CN104613890B - Optical grating strain measurement device - Google Patents
Optical grating strain measurement device Download PDFInfo
- Publication number
- CN104613890B CN104613890B CN201510067386.2A CN201510067386A CN104613890B CN 104613890 B CN104613890 B CN 104613890B CN 201510067386 A CN201510067386 A CN 201510067386A CN 104613890 B CN104613890 B CN 104613890B
- Authority
- CN
- China
- Prior art keywords
- reflecting mirror
- light
- guide rail
- test specimen
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an optical grating strain measurement device. The optical grating strain measurement device comprises a freedom-degree-adjustable base, a Z-direction guide rail, an X-direction guide rail, a diaphragm, an optical screen, a light source, a semi-light-transmitting semi-reflective mirror, a reflecting mirror rack, a first reflecting mirror, a second reflecting mirror, a third reflecting mirror, a fourth reflecting mirror and a camera. The diaphragm is arranged on the Z-direction guide rail, the optical screen is movably arranged on the Z-direction guide rail in the Z-direction, the light source is arranged on the X-direction guide rail, and the reflecting mirror rack is arranged on the Z-direction guide rail. The semi-light-transmitting semi-reflective mirror is arranged on the X-direction guide rail, measurement light reflected on a test part is reflected and diffracted on the surface of the test part, and calibration light is transmitted to the optical screen through the diaphragm. The first reflecting mirror and the second reflecting mirror are adjustably arranged on the reflecting mirror rack. The third reflecting mirror is adjustably arranged on the X-direction guide rail, the measurement light reflected on the test part through the third reflecting mirror is diffracted on the surface of the test part, and the fourth reflecting mirror is adjustably arranged on the reflecting mirror rack. The optical grating strain measurement device has the advantages of being high in measurement accuracy and the like.
Description
Technical field
The present invention relates to a kind of grating strain measurement apparatus.
Background technology
Existing deformation test method includes two big class of electrical measuring method and flash spotting.Wherein, electrical measuring method application is relatively broad, but
Due to needing foil gauge to be sticked in surface of test piece, therefore electrical measuring method application in extreme circumstances is limited, such as high temperature, low
Temperature, forceful electric power magnetic environment etc..In recent years, flash spotting is with the advantage of its non-cpntact measurement, of increased attention.
Propose diffraction grating strain transducer method the sixties in 20th century, the method using grating frequency, optical maser wavelength and
Relation (grating equation) between the angle of diffraction completes deformation measurement：Spread out when beam of laser incides grating belt surface of test piece
Penetrate, test specimen stand under load is deformed, grating can also be followed occurs same deformation, and the deformation of grating causes the frequency shift of grating,
Angle of diffraction can also change therewith.By the change in location for recording diffraction pattern, it may be determined that the change of angle of diffraction, and then really
Determine the change of grating frequency, finally give the deformation of test specimen.
The content of the invention
The application is the discovery of following facts and problem and understanding to be made based on inventor：In deformation test, mesh
Mark is the in-plane deformation for reliably obtaining test specimen, and the acoplanarity displacement of test specimen is not concerned.Existing diffraction grating strain
Sensor method is easily affected by the acoplanarity displacement of test specimen, so as to cause the decline of certainty of measurement.
It is contemplated that at least solving one of technical problem in correlation technique to a certain extent.For this purpose, the present invention is carried
Go out a kind of grating strain measurement apparatus for having the advantages that certainty of measurement is high.
Grating strain measurement apparatus according to embodiments of the present invention include：Degree of freedom adjustable base；Z-direction guide rail and guide X
Rail, the Z-direction guide rail are located on the degree of freedom adjustable base, and the X direction guiding rails are located on the Z-direction guide rail；Diaphragm, it is described
Diaphragm is located on the Z-direction guide rail；Optical screen, the optical screen are movably arranged on the Z-direction guide rail along Z-direction；For sending survey
The light source of amount light, the light source are located on the X direction guiding rails, measure light line reflection for transmission measurement light and by described
Semi-transparent semi-reflecting lens on test specimen, the semi-transparent semi-reflecting lens are located on the X direction guiding rails, wherein the surface of the test specimen has light
Grid, reflex to the measurement light on the test specimen and occur to reflect to form demarcation light and to spread out on the surface of the test specimen
Penetrate to form the first light and the second light, diaphragm described in the demarcation light Jing is transmitted on the optical screen to form demarcation
Flare；Reflector mount, the reflector mount are located on the Z-direction guide rail；It is described for first light is reflexed to
Forming the first reflecting mirror of the first hot spot and for second light being reflexed on the optical screen to form the on optical screen
Second reflecting mirror of two hot spots, first reflecting mirror and the second reflecting mirror adjustable ground are located on the reflector mount,
First reflecting mirror and second reflecting mirror along X to Y-direction in an arrangement；For the measurement light line reflection that will be transmitted
The 3rd reflecting mirror on test specimen, the 3rd reflecting mirror adjustable ground are located on the X direction guiding rails, the semi-transparent semi-reflecting lens position
Between the light source and the 3rd reflecting mirror, wherein reflexing to the measurement light on the test specimen by the 3rd reflecting mirror
There is reflection on the surface of the test specimen to form the 3rd light in line；For the 3rd light is reflexed to the optical screen
On to form the 4th reflecting mirror of acoplanarity displacement hot spot of disappearing, the 4th reflecting mirror adjustable ground is located on the reflector mount；
With for gathering the phase for demarcating flare, first hot spot, second hot spot and the acoplanarity displacement hot spot that disappears
Machine.
