CN104606945A - Chemical filter element cleaning device and chemical filter element cleaning method - Google Patents

Chemical filter element cleaning device and chemical filter element cleaning method Download PDF

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Publication number
CN104606945A
CN104606945A CN201510052282.4A CN201510052282A CN104606945A CN 104606945 A CN104606945 A CN 104606945A CN 201510052282 A CN201510052282 A CN 201510052282A CN 104606945 A CN104606945 A CN 104606945A
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CN
China
Prior art keywords
filter core
soaking barrel
cleaned
barrel groove
cleaning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510052282.4A
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Chinese (zh)
Inventor
黄磊
建发
李鹏
缪俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huahong Grace Semiconductor Manufacturing Corp
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Shanghai Huahong Grace Semiconductor Manufacturing Corp
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Application filed by Shanghai Huahong Grace Semiconductor Manufacturing Corp filed Critical Shanghai Huahong Grace Semiconductor Manufacturing Corp
Priority to CN201510052282.4A priority Critical patent/CN104606945A/en
Publication of CN104606945A publication Critical patent/CN104606945A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D41/00Regeneration of the filtering material or filter elements outside the filter for liquid or gaseous fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2201/00Details relating to filtering apparatus
    • B01D2201/08Regeneration of the filter
    • B01D2201/085Regeneration of the filter using another chemical than the liquid to be filtered

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The invention provides a chemical filter element cleaning device and a chemical filter element cleaning method. The method comprises the following steps: putting a filter element to be cleaned and recycled into a soaking tank, soaking the filter element by using chemicals, and removing the attached high polymer organic matters inside the filter element to be cleaned and recycled, so that the filter element to be cleaned and recycled can be reutilized, and the cost increase caused by frequent replacement is avoided. Furthermore, according to the chemical filter element cleaning method provided by the invention, the filter element is soaked by adopting hydrogen peroxide of the preset concentration, and the high polymer organic matters attached to the interior of the filter element to be cleaned and recycled can be subjected to oxidative decomposition, so that the high polymer organic matters are eliminated. Therefore, the filter element to be cleaned and recycled can be restored to a serviceable condition, and the cost is reduced.

