CN104647145A - Milling vibration displacement high-bandwidth compensation device - Google Patents

Milling vibration displacement high-bandwidth compensation device Download PDF

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Publication number
CN104647145A
CN104647145A CN201510036755.1A CN201510036755A CN104647145A CN 104647145 A CN104647145 A CN 104647145A CN 201510036755 A CN201510036755 A CN 201510036755A CN 104647145 A CN104647145 A CN 104647145A
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China
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axis
main shaft
voice coil
coil motor
vibration
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CN104647145B (en
Inventor
李祥飞
赵欢
丁汉
张永红
赵鑫
张国强
史振辉
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HUST Wuxi Research Institute
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Huazhong University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q23/00Arrangements for compensating for irregularities or wear, e.g. of ways, of setting mechanisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23CMILLING
    • B23C2250/00Compensating adverse effects during milling
    • B23C2250/16Damping vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23CMILLING
    • B23C9/00Details or accessories so far as specially adapted to milling machines or cutter

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Auxiliary Devices For Machine Tools (AREA)

Abstract

The invention discloses a milling vibration displacement high-bandwidth compensation device, which belongs to the technical field of the milling. The milling vibration displacement high-bandwidth compensation device comprises a main shaft supporting block for supporting a main shaft, a square-frame-shaped square slide block and an open groove, wherein the square slide block surrounds the main shaft supporting block, the open groove is used for containing the square slide block and the main shaft supporting block, two side surfaces of the main shaft supporting block are respectively connected with the inner walls of two edges, which are parallel to a Y axis, of the square slide block through a first X-axis sound ring motor and a second X-axis sound ring motor, the inner walls of two edges, parallel to the X axis, of the open groove are respectively connected with the outer walls of two edges, parallel to the X axis, of the square slide block through a first Y-axis sound ring motor and a second Y-axis sound ring motor, and the bottom of the open groove is provided with a Z-axis sound ring motor and a plurality of flexible hinge supports. The milling vibration displacement high-bandwidth compensation device is simple in structure, reasonable in layout, high in detection precision and capable of simultaneously detecting the vibration displacement along the X axis, the Y axis and the Z axis and carrying out the compensation.

Description

A kind of Milling Process vibration displacement high bandwidth compensation arrangement
Technical field
The invention belongs to Milling Process technical field, more specifically, relate to a kind of Milling Process vibration displacement high bandwidth compensation arrangement.
Background technology
Manufacturing industry is mainstay of the national economy industry, and be the important embodiment of national creativity, competitiveness and overall national strength, its development is directly connected to the development of each department of national economy, also will directly have influence on the reinforcement of national economy and defense force.Milling, as the one of cutting technology, can carry out the processing of the large removal of material, is a kind of process technology efficiently, occupies important function in current manufacturing technology field.In NC Milling, due to the effect of cutting force and the interference of other uncertain load, process system can vibrate, the generation of vibration can cause cutting or owe to cut, leave chatter mark at piece surface, have a strong impact on machined surface quality and the precision of workpiece, shorten cutting-tool's used life simultaneously, the development of restriction processing technology, and can harsh noise be sent, affect operator physically and mentally healthy, in order to reduce vibration, have to reduce milling usage, thus reduce production efficiency.
Application publication number is that the Chinese patent application of CN103223520A discloses a kind of device suppressing cutter for milling machines spindle vibration, the gas viscosity damping characteristic that the radial direction in ultrasonic wave vibration-extrusion technology contains squeeze film aerostatic bearing is utilized to suppress vibration, but, the not open vibration how knowing X-axis, Y-axis and Z axis of (1) this invention; (2) this device can not know the vibration of X-axis, Y-axis and Z axis respectively, and suppresses the vibration of above three axles respectively.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of Milling Process vibration displacement high bandwidth compensation arrangement, its object is to be detected by displacement transducer obtain the vibration of main shaft in X-direction, Y direction and Z-direction, and the voice coil motor suppressing spindle vibration is set in X-direction, Y direction and Z-direction respectively, in multiple directions, the bit shift compensation of high bandwidth is carried out to spindle vibration respectively, solve in prior art thus and can not carry out the technical problem of high bandwidth bit shift compensation in multiple directions to spindle vibration respectively.
