holes of Ф 40 of the mode of manual tool changing, i.e. boring
Afterwards, keep processing stand position X, Y-coordinate constant, only become Z coordinate values, when boring cutter reaches home, manual tool changing, boring Ф
52 holes, the axiality that holes is measured after processing is 0.016mm, i.e., when using manual tool changing, can avoid because resetting is drawn
The error risen.
The method is equally used for the holes of processing 2- Ф 6, because 2- Ф 6 are positioning when fixed scroll 2 is assembled with contiguous block 3
Hole, therefore required precision is especially high, the line of two positioning holes centers need to be by the center line in the holes of Ф 52, and relatively in theory
Center line in the holes of Ф 52 is symmetrical.If at will look for individual position placement overall processing part, X, Y-axis need to be walked during boring 2- 6 holes of Ф same
When interpolation, if being beforehand with frock so that the line for this two positioning holes center that need to be processed is parallel relative to X-axis, then can only walk X
Axle interpolation, it is to avoid requirement to Y axle positioning precisions, experiment proves that, when using the interpolation simultaneously of X, Y-axis symmetry for
0.02mm or so, and X-axis interpolation is used, symmetry can drop to below 0.01mm.
In the vortex dry vacuum pump of the present embodiment, by contiguous block 3, electric machine casing 6, back end cover for motor 7, eccentric motor
The composition motor such as axle 9, two kind of balancing weight 11 and sealing strip 13, stator, rotor part, the motor difference maximum with other motors
It is sealing, therefore the plug wire part of the outside interface in motor part also needs sealing, i.e. the plug wire of the outside interface of motor is adopted
Use seal socket.
In addition, in the vortex dry vacuum pump, the axial gap between static vortex and dynamic vortex body is (also referred to as between end face
Gap, for dynamic vortex body top after assembling and the gap at the end face cooperation of static vortex bottom) sealed by sealing strip 13, quiet whirlpool
The top of rotation body and dynamic vortex body corresponds to opens up fluted respectively, and sealing strip 13 is respectively arranged at static vortex and dynamic vortex body
In groove.The size of oil-free scroll dry vacuum pump axial gap plays vital effect to vavuum pump final vacuum,
Cause leakage excessive if gap is excessive, efficiency reduction;Though gap is too small can to reduce leakage, orbiter 10, quiet whirlpool
The contact surface frictional power loss of capstan 2 can increase, and temperature rise ratio is higher.
In the prior art, sealing strip is typically all formed using polytetrafluoroethylmaterial material, to play wear-resisting effect;Together
When, sealing strip should also have certain decrement, just can guarantee that certain sealing property.In the vortex dry vacuum of the present embodiment
In pump, due to being dynamic sealing between static vortex and dynamic vortex body, decrement again can not be too big, so positioning to axial dimension
Required precision will be especially high, once and sealing strip wear and tear, during vacuum pump operation, its vacuum can not reach required
Value, now then needs to re-replace sealing strip 13.For these reasons, in the present embodiment, as shown in fig. 7, sealing strip 13 includes
First sublayer 131 and the second sublayer 132 for being arranged at the lower section of the first sublayer 131, the first sublayer 131 use super high molecular weight
Polyethylene, the second sublayer 132 uses fretting map rubber elastomer, and the first sublayer 131 is connected with the second sublayer 132 by adhesive
Connect.To ensure preferable sealing effectiveness, and take into account in sealing life, the sealing strip 13 of the present embodiment, surpass in the first sublayer 131
The molecular weight ranges of High molecular weight polyethylene are 4,500,000~5,500,000, and preferred molecular weight is 5,000,000 or so, is increased wear-resisting;Second
Fretting map rubber elastomer is the mixture of buna and neoprene (NBR/CR), the density of fretting map rubber in sublayer 132
Scope is 160kg/m3~230kg/m3, increase the life-span.The inside and outside pressure of micropore is in vavuum pump off-duty in bipeltate
Shi Weiyi atmospheric pressure, when vacuum pump operation, the external pressure of bipeltate can be reduced gradually, and internal pressure is constant,
Therefore the micropore inside bipeltate will swell, and produce upward top power, and pressure differential is bigger, then the power of upward jack-up is also got over
Greatly so that sealing strip 13 is brought into close contact with the end face coordinated, sealing is realized, therefore the power of jack-up needs control upwards, can neither
It is too big, can not be too small, it is computed finding, when the density range of bipeltate is 160~230kg/m3When can preferably meet
Use requirement, when part wears occurs in the high-abrasive material of the use ultra-high molecular weight polyethylene formation in upper strata, due under
The presence of the jack-up power of the use fretting map rubber elastomer of layer, with certain compensating action, therefore the life-span of sealing strip 13
Can be long.