Grating strain measurement apparatus according to embodiments of the present invention can eliminate interference of the acoplanarity displacement to test result, from
And have the advantages that certainty of measurement is high.
In addition, grating strain measurement apparatus according to the above embodiment of the present invention can also have following additional technology special
Levy：
According to one embodiment of present invention, the measurement light reflexed to by the semi-transparent semi-reflecting lens on the test specimen is existed
There is diffraction on the surface of the test specimen to form the 4th light and the 5th light, the grating strain measurement apparatus are further
Including for the 4th light is reflexed on the optical screen to form the 5th reflecting mirror of the 3rd hot spot and for will be described
5th light reflexes on the optical screen to form the 6th reflecting mirror of the 4th hot spot, the 5th reflecting mirror and described 6th anti-
Penetrate mirror adjustable ground to be located on the reflector mount, the 5th reflecting mirror and the 6th reflecting mirror along X to Y-direction in it is another
One arrangement.
According to one embodiment of present invention, first reflecting mirror and second reflecting mirror along X to arrangement, described
Five reflecting mirrors and the 6th reflecting mirror are arranged along Y-direction, and first reflecting mirror and second reflecting mirror are along X to movably
It is located on the reflector mount, the 5th reflecting mirror and the 6th reflecting mirror are movably arranged at the reflecting mirror along Y-direction
On frame.
According to one embodiment of present invention, the reflector mount is movably arranged on the Z-direction guide rail along Z-direction.
According to one embodiment of present invention, first reflecting mirror, second reflecting mirror and the 4th reflection
Mirror is changeably located on the reflector mount to the 6th reflecting mirror normal direction.
According to one embodiment of present invention, the light source, the semi-transparent semi-reflecting lens and the 3rd reflecting mirror along X to can
Movably arrange, the light source, the semi-transparent semi-reflecting lens, the 3rd reflecting mirror, the diaphragm, the optical screen and the camera
It is movably disposed along Y-direction.
According to one embodiment of present invention, it is described to demarcate the measurement light, described that light is sent perpendicular to the light source
The plane that the plane and the optical screen that diaphragm is located is located.
According to one embodiment of present invention, the light source is laser instrument.
According to one embodiment of present invention, the degree of freedom adjustable base includes：Y-direction lifting platform；X is to translation stage, institute
State X to be located on the Y-direction lifting platform to translation stage；With Z-direction translation stage, the Z-direction translation stage is located at the X to translation stage, institute
State Z-direction guide rail to be located on the Z-direction translation stage.
According to one embodiment of present invention, the grating strain measurement apparatus are further included around X to, Y-direction and Z-direction rotation
The three-dimensional rotation platform for turning, the three-dimensional rotation platform are located on the degree of freedom adjustable base, and the Z-direction guide rail is located at the three-dimensional
On turntable.
Description of the drawings
Fig. 1 is the structural representation of grating strain measurement apparatus according to embodiments of the present invention；
Fig. 2 is the sectional view along A-A directions of Fig. 1；
Fig. 3 is the sectional view along B-B directions of Fig. 1；
Fig. 4 is the schematic diagram of the X of grating strain measurement apparatus according to embodiments of the present invention to optical system for testing；
Fig. 5 is the schematic diagram of the Y-direction optical system for testing of grating strain measurement apparatus according to embodiments of the present invention；
Fig. 6 is the schematic diagram of the acoplanarity displacement light path that disappears of grating strain measurement apparatus according to embodiments of the present invention；
Fig. 7 is the light spot image that grating strain measurement apparatus according to embodiments of the present invention are collected.
Specific embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings.Below with reference to
The embodiment of Description of Drawings is exemplary, it is intended to for explaining the present invention, and be not considered as limiting the invention.
Below with reference to the accompanying drawings grating strain measurement apparatus 10 according to embodiments of the present invention are described.As shown in Fig. 1-Fig. 7, root
Include degree of freedom adjustable base 101, Z-direction guide rail 1021, X direction guiding rails according to the grating strain measurement apparatus 10 of the embodiment of the present invention
1022nd, diaphragm 1031, optical screen 1032, for send measurement light 1067 light source 1033, for transmission measurement light 1067 with
And measurement light 1067 is reflexed to into semi-transparent semi-reflecting lens 1041 on test specimen 20, reflector mount 107, for by the first light 1062
Reflex on optical screen 1032 with formed the first hot spot the first reflecting mirror 1042, for the second light 1063 is reflexed to optical screen
On 1032 with formed the second hot spot the second reflecting mirror 1043, for by transmission measurement light 1067 reflex on test specimen 20
3rd reflecting mirror 1044, for the 3rd light 1064 is reflexed on optical screen 1032 to form the of the acoplanarity displacement hot spot 1086 that disappears
Four reflecting mirrors 1045 and flare 1081, the first hot spot, the second hot spot and the acoplanarity displacement hot spot 1086 that disappears are demarcated for gathering
Camera 1035.