For achieving the above object, the invention provides a kind of Milling Process vibration displacement high bandwidth compensation arrangement, it is characterized in that, comprising:
Main shaft support block, for supports main shaft;
Hollow slide block, this hollow slide block is square frame shape, it is enclosed in around described main shaft support block, and two of main shaft support block end faces fit tightly on the inwall on two limits parallel with X-axis of this hollow slide block, main shaft support block two sides are connected with the inwall of the second X-axis voice coil motor with two limits parallel with Y-axis of hollow slide block, for suppressing main shaft along the vibration of X-direction respectively by the first X-axis voice coil motor;
Open recesses, it is for socket font slide block and main shaft support block, the outer wall on two limits parallel with Y-axis of described hollow slide block fits tightly with the inwall on two limits of the parallel with Y-axis of open recesses, the inwall on two limits parallel with X-axis of described open recesses is connected, for suppressing main shaft along the vibration of Y direction with the outer wall of the second Y-axis voice coil motor with two limits parallel with X-axis of described hollow slide block respectively by the first Y-axis voice coil motor;
Flexible hinge supports, and this flexible hinge multiple supports the bottom being installed on open recesses, for supporting open recesses;
Bottom open recesses, Z axis voice coil motor is also installed, for suppressing main shaft along the vibration of Z-direction;
Detect and obtain main shaft respectively along X-axis, along Y-axis and the vibration along Z axis, feed back to corresponding voice coil motor after treatment, suppress main shaft along the vibration of X-axis, Y-axis and Z axis respectively by the voice coil motor of correspondence.
Further, described first X-axis voice coil motor and the second X-axis voice coil motor comprise mover and stator, described stator is arranged on the inwall on two limits parallel with Y-axis of hollow slide block respectively, and described mover is arranged on two sides parallel with Y-axis of described main shaft support block respectively.
Further, described first Y-axis voice coil motor and the second Y-axis voice coil motor comprise mover and stator, described stator is arranged on the inwall on two limits parallel with X-axis of open recesses respectively, and described mover is arranged on the outer wall on two limits parallel with X-axis of described hollow slide block respectively.
Further, described flexible hinge supports has four, be arranged on four bights of described open recesses, and described Z axis voice coil motor is arranged on center bottom described open recesses.
Further, Z axis displacement transducer and Y-axis displacement transducer is adopted to detect main shaft respectively along Z axis, vibration along Y-axis, described Z axis displacement transducer and Y-axis displacement transducer are all positioned at front-end of spindle, described Z axis displacement transducer is positioned at directly over spindle axis line, described Y-axis displacement transducer is located across in the horizontal plane of spindle axis line, and described Z axis displacement transducer and Y-axis displacement transducer are positioned at the same plane perpendicular to spindle axis line.
Further, described Z axis displacement transducer and Y-axis displacement transducer are laser displacement sensor.
Further, adopt X-axis displacement transducer to detect the vibration of main shaft along X-direction, described X-axis displacement transducer is current vortex sensor, and its axial line overlaps with the axial line of main shaft.
Further, the axial line of described main shaft tail is provided with aluminium bar, and described aluminium bar and described X-axis displacement transducer are at a distance of gap.
Further, described X-axis displacement transducer and fore-lying device are electrically connected, described Z axis displacement transducer and Y-axis displacement transducer are all electrically connected with amplifier, described fore-lying device and described amplifier are all electrically connected with controller, described controller is electrically connected with driver and computer simultaneously, described driver and the first X-axis voice coil motor, second X-axis voice coil motor, first Y-axis voice coil motor, second Y-axis voice coil motor and Z axis voice coil motor are electrically connected, detect and obtain main shaft respectively along X-axis, along Y-axis and after the vibration of Z axis, for feeding back to controller and send control voltage to described driver after this controller process, thus the voice coil motor controlling correspondence suppresses main shaft along X-axis respectively, the vibration of Y-axis and Z axis.
