CN104668675A - Electrode with micro-conical tower array end surface and processing method and application thereof - Google Patents
Electrode with micro-conical tower array end surface and processing method and application thereof Download PDFInfo
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- CN104668675A CN104668675A CN201510098996.9A CN201510098996A CN104668675A CN 104668675 A CN104668675 A CN 104668675A CN 201510098996 A CN201510098996 A CN 201510098996A CN 104668675 A CN104668675 A CN 104668675A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/04—Electrodes specially adapted therefor or their manufacture
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/04—Electrical discharge machining combined with mechanical working
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Abstract
The invention discloses an electrode with a micro-conical tower array end surface and a processing method and an application thereof. The electrode comprises an electrode end head and an air distributing guide rod, wherein the electrode end head is mutually connected with the air distributing guide rod; a micro-conical tower array is processed on the discharging end surface of the electrode end head; a plurality of micro-conical towers are sequentially, transversely and longitudinally connected into rows on a plane of the electrode end surface; each micro-conical tower is of a micro-conical structure; the bottom parts of V-shaped grooves are connected by a transition circular arc with the radius of 1 to 5micrometer; air ventilating holes are uniformly distributed in the bottom part of each micro-conical tower; the middle part of the air distributing guide rod is provided with a guide rod cavity, and the guide rod cavity is communicated with the air ventilating holes. The electrode has the advantages that when the electrode is continuously fed to a workpiece, the tip end of each micro-conical tower in the array structure can generate electric spark erosion, and finally a micro structure is processed on the surface of the workpiece by the tip end of each conical tower; a plurality of micro structures can be formed by one-time processing; the processing efficiency is greatly improved; the processing time is greatly shortened; the processing cost is reduced, and the electrode is suitable for batch production.
Description
Technical field
The present invention relates to a kind of spark erosion technique, be specifically related to a kind of there is micro-cone tower array end face electrode and processing method and application; This application is that the air pulse of this electrode of application assists the microarray discharge-treating method of heat build-up chip removal, belongs to the special process field in machining.
Technical background
New functional characteristic can be produced owing to processing micro-structural at surface of the work, as optical property, wettability, frictional behaviour, heat dispersion etc., can improve the performance of work system, these workpiece with specific function generally adopt the method such as mold injection, punching press to process.The processing method mainly lithography that this type of die surface micro-structural is conventional at present.Lithography is divided into dry etching and wet etching.Although wet etching processing cost is low, equipment is simple, and it is poor that controlling that is serious, figure carved by this processing method brill, and can produce a large amount of chemical waste fluids; Although adopt dry etching not have chemical waste fluid to produce, easily realize automation processing, its processing cost is high, and equipment is complicated.
Summary of the invention
The object of the invention is the determination overcoming prior art, the electrode with micro-cone tower array end face providing working (machining) efficiency high and processing method thereof.
Another object of the present invention is to provide a kind of air pulse applying above-mentioned electrode to assist the microarray discharge-treating method of heat build-up chip removal, improve working (machining) efficiency, reduce costs, and cleanliness without any pollution.
First the present invention processes micro-cone tower array structure on electrode end surface, uses electric spark electric discharge machining in gas principle, makes the micro-cone tower structure on electrode end surface and surface of the work produce electric spark electric discharge machining in gas, form micro-structural on the surface of the workpiece; Electric discharge simultaneously in addition direct impulse air-flow can assist heat build-up, the heat produced to make spark discharge is more concentrated, and one time electric discharge removal workpiece material is more.The back draught passed into after pulsatile once electric discharge terminates can assist chip removal, and the chip that electric discharge produces is discharged sooner, and the electric discharge of succeeding impulse can be made more easily to carry out, and improves efficiency and the machined surface quality of electric discharge processing.
The method electrode used therein end face micro-conic tower type looks are small pyramidal structure, and cone tower angle is 45 ~ 60 degree, and be highly 5 ~ 100 microns, spacing is 5 ~ 100 microns.Hole diameter 50 μm of >d>2 μm, passage is uniformly distributed between micro-cone tower.The ventilatory frequency of the air pulse used is identical with micro discharge pulse power frequency, but air-flow pulse ratio power pulse shifts to an earlier date 0.5 ~ 1 microsecond.Within a spark discharge cycle, when electrode and surface of the work generation spark discharge, when electrode and surface of the work generation spark discharge, the air pulse passed into is forward, and after pulsatile once electric discharge terminates, now air pulse is reverse.
