CN104678211B - A kind of Electrical Characteristics and breakdown characteristics real time test ＆ analysis system - Google Patents
A kind of Electrical Characteristics and breakdown characteristics real time test ＆ analysis system Download PDFInfo
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- CN104678211B CN104678211B CN201410855728.2A CN201410855728A CN104678211B CN 104678211 B CN104678211 B CN 104678211B CN 201410855728 A CN201410855728 A CN 201410855728A CN 104678211 B CN104678211 B CN 104678211B
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Abstract
The present invention relates to a kind of Electrical Characteristics and breakdown characteristics real time test ＆ analysis system, including electrical testing device, micro-image real-time acquisition device and comprehensive analysis processing device, wherein：The electrical testing device includes sample clamping seat, test probe, digital sourcemeter and testing control module, and the test probe is arranged on sample clamping seat, and the test probe, digital sourcemeter and testing control module are sequentially connected；The micro-image real-time acquisition device includes numeric data code optical microphotograph module and the image capture module being connected, and the numeric data code optical microphotograph module is arranged on sample clamping seat；The comprehensive analysis processing device difference connecting test control module, image capture module.Compared with prior art, the present invention has easily operated, and it is few to expend the time, the advantages of intuitive is good, effectively can analyze and evaluate and thin-film material puncture mechanism and causes punch through the reason for phenomenon occurs.
Description
Technical field
The present invention relates to the dielectric in materials science field or semiconductive thin film Performance Testing Technology, more particularly, to
A kind of Electrical Characteristics and breakdown characteristics real time test ＆ analysis system.
Background technology
Puncture the important component that test is thin-film semiconductor device or thin film capacitor research.But film under high field
To puncture behavior extremely complex, it is difficult to lump together.How simply and effectively to evaluate and hitting that analysed film occurs under high field
Phenomenon is worn, is the important research means for improving thin-film material Efficiency.Test and analysis to sample breakdown behavior are raisings
Its electric durability can be with reliability necessary means.
For puncturing performance testing research, conventional method is that a large amount of samples are carried out to puncture test, obtains statistical life
Predict the outcome.Film puncture or failure analysis is realized by statistical method so that the breakdown performance of research material is needed
A considerable amount of samples are wanted to be used to test.This consumes substantial amounts of time and material resources, and Efficiency is relatively low.With this simultaneously as
It is the statistic analysis result to large quantities of samples that tradition, which punctures method of testing, but breakdown process is not studied, so that
It is difficult to analyze and evaluate thin-film material puncture mechanism and cause punch through the reason for phenomenon occurs, this pole is unfavorable for thin-film material and device
The research and design of part.
The content of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide one kind is easily operated, expend
Time is few, the good Electrical Characteristics of intuitive and breakdown characteristics real time test ＆ analysis system.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of Electrical Characteristics and breakdown characteristics real time test ＆ analysis system, including electrical testing device, micro-image
Real-time acquisition device and comprehensive analysis processing device, wherein：
The electrical testing device includes sample clamping seat, test probe, digital sourcemeter and testing control module, the survey
Sound out pin to be arranged on sample clamping seat, the test probe, digital sourcemeter and testing control module are sequentially connected；
The micro-image real-time acquisition device includes numeric data code optical microphotograph module and the image capture module being connected,
The numeric data code optical microphotograph module is arranged on sample clamping seat；
The comprehensive analysis processing device difference connecting test control module, image capture module；
Testing control module control digital sourcemeter, test probe carry out electrical testing, figure to the sample on sample clamping seat
Picture acquisition module gathers micro-image data by numeric data code optical microphotograph module, and is handled, comprehensive analysis processing device
Sample electrology characteristic and breakdown characteristics are obtained according to result and shown.
Preferably, the sample clamping seat includes being used to install sample with the testboard base of test probe and for pacifying
Fill the testboard support of numeric data code optical microphotograph module.
Preferably, the digital sourcemeter is with programmable constant-current source function, programmable constant pressure source function, programmable digital
The programmable digital source table of function of multimeter.
Preferably, the testing control module includes linear potential sweep unit, circulation linear potential sweep unit, control
Test cell, control electric current timing test unit and skipping trajectories catch and punctured energy test unit during potentiometer.
Preferably, the numeric data code optical microphotograph module include collective lighting system, object lens, eyepiece, focus adjusting mechanism and
High speed high power digital camera head.
Preferably, described image acquisition module includes image capture unit, video record unit and image recognition and positioning
Unit.
Preferably, the comprehensive analysis processing device includes punch-through seizure and locating module, punctures morphology analysis mould
Block and puncture classification and its quantity statistics module.
Preferably, the punch-through catches and included with locating module：
The current impulse of real-time process is caught, the period of its generation is positioned, and then catch with analyzing the period microstructure
Change, so as to realize the sterically defined unit of punch-through；Or
Position and the period of punch-through generation are determined by image recognition, and electricity is determined using its timi requirement
Performance change, so as to realize the unit for puncturing comprehensive analysis.