In general, the above technical scheme conceived by the present invention can obtain following beneficial effect:
1, adopt voice coil motor to carry out the bit shift compensation of high bandwidth to vibration, contribute to the sensitivity improving bit shift compensation.The operating frequency of voice coil motor is higher than general motor, and it suppresses the sensitivity of vibration displacement higher, more accurately, finally significantly can improve stability and the part quality of Milling Process.
2, by the version of front-end of spindle and end cloth displacement sensor, accurately can detect the vibration displacement of main shaft milling point, the method comparing the vibration of traditional detection milling point peripheral region more directly and accurately.
3, the present invention ingeniously utilizes flexible hinge support, hollow slide block, open recesses and voice coil motor match topology layout, its apparatus structure is simple, the vibration displacement of main shaft along three directions of X-axis, Y-axis and Z axis can be detected simultaneously, and be separate for the vibration of suppression X-axis, Y-axis and Z-direction, do not interfere with each other.
Accompanying drawing explanation
Fig. 1 is the structural representation of the Milling Process vibration displacement high bandwidth compensation arrangement that the embodiment of the present invention provides;
Fig. 2 is the structural representation of each parts electrical connection in the Milling Process vibration displacement high bandwidth compensation arrangement that provides of the embodiment of the present invention;
Fig. 3 is the partial sectional view of the layout structure that in the embodiment of the present invention, flexible hinge supports;
Fig. 4 is the layout structure sectional view of voice coil motor in the embodiment of the present invention;
Fig. 5 is the layout structure side view of laser displacement sensor in the embodiment of the present invention;
In all of the figs, identical Reference numeral is used for representing identical element or structure, wherein:
1-rigid base 2-flexible hinge supports 3-open recesses
4-square shape slide block 5-Z axial displacement sensor 6-main shaft
7-main shaft support block 8-Z axle voice coil motor 9-aluminium bar
10-X axial displacement sensor 11-X bracing strut 12-Y axial displacement sensor
13-Y bracing strut 14-Z bracing strut 15-fore-lying device
16-first X-axis voice coil motor 17-first Y-axis voice coil motor 18-second X-axis voice coil motor
The driver of 19-second Y-axis voice coil motor 20-computer 21-voice coil motor
22-controller 23-amplifier
Detailed description of the invention
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
Milling Process, as the efficient manufacturing technology of one, is a kind of processing can carrying out the large removal of material.In NC Milling, due to the interference of cutting force and uncertain external applied load, process system can vibrate, have a strong impact on machined surface quality and the precision of workpiece, shorten cutting-tool's used life, the development of restriction processing technology, in order to reduce vibration simultaneously, have to reduce milling usage, thus reduce production efficiency.
Vibration displacement high bandwidth compensation arrangement can detect the vibration displacement of main shaft in real time, and carries out high bandwidth compensation to vibration, thus significantly improves stability and the part quality of Milling Process.The present invention detects the vibration displacement of main shaft Y and main shaft Z-direction with mutually orthogonal two laser displacement sensors, the vibration displacement in major axis X direction is detected with current vortex sensor, after signal condition, send to controller to process after obtaining the displacement signal of each main shaft respectively, controller exports control voltage compensates main shaft with high bandwidth vibration displacement to voice coil motor simultaneously.
Illustrate further below in conjunction with concrete accompanying drawing.
Fig. 1 is the structural representation of the Milling Process vibration displacement high bandwidth compensation arrangement that the embodiment of the present invention provides, Fig. 2 is the structural representation of each parts electrical connection in the Milling Process vibration displacement high bandwidth compensation arrangement that provides of the embodiment of the present invention, known in conjunction with above two figure, main shaft support block 7 has the wall of arc, wall and the columned main shaft shape of this arc match, for supports main shaft 6, main shaft support block 7 is positioned at hollow slide block 4, hollow slide block 4 is positioned at open recesses 3, is provided with flexible hinge and supports 2 and Z axis voice coil motor 8 bottom open recesses 3.