The sealing strip 13 formed with sealing strip in the prior art using Vehicle Processing mode in difference, the present embodiment uses punching press
Mode is molded.For example:First using the bar (such as German brand) of ultra-high molecular weight polyethylene, piece is turned into by secondary operation
Material, it is stand-by as the first sublayer;Using bipeltate elastomer (such as the ADIA201 of Changzhou Ai get Er plastic materials company),
Sheet material is turned into by secondary operation, it is stand-by as the second sublayer;Then, after both materials are all worked into the state of lamellar body,
Adhesive is compounded in the second sublayer, then the adhesive face of the first sublayer and the second sublayer is bonded together, blank is formed;
Finally, using preformed mould, the shape of the sealing strip needed for blank is further stamped and formed out obtains finished product sealing strip
13.The processing process of specific sealing strip is as shown in Figure 8.
In the inside of electric machine casing 6, vortex dry vacuum pump also includes being used to control the vacuum chamber to be with vavuum pump working chamber
The turnover airgun controller part of no communication, turnover airgun controller part uses electromagnet assembly 4, and electromagnet assembly 4 includes electromagnet, iron
Core and spring, electromagnet and spring are used to control the stretching of iron core or rebounded, and the major function of electromagnet assembly 4 is:Motor is not
Iron core stretches out during work, the communication of isolated vacuum room and vavuum pump working chamber;Iron core postpones (such as 10s) bullet during electrical power
Return, link up vacuum chamber and with vavuum pump working chamber vacuum chamber is communicated with vavuum pump working chamber;Iron core is stretched at once when motor is powered off
Go out, the communication of cut-out vacuum chamber and vavuum pump working chamber (when motor is powered off, vavuum pump working chamber is communicated with the external world).
In the vortex dry vacuum pump, as shown in figure 1, electric machine casing 6, back end cover for motor 7 and the formation of base assembly 8 whirlpool
Revolve the profile of dry vacuum pump, the stator of motor, rotor and be arranged at electric machine casing 6 with fixed scroll 2, orbiter 10
Interior, electric machine casing 6, back end cover for motor 7 are arranged at the top of base assembly 8.Wherein, contiguous block 3 is quiet to be vortexed on electric machine casing 6
Disk 2 is fixed on contiguous block 3 by alignment pin, and eccentric motor axle 9 is engaged the reference plane at place with fixed scroll 2 and contiguous block 3
Perpendicularity within 0.005mm;Anti- rotation component 12 includes three anti-rotation parts, and one end of three anti-rotation parts is uniformly set up separately
On orbiter 10, the other end is arranged on contiguous block 3.When motor operation, eccentric motor axle 9 is rotated, and drives dynamic vortex
Disk 10 is rotated, and at this moment anti-rotation component 12 can cause orbiter 10 orbiter 10 will not occurs around own rotation
Translation is being done with the track of the circle of the eccentric throw formation of eccentric motor axle 9 relative to fixed scroll 2, to reach the mesh of volume change
, realize pumping function.