Preferably, it is described puncture classification and its quantity statistics module include：
Use the unit of classification that disruptive field intensity punctures for standard implementation and statistics；
Use the unit for puncturing classification that energy and two parameters of disruptive field intensity puncture for standard implementation and statistics；
In the unit for using classification that puncture place, pattern and the size covered puncture for standard implementation and statistics
It is one or more.
Preferably, the testing control module, image capture module and comprehensive analysis processing device are arranged at a computer
In.
Compared with prior art, the invention has the advantages that：
1st, the real-time corresponding of film breakdown phenomenon and electrical properties is realized, can determine that position occurs for punch-through, puncture
Pattern and puncture energy etc. so that it is determined that what is occurred punctures type.
2nd, punch-through can be obtained in membrane electrode surface distributed collection of illustrative plates.
3rd, it can realize and different types of punch-through is classified and counted, further determining that causes sample breakdown
Main cause.
4th, the system is easily operated, and the consuming time is few, and intuitive is good, effectively can analyze and evaluate thin-film material and puncture machine
Manage and cause punch through the reason for phenomenon occurs.
5th, the system is using ripe Microbeam Analysis Techniques and electrical testing technology, reliable and stable and device systems cost compared with
It is low, it is easy to the application in sphere of learning and industrial test field.
Brief description of the drawings
Fig. 1 is structural representation of the invention；
Fig. 2 is film sample real-time testing interface schematic diagram；
Fig. 3 is film sample breakdown process and classification schematic diagram；
In Fig. 3, A- electrode edge effect induced breakdowns phenomenon, B- film defects induced breakdowns phenomenon, at C probe contact points
Extensive punch-through.
Fig. 4 is film volt-ampere curve and microstructure comprehensive analysis schematic diagram；
Fig. 5 punctures topographic data post processing schematic diagram for film；
In Fig. 5, what A, B, C, D and E represented different breakdown points respectively punctures pattern area coverage.
Embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with technical solution of the present invention
Premised on implemented, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to
Following embodiments.
A kind of Electrical Characteristics and breakdown characteristics real time test ＆ analysis system, including electrical testing device, micro-image
Real-time acquisition device and comprehensive analysis processing device, wherein, electrical testing device is used to carry out electrical testing to sample；Micrograph
The micro-image data for being used for the sample to carrying out electrical testing as real-time acquisition device are gathered and handled in real time；Total score
Analysis processing unit is used to carry out comprehensive analysis according to the micro-image data after processing and shows result.
It is the hardware architecture diagram of test analysis of the present invention as shown in Figure 1.Electrical testing device includes sample clamping seat
6th, test probe 5, digital sourcemeter 2 and testing control module, test probe 5 are arranged on sample clamping seat 6, test probe 5, number
Word source table 2 and testing control module are sequentially connected, and digital sourcemeter 2 is connected by electrical testing line 4 with test probe 5.Micrograph
As real-time acquisition device includes the numeric data code optical microphotograph module 7 being connected and image capture module, numeric data code optical microphotograph mould
Block 7 is arranged on sample clamping seat 6.Comprehensive analysis processing device difference connecting test control module, image capture module.Test
Control module, image capture module and comprehensive analysis processing device are arranged in computer 1, and computer 1 passes through data line 3
Digital sourcemeter 2 and numeric data code optical microphotograph module 7 are connected respectively.
Testing control module control digital sourcemeter 2, test probe 5 carry out electrical testing to the sample on sample clamping seat 6,
Image capture module gathers micro-image data by numeric data code optical microphotograph module 7, and is handled, comprehensive analysis processing dress
Put and sample electrology characteristic and breakdown characteristics are obtained according to result and real-time testing process is shown, as shown in Figure 2.
In electrical testing device, sample clamping seat 6 include being used for installing the testboard base 61 of sample and test probe 5 with
And the testboard support 62 for installation data code optical microphotograph module 7；Digital sourcemeter 2 be with programmable constant-current source function,
Programmable constant pressure source function, the programmable digital source table of programmable digital function of multimeter；The survey that testing control module can be carried out
Examination includes linear potential sweep, circulation linear potential sweep, the timing test of control potential, control electric current timing test and jump
Conductance catches and punctured energy test.
In micro-image real-time acquisition device, numeric data code optical microphotograph module 7 include collective lighting system, object lens, eyepiece,
Focus adjusting mechanism and high speed high power digital camera head；Image capture module includes image capture unit, video record unit and figure
As identification and positioning unit.
Comprehensive analysis processing device includes punch-through seizure and locating module, punctures morphology analysis module and puncture classification
And its quantity statistics module.