Concrete, rigid base 1 is fixed in the working groove on lathe, rigid base 1 is provided with four flexible hinges be arranged symmetrically with and supports 2, four flexible hinges support four bights that 2 are positioned at open recesses 3, and be symmetrical between two each other, as shown in Figure 3, Fig. 3 is the partial sectional view of the layout structure that in the embodiment of the present invention, flexible hinge supports, center bottom open recesses 3 is provided with Z axis voice coil motor 8, the stator of Z axis voice coil motor 8 is fixed on rigid base 1, and its mover is fixed on center in the bottom of open recesses 3.Z axis voice coil motor 8 is for suppressing main shaft 6 along the vibration in Z-direction.
Fig. 4 is the layout structure sectional view of voice coil motor in the embodiment of the present invention, as seen from the figure, open recesses 3 shaped like rectangular box, hollow slide block 4 is the square frame shape of the similar Chinese character of shape " mouth ", hollow slide block 4 to be placed in open recesses 3 and can translation gliding on the bottom of open recesses 3, open recesses 3 and hollow slide block 4 all have two limits parallel with X-axis and parallel with Y-axis two limits, and two limits parallel with Y-axis on hollow slide block 4 are fitted on two limit inwalls parallel with Y-axis of open recesses 3, two limits parallel with X-axis on hollow slide block 4 are connected with two limits parallel with X-axis on open recesses 3 with the second Y-axis voice coil motor 19 respectively by the first Y-axis voice coil motor 17, and the stator of the first Y-axis voice coil motor 17 and the second Y-axis voice coil motor 19 is installed on the inwall of open recesses, the mover of the first Y-axis voice coil motor 17 and the second Y-axis voice coil motor 19 is installed on the outer wall of hollow slide block, first Y-axis voice coil motor 17 is positioned on the center line parallel with Y-axis of open recesses 3 with the second Y-axis voice coil motor 19, and it is symmetrical about the center line parallel with X-axis of open recesses 3, for movable to suppress main shaft 6 along the vibration in Y direction.
Main shaft support block 7 is placed in open recesses 3, it is overall parallel with Y-axis, and surrounded by hollow slide block 4, main shaft support block in the height direction overall convex goes out outside hollow slide block, but in the Y-axis direction, two end faces of main shaft support block 7 are vertically fitted on two limit inwalls parallel with X-axis of hollow slide block respectively, two sides of main shaft support block 7 are connected with two limit inwalls parallel with Y-axis on hollow slide block with the second X-axis voice coil motor 18 respectively by the first X-axis voice coil motor 16, and the stator of the first X-axis voice coil motor 16 and the second X-axis voice coil motor 18 is all fixed on the inwall of hollow slide block, its mover is arranged on two sides of main shaft support block respectively, and the first X-axis voice coil motor 16 is positioned on the center line parallel with X-axis of open recesses 3 with the second X-axis voice coil motor 18, and it is symmetrical about the center line parallel with Y-axis of open recesses 3, for moving left and right to suppress main shaft 6 along the vibration in X-direction.
Fig. 5 is the layout structure side view of laser displacement sensor in the embodiment of the present invention, as seen from the figure, Z axis displacement transducer 5 is positioned at directly over main shaft 6 axial line, Y-axis displacement transducer 12 is located across in the horizontal plane of main shaft 6 axial line, and Z axis displacement transducer 5 and Y-axis displacement transducer 12 are in same plane, and this plane orthogonal is in the axial line of main shaft 6.Z axis displacement transducer 5 is fixed by Z axis support 14, and Z axis support 14 is fixed on rigid base 1.Y-axis displacement transducer 12 is fixed on rigid base 1 by Y-axis support 13.Weak magnetic aluminium bar 9 is arranged on spindle axis line, the axial line of X-axis displacement transducer 10 overlaps with the axial line of aluminium bar 9, and spacing therebetween keeps about having gap, X-axis support 11, for supporting X-axis displacement transducer 10, makes the axial line of X-axis displacement transducer 10 overlap with the axial line of aluminium bar 9.X-axis displacement transducer 10 is connected with fore-lying device 15.When processing, main shaft can synchronously be embodied on aluminium bar 9 along the vibration of X-direction, and X-axis displacement transducer 10 can detect the vibration of aluminium bar, and sends this vibration signal to fore-lying device 15.
More specifically, as shown in Figure 2, Z axis displacement transducer is all connected with amplifier 23 with Y-axis displacement transducer, and X-axis displacement transducer 10 is connected with fore-lying device 15, amplifier 23 and fore-lying device 15 are signal APU, for carrying out process amplification by detecting the vibration displacement signal obtained.Fore-lying device 15 is all connected with controller 22 with amplifier 23, and controller 22 is also connected with computer 20 with driver 21, and controller 22 is for Received signal strength and processing signals.Driver is for receiving the instruction of controller 22 and driving 5 voice coil motors altogether, to suppress the vibration of X-axis, Y-axis and Z axis.
X-axis displacement transducer 10 is current vortex sensor, and Z axis displacement transducer and Y-axis displacement transducer are laser displacement sensor.Such cooperation, is conducive to the spindle vibration accurately measuring all directions.
What need again to illustrate is, in the Z-axis direction, four flexible hinges support 2 and make main shaft can carry out the micrometric displacement of Z-direction, Z axis voice coil motor 8 is for directly suppressing open recesses 3 along the vibration of Z-direction, the main shaft support block 7 of supports main shaft 6 is positioned at open recesses 3, and main shaft 6, main shaft support block 7 and open recesses 3 close contact in the Z-axis direction, without any gap, then can reach along the vibration of Z-direction the vibration suppressing main shaft 6 along Z-direction by directly suppressing open recesses 3.
In the X-axis direction, main shaft support block 7 two sides are connected with two limit inwalls parallel with Y-axis on hollow slide block with the second X-axis voice coil motor 18 respectively by the first X-axis voice coil motor 16, two the limit outer walls parallel with Y-axis on hollow slide block 4 fit tightly on two limit inwalls parallel with Y-axis on open recesses 3, make to suppress main shaft support block 7 vibration in the X-axis direction by the first X-axis voice coil motor 16 and the second X-axis voice coil motor 18, thus reach the object suppressing main shaft 6 to vibrate along X-direction.
In like manner, in the Y-axis direction, two end faces of main shaft support block 6 fit tightly on two limit inwalls parallel with X-axis on hollow slide block 4, and two limits parallel with X-axis on hollow slide block 4 are connected with two limits parallel with X-axis on open recesses 3 with the second Y-axis voice coil motor 19 respectively by the first Y-axis voice coil motor 17, and the stator of the first Y-axis voice coil motor 17 and the second Y-axis voice coil motor 19 is installed on the inwall of open recesses, the mover of the first Y-axis voice coil motor 17 and the second Y-axis voice coil motor 19 is installed on the outer wall of hollow slide block, which ensure that hollow slide block 4 and main shaft support block 7 directly can be suppressed the vibration along Y direction by the first Y-axis voice coil motor 17 and the second Y-axis voice coil motor 19, finally reach the vibration suppressing main shaft 6 along Y direction.
In the present invention, the vibration for suppression X-axis, Y-axis and Z-direction is separate, and complementary interference, makes apparatus of the present invention structure simple.
Further description is carried out to the installation of apparatus of the present invention, debugging and the course of work below:
Installation and debugging: Milling Process vibration displacement high bandwidth compensation arrangement is fixed on rigid base 1 according to above-mentioned connection and mounting means, wherein Z axis voice coil motor 8 is positioned at open recesses 3 along on the center line of Z-direction, and apply certain voltage in advance the driver of Z axis voice coil motor 8, ensure that now flexible hinge supports in the raw, i.e. indeformable state, first X-axis voice coil motor 16, second X-axis voice coil motor 18, first Y-axis voice coil motor 17, second Y-axis voice coil motor 19 is according to the symmetrical arrangement of foregoing description, the certain voltage of same applying gives respective driver.Hollow slide block 4, main shaft support block 7 and open recesses 3 have identical center line when original state, namely the center line of above three along X-direction and the center line along Y direction all overlap, and during original state, first X-axis voice coil motor 16 and the second X-axis voice coil motor 18 are all positioned at above three along on the center line of X-direction, and the first Y-axis voice coil motor 17 and the second Y-axis voice coil motor 19 are all positioned at above three along on the center line of Y direction.After installation, the Drive Status of voice coil motor is set to original state.According to above-mentioned mounting means rigid base 1 is fixed in the working groove on lathe simultaneously.Z axis displacement transducer 5 is positioned at about 20mm place directly over main shaft 6 axial line, Y-axis displacement transducer 12 is positioned at the horizontal plane at main shaft 6 axial line place, distance main shaft is about 20mm place, and Z axis displacement transducer 5 and Y-axis are positioned at sensor 12 at same plane, and this plane orthogonal is in the axial line of main shaft 6.Weak magnetic aluminium bar 9 is positioned on spindle axis line, and the axial line of X-axis displacement transducer 10 overlaps with the axial line of aluminium bar 9, and spacing therebetween keeps the gap of about 1.5mm.X-axis displacement transducer 10 is connected with fore-lying device 15.