The object of the invention is achieved through the following technical solutions:
There is an electrode for micro-cone tower array end face, comprise interconnective electrode tip and distribution guide post; The electric discharge end face of described electrode tip is processed micro-cone tower array, multiple micro-cone tower in a row connects successively in length and breadth in the plane of electrode tip; Wherein micro-cone tower is small pyramidal structure, and cone tower angle is 45 ~ 90 degree, and be highly 5 ~ 200 microns, spacing is 5 ~ 200 microns; Form vee-cut structure between micro-cone tower, the transition arc being 1 ~ 5 micron by radius bottom vee-cut connects; Passage is uniform-distribution with between the bottom of micro-cone tower; Be provided with guide post cavity in the middle part of distribution guide post, guide post cavity is communicated with passage.
Preferably, described passage is cylindrical, and the diameter of passage is 2 ~ 500 microns.
Described electrode tip is connected by draw-in groove with distribution guide post.
The material of described electrode tip is red copper, brass or red metal.
Described electric discharge end face is of a size of 2 ~ 50mm × 2 ~ 50mm.
The described processing method with the electrode of micro-cone tower array end face: adopt the most advanced and sophisticated skive of High Rotation Speed V-arrangement, electric discharge end face moves under cooling fluid cooling along cutter path, each feeding depth is 1 ~ 3 micron, process vee-cut array gradually, process vee-cut array combination two orthogonal directions and form micro-cone tower array; Wherein boart boart wheel speed is 2000 ~ 3000 revs/min, and feed speed is 0.1 ~ 0.2 m/min, uses water cooling; Tool track is the vertical or horizontal reciprocating folding type line going up the micro-cone tower in interval and transition arc width sum respectively of electrode tip.
The air pulse described in application with the electrode of micro-cone tower array end face assists the microarray discharge-treating method of heat build-up chip removal: electrode is to the feeding of workpiece direction, electrode is made up of electrode tip and distribution guide post, the guide post cavity of guide post is communicated with passage, micro-cone pinnacle of a pagoda end of micro-cone tower array of electrode tip processing produces spark eroding, along with electrode is constantly to workpiece feeding, each micro-cone pinnacle of a pagoda end will produce spark eroding, when carrying out micro discharge, the passage to electrode passes into air pulse; Open-circuit voltage 2 ~ the 50V of described micro discharge pulse power frequency; The ventilatory frequency of described air pulse and the frequency of micro discharge pulse power frequency are all 300 ~ 1000Hz, air pulse shifts to an earlier date 0.5 ?1 microsecond than the power pulse of the micro discharge pulse power, and when making each spark discharge, air pulse can reaching on the time discharge tip; Finally process micro structure array at surface of the work.
Preferably, described cooling fluid is water.
The present invention compared with prior art tool has the following advantages:
(1) on electrode discharge end face, micro-cone tower array is processed, along with there is the electrode of micro-cone tower array constantly to workpiece feeding, each micro-cone pinnacle of a pagoda end of array structure will produce spark eroding, therefore can form multiple micro-structural in time processing stroke, substantially increase working (machining) efficiency.
(2) during application, micro discharge processing method passes into the electric discharge machining method that air is used as a kind of electric discharge machining in gas of discharge medium, without the need to working solution, do not have chemical waste fluid to produce, and the discharge of decreasing pollution thing is a kind of processing method of environmental type.
(3) adopt array structure micro discharge in gas, compared with traditional etching surface method for processing microstructure, can size be processed less, shape and the higher micro-structural of positional precision.
(4) under air pulse assists heat build-up, make micro-cone pinnacle of a pagoda end spark discharge more concentrated, temperature is more concentrated, and explosive force is stronger, and one time electric discharge removal workpiece material is more, and working (machining) efficiency is higher.