The course of work of the vortex dry vacuum pump is:When vavuum pump is static not to be run, now in electromagnet assembly 4
Electromagnet not it is electric, iron core stretches out, isolated vacuum room and extraneous communication, to prevent the certain vacuum of vacuum chamber and can not
Communicated with air;When electrical power, eccentric motor axle 9 is rotated, and orbiter 10 is driven under the limitation of anti-rotation component 12
Translation is done, now orbiter 10 just can form a pair of larger closing chambers with fixed scroll 2 in outermost end, and with dynamic vortex
The translation of disk 10, this is moved inward to closing chamber (i.e. compression chamber), and less and less, until core goes out gas extrusion
Go, now electromagnet delay 10s obtains electric, and iron core delay is withdrawn, and vavuum pump is first evacuated to motor internal, then is caused
Vacuum chamber is communicated with working chamber, and now vacuum chamber could be vacuumized;When motor is powered off, electromagnet is powered off at once, iron core
Stretch out at once, the connection of cut-out vacuum chamber and working chamber.
Preferably, the lower section of base assembly 8 of the vortex dry vacuum pump is provided with fan, and fixed scroll is provided with wind
Cover, fan and motor synchronous averaging, for by fan housing by wind water conservancy diversion to the end face of fixed scroll 2 to be radiated;Fan is
Blowing machine type fan with larger air quantity is (certainly, according to practical application needs, it would however also be possible to employ other less wind of air quantity
Fan, such as tube-axial fan).When the motor is energized, fan can effectively be radiated to the end face of fixed scroll 2, to ensure
The Effec-tive Function of the vortex dry vacuum pump.
In the vortex dry vacuum pump of the present embodiment, as shown in figure 1, air inlet 5 is arranged on the outer ring end of orbiter 10
At end, gas outlet 1 is arranged on the center of fixed scroll 2, and air inlet 5 can be by the vacuum chamber outside mechanical interface and vacuum system
It is connected, or, air inlet 5 can be connected by pipe method with the gas outlet of next stage pump in vacuum system.
As another aspect of the present invention, the present embodiment also provides a kind of vacuum system, and the vacuum system includes vavuum pump,
The vavuum pump uses above-mentioned vortex dry vacuum pump.
As unit in use, air inlet 1 need to be only connected with required vacuum chamber by mechanical interface, you can as complete
The whole product run;It is used for if desired in vacuum system, then the gas outlet of air inlet 1 and next stage pump such as turbomolecular pump
It is connected by modes such as pipelines.Fore pump is essential in each vacuum system, and the vortex dry vacuum pump is as preceding
During level pump, the vortex dry vacuum pump first works, when the vacuum in required airtight vacuum space reaches below 10Pa, vacuum machine
Second level molecular pump in group could start working.
The present embodiment mesoscale eddies dry vacuum pump is one of core parts of vacuum system, with without oily pollution, structure letter
It is single, be simple to manufacture, operate steadily, the advantage that noise is low, can rapidly build cleaning, oil-free, environmentally friendly vacuum environment, and can
Using the fore pump as vacuum pump set, can also be independently operated, as unit be widely used in needing cleaning oil-free, it is long-life
In vacuum system.
Vortex dry vacuum pump in the present invention, by the orbiter to its core, the scroll molded line of fixed scroll with
And gasket structure and its corresponding processing method are innovated, while also to the overall construction design of motor and processing side
Method, assembly method are improved, on the premise of vavuum pump self performance and use requirement is met, and reduce difficulty of processing and life
Produce cost.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, but the invention is not limited in this.For those skilled in the art, the essence of the present invention is not being departed from
In the case of refreshing and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.