Z-direction guide rail 1021 is located on degree of freedom adjustable base 101, and X direction guiding rails 1022 are located on Z-direction guide rail 1021.Diaphragm
1031 are located on Z-direction guide rail 1021, and optical screen 1032 is movably arranged on Z-direction guide rail 1021 along Z-direction.Light source 1033 be located at X to
On guide rail 1022, semi-transparent semi-reflecting lens 1041 are located on X direction guiding rails 1022.Wherein, the surface of test specimen 20 has grating, reflexes to examination
On part 20 measurement light 1067 occurs on the surface of test specimen 20 reflect so as to formed demarcation light 1061 and diffraction so as to
The first light 1062 and the second light 1063 are formed, 1061 Jing diaphragms 1031 of light is demarcated and is transmitted on optical screen 1032 to form mark
Determine flare 1081.
Reflector mount 107 is located on Z-direction guide rail 1021.First reflecting mirror 1042 and 1043 adjustable ground of the second reflecting mirror set
On reflector mount 107, the first reflecting mirror 1042 and the second reflecting mirror 1043 along X to Y-direction in an arrangement.3rd reflection
1044 adjustable ground of mirror is located on X direction guiding rails 1022, semi-transparent semi-reflecting lens 1041 be located at light source 1033 and the 3rd reflecting mirror 1044 it
Between.Wherein, the measurement light 1067 reflexed to by the 3rd reflecting mirror 1044 on test specimen 20 is occurred on the surface of test specimen 20 instead
Penetrate to form the 3rd light 1064.4th reflecting mirror, 1045 adjustable ground is located on reflector mount 107.
Grating strain measurement apparatus 10 according to embodiments of the present invention are by being provided for the measurement light 1067 of transmission
Reflex to the 3rd reflecting mirror 1044 on test specimen 20 and for the 3rd light is reflexed to optical screen 1032, such that it is able to be formed
Disappear acoplanarity displacement hot spot.Thus after loading to the test specimen 20 with grating, can be by adjusting degree of freedom adjustable base
101 Z-direction translation stage 1013, the acoplanarity displacement hot spot that makes to disappear return to initial position, such that it is able to eliminate acoplanarity displacement to test
As a result interference.
Therefore, grating strain measurement apparatus 10 according to embodiments of the present invention can eliminate acoplanarity displacement to test result
Interference, so as to have the advantages that certainty of measurement is high.
As shown in Fig. 1-Fig. 7, the grating strain measurement apparatus 10 of some embodiments of the invention include that degree of freedom can
Adjust base 101, three-dimensional rotation platform 105, Z-direction guide rail 1021, X direction guiding rails 1022, diaphragm 1031, optical screen 1032, light source 1033, anti-
Penetrate mirror holder 107, camera 1035, semi-transparent semi-reflecting lens 1041, the first reflecting mirror 1042, the second reflecting mirror 1043, the 3rd reflecting mirror
1044th, the 4th reflecting mirror 1045, the 5th reflecting mirror 1046 and the 6th reflecting mirror 1047.
Wherein, camera 1035, optical screen 1032, diaphragm 1031, the first reflecting mirror 1042, the second reflecting mirror 1043, light source
1033rd, semi-transparent semi-reflecting lens 1041 and the composition X-direction strain testing light path of the test specimen with grating 20.Camera 1035, optical screen 1032,
Diaphragm 1031, the 5th reflecting mirror 1046, the 6th reflecting mirror 1047, light source 1033, semi-transparent semi-reflecting lens 1041 and the examination with grating
Part 20 constitutes Y-direction strain testing light path.Camera 1035, optical screen 1032, the 4th reflecting mirror 1045, the 3rd reflecting mirror 1044, light
Source 1033, semi-transparent semi-reflecting lens 1041 and the test specimen with grating 20 constitute the acoplanarity displacement light path that disappears.
One direction deformation measurement can be carried out individually with X-direction strain testing light path or Y-direction strain testing light path,
Both direction deformation measurement can be carried out using X-direction strain testing light path and Y-direction strain testing light path simultaneously.It is sharp when simultaneously
When both direction deformation measurement is carried out with X-direction strain testing light path and Y-direction strain testing light path, can directly obtain and have
The Poisson's ratio of the test specimen 20 of grating.
As shown in figure 1, reflector mount 107, diaphragm 1031, optical screen 1032 and camera 1035 are arranged in order in Z-direction.