(5) chip that electric discharge can produce by the reverse impulse air-flow passed into is discharged, thus accelerates chip removal, improves working (machining) efficiency and machined surface quality.
Accompanying drawing explanation
Fig. 1 is micro-cone tower array machining sketch chart of the electrode end surface with micro-cone tower array end face.
Fig. 2 is that air pulse assists heat build-up micro discharge machining sketch chart.
Fig. 3 is that air pulse assists heat build-up micro discharge to process partial schematic diagram.
Fig. 4 is that air pulse assists chip removal partial schematic diagram.
Fig. 5 is embodiment 1 red copper electrode tip used scanning electron microscope (SEM) photograph.
Fig. 6 is that embodiment 1 electrode is at aluminum-base silicon carbide material surface processing effect figure.
Fig. 7 is that embodiment 2 electrode is at titanium alloy cylindrical piece end face processing effect figure.
Fig. 8 is that embodiment 3 electrode is at mould steel finishes figure.
Detailed description of the invention
For better understanding the present invention, below in conjunction with drawings and Examples, the present invention is described further, but the scope of protection of present invention is not limited to the scope of embodiment statement.
Traditional electric discharging machining electrode end face is plane.The present invention is the end face that processing has micro-cone tower array on electrode end surface.As shown in Figure 1, electrode tip 1 discharges on end face and processes micro-cone tower array 2, and multiple micro-cone tower 2 in a row distributes successively in length and breadth in eletrode tip plane; Wherein micro-cone tower 2 pattern is small pyramidal structure, and cone tower angle is 45 ~ 90 degree, and be highly 5 ~ 200 microns, spacing is 5 ~ 200 microns; Form vee-cut structure between micro-cone tower 2, the transition arc 5 being 1 ~ 5 micron by radius bottom vee-cut connects, and can reduce poly-electricity bottom vee-cut like this, strengthen micro-cone pinnacle of a pagoda end 4 discharge effect.Be uniform-distribution with passage 3 between micro-cone tower 2, passage 3 is preferably cylindrical, and the diameter d of passage is preferably 2 ~ 500 microns.
It is the processing method of the electrode spark discharge with micro-cone tower array end face shown in Fig. 1, its processing method is: adopt the most advanced and sophisticated skive 6 of High Rotation Speed V-arrangement, electrode end surface moves along cutter path 7, each feeding depth a is 1 ~ 3 micron, process vee-cut array gradually, process vee-cut array combination two orthogonal directions and form micro-cone tower array 2; Wherein skive 6 rotating speed is 2000 ~ 3000 revs/min, and feed speed is 0.1 ~ 0.2 m/min, uses water cooling; Tool track 7 is the vertical or horizontal reciprocating folding type line going up the micro-cone tower 2 in interval and transition arc 5 width sum respectively of electrode tip 1.
As shown in Figure 2, the electrode with micro-cone tower array end face comprises electrode tip 1 and distribution guide post 10, by draw-in groove, two parts is connected, when electrode needs only need change electrode tip 1 part when changing, and do not need to change whole electrode, thus cut down finished cost.Guide post cavity 11 is provided with in the middle part of distribution guide post 10, guide post cavity 11 is communicated with passage 5, carrying out electrical spark working man-hour, air pump passes into air pulse by the guide post cavity 11 of the guide post 10 in Fig. 2, the ventilatory frequency of the air pulse 8 used is identical with micro discharge pulse power frequency (frequency is 300 ~ 1000Hz/s), air-flow pulse ratio power pulse shifts to an earlier date 0.5 ~ 1 microsecond, and when each spark discharge, air pulse 8 can reaching on the time discharge tip.
As shown in Figure 3, when air pulse 8 is forward, it is more concentrated under air pulse assists heat build-up to there is the electric spark 9 instantaneous generation high temperature that discharges in micro-cone pinnacle of a pagoda end on electrode tip 14 and workpiece 12 surface, reach the effect of auxiliary heat build-up, make explosive force stronger, spark discharge is more concentrated, and single step of releasing galvano-cautery workpiece material is more.