Claims (23)
1. a kind of vortex dry vacuum pump, including the fixed scroll (2) and orbiter (10) being oppositely arranged, the fixed scroll
(2) include static vortex, the orbiter (10) include dynamic vortex body, it is characterised in that the molded line of the static vortex and
The molded line of the dynamic vortex body uses Archimedes's vortex lines, the molded line of the dynamic vortex body and the molded line of the static vortex
Between there is 180 ° of phase difference, the dynamic vortex body can engage to form compression chamber with the static vortex;
Radial clearance is reserved between the static vortex and the dynamic vortex body, the gap is gradually passed from outer ring to inner ring
Subtract, and interior ring gap keeps definite value;
Further, the molded line of the molded line of the static vortex and the dynamic vortex body uses Archimedes's vortex lines and two
The mating connection of secondary Archimedes's vortex lines, head uses secondary Archimedes's vortex lines, and afterbody is using an Archimedes whirlpool
Spin line, Archimedes's vortex lines and secondary Archimedes's vortex lines have continuous first order derivative in junction and secondary led
Number.
2. vortex dry vacuum pump according to claim 1, it is characterised in that the dynamic vortex body and the static vortex
It is arranged in parallel, the depth of parallelism between the dynamic vortex body and the static vortex is less than or equal to 0.005mm.
3. vortex dry vacuum pump according to claim 1, it is characterised in that the static vortex and the dynamic vortex body
Between reserve unilateral interstice coverage be 0.03mm~0.02mm.
4. vortex dry vacuum pump according to claim 1, it is characterised in that the static vortex and the dynamic vortex body
Between axial gap sealed by sealing strip (13), the top of the static vortex and the dynamic vortex body is corresponded to respectively to be opened up
Fluted, the sealing strip is respectively arranged in the groove of the static vortex and the dynamic vortex body.
5. vortex dry vacuum pump according to claim 4, it is characterised in that the sealing strip (13) includes the first sublayer
(131) and the second sublayer (132) for being arranged at below first sublayer (131), first sublayer (131) uses superelevation
Molecular weight polyethylene, second sublayer (132) uses fretting map rubber elastomer, first sublayer (131) and described the
Two sublayers (132) are connected by adhesive.
6. vortex dry vacuum pump according to claim 5, it is characterised in that superelevation point in first sublayer (131)
The molecular weight ranges of sub- weight northylen are 4,500,000~5,500,000, and fretting map rubber elastomer is fourth in second sublayer (132)
The mixture of rubber and neoprene, the density range of the fretting map rubber is 160kg/m3~230kg/m3。
7. vortex dry vacuum pump according to claim 4, it is characterised in that the sealing strip (13) uses impact style
Shaping.
8. vortex dry vacuum pump according to claim 1, it is characterised in that air inlet (5) is arranged on the dynamic vortex
The outer ring end of disk (10), gas outlet (1) is arranged on the center of the fixed scroll (2), and the air inlet (5) can pass through
Mechanical interface is connected with the vacuum chamber outside vacuum system, or, the air inlet (5) can be by pipe method and vacuum system
The gas outlet of next stage pump is connected.
9. vortex dry vacuum pump according to claim 1, it is characterised in that the vortex dry vacuum pump includes motor
And contiguous block (3), anti-rotation component (12), the motor has eccentric motor axle (9), and the orbiter (10) is arranged on
On the eccentric motor axle (9);The contiguous block (3) is arranged on electric machine casing (6), and the fixed scroll (2) is arranged on institute
State on contiguous block (3);The anti-rotation component (12) is connected simultaneously with the orbiter (10) and the contiguous block (3), institute
Anti- rotation component (12) is stated such that the orbiter (10) can be quiet relative to described under the drive of the eccentric motor axle (9)
Scroll plate (2) does translational motion with the Circular test of the eccentric throw formation of eccentric motor axle (9).
10. vortex dry vacuum pump according to claim 9, it is characterised in that the contiguous block (3) passes through interference fits
It is fixed on the electric machine casing (6), the fixed scroll (2) is fixed on contiguous block (3) by alignment pin, the eccentric electricity
Arbor (9) is engaged the perpendicularity of the reference plane at place with the fixed scroll (2) and the contiguous block (3) within 0.005mm;
The anti-rotation component (12) includes three anti-rotation parts, and one end of three anti-rotation parts is uniformly set up separately in the dynamic vortex
On disk (10), the other end is arranged on the contiguous block (3).