Wherein, punch-through is caught provides two methods to realize that punch-through is caught and positioning with locating module.First
Kind of method positions the period of its generation, and then catch with analyzing the period micrograph by catching the current impulse of real-time process
The change of picture, so as to realize punch-through space orientation.Another method determines the position that punch-through occurs by image recognition
Put and the period, and determine that electric property changes using its timi requirement, comprehensive analysis is punctured so as to realize.
Puncture classification and its quantity statistics module provides three kinds of basic skills and realizes to puncture and classifies and its numerical statistic.First
The method of kind uses disruptive field intensity for standard to realize the classification punctured and statistics.Second method, which is used, punctures energy and breakdown field
Strong two parameters are the classification and statistics that standard implementation punctures.The third method is using puncture place, pattern and the face covered
Product size is the classification and statistics that standard implementation punctures.These three classification results can be integrated, realize more accurately classification with
Statistics.
Above-mentioned detecting and analysing system is further illustrated with specific experiment below.
Experiment 1
As shown in figure 3, being film sample breakdown process and classification schematic diagram.Sample is in Si/SiO2/TiO2/Pt substrates
The unformed aluminum oxide films of 210nm prepared by upper use spin coating method, sample Top electrode is the thickness prepared using sputtering technology
For 100nm gold electrodes (diameter 1mm).Found in real-time process analysis, in voltage near 20V, puncturing now occurs in electrode edge
As (a-quadrant)；It is near 60V, defect induced breakdown (B regions) occur in voltage；And electrode contacted with probe place then
Near 65V, there is hard breakdown (C regions), leakage current increases suddenly, causes test can not continue and terminate.By real-time process
Punch-through and volt-ampere curve corresponding relation, be the edge effect of electrode we can determine whether puncturing for occurring in a-quadrant
Induced breakdown；And the punch-through occurred in B regions is aluminum oxide film internal flaw induced breakdown phenomenon；C regions puncture
Occur near probe and electrode contact, situation is complex.This punctures first by film internal flaw induced breakdown, leads
Causing probe, nearby electrode is destroyed, so as to occur electrode defects near probe, further induction of largely puncturing, is finally led
Cause probe be in contact with hearth electrode, circuit turn-on and terminate test.Obviously by the inventive method, quickly realize the sample and go out
Existing punctures classification.The experimental result can provide reliable basis to improve film electric durability with reliability.
Experiment 2
As shown in figure 4, being film volt-ampere curve and microstructure comprehensive analysis schematic diagram.Sample is in Si/SiO2/
The unformed aluminum oxide films of 210nm prepared on TiO2/Pt substrates using spin coating method, sample Top electrode is using vacuum evaporation
The thickness for plating film preparation is 50nm aluminium electrodes (diameter 1mm).Its real-time process can be divided into (a), (b), (c), (d) four ranks
Section.In the first phase, aluminium electrode edge is changed into light blue from white first, all regions of second stage aluminium electrode all from
White is changed into light blue.Now electric current suddenly falls to 5nA from 4 μ A.In the phase III, gradually have shallow in aluminium electrode color
Blueness is changed into navy blue.Leakage current gradually increases to 1 μ A from 5nA.Finally, near 160V, electric current increases suddenly, probe with
Punctured at aluminium electrode contact point.By XPS Analysis (XPS) to carrying out chemical valence before and after electrode color change
State is analyzed, we determined that aluminium electrode during the electrical testing there occurs anodic oxidation reactionses.In conjunction with from real-time testing
Process determines time point during electrode color change, field strength and leakage current change node.So as to this anode oxidation process
Have and more comprehensively recognize.The present invention provides important evidence for this electrochemical breakdown phenomenon.
Experiment 3
As shown in figure 5, puncturing topographic data post processing mode schematic diagram for a film sample.A, B, C, D and E are marked in figure
Represent the different area coverage of different breakdown points.According to the difference of its area, we can classify to this kind of punch-through
And statistics.This classification and statistics are conducive to we have appreciated that the defect induced breakdown of film inside different type and size.In addition
We can observe that punch-through shows that the electrode breakages after partly puncturing cause surrounding electric field uneven into continuously distributed
It is even, further puncture behavior induction of other defect.This phenomenon we can be with from microstructure change real-time process video
It is confirmed.
Claims (9)
1. a kind of Electrical Characteristics and breakdown characteristics real time test ＆ analysis system, it is characterised in that including electrical testing device,
Micro-image real-time acquisition device and comprehensive analysis processing device, wherein：
The electrical testing device includes sample clamping seat, test probe, digital sourcemeter and testing control module, and the test is visited
Pin is arranged on sample clamping seat, and the test probe, digital sourcemeter and testing control module are sequentially connected；
The micro-image real-time acquisition device includes numeric data code optical microphotograph module and the image capture module being connected, described
Numeric data code optical microphotograph module is arranged on sample clamping seat；
The comprehensive analysis processing device difference connecting test control module, image capture module；
Testing control module control digital sourcemeter, test probe carry out electrical testing to the sample on sample clamping seat, and image is adopted
Collect module and micro-image data gathered by numeric data code optical microphotograph module, and handled, comprehensive analysis processing device according to
Result obtains sample electrology characteristic and breakdown characteristics and shown；
The comprehensive analysis processing device includes punch-through seizure and locating module, punctures morphology analysis module and puncture classification
And its quantity statistics module.
2. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In the sample clamping seat includes being used to install sample with the testboard base of test probe and for installation data code optics
The testboard support of micro- module.
3. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In the digital sourcemeter is with programmable constant-current source function, programmable constant pressure source function, programmable digital function of multimeter
Programmable digital source table.
4. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In the testing control module includes linear potential sweep unit, circulation linear potential sweep unit, control potential timing test
Unit, control electric current timing test unit and skipping trajectories catch and punctured energy test unit.
5. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In it is digital that the numeric data code optical microphotograph module includes collective lighting system, object lens, eyepiece, focus adjusting mechanism and high speed high power
Camera.
6. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In described image acquisition module includes image capture unit, video record unit and image recognition and positioning unit.
7. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In the punch-through is caught to be included with locating module：
The current impulse of real-time process is caught, the period of its generation is positioned, and then caught with analyzing period microstructure change,
So as to realize the sterically defined unit of punch-through；Or
Position and the period of punch-through generation are determined by image recognition, and electric property is determined using its timi requirement
Change, so as to realize the unit for puncturing comprehensive analysis.
8. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In, it is described puncture classification and its quantity statistics module include：
Use the unit of classification that disruptive field intensity punctures for standard implementation and statistics；
Use the unit for puncturing classification that energy and two parameters of disruptive field intensity puncture for standard implementation and statistics；
Use one in the unit of classification that puncture place, pattern and the size covered puncture for standard implementation and statistics
It is individual or multiple.
9. a kind of Electrical Characteristics according to claim 1 and breakdown characteristics real time test ＆ analysis system, its feature exist
In the testing control module, image capture module and comprehensive analysis processing device are arranged in a computer.
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| CN106093753B (en) * | 2016-07-27 | 2019-01-01 | 嘉兴学院 | A kind of device detecting flexible electronic device electric conductivity |
| WO2019027521A1 (en) * | 2017-07-31 | 2019-02-07 | Dow Global Technologies Llc | Device for analyzing impact and puncture resistance |
| CN107505525B (en) * | 2017-09-12 | 2020-10-20 | 浙江大学 | Reliability on-line monitoring system |
| CN107677726B (en) * | 2017-09-29 | 2021-05-04 | 佛山科学技术学院 | Real-time capturing and analyzing method for film breakdown phenomenon |
| CN109142059B (en) * | 2018-09-06 | 2024-01-30 | 金华职业技术学院 | Method for measuring electrical properties of film sample |
| CN109541429A (en) * | 2018-12-28 | 2019-03-29 | 佛山科学技术学院 | A kind of photo-thermal electricity THM coupling device testing apparatus |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1808154A (en) * | 2005-06-23 | 2006-07-26 | 中国科学技术大学 | Method and apparatus for measuring material piezoelectric coefficient by using scanning near-field microwave microscopy |
| CN202029036U (en) * | 2011-02-25 | 2011-11-09 | 上海理工大学 | Feature monitoring device used for grinding wheel dressing |
| CN202083773U (en) * | 2011-01-18 | 2011-12-21 | 上海理工大学 | Semiconductor parameter testing system |
| CN103278386A (en) * | 2013-05-22 | 2013-09-04 | 天津大学 | Measurement system for thin-film material tension-compression fatigue dynamic loading |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3562070B2 (en) * | 1995-11-14 | 2004-09-08 | 凸版印刷株式会社 | Thin film strength evaluation device |
-
2014
- 2014-12-30 CN CN201410855728.2A patent/CN104678211B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1808154A (en) * | 2005-06-23 | 2006-07-26 | 中国科学技术大学 | Method and apparatus for measuring material piezoelectric coefficient by using scanning near-field microwave microscopy |
| CN202083773U (en) * | 2011-01-18 | 2011-12-21 | 上海理工大学 | Semiconductor parameter testing system |
| CN202029036U (en) * | 2011-02-25 | 2011-11-09 | 上海理工大学 | Feature monitoring device used for grinding wheel dressing |
| CN103278386A (en) * | 2013-05-22 | 2013-09-04 | 天津大学 | Measurement system for thin-film material tension-compression fatigue dynamic loading |
Non-Patent Citations (1)
| Title |
|---|
| 薄膜电容器特性研究;徐静江;《浙江大学学报（自然科学版）》;19920131;第26卷(第1期);第69-75页 * |
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