CN104614115A - MEMS device for measuring water pressure in real time and measuring method thereof - Google Patents
MEMS device for measuring water pressure in real time and measuring method thereof Download PDFInfo
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- CN104614115A CN104614115A CN201510051617.0A CN201510051617A CN104614115A CN 104614115 A CN104614115 A CN 104614115A CN 201510051617 A CN201510051617 A CN 201510051617A CN 104614115 A CN104614115 A CN 104614115A
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Abstract
The invention discloses an MEMS device for measuring water pressure in real time and a measuring method thereof. The MEMS device for measuring the water pressure in real time is suitable for the quick sea water depth change field and comprises an insulating substrate, a protective silicon cap, a double-clamped resonator, a bonding pad and a bottom electrode; the protective silicon cap covers the upper head face of the insulating substrate, and a closed holding inner cavity for holding the double-clamped resonator, bonding pad and bottom electrode is formed between the protective silicon cap and insulating substrate; the bottom electrode is connected with the upper head face of the insulating substrate; the double-clamped resonator comprises an overhead beam and step anchors connected with two ends of the overhead beam and distributed symmetrically; the lower head faces of the bottom edges of the two step anchors are connected with the upper head face of the insulating substrate; the bonding pad is firmly arranged at the upper head faces of the bottom edges of the step anchors. The MEMS device is simple in structure, convenient to operate and high in measuring precision; the MEMS device is easy to measure the water pressure in real time, the respond speed is fast, and the water pressure can be quickly measured to reflect the water depth in real time.
Description
Technical field
The present invention relates to a kind of MEMS and measuring method thereof of real-time measurement hydraulic pressure, relate to microelectromechanical systems manufacture, Ocean Surveying application scenario, real-time water-pressure survey under being specially adapted to ocean depth of water Rapid Variable Design occasion.
Background technology
At present, ocean application receives extensive concern, under the fast-changing occasion of the ocean depth of water, the quick dive of such as underwater vehicle and floating, real-time hydraulic pressure during depth of water Rapid Variable Design is an important environmental parameter, it can reflect the depth of water position residing for measured target in real time, also can provide indirectly monitoring parameter for the speed of measured target dive and floating.
But, traditional bathymetric survey equipment is generally the water-pressure survey equipment of pressure gauge and so on, although traditional water-pressure survey equipment is higher for the measuring accuracy of hydraulic pressure, response speed is seriously delayed, is not suitable for the real-time water-pressure survey under the depth of water Rapid Variable Design occasion of ocean; So provide a kind of measuring element that can respond fast variation in water pressure, be to be applicable to the fast-changing occasion of the depth of water preferably, the diving kind equipment that more can be quick dive and floating in seawater provides important environmental parameter and running parameter.
Summary of the invention
Fundamental purpose of the present invention is, overcomes deficiency of the prior art, provides a kind of MEMS and measuring method thereof of real-time measurement hydraulic pressure, is specially adapted to ocean depth of water Rapid Variable Design occasion.
Technical matters to be solved by this invention is to provide the MEMS of simple, easy to operate, safe and reliable, the practical real-time measurement hydraulic pressure of structure, and not only measuring accuracy is high, and fast response time, can realize measuring fast, efficiently, accurately; The MEMS of also provide simple, reacting at a high speed measures the measuring method of hydraulic pressure in real time.
In order to achieve the above object, the technical solution adopted in the present invention is:
A MEMS for real-time measurement hydraulic pressure, comprises dielectric substrate, protection silicon cap, the clamped resonator of both-end, pad and hearth electrode; Described protection silicon cap covers between dielectric substrate upper surface and dielectric substrate and forms case type accommodating inner chamber; The clamped resonator of described both-end, pad and hearth electrode are all contained in accommodating inner chamber.
Wherein, described hearth electrode is connected with dielectric substrate upper surface; The clamped resonator of described both-end comprises built on stilts crossbeam, be connected to the step anchor that built on stilts crossbeam two ends are symmetric; The lower surface on described step anchor base is all connected with dielectric substrate upper surface, and the clamped resonator of formation both-end is erected at directly over hearth electrode also and between hearth electrode exists spacing space; Described pad is installed in the upper surface on step anchor base; Described pad is connected with extraneous phase-locked loop circuit by connecting lead wire with hearth electrode.
The present invention is set to further: described dielectric substrate adopts silica-base material to make, and the upper surface of described dielectric substrate is silicon nitride dielectric layer.
The present invention is set to further: the clamped resonator of described both-end adopts polycrystalline silicon material to be made up of surface micro-fabrication.
The present invention is set to further: described pad adopts metal material to be made up of surface micro-fabrication.
The present invention is set to further: described metal material is aluminium or gold.
