CN104678339B - Calibration device, system and method for probe type microwave voltage measurement system - Google Patents
Calibration device, system and method for probe type microwave voltage measurement system Download PDFInfo
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- CN104678339B CN104678339B CN201510072783.9A CN201510072783A CN104678339B CN 104678339 B CN104678339 B CN 104678339B CN 201510072783 A CN201510072783 A CN 201510072783A CN 104678339 B CN104678339 B CN 104678339B
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Abstract
The invention discloses a calibration device for a probe type microwave voltage measurement system. The device comprises a microwave signal input end and a microwave signal output end, and further comprises a standard micro-strip, a probe negative electrode touch disk, a probe negative electrode contact, a probe positive electrode contact and a probe positioning bracket, wherein the standard micro-strip is used for transmitting a microwave signal input from the microwave signal input end; the microwave signal output end is used for outputting the microwave signal from the standard micro-strip; the probe negative electrode touch disk adopts a corner cut design; the probe negative electrode contact, the probe positive electrode contact and the probe positioning bracket point are used for positioning a probe. According to the calibration device, a microwave voltage calibration result can be traced back to a power parameter of a 50 ohm system based on a circuit parallel isobaric principle; the calibration device is suitable for calibration of any non-zero impedance probe type microwave voltage measurement systems, and the accuracy of a non 50ohm microwave voltage measurement system can be improved.
Description
Technical field
The present invention relates to a kind of calibrating installation.More particularly, to a kind of for probe-type microwave voltage measuring system
Calibrating installation, system and method.
Background technology
At present, microwave voltage measuring system conventional both at home and abroad is mainly based upon the detection principle of microwave detection tube, will be micro-
Ripple signal is changed into direct current signal, then carries out DC voltage measurement.At present, probe-type microwave voltage conventional both at home and abroad measurement
The calibrating installation of system is generally probe station (for being accurately positioned) and its standard film (short circuit load, open-circuited load, matched load
With straight-through part etc.).Because probe and standard film are generally 50 Ω systems, and a kind of typical non-50 omega loads (electro explosive device igniter wire)
Impedance be 1 Ω~10 Ω, both impedance severe mismatch, thus on probe station calibrate 50 Ω probe-types microwave voltages measurement
System is not particularly suited for the measurement of microwave voltage in non-50 omega load (electro explosive device igniter wire), and this is had a strong impact in non-50 omega load
The accuracy of microwave voltage measurement.
According to circuit voltage divider principle, the accurate measurement of the upper microwave voltage of non-50 omega load is realized, as reception device
Probe impedance should be much larger than load impedance.And to realize calibrating the big impedance probe of non-50 omega, just should be using suitable
In the calibrating installation of big impedance probe.50 Ω probe type micro-waves are only applicable to for existing microwave voltage measuring system calibrating installation
The shortcoming of voltage measurement system, the microwave voltage measurement of present invention design is applied to any non-zero impedance probe-type with calibrating installation
The calibration of microwave voltage measuring system, it is possible to increase the accuracy of non-50 omega microwave voltage measuring system calibration.
Accordingly, it is desirable to provide a kind of calibrating installation, system and method for probe-type microwave voltage measuring system, is based on
Circuit in parallel equal pressure principle, microwave voltage calibration result can be traceable to the power parameter of 50 Ω systems, it is adaptable to arbitrarily non-
The calibration of zero impedance probe-type microwave voltage measuring system, it is possible to increase it is accurate that non-50 omega microwave voltage measuring system is calibrated
Property.
The content of the invention
It is an object of the invention to provide a kind of calibrating installation for probe-type microwave voltage measuring system, system and side
Method, solves microwave current voltage measurement system calibrating installation and is only applicable to lacking for 50 Ω probe-type microwave voltage measuring systems
Point, it is adaptable to the arbitrarily calibration of non-zero impedance probe-type microwave voltage measuring system, it is possible to increase non-50 omega microwave voltage is measured
The accuracy of system calibration.
To reach above-mentioned purpose, the present invention adopts following technical proposals：
A kind of calibrating installation for probe-type microwave voltage measuring system, the device includes microwave signal input and micro-
Ripple signal output part, the device is further included
Standard microstrip, probe negative pole tactile disk, probe cathode contact, probe cathode contact, probe locating support and reference
Measuring unit；
The standard microstrip, for transmitting the microwave signal being input into by microwave signal input；
The microwave signal outfan, for exporting the microwave signal from standard microstrip；
The probe negative pole tactile disk is designed using corner cut；
The probe cathode contact, probe cathode contact and the probe locating support, for positioning to probe；
The probe is with the reference measure unit equivalent parallel in microwave signal outfan.
Preferably, the standard microstrip, probe negative pole tactile disk, probe cathode contact and probe cathode contact are placed in standard
On micro belt board, the standard microstrip circuit board is the Wide-Band Design, and it is DC~18GHz to be suitable for frequency.
Preferably, the probe locating support is glass fibre reinforced plastic support.
A kind of microwave voltage measures calibration system, the system include signal source, probe-type microwave voltage measuring system and on
State calibrating installation；
The calibrating installation, for the microwave signal that collection is produced from signal source, and forms in microwave signal outfan
Reference measure unit is in parallel with probe；
The reference measure unit, for measuring the standard microwave electricity of the microwave signal from the microwave signal outfan
Pressure value V0, as reference standard value；
The probe-type microwave voltage measuring system further includes microwave detector and data processing unit；
The microwave detector, for by with the reference measure unit equivalent parallel microwave signal outfan probe
Microwave signal voltage conversion obtained by measurement is d. c. voltage signal；
The data processing unit, for measuring the magnitude of voltage V of the d. c. voltage signal of the microwave detector output1,
And the standard microwave magnitude of voltage V measured according to the reference measure unit0With the DC voltage letter of microwave detector output
Number magnitude of voltage V1, obtain the calibration curve of microwave signal.
Preferably, the probe by the probe locating support in the calibrating installation, probe cathode contact and probe just
Pole contact is positioned.
Preferably, the characteristic impedance of the probe can be any nonzero value.
Preferably, the probe-type microwave voltage measuring system further includes wave filter, for filtering the microwave inspection
High-frequency interferencing signal in the d. c. voltage signal of ripple device output.
A kind of microwave voltage measurement calibration steps that calibration system is measured using above-mentioned microwave voltage, the method is included：
The microwave signal produced from signal source is transmitted with the calibrating installation；
The microwave signal of the microwave signal outfan from the calibrating installation is gathered with the reference measure unit, and
The power or voltage of the microwave signal are measured, as reference standard value；
With probe locating support, probe cathode contact and probe cathode contact by probe and described reference measure unit etc.
Effect is in parallel, and with the probe microwave signal of the microwave signal outfan from the calibrating installation is detected；
With microwave detector by the microwave signal voltage conversion of probe measurement be d. c. voltage signal；
The reference standard value measured according to the reference measure unit and microwave detector gained d. c. voltage signal,
It is calculated the calibration value of the probe.
Preferably, the probe by the probe locating support in the calibrating installation, probe cathode contact and probe just
Pole contact is positioned.
Preferably, the characteristic impedance of the probe can be any nonzero value.
Beneficial effects of the present invention are as follows：
Technical scheme of the present invention compared with prior art, has the advantage that：
1st, based on circuit in parallel equal pressure principle, microwave voltage calibration result can be traceable to the power ginseng of 50 Ω systems
Number；
2nd, the probe negative pole tactile disk in the calibrating installation employs corner cut design, and the design reduces tactile disk and 50 Ω are calibrated
The disturbance of micro-strip line impedance, is conducive to improving the accuracy of calibration；
3rd, the calibrating installation is applied to the calibration of any non-zero impedance probe-type microwave voltage measuring system, it is possible to increase
The accuracy of non-50 omega microwave voltage measuring system calibration.
Description of the drawings
The specific embodiment of the present invention is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 (a) illustrates that a kind of calibrating installation for probe-type microwave voltage measuring system is just in the embodiment of the present invention
View；
Fig. 1 (b) illustrates an a kind of left side for the calibrating installation for probe-type microwave voltage measuring system in the embodiment of the present invention
View；
Fig. 1 (c) illustrates a kind of bowing for calibrating installation for probe-type microwave voltage measuring system in the embodiment of the present invention
View；
Fig. 2 illustrates that a kind of calibrating installation alignment for probe-type microwave voltage measuring system is micro- in the embodiment of the present invention
Band wire board structure of circuit schematic diagram；
Fig. 3 illustrates a kind of system knot of calibrating installation for probe-type microwave voltage measuring system in the embodiment of the present invention
Structure schematic diagram.
