CN104665874A - Ultrasonic detector and manufacturing method thereof - Google Patents
Ultrasonic detector and manufacturing method thereof Download PDFInfo
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- CN104665874A CN104665874A CN201510077410.0A CN201510077410A CN104665874A CN 104665874 A CN104665874 A CN 104665874A CN 201510077410 A CN201510077410 A CN 201510077410A CN 104665874 A CN104665874 A CN 104665874A
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- array type
- pzt
- piezoelectric ceramics
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
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- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention relates to an ultrasonic detector and a manufacturing method thereof. The ultrasonic detector comprises an array type piezoceramic probe, a damper, a relay and a UHF (ultra-high frequency) connector, wherein the upper layer of the UHF connector is provided with the array type piezoceramic probe, the middle of the UHF connector is provided with the damper, the lower layer is provided with a relay plate, the array type piezoceramic probe consists of 4*6 array PZT (piezoceramic transducer) square three-dimensional posts, a position between the PZT square three-dimensional posts is filled with liquid resin to form into a whole, and then is used for reducing vibration and noise, the directivity of the detector is improved, and the detection sensitivity is improved. The ultrasonic detector has the advantages that the structure is simple, the service life is long, the directivity of the detector can be improved, and the detection sensitivity of the detector is improved.
Description
Technical field
The present invention relates to a kind of ultrasonic detector, particularly relate to a kind of PZT ultrasonic detector and preparation method thereof.
Background technology
In recent years, along with the development of the new and high technologies such as ultrasonic sensing technology, micro-electromechanical technology, computer technology, medical ultrasonic technology obtains development and raising, for clinical diagnosis provides more Human Physiology and pathological change information.And in gynecological clinic work, due to ultrasonic diagnostic technique comparatively other technologies there is obvious advantage, be therefore widely used in gynaecopathia and embryo growth and development observation and diagnosis in.Through finding the literature search of prior art, " instrument and meter user ", 12nd volume fifth phase 25-26 page in 2005, Yin Jiaxi, Kang Yong, remaining honey etc. disclose a kind of design of omnidirectional ultrasonic scanning device, this technology adopts motor to drive ultrasonic sensor to scan barrier, and concise and to the point introduction has been carried out to the operation principle of ultrasonic sensor, namely the inverse piezoelectric effect of piezoelectric ceramics is adopted, piezoelectric ceramics is applied to the alternating voltage of certain frequency, thus make piezoelectric ceramics produce ultrasound wave.But this omnidirectional ultrasonic scanning device vibrates, reduce noise large, the directivity of detector is poor, and detectivity is lower.
Summary of the invention
The object of the present invention is to provide simple PZT ultrasonic detector of a kind of structure and preparation method thereof, this wave detector adopts and insert liquid resin in array type PZT detector, and make it solidify, thus reduce the vibration in unnecessary direction, reduce noise, improve the directivity of detector, improve detectivity.
The present invention is achieved by the following technical solutions:
A kind of ultrasonic detector, comprise array type piezoelectric ceramics probe, antivibrator, repeater, UHF adapter, UHF adapter is provided with array type piezoelectric ceramics probe, centre is equipped with antivibrator, under be provided with relay plate, it is characterized in that: described array type piezoelectric ceramics probe is made up of the PZT square dimensional column of 4 × 6 arrays, insert liquid resin between PZT square dimensional column and form one after solidification,, noise dynamic for vibration damping, improves the directivity of detector, improves detectivity.
Described PZT rectangle dimensional column is of a size of 50 μm × 50 μm × 70 μm.
Described array type piezoelectric ceramics probe surfaces externally and internally is stained with 1 μm of thick surface electrode film, surface electrode film adheres to respectively 5 μm of thick interior, table electrode native silver lead-out wires.
A kind of manufacture method of array type piezoelectric ceramics probe of ultrasonic detector, first with the cutting machine of cutting silicon wafer, PZT substrate is cut into the PZT rectangle dimensional column of 4 × 6 arrays, each pillar is of a size of 50 μm × 50 μm × 70 μm, insert liquid resin wherein again, then put it in 80 DEG C of baking ovens and toast half an hour, make it solidify.
The present invention has following beneficial effect compared to existing technology:
Structure of the present invention is simple, and long service life, can improve the directivity of detector, improves its detectivity.
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiments of the invention;
Fig. 2 is the preparation method schematic diagram of PZT probe;
Fig. 3 is PZT probe lead wire connection layout.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the invention are elaborated.
As shown in Figure 1, a kind of ultrasonic detector, comprising: array type piezoelectric ceramics probe 1, antivibrator 2, relay plate 3 and UHF adapter 4, and wherein: UHF adapter 4 external diameter is 16mm, length is 50mm; Array type piezoelectric ceramics probe 1 is placed in the superiors, and antivibrator 2 is in centre, and relay plate 3 is in lower floor, and above-mentioned three parts are placed in UHF adapter 4; Array type piezoelectric ceramics 1 top and bottom of popping one's head in are drawn by wire.
As shown in Figure 2, the manufacturing process of array type piezoelectric ceramics probe 1 is as follows: utilize the cutting machine of cutting silicon wafer 100 μm of thick PZT(piezoelectric ceramics) substrate is cut into the PZT square dimensional column 7 of 4 × 6 arrays, each pillar is of a size of 50 × 50 × 70 μm, insert liquid resin 8 wherein again, and to put it in 80 DEG C of baking ovens baking half an hour, make it solidify, form the structure shown in Fig. 2.