As shown in Figure 4, when air pulse 8 is reverse, reverse air pulse 8 can assist chip removal, and the chip that electric discharge produces is discharged sooner, and the electric discharge of succeeding impulse can be made more easily to carry out, and improves efficiency and the machined surface quality of electric discharge processing.
Embodiment 1
At the upper fine diamond emery wheel 6 adopting diameter 150 millimeters of CNC precision machine tool (SMRART B818), the granularity of skive is 3000 orders, bonding agent is resin, concentration is 100%, skive V-arrangement tip angle is 60 degree, Digit Control Machine Tool drives the most advanced and sophisticated cutter path 7 along square crossing on red copper electrode end surface 1 of the V-arrangement of skive 6 to move by the direction of arrow indication, and each feeding depth a of emery wheel is 1 micron, feed speed v
f=0.05m/min, grinding wheel speed N=2000r/min, adopt water as cooling fluid, finally to process on 2mm × 2mm rectangle red copper electrode end surface be highly 578 microns, drift angle is 60 degree, the cone tower array manifold structure of spacing 667 microns.
The present embodiment electrode used therein is made up of electrode tip (Fig. 5) and distribution guide post two parts.The material of electrode tip is red copper, the hollow and thin-walled structure of long 2mm, wide 2mm, thick 4mm, wall thickness 0.5mm.The electric discharge end face of electrode tip is processed with micro-cone tower array structure, micro-cone tower height degree is 578 microns, drift angle is 60 degree, the spacing of adjacent two micro-cone towers is 667 microns, and quantity is 9.Every four adjacent micro-cone tower junctions are processed with a passage, and passage is cylinder straight hole, and diameter is 100 microns, and quantity is 4.Distribution guide post and electrode tip link together, and the shape of distribution guide post is cylindrical copper tube, and external diameter is 1mm, internal diameter is 0.3mm.
End face is processed with the red copper electrode clamping of micro-cone tower array structure on precision EDM machine (HAN SPARK Precision EDM forming machine), working solution is kerosene.Spark-erosion machine tool used needs setting voltage, electric current, power pulse frequency and feeding depth, and current settings is 1A, and voltage sets is 130V, and working depth is set as 50 microns.Supply frequency is set as 300Hz, and air-flow pulse is identical with power pulse frequency, but air-flow pulse ratio power pulse shifts to an earlier date 1 microsecond, makes the air pulse when each spark discharge can arrive discharge tip in advance.Within a spark discharge cycle, when electrode and surface of the work generation spark discharge, the air pulse passed into is forward, and after pulsatile once electric discharge terminates, now air pulse becomes oppositely.
The workpiece of the present embodiment processing is long 5 millimeters, wide 5 millimeters, thick 4 millimeters aluminum-base silicon carbide lumps.Finally go out 9 micro-holes in aluminum-base silicon carbide caking Surface Machining.As the shape appearance figure that Fig. 6 is a micro-hole in 9 microarraies hole of processing of the surface of the work taken by field emission scanning electron microscope, as can be seen from Figure 6, discharge micro-hole of processing is inverted pyramid shape, and the micro-conic tower type shape on the pattern in micro-hole and sparking electrode end face is substantially identical.The opening in micro-hole is square, and long and is widely all 0.4 millimeter, dark 0.3 millimeter.Aluminum-base silicon carbide composite, as a kind of new structural material, has excellent heat conductivility, can be used as the radiating module of electronic component, at its Surface Machining micro array structure, can increase area of dissipation, thus strengthen its heat dispersion.
Embodiment 2
The present embodiment electrode used therein is made up of electrode tip (Fig. 5) and distribution guide post two parts.The material of electrode tip is red copper, the hollow and thin-walled structure of long 2mm, wide 2mm, thick 4mm, wall thickness 0.5mm.The electric discharge end face of electrode tip is processed with micro-cone tower array structure, the two sides angle that micro-cone tower height degree is 428 microns, cone tower is relative is 60 degree, and cone top of tower is circular arc, and radius is 150 microns; The spacing of adjacent two micro-cone towers is 667 microns, and quantity is 9.Every four adjacent micro-cone tower junctions are processed with a passage, and passage is cylinder straight hole, and diameter is 100 microns, and quantity is 4.Distribution guide post and electrode tip link together, and the shape of distribution guide post is cylindrical copper tube, and external diameter is 1mm, internal diameter is 0.3mm.
By electrode clamping on precision EDM machine (HAN SPARK Precision EDM forming machine), working solution is kerosene.Spark-erosion machine tool used needs setting voltage, electric current, power pulse frequency and feeding depth, and current settings is 1A, and voltage sets is 80V, and working depth is set as 300 microns.Supply frequency is set as 300Hz, and air-flow pulse is identical with power pulse frequency, but air-flow pulse ratio power pulse shifts to an earlier date 1 microsecond, makes the air pulse when each spark discharge can arrive discharge tip in advance.Within a spark discharge cycle, when electrode and surface of the work generation spark discharge, the air pulse passed into is forward, and after pulsatile once electric discharge terminates, now air pulse becomes oppositely.
The workpiece of the present embodiment processing is diameter 50 millimeters, the titanium alloy cylindrical piece of thick 8 millimeters.Titanium alloy cylindrical piece two end faces were processed into minute surface before electric discharge processing, were illustrated in figure 7 the processing effect figure clapped under amplifying 80 times of conditions by field emission scanning electron microscope.Titanium alloy surface is processed as can be seen from Figure 79 microarraies hole, the opening in micro-hole is square, and long and is widely all 500 microns, and the overall pattern in micro-hole is inverted pyramid shape.In micro-hole of inverted pyramid turriform shape and the shape of electrode end surface micro-structural substantially identical.It is high that titanium alloy has intensity, corrosion-resistant, the excellent performance such as heat-resisting, often be used to manufacture aviation body etc., micro array structure is gone out in its Surface Machining, the contact area of radar wave and body surface can be increased, thus increase the ability of body surface absorbing radar wave, and then improve the stealthy performance of spacecraft.
Embodiment 3
The workpiece material that the present embodiment 3 is processed is Datong District S-STAR minute surface injection mold steel, is of a size of long 50 millimeters, wide 50 millimeters, thick 8 millimeters.Processing method of the present invention is utilized to go out micro array structure to make the core rod of injection mold in mould steel Surface Machining.The core rod with micro array structure may be used for producing low-light electric parts, such as has the lampshade of specific light efficiency, Lamp cup and high performance light guide plate etc.The material of the electrode tip that the present embodiment uses is red copper, the hollow and thin-walled structure of long 2mm, wide 2mm, thick 4mm, wall thickness 0.5mm.The electric discharge end face of electrode tip is processed with micro-cone tower array structure, the two sides angle that micro-cone tower height degree is 378 microns, cone tower is relative is 60 degree, and cone top of tower is circular arc, and radius is 200 microns; The spacing of adjacent two micro-cone towers is 667 microns, and quantity is 9.Every four adjacent micro-cone tower junctions are processed with a passage, and passage is cylinder straight hole, and diameter is 100 microns, and quantity is 4.Distribution guide post and electrode tip link together, and the shape of distribution guide post is cylindrical copper tube, and external diameter is 1mm, internal diameter is 0.3mm.
End face is processed with the red copper electrode clamping of micro-cone tower array structure on precision EDM machine (HAN SPARK Precision EDM forming machine), working solution is kerosene.Spark-erosion machine tool used needs setting voltage, electric current, power pulse frequency and feeding depth, and current settings is 1A, and voltage sets is 130V, and working depth is set as 50 microns.Supply frequency is set as 300Hz, and air-flow pulse is identical with power pulse frequency, but air-flow pulse ratio power pulse shifts to an earlier date 1 microsecond, makes the air pulse when each spark discharge can arrive discharge tip in advance.Within a spark discharge cycle, when electrode and surface of the work generation spark discharge, the air pulse passed into is forward, and after pulsatile once electric discharge terminates, now air pulse becomes oppositely.