As shown in Fig. 2 the first reflecting mirror 1042 and the second reflecting mirror 1043 along X to arrangement, the first reflecting mirror 1042 and
, along X to being movably arranged on reflector mount 107, the 5th reflecting mirror 1046 and the 6th reflecting mirror 1047 are along Y for two-mirror 1043
To arrangement, the 5th reflecting mirror 1046 and the 6th reflecting mirror 1047 are movably arranged on reflector mount 107 along Y-direction.
First reflecting mirror 1042, the second reflecting mirror 1043, the 5th reflecting mirror 1046 and 1047 adjustable ground of the 6th reflecting mirror
It is located on reflector mount 107.
Advantageously, light source 1033 can be laser instrument.The 1067 Jing semi-transparent semi-reflecting lens of measurement light that light source 1033 sends
On 1041 surfaces for reflexing to the test specimen 20 with grating, and there is reflection on the surface of test specimen 20 to form demarcation light
1061 and diffraction to form the first light 1062, the second light 1063, the 4th light 1065 and the 5th light 1066.
The reflected light loophole 1071 demarcated on 1061 Jing semi-transparent semi-reflecting lens 1041 of light, reflector mount 107 and diaphragm
1031 are transmitted on optical screen 1032 to form demarcation flare 1081.Wherein, light 1061 is demarcated perpendicular to light source 1033
The plane of the measurement light 1067, the plane that diaphragm 1031 is located and the place of optical screen 1032 that send.
Specifically, demarcation light 1061 is made by the aperture on diaphragm 1031 by adjusting degree of freedom adjustable base 101,
To ensure that the surface of test specimen 20 is vertical with light 1061 is demarcated.
First light 1062 is reflexed on optical screen 1032 to form an X to diffraction pattern by the first reflecting mirror 1042
1082, the second light 1063 is reflexed to form the 2nd X to diffraction pattern 1083 on optical screen 1032 by the second reflecting mirror 1043,
4th light 1065 is reflexed to form the first Y-direction diffraction pattern 1084 on optical screen 1032 by the 5th reflecting mirror 1046, and the 5th
Light 1066 is reflexed on optical screen 1032 to form the second Y-direction diffraction pattern 1085 by the 6th reflecting mirror 1047.
As shown in Fig. 2 reflector mount 107 is provided with the diffraction light loophole 1072 and diffraction for allowing X to pass through to diffraction light
Diffraction light loophole 1074 and diffraction light loophole 1075 that light loophole 1073 and permission Y-direction diffraction light are passed through.
The transmission of 1067 Jing semi-transparent semi-reflecting lens of measurement light 1041 and the 3rd reflecting mirror 1044 that light source 1033 sends is reflexed to
On the surface of the test specimen 20 with grating, and there is reflection on the surface of test specimen 20 to form the 3rd light 1064 and to spread out
Penetrate.3rd light 1064 is reflexed on optical screen 1032 to form the acoplanarity displacement hot spot 1086 that disappears by the 4th reflecting mirror 1045.
Six hot spots receiving on the collection optical screen 1032 of camera 1035, Jing computers analyze X to Y-direction diffraction pattern
Position, calculates the strain information of the test specimen 20 with grating according to Principle of Grating Diffraction.
In a specific example of the present invention, the first reflecting mirror 1042, the second reflecting mirror 1043, the 4th reflecting mirror
1045th, the 5th reflecting mirror 1046 and 1047 normal direction of the 6th reflecting mirror are changeably located on reflector mount 107.In other words, may be used
With to the first reflecting mirror 1042, the second reflecting mirror 1043, the 4th reflecting mirror 1045, the 5th reflecting mirror 1046 and the 6th reflecting mirror
1047 angular adjustments for carrying out pitching and rotation twocouese.
By adjusting the first reflecting mirror 1042, the second reflecting mirror 1043, the 5th reflecting mirror 1046 and the 6th reflecting mirror 1047,
The first X can be made to spread out to diffraction pattern 1082, the 2nd X to diffraction pattern 1083, the first Y-direction diffraction pattern 1084 and the second Y-direction
Penetrate hot spot 1085 and overlap with flare 1081 is demarcated, to ensure that X is coplanar to light and Y-direction light difference.Light is moved along Z-direction
Screen 1032, to make an X to diffraction pattern 1082, the 2nd X to diffraction pattern 1083, the first Y-direction diffraction pattern 1084, second
Y-direction diffraction pattern 1085 and demarcation flare 1081 are formed separately five hot spots, are subsequently measured.
Labelling disappears the initial position of acoplanarity displacement hot spot 1086, and then the test specimen 20 with grating is loaded, plus
The acoplanarity displacement produced during the load acoplanarity displacement hot spot 1086 that can cause to disappear is moved, by adjusting degree of freedom adjustable base 101
The acoplanarity displacement hot spot 1086 that makes to disappear of Z-direction translation stage 1013 return to initial position, it is possible thereby to eliminate acoplanarity displacement to test knot
The interference of fruit.