As shown in Figure 3, the present embodiment comprises: interior electrode native silver lead-out wire 5, array type piezoelectric ceramics probe 1, table electrode native silver lead-out wire 6 and surface electrode film 9, wherein: the surface electrode film 9 of thick 1 μm sticks to a gust surfaces externally and internally for array type piezoelectric ceramics probe 1, then with 5 μm thick interior, show electrode native silver lead-out wire 5,6 and stick to respectively on surface electrode film 9.Alternating voltage can be added on array type piezoelectric ceramics probe 1 by interior, table electrode native silver lead-out wire 5,6 and surface electrode film 9.
Operation principle of the present invention is as follows: the present invention adopts the inverse piezoelectric effect of piezoelectric ceramics to design, when namely applying the alternating voltage that size and Orientation constantly changes on piezoelectric ceramics, piezoelectric ceramics can produce mechanically deform, and the size and Orientation of this mechanically deform is directly proportional to the size and Orientation of the voltage applied thereon.The present invention applies given frequency f by the plain conductor at array type piezoelectric ceramics probe two ends to array type piezoelectric ceramics
0with the alternating voltage of size U, piezoelectric ceramics array produces same frequency and mechanical vibration corresponding to voltage swing, and this vibration promotes air dielectric, and directed outwards sends ultrasound wave.Antivibrator under array type piezoelectric ceramics probe can play cushioning effect to the vibration of piezoelectric ceramics on non-detection direction.Insert resin in array type PZT detector, the vibration in unnecessary direction can be reduced, reduce noise, improve the directivity of detector.
Claims (4)
1. a ultrasonic detector, comprise array type piezoelectric ceramics probe (1), antivibrator (2), repeater (3), UHF adapter (4), UHF adapter (4) is provided with array type piezoelectric ceramics probe (1), centre is equipped with antivibrator (2), under be provided with relay plate (3), it is characterized in that: described array type piezoelectric ceramics probe (1) is made up of the PZT rectangle dimensional column (7) of 4 × 6 arrays, insert liquid resin (8) between PZT rectangle dimensional column (7) and form one after solidification, move for vibration damping, noise, improve the directivity of detector, improve detectivity.
2. ultrasonic detector according to claim 1, is characterized in that: described PZT square dimensional column (7) is of a size of 50 μm × 50 μm × 70 μm.
3. ultrasonic detector according to claim 1, it is characterized in that: described array type piezoelectric ceramics probe (1) surfaces externally and internally is stained with 1 μm of thick surface electrode film (9), surface electrode film (9) adheres to respectively 5 μm of thick interior, tables pole native silver electrode outlet line (5,6).
4. the manufacture method of the array type piezoelectric ceramics probe of the ultrasonic detector described in an any one of claim 1-3, it is characterized in that: the PZT rectangle dimensional column (7) first with the cutting machine of cutting silicon wafer, PZT substrate being cut into 4 × 6 arrays, each pillar (7) is of a size of 50 μm × 50 μm × 70 μm, insert liquid resin (8) more wherein, then put it in 80 DEG C of baking ovens and toast half an hour, make it solidify.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510077410.0A CN104665874A (en) | 2015-02-13 | 2015-02-13 | Ultrasonic detector and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510077410.0A CN104665874A (en) | 2015-02-13 | 2015-02-13 | Ultrasonic detector and manufacturing method thereof |
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| CN104665874A true CN104665874A (en) | 2015-06-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201510077410.0A Pending CN104665874A (en) | 2015-02-13 | 2015-02-13 | Ultrasonic detector and manufacturing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535696A (en) * | 2018-04-18 | 2018-09-14 | 彭浩 | Proton bragg peak tuning on-line method and monitoring device |
| CN108613644A (en) * | 2018-04-18 | 2018-10-02 | 华东理工大学 | A kind of ultrasonic probe that extreme environment wall thickness reduction measures |
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| CN1478439A (en) * | 2002-07-22 | 2004-03-03 | ���µ�����ҵ��ʽ���� | Compound piezoelectrics |
| US20080238259A1 (en) * | 2007-04-02 | 2008-10-02 | Fujifilm Corporation | Ultrasonic probe and production method thereof |
| CN102112060A (en) * | 2008-10-14 | 2011-06-29 | 奥林巴斯医疗株式会社 | Ultrasonic probe |
| CN103344708A (en) * | 2013-06-13 | 2013-10-09 | 江苏大学 | Ultrasonic phased-array transducer used for detection of concrete material and manufacturing method |
| CN103364492A (en) * | 2013-07-17 | 2013-10-23 | 江苏省特种设备安全监督检验研究院镇江分院 | Adjustable weld inspection guided wave probe and use method thereof |
-
2015
- 2015-02-13 CN CN201510077410.0A patent/CN104665874A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1478439A (en) * | 2002-07-22 | 2004-03-03 | ���µ�����ҵ��ʽ���� | Compound piezoelectrics |
| US20080238259A1 (en) * | 2007-04-02 | 2008-10-02 | Fujifilm Corporation | Ultrasonic probe and production method thereof |
| CN102112060A (en) * | 2008-10-14 | 2011-06-29 | 奥林巴斯医疗株式会社 | Ultrasonic probe |
| CN103344708A (en) * | 2013-06-13 | 2013-10-09 | 江苏大学 | Ultrasonic phased-array transducer used for detection of concrete material and manufacturing method |
| CN103364492A (en) * | 2013-07-17 | 2013-10-23 | 江苏省特种设备安全监督检验研究院镇江分院 | Adjustable weld inspection guided wave probe and use method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535696A (en) * | 2018-04-18 | 2018-09-14 | 彭浩 | Proton bragg peak tuning on-line method and monitoring device |
| CN108613644A (en) * | 2018-04-18 | 2018-10-02 | 华东理工大学 | A kind of ultrasonic probe that extreme environment wall thickness reduction measures |
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Application publication date: 20150603 |