11. vortex dry vacuum pump according to claim 9, it is characterised in that the theoretical matter of the orbiter (10)
The heart is on rotation centerline;Vortex dry vacuum pump includes balanced component (11), and the balanced component (11) includes two pieces of balances
Block, two pieces of balance weights set up separately in the eccentric motor axle (9) close to contiguous block (3) and close to the area of back end cover for motor (7)
Domain.
12. vortex dry vacuum pump according to claim 9, it is characterised in that the plug wire of the outside interface of motor
Using seal socket;The vortex dry vacuum pump also includes being used to control vacuum chamber and entering that whether vavuum pump working chamber links up
Outlet control device, the turnover airgun controller part use electromagnet assembly (4), the electromagnet assembly (4) include electromagnet,
Iron core and spring, the electromagnet and the spring are used to control the stretching of the iron core or rebounded, when the motor does not work
The iron core stretches out, the communication of isolated vacuum room and vavuum pump working chamber;The iron core delay is rebounded during the electrical power, ditch
Logical vacuum chamber and vavuum pump working chamber;The iron core stretches out at once during the motor power-off, cut-out vacuum chamber and vacuum pump work
The communication of chamber.
13. vortex dry vacuum pump according to claim 9, it is characterised in that also including base assembly (8), the bottom
Fan is provided with below holder assembly (8), the fixed scroll is provided with fan housing, the fan and the motor synchronous averaging, used
In by the fan housing by wind water conservancy diversion to the end face of the fixed scroll (2) to be radiated;The fan is blowing machine type wind
Fan.
14. a kind of vacuum system, including vavuum pump, it is characterised in that the vavuum pump is using any one of claim 1-13 institute
State vortex dry vacuum pump.
15. a kind of manufacture method of the vortex dry vacuum pump as described in any in 1-13 such as claim, including processing form phase
The step of fixed scroll (2) to setting and orbiter (10), the fixed scroll (2) includes static vortex, the dynamic whirlpool
Capstan (10) includes dynamic vortex body, it is characterised in that the molded line of the molded line of the static vortex and the dynamic vortex body is used
Archimedes's vortex lines, the phase difference between the molded line of the dynamic vortex body and the molded line of the static vortex with 180 °;Institute
The Archimedes's vortex lines for stating static vortex and the dynamic vortex body are formed using Milling Machining, and during Milling Machining milling cutter to rotate
For main motion, feed motion is moved and realized by the working shaft rotation of rotary table and the working shaft of milling machine horizontal table;
Further, the molded line of the molded line of the static vortex and the dynamic vortex body uses Archimedes's vortex lines and two
The mating connection of secondary Archimedes's vortex lines, head uses secondary Archimedes's vortex lines, and afterbody is using an Archimedes whirlpool
Spin line, Archimedes's vortex lines and secondary Archimedes's vortex lines have continuous first order derivative in junction and secondary led
Number.
16. the manufacture method of vortex dry vacuum pump according to claim 15, it is characterised in that processing the quiet whirlpool
During the Archimedes's vortex lines for revolving body or the dynamic vortex body, the working shaft of rotary table remains rotating forward or anti-
Turn, the working shaft of milling machine horizontal table only realizes feed motion in a direction movement;Finish the static vortex or
During Archimedes's vortex lines of the dynamic vortex body, the working shaft commutation of rotary table is once.
17. the manufacture method of vortex dry vacuum pump according to claim 16, it is characterised in that the static vortex and
The Milling Machining of the dynamic vortex body also includes, and the simultaneously working shaft of compensation level workbench and rotation work are detected by laser interferometer
Make the positioning of the working shaft of platform, wherein positioning precision is 0.005mm, and repetitive positioning accuracy is 0.003mm;The work of rotary table
The positioning precision for making axle is 7 ", and repetitive positioning accuracy is 4 ".