As shown in Fig. 2 in one embodiment of the invention, the first reflecting mirror 1042 passes through the first reflecting mirror slide rail 1091
Along X to being movably arranged on reflector mount 107, the second reflecting mirror 1043 is by the second reflecting mirror slide rail 1092 along X to removable
It is located on reflector mount 107 dynamicly, the 5th reflecting mirror 1046 is movably arranged at instead along Y-direction by the 3rd reflecting mirror slide rail 1093
Penetrate on mirror holder 107, the 6th reflecting mirror 1047 is movably arranged at reflector mount 107 along Y-direction by the 4th reflecting mirror slide rail 1094
On.It is possible thereby to along X to regulation the distance between the first reflecting mirror 1042 and the second reflecting mirror 1043 and along Y-direction regulation the 5th
The distance between reflecting mirror 1046 and the 6th reflecting mirror 1047.It is possible thereby to make grating strain measurement apparatus 10 be applied to different frequencies
The light source 1033 of the grating and different wave length of rate.
Reflector mount 107 is movably arranged on Z-direction guide rail 1021 along Z-direction.Camera 1035 can be solid by camera bearing
It is scheduled on X direction guiding rails 1022, optical screen 1032 is fixed on Z-direction guide rail 1021 by optical screen bearing, diaphragm 1031 is by diaphragm
Seat is fixed on Z-direction guide rail 1021.
As shown in figure 3, light source 1033 passes through light source support along X to being movably arranged on X direction guiding rails 1022, it is semi-transparent semi-reflecting
Mirror 1041 passes through semi-transparent semi-reflecting lens bearing along X to being movably arranged on X direction guiding rails 1022, and the 3rd reflecting mirror 1044 is by reflection
Mirror bearing is along X to being movably arranged on X direction guiding rails 1022.
Advantageously, camera bearing, optical screen bearing, diaphragm retainer, light source support, semi-transparent semi-reflecting lens bearing and mirror mount
Height can adjust, to make camera 1035, diaphragm 1031, optical screen 1032, light source 1033, semi-transparent semi-reflecting lens 1041 and the 3rd
Reflecting mirror 1044 can be moved in Y-direction.That is, light source 1033, semi-transparent semi-reflecting lens 1041, the 3rd reflecting mirror 1044, light
Door screen 1031, optical screen 1032 and camera 1035 are movably disposed along Y-direction.
X direction guiding rails 1022 are movably arranged on Z-direction guide rail 1021 along Z-direction.As shown in figure 1, degree of freedom adjustable base 101
Y-direction lifting platform 1011, X can be included to translation stage 1012 and Z-direction translation stage 1013.X is located at Y-direction lifting platform to translation stage 1012
On 1011, Z-direction translation stage 1013 is located at X to translation stage 1012, and Z-direction guide rail 1021 is located on Z-direction translation stage 1013.
In deformation test, target is the in-plane deformation for reliably obtaining test specimen, and the Rigid Body in Rotation With of test specimen is not closed
Note.Existing diffraction grating strain transducer method is easily affected by the Rigid Body in Rotation With of test specimen, so as to cause certainty of measurement
Decline.
As shown in figure 1, grating strain measurement apparatus 10 are further included around X to, Y-direction and the three-dimensional rotation platform of Z-direction rotation
105, three-dimensional rotation platform 105 is located on degree of freedom adjustable base 101, and Z-direction guide rail 1021 is located on three-dimensional rotation platform 105.
If the test specimen 20 with grating produce in loading procedure around X to or Y-direction rotation, can be three-dimensional by adjusting
The X of turntable 105 to or Y-direction rotation, make demarcation light 1061 again through the aperture on diaphragm 1031, it is possible thereby to eliminate tool
The test specimen 20 for having grating produce in loading procedure around X to or Y-direction the interference that causes of rotation, such that it is able to further improve
The certainty of measurement of grating strain measurement apparatus 10.
Describe in detail below with reference to Fig. 1-Fig. 7 and measured using grating strain measurement apparatus 10 according to embodiments of the present invention
The process of the Young's moduluss and Poisson's ratio of aluminum alloy materials.Wherein, test specimen 20 is made up of aluminum alloy materials, the grating on test specimen 20
For the orthogonal grating that frequency is f=1200 lines/mm, the wavelength of light source 1033 is λ=532nm.According to grating equation sin θ=λ f,
Can determine that θ=39.67 degree.
Test specimen 20 is clamped in Material Testing Machine, applying preloads 100N.Degree of freedom adjustable base 101 is adjusted, so as to
The measurement light 1067 that light source 1033 sends is made to impinge perpendicularly on the surface of test specimen 20.Table of the measurement light 1067 in test specimen 20
There is reflection on face and light 1061 is demarcated to be formed, demarcate on 1061 Jing semi-transparent semi-reflecting lens 1041 of light, reflector mount 107
Reflected light loophole 1071 and diaphragm 1031 are incided on optical screen 1032.