Fig. 8 is that the workpiece of the present embodiment processing amplifies 80 times of images clapped by field emission scanning electron microscope, mould steel surface is processed as can be seen from Figure 8, and 9 microarraies are cheated, the opening in micro-hole is square, long and be widely all 600 microns, the overall pattern in micro-hole is inverted pyramid shape, and arc transition is arranged at the bottom in micro-hole.
The present embodiment uses the used electrode of embodiment 1, object is micro-hole in order to go out bottom in mould steel Surface Machining with arc transition, because the tip of electrode can produce loss in discharge process, so used eletrode tip can form circular arc (as Fig. 5).The easier demoulding when injection moulding low-light electric parts when there is bottom the micro array structure of core surface arc transition.
Claims (8)
1. there is an electrode for micro-cone tower array end face, it is characterized in that, comprise interconnective electrode tip and distribution guide post; The electric discharge end face of described electrode tip is processed micro-cone tower array, multiple micro-cone tower in a row connects successively in length and breadth in the plane of electrode tip; Wherein micro-cone tower is small pyramidal structure, and cone tower angle is 45 ~ 90 degree, and be highly 5 ~ 200 microns, spacing is 5 ~ 200 microns; Form vee-cut structure between micro-cone tower, the transition arc being 1 ~ 5 micron by radius bottom vee-cut connects; Passage is uniformly distributed between the bottom of micro-cone tower; Be provided with guide post cavity in the middle part of distribution guide post, guide post cavity is communicated with passage.
2. the electrode with micro-cone tower array end face according to claim 1, it is characterized in that, described passage is cylindrical, and the diameter of passage is 2 ~ 500 microns.
3. the electrode with micro-cone tower array end face according to claim 1, it is characterized in that, described electrode tip is connected by draw-in groove with distribution guide post.
4. the electrode with micro-cone tower array end face according to claim 1, is characterized in that: the material of described electrode tip is red copper, brass or red metal.
5. the electrode with micro-cone tower array end face according to claim 1, is characterized in that: described electric discharge end face is of a size of 2 ~ 50mm × 2 ~ 50mm.
6. there is described in claim 1 processing method of the electrode of micro-cone tower array end face, it is characterized in that, adopt the most advanced and sophisticated skive of High Rotation Speed V-arrangement, electric discharge end face moves under cooling fluid cooling along cutter path, each feeding depth is 1 ~ 3 micron, process vee-cut array gradually, process vee-cut array combination two orthogonal directions and form micro-cone tower array; Wherein boart boart wheel speed is 2000 ~ 3000 revs/min, and feed speed is 0.1 ~ 0.2 m/min, uses water cooling; Tool track is the vertical or horizontal reciprocating folding type line going up the micro-cone tower in interval and transition arc width sum respectively of electrode tip.
7. application rights requires that the air pulse described in 1 with the electrode of micro-cone tower array end face assists the microarray discharge-treating method of heat build-up chip removal, it is characterized in that: electrode is to the feeding of workpiece direction, electrode is made up of electrode tip and distribution guide post, the guide post cavity of guide post is communicated with passage, micro-cone pinnacle of a pagoda end of micro-cone tower array of electrode tip processing produces spark eroding, along with electrode is constantly to workpiece feeding, each micro-cone pinnacle of a pagoda end will produce spark eroding, when carrying out micro discharge, the passage to electrode passes into air pulse; Open-circuit voltage 2 ~ the 50V of described micro discharge pulse power frequency; The ventilatory frequency of described air pulse and the frequency of micro discharge pulse power frequency are all 300 ~ 1000Hz, air pulse shifts to an earlier date 0.5 ?1 microsecond than the power pulse of the micro discharge pulse power, and when making each spark discharge, air pulse can reaching on the time discharge tip; Finally process micro structure array at surface of the work.
8. air pulse according to claim 7 assists the microarray discharge-treating method of heat build-up chip removal, it is characterized in that: described cooling fluid is water.
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| CN108394035A (en) * | 2018-01-30 | 2018-08-14 | 华南理工大学 | A kind of titanium silicon carbide ceramics structure and preparation method thereof with hydrophobic micro-structure |
| CN108726473A (en) * | 2018-05-24 | 2018-11-02 | 山东理工大学 | A kind of processing method of surface micro-structure array |
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