Specific embodiment
In order to be illustrated more clearly that the present invention, the present invention is done further with reference to preferred embodiments and drawings
It is bright.Similar part is indicated with identical reference in accompanying drawing.It will be appreciated by those skilled in the art that below institute is concrete
The content of description is illustrative and be not restrictive, and should not be limited the scope of the invention with this.
As shown in Fig. 1 (a)-(c), the invention discloses a kind of calibrating installation for the measurement of probe-type microwave voltage, should
Device includes the coaxial SMA micro-strips seat 101 of input, base box housing 102, calibration microstrip circuitry plate 103, probe locating support
The coaxial SMA micro-strips seat 105 of (glass fibre reinforced plastic support) 104, outfan；As shown in Fig. 2 calibration microstrip circuitry plate 103 is further wrapped
Include the gold on standard microstrip substrate 1031, standard microstrip (50 Ω) 1032, probe negative pole tactile disk 1033, probe negative pole tactile disk
Categoryization via 1034, probe cathode contact 1035, probe cathode contact 1036.
The coaxial SMA micro-strips seat 101 of the input, for being input into microwave signal, and conveys signal to standard microstrip (50
Ω)1032；
The standard microstrip (50 Ω) 1032, for transmitting microwave signal；
The coaxial SMA micro-strips seat 105 of the outfan, believes for microwave of the output from standard microstrip (50 Ω) 1032
Number；
The probe negative pole tactile disk 1033 uses corner cut design, this design reduces tactile disk and calibrates microstrip line to 50 Ω
The disturbance of 1032 impedances, is conducive to improving the accuracy of calibration；
It is described metallization via 1034, with the standard microstrip substrate 1031 on positioned at the probe negative pole tactile disk phase
The metal of side is connected；
The probe cathode contact 1035, probe cathode contact 1036 and probe locating support 104, for carrying out to probe
Positioning.
The microwave signal that microwave signal source is produced is injected into the calibrating installation by the coaxial SMA micro-strips seat 101 of input
Calibration microstrip circuitry plate 103 on；The microwave power being injected on calibration microstrip circuitry plate 103 is coaxial by outfan
SMA micro-strips seat 105 is entered in energy meter or audiofrequency spectrometer.
During calibration, the positive contact probe cathode contact 1036 of probe, the cathode contact probe negative pole of probe touches contact
1035.Now, probe and energy meter (or audiofrequency spectrometer) equivalent parallel being connected on the coaxial SMA micro-strips seat 105 of outfan, two
The voltage of person should be equal.Based on circuit in parallel equal pressure principle, 50 Ω conditions can be calculated using the power reading of energy meter
Under microwave voltage, the microwave voltage that non-50 omega probe reads is calibrated using the voltage.
The calibration microstrip circuitry plate 103 of the device is the Wide-Band Design, is suitable for frequency range DC~18GHz.
As shown in figure 3, the invention also discloses a kind of probe-type microwave voltage based on said apparatus measures calibration system,
The system includes microwave signal source 301, probe-type microwave voltage measurement calibrating installation 302, energy meter (or audiofrequency spectrometer) 303, quilt
The probe-type microwave voltage measuring system of calibration；The probe-type microwave voltage measuring system being calibrated further includes tested microwave
Voltage probe 304, microwave detector 305, wave filter 306, oscillograph 307.
Microwave signal source 301, for producing a power or voltage signal；
Probe-type microwave voltage measures calibrating installation 302, for power or voltage signal to be transferred to into energy meter (or frequency spectrum
Instrument) and probe-type microwave voltage measuring system, and form energy meter (or audiofrequency spectrometer) and the survey of probe-type microwave voltage in outfan
The parallel connection of amount system；
Energy meter (or audiofrequency spectrometer) 303, for the power or voltage signal of the outfan of measurement calibrating installation 302, forms
Reference standard value, the standard value is used for the calibration of probe-type microwave voltage measuring system；
Tested microwave voltage probe 304, for contacting the both positive and negative polarity of tested voltage, its characteristic impedance can be any, typically
For 50 Ω or much larger than 50 Ω；
Microwave detector 305, the microwave voltage signal for microwave voltage probe 304 to be transmitted is become by way of detection
Into direct current signal；
Wave filter 306, for filtering the output signal of microwave detector 305 in high-frequency interferencing signal；
Oscillograph 307, for exporting the reading of direct current signal to microwave detector 305.
The invention also discloses a kind of microwave voltage based on said apparatus measures calibration steps, the method includes：
S1, microwave voltage is visited by probe locating support 104 and probe cathode contact 1035, probe cathode contact 1036
Pin 304 is positioned；
The power that S2, microwave signal source 301 are produced is injected into calibration microstrip line by the coaxial SMA micro-strips seat 101 of input
On circuit board 103；
S3, the microwave power being injected on calibration microstrip circuitry plate 103 are entered by the coaxial SMA micro-strips seat 105 of outfan
Enter in energy meter (or audiofrequency spectrometer) 303；
S4, by microwave voltage probe 304 and energy meter (or the frequency spectrum being connected on the coaxial SMA micro-strips seat 105 of outfan
Instrument) 303 equivalent parallels, both voltage should be equal；
S5, the microwave voltage that can be calculated using the power reading of energy meter (or audiofrequency spectrometer) 303 under the conditions of 50 Ω
V0；
S6, non-50 omega probe-type microwave voltage measuring system is read microwave voltage V using the voltage1Calibrated；
S7, the standard microwave magnitude of voltage V measured according to the energy meter (or audiofrequency spectrometer) 3030With the microwave detector
The magnitude of voltage V of the d. c. voltage signal of 304 outputs1, obtain the calibration curve of microwave signal.
The method calibration process is further included：Under fixed frequency point, the continuous output for changing microwave signal source
Pi, obtain corresponding standard microwave magnitude of voltage V0i, and it is calibrated thing (probe-type microwave voltage measuring system) while recording
Reading V1i, so as to obtain a certain fixed frequency under calibration curve V1i-V0i；Then, by frequency step to next calibration frequency
Point, repeat the above steps obtain the calibration curve under new Frequency point；Repeat the above steps, until covering the required frequency of calibration
Point and power level.
In sum, scheme of the present invention, based on equal pressure principle in parallel so that non-50 omega microwave voltage measuring system is read
Number can be traceable to the power parameter of 50 Ω, improve calibration accuracy so that arbitrarily non-zero impedance probe-type microwave voltage measurement
System can be calibrated, and improve the accuracy of non-50 omega microwave voltage measuring system calibration.
Obviously, the above embodiment of the present invention is only intended to clearly illustrate example of the present invention, and is not right
The restriction of embodiments of the present invention, for those of ordinary skill in the field, may be used also on the basis of the above description
To make other changes in different forms, all of embodiment cannot be exhaustive here, it is every to belong to this
Obvious change that bright technical scheme is extended out changes row still in protection scope of the present invention.
Claims (10)
1. a kind of calibrating installation for probe-type microwave voltage measuring system, the device includes microwave signal input and microwave
Signal output part, it is characterised in that the device is further included
Standard microstrip, probe negative pole tactile disk, probe cathode contact, probe cathode contact, probe locating support and reference measure
Unit；
The standard microstrip, for transmitting the microwave signal being input into by microwave signal input；
The microwave signal outfan, for exporting the microwave signal from standard microstrip；
The probe negative pole tactile disk is designed using corner cut；
The probe cathode contact, probe cathode contact and the probe locating support, for positioning to probe；
The probe is with the reference measure unit equivalent parallel in microwave signal outfan.
2. calibrating installation according to claim 1, it is characterised in that the standard microstrip, probe negative pole tactile disk, probe
Cathode contact and probe cathode contact are placed on standard microstrip circuit board, and the standard microstrip circuit board is the Wide-Band Design, is suitable for
Frequency is DC~18GHz.
3. calibrating installation according to claim 1, it is characterised in that the probe locating support is glass fibre reinforced plastic support.