The Z-direction translation stage 1013 of degree of freedom adjustable base 101 is adjusted, reflector mount 107 to be made to the surface of test specimen 20
Spacing be 241 millimeters, adjust the X of degree of freedom adjustable base 101 to translation stage 1012 and Y-direction lifting platform 1011, to make the
One light 1062, the second light 1063, the 4th light 1065 and the 5th light 1066 respectively through diffraction light loophole 1072, spread out
Penetrate light loophole 1073, diffraction light loophole 1074 and diffraction light loophole 1075.
Optical screen 1032 is moved along Z-direction, is 482 millimeter with the spacing of test specimen 20 to make optical screen 1032.Adjust first to reflect
The distance between mirror 1042 and the second reflecting mirror 1043 to 400 millimeters and the 5th reflecting mirror 1046 of regulation and the 6th reflecting mirror
The distance between 1047 to 400 millimeters, X is made to diffraction light and Y-direction diffraction light (the first light 1062, the second light the 1063, the 4th
1066) light 1065 and the 5th light is reflected on optical screen 1032.
The first reflecting mirror 1042, the second reflecting mirror 1043, the 5th reflecting mirror 1046 and the 6th reflecting mirror 1047 are adjusted, so as to
An X is made to diffraction pattern 1082, the 2nd X to diffraction pattern 1083, the first Y-direction diffraction pattern 1084 and the second Y-direction diffraction light
Speckle 1085 overlaps with flare 1081 is demarcated, and now X is coplanar to light and Y-direction light is coplanar.Optical screen 1032 is adjusted, optical screen is made
1032 move -10 millimeters along Z-direction, to make an X spread out to diffraction pattern 1082, the 2nd X to diffraction pattern 1083, the first Y-direction
Penetrate hot spot 1084, the second Y-direction diffraction pattern 1085 and demarcate flare 1081 and be formed separately five hot spots.
The 3rd reflecting mirror 1044 is adjusted, to make the light Jing test specimens 20 through the transmission of semi-transparent semi-reflecting lens 1041 reflex to the 4th
On reflecting mirror 1045.The 4th reflecting mirror 1045 is adjusted, the 3rd light 1064 is reflexed on optical screen 1032 and is disappeared from face to be formed
Displacement hot spot 1086, labelling disappear the initial position of acoplanarity displacement hot spot 1086.Now, the position of this six hot spots is initial time
Facula position.
Test specimen 20 is loaded, in loading procedure, test specimen 20 produces acoplanarity displacement, so as to cause optical screen 1032 to receive
The acoplanarity displacement hot spot 1086 that disappears move.By the Z-direction translation stage 1013 for adjusting degree of freedom adjustable base 101, can make to disappear from
Face displacement hot spot 1086 returns to initial position, such that it is able to eliminate interference of the acoplanarity displacement to test result
If test specimen 20 produces the rotation around X to (or Y-direction) in loading procedure, can be by making three-dimensional rotation platform 105
Around X to the rotation of (or Y-direction), make reflected light of the demarcation light 1061 again on Jing semi-transparent semi-reflecting lens 1041, reflector mount 107 saturating
Unthreaded hole 1071 and diaphragm 1031 are incided on optical screen 1032, such that it is able to eliminate the interference that the rotation of test specimen 20 is caused.
Six light spot images before and after loading (deformation) are gathered respectively using camera 1035, and the light spot image for collecting is led
Enter computer 30, determine X to diffraction pattern and the locus of Y-direction diffraction pattern.By the facula position under different loads with it is first
Begin the moment facula position subtract each other, such that it is able to obtain the displacement of hot spot, be calculated X to strain and Y-direction strain.
From X to strain and the strain calculation of Y-direction obtain Poisson's ratio, combine load, the sectional area of test specimen 20 and the Y-direction strain gauge for applying
Calculate Young's moduluss.