18. the manufacture method of vortex dry vacuum pump according to claim 16, it is characterised in that the vortex dry type is true
Empty pump includes motor, and the motor has eccentric motor axle (9);The manufacture method also include the fixed scroll (2) with it is described
The assembling of orbiter (10), the fixed scroll (2) is assemblied on electric machine casing (6) by contiguous block (3), the dynamic vortex
Disk (10) is assemblied on the eccentric motor axle (9).
19. the manufacture method of vortex dry vacuum pump according to claim 18, it is characterised in that the contiguous block (3)
Fitted together with electric machine casing (6) by interference fits, the eccentric motor axle (9) passes through bearing and back end cover for motor (7)
Fit together, the eccentric motor axle (9) is connected as outside with the bearing of the contiguous block (3) and is connected, the eccentric motor
The bearing outside diameter that axle (9) is connected with the contiguous block (3) is more than the eccentric motor axle (9) and the back end cover for motor (7)
Bearing outside diameter, the axiality of bearing hole exists between the eccentric motor axle (9) and the contiguous block (3) and back end cover for motor (7)
Within 0.02mm.
20. the manufacture method of vortex dry vacuum pump according to claim 19, it is characterised in that the back end cover for motor
(7) bearing hole between the eccentric motor axle (9) is first axle bearing bore, and the first axle bearing bore embeds steel bushing;It is described inclined
The bearing hole that electrocardio arbor (9) is connected with the contiguous block (3) is second bearing hole, the first axle bearing bore and second axle
Bearing bore processes to be formed using boring, and the knife bar material of boring cutter is hard alloy.
21. the manufacture method of vortex dry vacuum pump according to claim 20, it is characterised in that the first axle bearing bore
External diameter be less than the second bearing hole external diameter;After the clutch shaft bearing hole machined is complete, continued by the way of manual tool changing
The second bearing hole is processed, keeps the X of processing stand position, Y-coordinate constant during manual tool changing, only changes Z coordinate value, described the
The axiality in one bearing hole and the second bearing hole is within 0.02mm.
22. the manufacture method of vortex dry vacuum pump according to claim 20, it is characterised in that the fixed scroll
(2) positioning hole when being assembled with contiguous block (3) is symmetrically arranged two, and the lines of two positioning holes centers passes through described
The center line in second bearing hole and two positioning holes are symmetrical relative to the center line in the second bearing hole.
23. the manufacture method of vortex dry vacuum pump according to claim 22, it is characterised in that two positioning holes
It is beforehand with frock so that the line of two positioning holes centers is parallel relative to X-axis, and carries out X-axis interpolation, then carries out two
The processing of the individual positioning hole, the symmetry of two positioning holes is within 0.01mm.
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WO2017113341A1 (en) * | 2015-12-31 | 2017-07-06 | 安徽大富重工机械有限公司 | Scroll compressor, air conditioner, and automobile |
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CN105909519B (en) * | 2016-06-29 | 2018-05-18 | 东莞市金达机电有限公司 | A kind of vortex air compressor machine |
JP6765515B2 (en) * | 2017-04-26 | 2020-10-07 | 三菱電機株式会社 | Manufacturing method of scroll compressor and machine tool for scroll compressor |
CN107420303B (en) * | 2017-09-20 | 2023-06-06 | 广东美的环境科技有限公司 | Scroll wrap, fixed scroll, moving scroll, compressor and refrigeration equipment |
CN109441802A (en) * | 2018-10-18 | 2019-03-08 | 东北大学 | A kind of dry vacuum pump work system, soil pick-up work system and suction work system |
CN110107499B (en) | 2019-06-10 | 2020-12-11 | 珠海格力节能环保制冷技术研究中心有限公司 | Scroll compressor, vehicle air conditioner and vehicle |
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