The present invention is set to further: described protection silicon cap and dielectric substrate upper surface are sealed by seal bond condensation material.
The present invention also provides a kind of measuring method of MEMS of real-time measurement hydraulic pressure, comprises the following steps:
Step 1: drive the clamped resonator resonance of both-end;
Pad in MEMS is connected with the phase-locked loop circuit in the external world by connecting lead wire with hearth electrode, provides the periodic drive signal identical with resonator resonance frequency by phase-locked loop circuit to the clamped resonator of both-end;
Step 2: dielectric substrate, by hydraulic pressure generation deformation, makes the resonance frequency of the clamped resonator of both-end change;
In marine environment, in MEMS, the bottom surface of dielectric substrate directly and contact with sea water, seawater pressure can cause the bottom surface of dielectric substrate that deformation occurs, the deformation of dielectric substrate is delivered on the clamped resonator of both-end, cause the step anchor generation deformation of the clamped resonator of both-end, make the built on stilts crossbeam of the clamped resonator of both-end produce STRESS VARIATION, thus the resonance frequency of the clamped resonator of both-end is changed;
Step 3: the resonance frequency of the clamped resonator of the both-end changed by phase-locked loop circuit measurement;
After the resonance frequency of the clamped resonator of both-end changes, phase-locked loop circuit can respond it, and because phase-locked loop circuit is negative-feedback circuit, phase-locked loop circuit can change its frequency being applied to the clamped resonator of both-end automatically until meet the resonant frequency value changed;
Followed the tracks of the resonance frequency of the clamped resonator of both-end obtaining and changed by phase-locked loop circuit, by the data mapping tables of resonance frequency and hydraulic pressure relation, draw the corresponding pressure size of seawater suffered by dielectric substrate;
Step 4: repeat step 2 and step 3 successively;
When residing for MEMS, the seawater depth of water changes, by the variable effect of seawater pressure, as described in step 2, the deformation of dielectric substrate changes thereupon, makes the resonance frequency of the clamped resonator of both-end along with changing; For another example, described in step 3, the resonance frequency of the clamped resonator of both-end that can have been changed by the frequency acquisition of phase-locked loop circuit, by the data mapping tables of resonance frequency and hydraulic pressure relation, obtains the corresponding pressure size of seawater suffered by dielectric substrate.
Wherein, described data mapping tables is stored in external control chip, can carry out transferring and converting of data.
Compared with prior art, the MEMS of a kind of real-time measurement hydraulic pressure provided by the invention, there is the plurality of advantages such as structure is simple, easy to operate, safe and reliable, practical, not only measuring accuracy is high, and fast response time, can realize measuring fast, efficiently, accurately, simultaneously based on MEMS process technology, can produce in enormous quantities, reduce manufacturing cost.The MEMS that the present invention also provides measures the measuring method of hydraulic pressure in real time, simple, compared with the metering system of traditional bathymetric survey device, especially has the feature of high-speed response, can realize the measurement to hydraulic pressure real-time under the depth of water Rapid Variable Design occasion of ocean.
Foregoing is only the general introduction of technical solution of the present invention, and in order to clearer understanding technological means of the present invention, below in conjunction with accompanying drawing, the invention will be further described.
Accompanying drawing explanation
Fig. 1 is the structural representation of the MEMS of a kind of real-time measurement hydraulic pressure of the present invention.
Embodiment
Below in conjunction with Figure of description, the present invention is further illustrated.
As shown in Figure 1, a kind of MEMS of real-time measurement hydraulic pressure, comprises dielectric substrate 1, protection silicon cap 2, the clamped resonator 3 of both-end, pad 4 and hearth electrode 5; Described protection silicon cap 2 covers between dielectric substrate 1 upper surface and dielectric substrate 1 and forms case type accommodating inner chamber 10, and described protection silicon cap 2 is sealed by seal bond condensation material with dielectric substrate 1 upper surface; The clamped resonator of described both-end 3, pad 4 and hearth electrode 5 are all contained in accommodating inner chamber 10.
Described hearth electrode 5 is connected with dielectric substrate 1 upper surface; Described dielectric substrate 1 adopts silica-base material to make, and the silicon nitride of the upper surface surface working of dielectric substrate 1 forms a layer insulating.
The clamped resonator of described both-end 3 comprises built on stilts crossbeam 31, be connected to the step anchor 32 that built on stilts crossbeam 31 two ends are symmetric; The lower surface on described step anchor 32 base is all connected with dielectric substrate 1 upper surface, and the clamped resonator 3 of formation both-end is erected at directly over hearth electrode 5 also and between hearth electrode 5 exists spacing space 33.The clamped resonator 3 of described both-end adopts polycrystalline silicon material to be made up of surface micro-fabrication.
Described pad 4 is installed in the upper surface on step anchor 32 base; Described pad 4 is connected with extraneous phase-locked loop circuit (not shown) by connecting lead wire with hearth electrode 5.Described pad 4 adopts the metal material such as aluminium, gold to be made up of surface micro-fabrication.
Adopt the MEMS of real-time measurement hydraulic pressure of the present invention to carry out water-pressure survey, its concrete measuring method comprises the following steps:
Step 1: drive the clamped resonator resonance of both-end;
Pad in MEMS is connected with the phase-locked loop circuit in the external world by connecting lead wire with hearth electrode, provides the periodic drive signal identical with resonator resonance frequency by phase-locked loop circuit to the clamped resonator of both-end.
Step 2: dielectric substrate, by hydraulic pressure generation deformation, makes the resonance frequency of the clamped resonator of both-end change;
In the depth of water environment of ocean, in MEMS, the bottom surface of dielectric substrate directly and contact with sea water, seawater pressure can cause the bottom surface of dielectric substrate that deformation occurs, the deformation of dielectric substrate is delivered on the clamped resonator of both-end, cause the step anchor generation deformation of the clamped resonator of both-end, make the built on stilts crossbeam of the clamped resonator of both-end produce STRESS VARIATION, thus the resonance frequency of the clamped resonator of both-end is changed.
Step 3: the resonance frequency of the clamped resonator of the both-end changed by phase-locked loop circuit measurement;
After the resonance frequency of the clamped resonator of both-end changes, phase-locked loop circuit can respond it, and because phase-locked loop circuit is negative-feedback circuit, phase-locked loop circuit can change its frequency being applied to the clamped resonator of both-end automatically until meet the resonant frequency value changed;
Followed the tracks of the resonance frequency of the clamped resonator of both-end obtaining and changed by phase-locked loop circuit, by the data mapping tables of resonance frequency and hydraulic pressure relation, draw the corresponding pressure size of seawater suffered by dielectric substrate;
Step 4: repeat step 2 and step 3 successively;
When residing for MEMS, the seawater depth of water changes, by the variable effect of seawater pressure, as described in step 2, the deformation of dielectric substrate changes thereupon, makes the resonance frequency of the clamped resonator of both-end along with changing; For another example, described in step 3, the resonance frequency of the clamped resonator of both-end that can have been changed by the frequency acquisition of phase-locked loop circuit, by the data mapping tables of resonance frequency and hydraulic pressure relation, obtains the corresponding pressure size of seawater suffered by dielectric substrate.
Above-mentioned data mapping tables is stored in external control chip, can carry out transferring and converting of data.
Real-time water-pressure survey is carried out by the MEMS of real-time measurement hydraulic pressure provided by the invention, simple, measuring accuracy is high, fast response time, overcome the deficiencies such as the measurement low-response of traditional bathymetric survey device, and the MEMS of real-time measurement hydraulic pressure is based on MEMS process technology, can be mass-produced, cost is lower, practical.
More than show and describe ultimate principle of the present invention, principal character and advantage.The technician of the industry should understand; the present invention is not restricted to the described embodiments; what describe in above-described embodiment and instructions just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.Application claims protection domain is defined by appending claims and equivalent thereof.
Claims (8)
1. measure a MEMS for hydraulic pressure in real time, it is characterized in that: comprise dielectric substrate, protection silicon cap, the clamped resonator of both-end, pad and hearth electrode;
Described protection silicon cap covers between dielectric substrate upper surface and dielectric substrate and forms case type accommodating inner chamber;
The clamped resonator of described both-end, pad and hearth electrode are all contained in accommodating inner chamber;
Described hearth electrode is connected with dielectric substrate upper surface;
The clamped resonator of described both-end comprises built on stilts crossbeam, be connected to the step anchor that built on stilts crossbeam two ends are symmetric; The lower surface on described step anchor base is all connected with dielectric substrate upper surface, and the clamped resonator of formation both-end is erected at directly over hearth electrode also and between hearth electrode exists spacing space;
Described pad is installed in the upper surface on step anchor base;
Described pad is connected with extraneous phase-locked loop circuit by connecting lead wire with hearth electrode.
2. the MEMS of a kind of real-time measurement hydraulic pressure according to claim 1, is characterized in that: described dielectric substrate adopts silica-base material to make, and the upper surface of described dielectric substrate is silicon nitride dielectric layer.
3. the MEMS of a kind of real-time measurement hydraulic pressure according to claim 1, is characterized in that: the clamped resonator of described both-end adopts polycrystalline silicon material to be made up of surface micro-fabrication.
4. the MEMS of a kind of real-time measurement hydraulic pressure according to claim 1, is characterized in that: described pad adopts metal material to be made up of surface micro-fabrication.
5. the MEMS of a kind of real-time measurement hydraulic pressure according to claim 4, is characterized in that: described metal material is aluminium or gold.
6. the MEMS of a kind of real-time measurement hydraulic pressure according to claim 1, is characterized in that: described protection silicon cap and dielectric substrate upper surface are sealed by seal bond condensation material.
7. the measuring method of the MEMS of a kind of real-time measurement hydraulic pressure according to claim 1, is characterized in that, comprise the following steps:
Step 1: drive the clamped resonator resonance of both-end;
Pad in MEMS is connected with the phase-locked loop circuit in the external world by connecting lead wire with hearth electrode, provides the periodic drive signal identical with resonator resonance frequency by phase-locked loop circuit to the clamped resonator of both-end;
Step 2: dielectric substrate, by hydraulic pressure generation deformation, makes the resonance frequency of the clamped resonator of both-end change;
In marine environment, in MEMS, the bottom surface of dielectric substrate directly and contact with sea water, seawater pressure can cause the bottom surface of dielectric substrate that deformation occurs, the deformation of dielectric substrate is delivered on the clamped resonator of both-end, cause the step anchor generation deformation of the clamped resonator of both-end, make the built on stilts crossbeam of the clamped resonator of both-end produce STRESS VARIATION, thus the resonance frequency of the clamped resonator of both-end is changed;
Step 3: the resonance frequency of the clamped resonator of the both-end changed by phase-locked loop circuit measurement;
After the resonance frequency of the clamped resonator of both-end changes, phase-locked loop circuit can respond it, and because phase-locked loop circuit is negative-feedback circuit, phase-locked loop circuit can change its frequency being applied to the clamped resonator of both-end automatically until meet the resonant frequency value changed;
Followed the tracks of the resonance frequency of the clamped resonator of both-end obtaining and changed by phase-locked loop circuit, by the data mapping tables of resonance frequency and hydraulic pressure relation, draw the corresponding pressure size of seawater suffered by dielectric substrate;
Step 4: repeat step 2 and step 3 successively;
When residing for MEMS, the seawater depth of water changes, by the variable effect of seawater pressure, as described in step 2, the deformation of dielectric substrate changes thereupon, makes the resonance frequency of the clamped resonator of both-end along with changing; For another example, described in step 3, the resonance frequency of the clamped resonator of both-end that can have been changed by the frequency acquisition of phase-locked loop circuit, by the data mapping tables of resonance frequency and hydraulic pressure relation, obtains the corresponding pressure size of seawater suffered by dielectric substrate.
8. the measuring method of the MEMS of a kind of real-time measurement hydraulic pressure according to claim 7, is characterized in that: described data mapping tables is stored in external control chip, can carry out transferring and converting of data.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510051617.0A CN104614115A (en) | 2015-01-30 | 2015-01-30 | MEMS device for measuring water pressure in real time and measuring method thereof |
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| CN201510051617.0A CN104614115A (en) | 2015-01-30 | 2015-01-30 | MEMS device for measuring water pressure in real time and measuring method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105388192A (en) * | 2015-12-24 | 2016-03-09 | 河海大学 | Seawater conductivity sensor based on MEMS silicone-glass bonding process |
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2015
- 2015-01-30 CN CN201510051617.0A patent/CN104614115A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5417115A (en) * | 1993-07-23 | 1995-05-23 | Honeywell Inc. | Dielectrically isolated resonant microsensors |
| CN101162170A (en) * | 2007-11-20 | 2008-04-16 | 东南大学 | Static excitation resonator capacitor vibration pick-up structure |
| CN102439407A (en) * | 2009-05-21 | 2012-05-02 | 通用电气基础设施传感公司 | Sensor |
| CN102439405A (en) * | 2009-05-27 | 2012-05-02 | 松下电器产业株式会社 | Physical quantity sensor |
| CN103115719A (en) * | 2013-01-29 | 2013-05-22 | 中国科学院半导体研究所 | Resonance-type micro electromechanical system wing wind power sensor and manufacturing method thereof |
Non-Patent Citations (1)
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| 王玉朝等: "静电驱动MEMS谐振式压力传感器闭环拓扑研究", 《传感技术学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105388192A (en) * | 2015-12-24 | 2016-03-09 | 河海大学 | Seawater conductivity sensor based on MEMS silicone-glass bonding process |
| CN105388192B (en) * | 2015-12-24 | 2017-12-15 | 河海大学 | A kind of sea water conductivity sensor based on MEMS silica glass bonding technologies |
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Application publication date: 20150513 |