In describing the invention, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or
Position relationship, is for only for ease of the description present invention and simplifies description, rather than indicates or imply that the device or element of indication must
With specific orientation, with specific azimuth configuration and operation, therefore must be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include at least one this feature.In describing the invention, " multiple " are meant that at least two, such as two, three
It is individual etc., unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or it is integral；Can be that machinery connects
Connect, or electrically connect or can communicate each other；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be with
It is connection or the interaction relationship of two elements of two element internals, unless otherwise clearly restriction.For this area
For those of ordinary skill, above-mentioned term concrete meaning in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be with
It is the first and second feature directly contacts, or the first and second features is by intermediary mediate contact.And, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
Example ", or the description of " some examples " etc. mean specific features with reference to the embodiment or example description, structure, material or spy
Point is contained at least one embodiment or example of the present invention.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be with office
Combined in one or more embodiments or example in an appropriate manner.Additionally, in the case of not conflicting, the skill of this area
The feature of the different embodiments or example described in this specification and different embodiments or example can be tied by art personnel
Close and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
Claims (10)
1. a kind of grating strain measurement apparatus, it is characterised in that include：
Degree of freedom adjustable base；
Z-direction guide rail and X direction guiding rails, the Z-direction guide rail are located on the degree of freedom adjustable base, and the X direction guiding rails are located at the Z
On direction guiding rail；
Diaphragm, the diaphragm are located on the Z-direction guide rail；
Optical screen, the optical screen are movably arranged on the Z-direction guide rail along Z-direction；
For sending the light source of measurement light, the light source is located on the X direction guiding rails,
The semi-transparent semi-reflecting lens on test specimen, the semi-transparent semi-reflecting lens are reflexed to for transmission measurement light and by the measurement light
Be located on the X direction guiding rails, wherein the surface of the test specimen has grating, the measurement light on the test specimen is reflexed to described
There is reflection on the surface of test specimen light and diffraction are demarcated to form the first light and the second light, the mark to be formed
Diaphragm described in determining light Jing is transmitted on the optical screen demarcates flare to be formed；
Reflector mount, the reflector mount are located on the Z-direction guide rail；
For first light is reflexed on the optical screen to form the first reflecting mirror of the first hot spot and for will be described
Second light reflexes on the optical screen to form the second reflecting mirror of the second hot spot, first reflecting mirror and described second anti-
Penetrate mirror adjustable ground to be located on the reflector mount, first reflecting mirror and second reflecting mirror along X to Y-direction in one
Individual arrangement；
For the measurement light of transmission to be reflexed to the 3rd reflecting mirror on test specimen, the 3rd reflecting mirror adjustable ground is located at institute
State on X direction guiding rails, the semi-transparent semi-reflecting lens are located between the light source and the 3rd reflecting mirror, wherein anti-by the described 3rd
Penetrate mirror reflex on the test specimen measurement light occurs on the surface of the test specimen reflect to form the 3rd light；
For the 3rd light is reflexed on the optical screen to form the 4th reflecting mirror of acoplanarity displacement hot spot of disappearing, described the
Four reflecting mirror adjustable grounds are located on the reflector mount；With
For gathering the demarcation flare, first hot spot, second hot spot and the acoplanarity displacement hot spot that disappears
Camera.
2. grating strain measurement apparatus according to claim 1, it is characterised in that reflexed to by the semi-transparent semi-reflecting lens
There is diffraction to form the 4th light and the 5th light in the measurement light on the test specimen on the surface of the test specimen, described
Grating strain measurement apparatus are further included for the 4th light being reflexed on the optical screen to form the 3rd hot spot
5th reflecting mirror and for by the 5th light reflex on the optical screen with formed the 4th hot spot the 6th reflecting mirror, it is described
5th reflecting mirror and the 6th reflecting mirror adjustable ground are located on the reflector mount, the 5th reflecting mirror and the described 6th
Reflecting mirror along X to Y-direction in another arrangement.
3. grating strain measurement apparatus according to claim 2, it is characterised in that first reflecting mirror and described second
Along X to arrangement, the 5th reflecting mirror and the 6th reflecting mirror are arranged reflecting mirror along Y-direction, first reflecting mirror and described
, along X to being movably arranged on the reflector mount, the 5th reflecting mirror and the 6th reflecting mirror are along Y-direction for second reflecting mirror
It is movably arranged on the reflector mount.
4. grating strain measurement apparatus according to claim 3, it is characterised in that the reflector mount is removable along Z-direction
Be located on the Z-direction guide rail.
5. grating strain measurement apparatus according to any one of claim 2-4, it is characterised in that first reflection
Mirror, second reflecting mirror and the 4th reflecting mirror are changeably located at the reflection to the 6th reflecting mirror normal direction
On mirror holder.
6. grating strain measurement apparatus according to claim 1, it is characterised in that the light source, the semi-transparent semi-reflecting lens
It is with the 3rd reflecting mirror along X to being movably disposed, the light source, the semi-transparent semi-reflecting lens, the 3rd reflecting mirror, described
Diaphragm, the optical screen and the camera are movably disposed along Y-direction.
7. grating strain measurement apparatus according to claim 6, it is characterised in that the demarcation light is perpendicular to the light
The plane of measurement light, the plane that the diaphragm is located and optical screen place that source sends.
8. grating strain measurement apparatus according to claim 7, it is characterised in that the light source is laser instrument.
9. grating strain measurement apparatus according to claim 8, it is characterised in that the degree of freedom adjustable base includes：
Y-direction lifting platform；
To translation stage, the X is located on the Y-direction lifting platform X to translation stage；With
Z-direction translation stage, the Z-direction translation stage are located at the X to translation stage, and the Z-direction guide rail is located on the Z-direction translation stage.