Description

Filter core chemically-cleaning device and cleaning method
Technical field
The present invention relates to field of semiconductor manufacture, particularly relate to a kind of filter core chemically-cleaning device and cleaning method.
Background technology
In ultra-pure water manufacture process, RO film is an important process unit, and before RO, usually all need use safety filter, security filter is using filter core as filter medium, for pollutants such as some particles in filtered water.Under security filter import and export have the condition of certain pressure reduction, trickle physical particles retained and is separated, reaching the object removing particulate matter.In use, along with the increase of trapped substance, filter core inlet and outlet pressure missionary society slowly increases security filter.Usually, in water treatment system, when definition pressure reduction is greater than 0.1MPa, more renew cartridge is needed.
After the ultrapure water system raw water of waterworks water source switching of company, the replacement frequency of filter core obviously rises.Check that ultra-pure water pretreatment system equipment operational factor is all within normal range (NR) through in all directions, the reason of final investigation is that the change of water quality of new water head site makes waterworks change treatment process, original treatment and purification technique has the link increasing anionic polymer and drop into, finally the safety filter element life-span of terminal use is directly caused greatly to shorten, replacement frequency increases, security filter consumptive material replacement cost increases greatly, up to original 5.6 times.
Expensive due to filter core, how to reduce the frequency of filter element replacing, reducing costs is the technical problem that those skilled in the art are badly in need of solving.
Summary of the invention
The object of the present invention is to provide a kind of filter core chemically-cleaning device and cleaning method, the frequency of filter element replacing can be reduced, reduce costs.
To achieve these goals, the present invention proposes a kind of filter core chemically-cleaning device, comprise: soaking barrel groove, water inlet pipe, chemicals QC and overflow pipe, wherein, described water inlet pipe, chemicals QC are all connected with described soaking barrel groove, described overflow pipe is connected with described soaking barrel groove, and near the top of described soaking barrel groove.
Further, in described filter core chemically-cleaning device, also comprise fixed head, described fixed head is located in described soaking barrel groove, and is provided with multiple hole, to be cleanedly recycles filter core for fixing.
Further, in described filter core chemically-cleaning device, described hole size is greater than the described size recycling filter core to be cleaned.
Further, in described filter core chemically-cleaning device, described hole number is 6.
Further, in described filter core chemically-cleaning device, also comprise drainpipe and draining valve, described drainpipe is connected with described soaking barrel trench bottom, and described draining valve is located on described drainpipe.
Further, in described filter core chemically-cleaning device, also comprise pedal and top cover, described pedal is close to outside described soaking barrel groove, and described top cover is screwed in the top place near described soaking barrel groove.
Further, in described filter core chemically-cleaning device, also comprise washing bucket groove, described washing bucket groove is connected with described water inlet pipe.
The present invention proposes a kind of filter core chemical cleaning method, adopt any one filter core chemically-cleaning device as described above, comprise step:
The filter core that recycles to be cleaned is put into soaking barrel groove;
Open water inlet pipe, deionized water is injected to described soaking barrel groove, describedly to be cleanedly recycle filter core predetermined altitude until flood;
Open chemicals QC, hydrogen peroxide is injected, until the hydrogen peroxide in described soaking barrel groove reaches predetermined concentration to described soaking barrel groove;
The described filter core that recycles to be cleaned is made to soak the scheduled time.
Further, in described filter core chemical cleaning method, to be cleanedly recycling before filter core puts into soaking barrel groove by described, also comprise pre-wash step, described pre-wash step is:
The described filter core that recycles to be cleaned is put into washing bucket groove, adopts deionized water to clean it.
Further, in described filter core chemical cleaning method, soak after the scheduled time the described filter core that recycles to be cleaned completing, also comprise secondary cleaning step, described secondary cleaning step is:
The described filter core that recycles to be cleaned is put into washing bucket groove, adopts deionized water repeatedly to clean it.
Further, in described filter core chemical cleaning method, described predetermined altitude is more than or equal to 10cm.
Further, in described filter core chemical cleaning method, the predetermined concentration of described hydrogen peroxide is volume range is 0.3% ~ 1%.
Compared with prior art, beneficial effect of the present invention is mainly reflected in: the filter core that recycles to be cleaned is put into soaking barrel groove, and use chemical substance to soak, thus remove the macromolecule organic recycling filter core inside and adhere to be cleaned, the filter core that recycles to be cleaned is used again, and avoiding often changing the cost caused increases.
Further, in the filter core chemical cleaning method proposed, the hydrogen peroxide of predetermined concentration is adopted to soak, can will adhere to the macromolecule organic oxidation Decomposition recycling filter core inside and adhere to be cleaned, thus got rid of, make the filter core that recycles to be cleaned return to serviceable condition, reduce costs.
Accompanying drawing explanation
Fig. 1 is the structural representation of filter core chemically-cleaning device in one embodiment of the invention;
Fig. 2 is the top view of fixed head in one embodiment of the invention;
Fig. 3 is the flow chart of filter core chemical cleaning method in one embodiment of the invention.
Detailed description of the invention
Below in conjunction with schematic diagram, filter core chemically-cleaning device of the present invention and cleaning method are described in more detail, which show the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, a large amount of implementation detail must be made to realize the specific objective of developer, such as, according to regarding system or the restriction about business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, more specifically the present invention is described by way of example with reference to accompanying drawing.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
The filter core of inventor to former security filter disintegrates, and does not find pollutant in cartridge surface.Then use medicine to immerse method to improve after situation infers pollutant according to filtration time and find by cutting the flat film of former security filter filter core, the particle that the tamper master causing filter core blocked except for flows into increases, but the Al (OH) that filter core film inside adheres to 2deng macromolecule organic cause, this macromolecule organic remains in cartridge surface will cause that water flux reduces, pressure reduction rises within a short period of time, caused filter core to block.
Recognize the reason resulted in blockage, inventor by experiment test comparison find out a kind of semicon industry ultrapure water system security filter filter core can be allowed to reuse soak, study and produce and be a kind ofly applied to the cleaning device and cleaning method that this security filter filter element cleaning recycles, recycle use to enable filter core.
Please refer to Fig. 1, in the present embodiment, a kind of filter core chemically-cleaning device, comprising: soaking barrel groove 10, water inlet pipe 15, chemicals QC 16 and overflow pipe 14, wherein, described water inlet pipe 15, chemicals QC 16 are all connected with described soaking barrel groove 10, described overflow pipe 14 is connected with described soaking barrel groove 10, and near the top of described soaking barrel groove 10, preferably, the height of entering is placed, with the macromolecule organic facilitating follow-up discharge oxidation Decomposition to go out higher than the filter core 20 that recycles to be cleaned.
In the present embodiment, filter core chemically-cleaning device also comprises fixed head 11, and described fixed head 11 is located in described soaking barrel groove 10, and is provided with multiple hole 18, as shown in Figure 2, to be cleanedly recycles filter core 20 for fixing.The described filter core 20 that recycles to be cleaned slightly larger than the described size recycling filter core 20 to be cleaned, can be put into hole 18 to facilitate, thus plays the fixing effect recycling filter core 20 to be cleaned by the size of described hole 18.Described hole 18 number is 6, and its concrete number can be selected according to different requirements.
In addition, in the present embodiment, filter core chemically-cleaning device also comprises drainpipe 12 and draining valve 13, described drainpipe 12 is connected with bottom described soaking barrel groove 10, described draining valve 13 is located on described drainpipe 12, when cleaning or after having soaked, when needing the liquid in soaking barrel groove 10 to discharge, draining valve 13 can be opened and carry out discharge opeing.
Due under normal circumstances, the length recycling filter core 20 to be cleaned is longer than 1m, therefore the height of soaking barrel groove 10 is inevitable higher than the height recycling filter core 20 to be cleaned, conveniently the filter core 20 that recycles to be cleaned is put into soaking barrel groove 10 by personnel, filter core chemically-cleaning device also comprises pedal 17, described pedal 17 is close to outside described soaking barrel groove 10, filter core chemically-cleaning device also comprises top cover 19, described top cover 19 is screwed in the top place near described soaking barrel groove 10, for prevent to be cleaned recycle filter core 20 floating go out, cannot clean preferably it.
Please refer to Fig. 3, in the another aspect of the present embodiment, propose a kind of filter core chemical cleaning method, adopt filter core chemically-cleaning device as described above, comprise step:
S10: the filter core 20 that recycles to be cleaned is put into soaking barrel groove 10;
S20: open water inlet pipe 15, injects deionized water to described soaking barrel groove 10, describedly to be cleanedly recycles filter core 20 predetermined altitude until flood;
S30: open chemicals QC 16, injects hydrogen peroxide to described soaking barrel groove 10, until the hydrogen peroxide in described soaking barrel groove 10 reaches predetermined concentration;
S40: make the described filter core 20 that recycles to be cleaned soak the scheduled time.
To be cleanedly recycling before filter core puts into soaking barrel groove by described, namely before step S10, also comprise pre-wash step, described pre-wash step is:
The described filter core 20 that recycles to be cleaned being put into washing bucket groove, adopting deionized water to clean it, for removing some granule foreigns etc.
In step S20, open water inlet pipe 15, deionized water is injected to described soaking barrel groove 10, describedly to be cleanedly recycle filter core 20 predetermined altitude until flood, usual predetermined altitude is 10cm, to be cleanedly recycles filter core 20 to guarantee that deionized water can be flooded completely; If there is the liquid of process last time in soaking barrel groove 10, first can open drainpipe 12 and draining valve 13 and discharge residual liquid, to facilitate the cleaning carried out next time.
In step s 30, hydrogen peroxide is injected to described soaking barrel groove 10, until the hydrogen peroxide in described soaking barrel groove 10 reaches predetermined concentration, described predetermined concentration is volume range is 0.3% ~ 1%, is preferably 0.5%, if the concentration of hydrogen peroxide is too low, then cleaning performance is bad, if hydrogen peroxide concentration is too high, cleaning performance can reach capacity about 0.5% on the one hand, then may treat clean cycle on the other hand and utilize filter core 20 to damage.
Then, in step s 40, usually need to treat clean cycle utilize filter core 20 to carry out a week about immersion, the surface of soaking barrel groove 10 liquid is floated to after making macromolecule organic oxidized, thus the mode of deionized water can be increased by opening water inlet pipe 15, the macromolecule organic on surface is drained into trench by overflow pipe 14, and then reaches the effect removing macromolecule organic, the filter core 20 that recycles to be cleaned can be recycled.
In order to further reach the effect of cleaning, soak after the scheduled time the described filter core that recycles to be cleaned completing, namely after step s 40 is complete, also comprise secondary cleaning step, described secondary cleaning step is:
The described filter core that recycles to be cleaned is put into washing bucket groove, adopts deionized water repeatedly to clean it, be generally 3 cleanings, to remove some residual impurity etc.
To sum up, in the filter core chemically-cleaning device provided in the embodiment of the present invention and cleaning method, the filter core that recycles to be cleaned is put into soaking barrel groove, and use chemical substance to soak, thus remove the macromolecule organic recycling filter core inside and adhere to be cleaned, the filter core that recycles to be cleaned is used again, and avoiding often changing the cost caused increases.Further, in the filter core chemical cleaning method proposed, the hydrogen peroxide of predetermined concentration is adopted to soak, can will adhere to the macromolecule organic oxidation Decomposition recycling filter core inside and adhere to be cleaned, thus got rid of, make the filter core that recycles to be cleaned return to serviceable condition, reduce costs.
Above are only the preferred embodiments of the present invention, any restriction is not played to the present invention.Any person of ordinary skill in the field; in the scope not departing from technical scheme of the present invention; the technical scheme disclose the present invention and technology contents make the variations such as any type of equivalent replacement or amendment; all belong to the content not departing from technical scheme of the present invention, still belong within protection scope of the present invention.

Claims (12)

1. a filter core chemically-cleaning device, it is characterized in that, comprise: soaking barrel groove, water inlet pipe, chemicals QC and overflow pipe, wherein, described water inlet pipe, chemicals QC are all connected with described soaking barrel groove, described overflow pipe is connected with described soaking barrel groove, and near the top of described soaking barrel groove.
2. filter core chemically-cleaning device as claimed in claim 1, it is characterized in that, also comprise fixed head, described fixed head is located in described soaking barrel groove, and is provided with multiple hole, to be cleanedly recycles filter core for fixing.
3. filter core chemically-cleaning device as claimed in claim 2, it is characterized in that, described hole size is greater than the described size recycling filter core to be cleaned.
4. filter core chemically-cleaning device as claimed in claim 2, it is characterized in that, described hole number is 6.
5. filter core chemically-cleaning device as claimed in claim 1, it is characterized in that, also comprise drainpipe and draining valve, described drainpipe is connected with described soaking barrel trench bottom, and described draining valve is located on described drainpipe.
6. filter core chemically-cleaning device as claimed in claim 1, it is characterized in that, also comprise pedal and top cover, described pedal is close to outside described soaking barrel groove, and described top cover is screwed in the top place near described soaking barrel groove.
7. filter core chemically-cleaning device as claimed in claim 1, it is characterized in that, also comprise washing bucket groove, described washing bucket groove is connected with described water inlet pipe.
8. a filter core chemical cleaning method, adopts any one the filter core chemically-cleaning device as described in claim 1 to 7, it is characterized in that, comprise step:
The filter core that recycles to be cleaned is put into soaking barrel groove;
Open water inlet pipe, deionized water is injected to described soaking barrel groove, describedly to be cleanedly recycle filter core predetermined altitude until flood;
Open chemicals QC, hydrogen peroxide is injected, until the hydrogen peroxide in described soaking barrel groove reaches predetermined concentration to described soaking barrel groove;
The described filter core that recycles to be cleaned is made to soak the scheduled time.
9. filter core chemical cleaning method as claimed in claim 8, is characterized in that, to be cleanedly recycling before filter core puts into soaking barrel groove by described, also comprise pre-wash step, described pre-wash step is:
The described filter core that recycles to be cleaned is put into washing bucket groove, adopts deionized water to clean it.
10. filter core chemical cleaning method as claimed in claim 8, is characterized in that, to be cleanedly recycle after filter core soaks the scheduled time to described completing, also comprise secondary cleaning step, described secondary cleaning step is:
The described filter core that recycles to be cleaned is put into washing bucket groove, adopts deionized water repeatedly to clean it.
11. filter core chemical cleaning methods as claimed in claim 8, it is characterized in that, described predetermined altitude is more than or equal to 10cm.
12. filter core chemical cleaning methods as claimed in claim 8, is characterized in that, the predetermined concentration of described hydrogen peroxide is volume range is 0.3% ~ 1%.
CN201510052282.4A 2015-01-31 2015-01-31 Chemical filter element cleaning device and chemical filter element cleaning method Pending CN104606945A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110760389A (en) * 2019-10-21 2020-02-07 河北冀研能源科学技术研究院有限公司 Chemical cleaning agent for filter element of pre-filter of condensate polishing system and application
CN112973212A (en) * 2021-02-22 2021-06-18 宜宾丝丽雅股份有限公司 Method for cleaning filter element for viscose production

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101224391A (en) * 2007-10-17 2008-07-23 中国铝业股份有限公司 Water curing reverse osmosis membrane chemical cleaning method
CN101496975A (en) * 2008-01-28 2009-08-05 张尧君 Method for cleaning filtering piece or filtering element stained with polyurethane
CN202569808U (en) * 2012-06-01 2012-12-05 浙江沁园水处理科技有限公司 Portable intelligent filter element cleaning device
CN203507823U (en) * 2013-07-09 2014-04-02 太平洋水处理工程有限公司 Online restoring immersion ultrafiltration membrane pool for pumping water

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101224391A (en) * 2007-10-17 2008-07-23 中国铝业股份有限公司 Water curing reverse osmosis membrane chemical cleaning method
CN101496975A (en) * 2008-01-28 2009-08-05 张尧君 Method for cleaning filtering piece or filtering element stained with polyurethane
CN202569808U (en) * 2012-06-01 2012-12-05 浙江沁园水处理科技有限公司 Portable intelligent filter element cleaning device
CN203507823U (en) * 2013-07-09 2014-04-02 太平洋水处理工程有限公司 Online restoring immersion ultrafiltration membrane pool for pumping water

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110760389A (en) * 2019-10-21 2020-02-07 河北冀研能源科学技术研究院有限公司 Chemical cleaning agent for filter element of pre-filter of condensate polishing system and application
CN112973212A (en) * 2021-02-22 2021-06-18 宜宾丝丽雅股份有限公司 Method for cleaning filter element for viscose production

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