4. a kind of microwave voltage measures calibration system, it is characterised in that the system includes that signal source, probe-type microwave voltage are measured
System and calibrating installation as claimed in claim 1；
The calibrating installation, for the microwave signal that collection is produced from signal source, and forms reference in microwave signal outfan
Measuring unit is in parallel with probe；
The reference measure unit, for measuring the standard microwave magnitude of voltage of the microwave signal from the microwave signal outfan
V0, as reference standard value；
The probe-type microwave voltage measuring system further includes microwave detector and data processing unit；
The microwave detector, for by with the reference measure unit equivalent parallel microwave signal outfan probe measurement
The microwave signal voltage conversion of gained is d. c. voltage signal；
The data processing unit, for measuring the magnitude of voltage V of the d. c. voltage signal of the microwave detector output1, and according to
The standard microwave magnitude of voltage V that the reference measure unit is measured0With the electricity of the d. c. voltage signal of microwave detector output
Pressure value V1, obtain the calibration curve of microwave signal.
5. microwave voltage according to claim 4 measures calibration system, it is characterised in that the probe is by the calibration
Probe locating support, probe cathode contact and probe cathode contact in device is positioned.
6. microwave voltage according to claim 4 measures calibration system, it is characterised in that the characteristic impedance of the probe
It can be any nonzero value.
7. microwave voltage according to claim 4 measures calibration system, it is characterised in that the probe-type microwave voltage is surveyed
Amount system further includes wave filter, for the High-frequency Interference letter in the d. c. voltage signal for filtering the microwave detector output
Number.
8. a kind of microwave voltage for measuring calibration system using microwave voltage as claimed in claim 4 measures calibration steps, its
It is characterised by, the method includes：
The microwave signal produced from signal source is transmitted with the calibrating installation；
The microwave signal of the microwave signal outfan from the calibrating installation is gathered with the reference measure unit, and is measured
The power or voltage of the microwave signal, as reference standard value；
It is with probe locating support, probe cathode contact and probe cathode contact that probe is equivalent simultaneously with the reference measure unit
Connection, with the probe microwave signal of the microwave signal outfan from the calibrating installation is detected；
With microwave detector by the microwave signal voltage conversion of probe measurement be d. c. voltage signal；
The reference standard value measured according to the reference measure unit and microwave detector gained d. c. voltage signal, calculate
Obtain the calibration value of the probe.
9. microwave voltage according to claim 8 measures calibration steps, it is characterised in that the probe is by the calibration
Probe locating support, probe cathode contact and probe cathode contact in device is positioned.
10. microwave voltage according to claim 8 measures calibration steps, it is characterised in that the characteristic impedance of the probe
It can be any nonzero value.
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| CN201510072783.9A CN104678339B (en) | 2014-12-30 | 2015-02-11 | Calibration device, system and method for probe type microwave voltage measurement system |
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| CN2014108408790 | 2014-12-30 | ||
| CN201510072783.9A CN104678339B (en) | 2014-12-30 | 2015-02-11 | Calibration device, system and method for probe type microwave voltage measurement system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105068031B (en) * | 2015-08-11 | 2018-07-17 | 工业和信息化部电子工业标准化研究院 | A kind of microwave probe calibration standard print |
| JP6754665B2 (en) * | 2016-10-18 | 2020-09-16 | 東京エレクトロン株式会社 | Microwave output device and plasma processing device |
| CN107219486A (en) * | 2017-05-24 | 2017-09-29 | 中国电子科技集团公司第四十研究所 | A kind of calibrating device and its calibration method tested for SAW filter |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8552742B2 (en) * | 2011-01-27 | 2013-10-08 | Yuan Ze University | Calibration method for radio frequency scattering parameter measurements |
| US20140118004A1 (en) * | 2012-10-30 | 2014-05-01 | Yuan Ze University | Measurement Structure for Radio Frequency Scattering Parameter Measurement Applying Two Calibrators and Calibration Method Thereof |
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| CN1405568A (en) * | 2002-10-19 | 2003-03-26 | 厦门大学 | Microwave automatic measuring device |
| CN1533000A (en) * | 2003-03-25 | 2004-09-29 | 中国科学院半导体研究所 | Method for measuring semiconductor laser chip frequency response |
| CN1645769A (en) * | 2005-01-24 | 2005-07-27 | 东南大学 | Microwave probe tester of integrated photodiode |
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