After installing, Z axis displacement transducer 5, Y-axis displacement transducer 12 and X-axis displacement transducer 10 are demarcated, obtains the output displacement signal of Z axis displacement transducer 5, Y-axis displacement transducer 12 and X-axis displacement transducer 10 and the relational model separately between voice coil motor input voltage.With this relational model for scale, the displacement signal for obtaining according to each displacement transducer regulates the voltage of respective voice coil motor, realizes vibration displacement and compensates.
Milling Process: after above-mentioned installation and debugging, resets Z axis displacement transducer 5, Y-axis displacement transducer 12 and X-axis displacement transducer 10.Robotic gripper's workpiece is adopted to carry out Milling Process, when there is vibration in main shaft, Z axis displacement transducer 5, Y-axis displacement transducer 12 and X-axis displacement transducer 10 detect main shaft Z respectively, the vibration displacement of Y and X-direction, and by the amplifier 23 of signal Auxiliary Processing Unit and fore-lying device 15, vibration displacement signal is sent to controller 22, computer 20 is for showing vibration displacement signal, and send control command to controller 22, controller 22 Comprehensive Control order and vibration displacement signal, and send control voltage to driver 21 after utilizing the relational model of displacement and the voltage previously obtained to carry out adjustment, and then control Z axis voice coil motor 8, first X-axis voice coil motor 16, second X-axis voice coil motor 18, first Y-axis voice coil motor 17 and the second Y-axis voice coil motor 19 decay rapidly main shaft 6 along X, Y, the vibration signal in Z tri-directions, thus realize the compensation of Milling Process vibration displacement high bandwidth.
Known by contrast Milling Process, the present invention can detect the vibration displacement of main shaft, and carries out high bandwidth compensation to vibration displacement, thus significantly improves stability and the part quality of Milling Process.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.

Claims (9)

1. a Milling Process vibration displacement high bandwidth compensation arrangement, is characterized in that, comprising:
Main shaft support block (7), for supports main shaft (6);
Hollow slide block (4), this hollow slide block (4) is in square frame shape, it is enclosed in described main shaft support block (7) around, and two end faces of main shaft support block (7) fit tightly on the inwall on two limits parallel with X-axis of this hollow slide block (4), main shaft support block (7) two sides are connected with the inwall of the second X-axis voice coil motor (18) with two limits parallel with Y-axis of hollow slide block (4) respectively by the first X-axis voice coil motor (16), to suppress main shaft (6) along the vibration of X-direction;
Open recesses (3), it is for socket font slide block (4) and main shaft support block (7), the outer wall on two limits parallel with Y-axis of described hollow slide block (4) fits tightly with the inwall on two limits parallel with Y-axis of open recesses (3), the inwall on two limits parallel with X-axis of described open recesses (3) is connected, to suppress main shaft along the vibration of Y direction with the outer wall of the second Y-axis voice coil motor (19) with two limits parallel with X-axis of described hollow slide block (4) respectively by the first Y-axis voice coil motor (17);
Flexible hinge supports (2), and this flexible hinge multiple supports the bottom that (2) are installed on open recesses (3), for supporting open recesses (3);
Open recesses (3) bottom is also provided with Z axis voice coil motor (8), for suppressing main shaft along the vibration of Z-direction;
Detect and obtain main shaft (6) respectively along X-axis, along Y-axis and the vibration along Z axis, feed back to corresponding voice coil motor after treatment, suppress main shaft (6) along the vibration of X-axis, Y-axis and Z axis respectively by the voice coil motor of correspondence.
2. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 1, it is characterized in that, described first X-axis voice coil motor (16) and the second X-axis voice coil motor (18) comprise mover and stator, described stator is arranged on the inwall on two limits parallel with Y-axis of hollow slide block (4) respectively, and described mover is arranged on two sides parallel with Y-axis of described main shaft support block (7) respectively.
3. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 1, it is characterized in that, described first Y-axis voice coil motor (17) and the second Y-axis voice coil motor (19) comprise mover and stator, described stator is arranged on the inwall on two limits parallel with X-axis of open recesses (3) respectively, and described mover is arranged on the outer wall on two limits parallel with X-axis of described hollow slide block (4) respectively.
4. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 1, it is characterized in that, described flexible hinge supports (2) and has four, be arranged on four bights of described open recesses (3), and described Z axis voice coil motor (8) is arranged on center, described open recesses (3) bottom.
5. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 1, it is characterized in that, Z axis displacement transducer (5) and Y-axis displacement transducer (12) is adopted to detect main shaft (6) respectively along Z axis, along the vibration of Y-axis, described Z axis displacement transducer (5) and Y-axis displacement transducer (12) are all positioned at main shaft (6) front end, described Z axis displacement transducer (5) is positioned at directly over main shaft (6) axial line, described Y-axis displacement transducer (12) is located across in the horizontal plane of main shaft (6) axial line, and described Z axis displacement transducer (5) and Y-axis displacement transducer (12) are positioned at the same plane perpendicular to main shaft (6) axial line.
6. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 5, it is characterized in that, described Z axis displacement transducer (5) and Y-axis displacement transducer (12) are laser displacement sensor.
7. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 1, it is characterized in that, X-axis displacement transducer (10) is adopted to detect the vibration of main shaft (6) along X-direction, described X-axis displacement transducer (10) is current vortex sensor, and the axial line of described X-axis displacement transducer (10) overlaps with the axial line of main shaft (6).
8. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 7, it is characterized in that, the axial line of described main shaft (6) afterbody is provided with aluminium bar (9), and described aluminium bar (9) and described X-axis displacement transducer (10) are at a distance of gap.
9. a kind of Milling Process vibration displacement high bandwidth compensation arrangement as claimed in claim 1, it is characterized in that, described X-axis displacement transducer (10) and fore-lying device (15) are electrically connected, described Z axis displacement transducer (5) and Y-axis displacement transducer (12) are all electrically connected with amplifier (23), described fore-lying device (15) and described amplifier (23) are all electrically connected with controller (22), described controller (22) is electrically connected with driver (21) and computer (20) simultaneously, described driver and the first X-axis voice coil motor (16), second X-axis voice coil motor (18), first Y-axis voice coil motor (17), second Y-axis voice coil motor (19) and Z axis voice coil motor (8) are electrically connected, detect and obtain main shaft (6) respectively along X-axis, along Y-axis and after the vibration of Z axis, for feeding back to controller (22) and send control voltage to described driver (21) after this controller process, thus the voice coil motor controlling correspondence suppresses main shaft (6) along X-axis respectively, the vibration of Y-axis and Z axis.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108080968A (en) * 2018-01-22 2018-05-29 深圳市创世纪机械有限公司 Numerical control machine tool and carving machine with double independent stations
CN108146647A (en) * 2017-12-25 2018-06-12 北京航空航天大学 Photoelectric nacelle based on opposing torque is surely as control device and control method

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CN108146647A (en) * 2017-12-25 2018-06-12 北京航空航天大学 Photoelectric nacelle based on opposing torque is surely as control device and control method
CN108146647B (en) * 2017-12-25 2019-02-01 北京航空航天大学 Photoelectric nacelle based on opposing torque is surely as control device and control method
CN108080968A (en) * 2018-01-22 2018-05-29 深圳市创世纪机械有限公司 Numerical control machine tool and carving machine with double independent stations

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