10. grating strain measurement apparatus according to claim 9, it is characterised in that further include around X to, Y-direction and Z
To the three-dimensional rotation platform of rotation, the three-dimensional rotation platform is located on the degree of freedom adjustable base, and the Z-direction guide rail is located at described
On three-dimensional rotation platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510067386.2A CN104613890B (en) | 2015-02-09 | 2015-02-09 | Optical grating strain measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510067386.2A CN104613890B (en) | 2015-02-09 | 2015-02-09 | Optical grating strain measurement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104613890A CN104613890A (en) | 2015-05-13 |
| CN104613890B true CN104613890B (en) | 2017-04-19 |
Family
ID=53148451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510067386.2A Active CN104613890B (en) | 2015-02-09 | 2015-02-09 | Optical grating strain measurement device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104613890B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106872283B (en) * | 2017-01-13 | 2020-08-25 | 西南交通大学 | Young modulus micro-elongation measurement method based on grating diffraction |
| CN109405635B (en) * | 2018-09-17 | 2020-10-30 | 南京理工大学 | Shadow photography station calibration system with vertically orthogonal camera optical axis and debugging method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5214489A (en) * | 1990-04-25 | 1993-05-25 | Nikon Corporation | Aligning device for exposure apparatus |
| CN101339012A (en) * | 2008-08-26 | 2009-01-07 | 北京交通大学 | Rolling angle measurement method and device based on grating |
| CN101608905A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | A kind of measuring method of little opening displacement of microcrack |
| CN102713504A (en) * | 2010-12-17 | 2012-10-03 | 松下电器产业株式会社 | Surface shape measurement method and surface shape measurement device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005030751A1 (en) * | 2005-06-29 | 2007-01-11 | Hottinger Baldwin Messtechnik Gmbh | Optical strain gauge |
| US7477362B2 (en) * | 2005-09-27 | 2009-01-13 | Nanyang Technological University | Moiré interferometric strain sensor |
-
2015
- 2015-02-09 CN CN201510067386.2A patent/CN104613890B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5214489A (en) * | 1990-04-25 | 1993-05-25 | Nikon Corporation | Aligning device for exposure apparatus |
| CN101339012A (en) * | 2008-08-26 | 2009-01-07 | 北京交通大学 | Rolling angle measurement method and device based on grating |
| CN101608905A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | A kind of measuring method of little opening displacement of microcrack |
| CN102713504A (en) * | 2010-12-17 | 2012-10-03 | 松下电器产业株式会社 | Surface shape measurement method and surface shape measurement device |
Non-Patent Citations (2)
| Title |
|---|
| Investigation of the crack growth behavior of Inconel 718 by high temperature Moire interferometry;XINGBO LIU;《JOURNAL OF MATERIALS SCIENCE 》;20041231(第39期);第1967-1973页 * |
| Optical strain sensor based on diffracrion grating and surface plasmon reaonance heteridyne interferometer;Jiun-You Lin;《Sensors and Actuators A: Physical 》;20130430;第193卷;第233-237页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104613890A (en) | 2015-05-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104111163B (en) | Convex lens focal length measuring device and method | |
| CN105829828B (en) | Method for measuring penetration depth of laser beam into workpiece and laser processing equipment | |
| JP3517903B2 (en) | Interferometer | |
| EP3250956B1 (en) | Microscopy system with auto-focus adjustment by low-coherence interferometry | |
| CN109579780A (en) | One kind being based on polarization spectro auto-collimation three-dimensional perspective measuring device and method | |
| CN104360095B (en) | A kind of method for measuring instantaneous rotation speed based on Beams, apparatus and system | |
| US20140067316A1 (en) | Measuring apparatus, detector deviation monitoring method and measuring method | |
| CN104713489B (en) | A kind of three-dimensional moire interferometer and material surface measuring method | |
| CN104808254B (en) | High-precision absolute gravimeter optics frequency multiplier type laser interference system and application | |
| CN105806525A (en) | Residual stress test device based on speckle pattern interferometry | |
| CN104359655A (en) | Off-axis parabolic mirror focal length detection device and method | |
| CN108226036A (en) | Integrated laser material fuel factor measuring device based on double grating shear interference | |
| CN104613890B (en) | Optical grating strain measurement device | |
| CN108474642A (en) | Use inclination Object light wave and the interferometer with Feisuo Objective Lens for Interferometer | |
| US6674521B1 (en) | Optical method and system for rapidly measuring relative angular alignment of flat surfaces | |
| CN107966279B (en) | Multi-view-field wavefront measuring device and method for telescope system | |
| CN109341519A (en) | For determining the method and system of the parameter in the interest region in structure | |
| CN103471834B (en) | The device of curved rigidity is accurately measured under high and low temperature environment | |
| CN203053853U (en) | Auxiliary device for accurately calibrating light beams for spectrum equipment | |
| CN103018175B (en) | Auxiliary device for accurately calibrating light beams of spectrum equipment | |
| CN104321633B (en) | For measuring the system of interval region in substrate | |
| TW201229495A (en) | Optical measuring system with illumination provided through a viod in a collecting lens | |
| KR101373709B1 (en) | The measurement device and the method of the principle axis and retardation of the 3-dimensional film | |
| CN103543075B (en) | Bendind rigidity method of testing and device under high and low temperature environment | |
| Halpern et al. | Laser fusion microballoon wall‐thickness measurements: A comparative study |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |