CN104584186B - Discharge lamp - Google Patents
Discharge lamp Download PDFInfo
- Publication number
- CN104584186B CN104584186B CN201380044279.7A CN201380044279A CN104584186B CN 104584186 B CN104584186 B CN 104584186B CN 201380044279 A CN201380044279 A CN 201380044279A CN 104584186 B CN104584186 B CN 104584186B
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- Prior art keywords
- heat carrier
- electrode
- recess
- lamp
- discharge lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
- H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes
Landscapes
- Discharge Lamp (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The discharge lamp of the present invention has discharge tube and is arranged in the pair of electrodes in described discharge tube, and at least one electrode has heat carrier, and this heat carrier is sealing in the confined space that electrode interior is formed.When lamp is lighted, described heat carrier is liquid condition, and after lamp extinguishes, described heat carrier solidifies and to form recess in the way of the electrode support rod side contrary with electrode front.Stress is reduced by forming recess.
Description
Technical field
The present invention relates to, at middle discharge lamps used such as exposure devices, particularly relate to be sealed with heat carrier in electrode interior
Electrode.
Background technology
About discharge lamp, along with high output, be known to be sealed with in the confined space that electrode interior is formed have cold
But the electrode (with reference to patent documentation 1) of the metal of function.Here, in anode interior, be sealed with by thermal conductivitys such as silver
The heat carrier that high and that fusing point is relatively low metal is constituted.When electrode temperature rises because lamp lights, metal melting also liquefies.
Thus, in inner space, produce thermal convection current, the heat of electrode leading section is carried to the electrode support rod direction of opposition side.
When enclosing heat carrier in inner space, ratio, i.e. volume fraction shared by this heat carrier can affect Heat transmission effect
Rate and pole strength.When the ratio of heat carrier is too small, thermal convection current is insufficient, and efficiency of thermal transfer deteriorates.On the other hand,
When the ratio of heat carrier is excessive, the vapour pressure within confined space rises, it is possible to excessively execute the wall of confined space
Plus-pressure and cause electrode damaged.
Accordingly, it is determined that the suitable volume ratio of heat carrier and internal confined space, adjust the enclosed volume (reference of heat carrier
Patent documentation 2).Or, adjust the volume ratio (with reference to patent documentation 3) of the protrusion member extended in confined space.
Prior art literature
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2012-15007 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2010-003594 publication
Patent documentation 3: Japanese Unexamined Patent Publication 2004-259644 publication
Summary of the invention
The problem that invention is to be solved
When lamp is lighted, heat carrier becomes aqueous, and when electrode temperature declines because lamp extinguishes, heat carrier thermal contraction is also
Solidification.Now, can the bottom surface of internal volume, sidewall applying stress.Further, when again putting bright light, heat carrier
Thermal expansion also melts, and becomes liquid.Now, stress can be applied by internal volume sidewall.
Electrode inner wall, the sidewall in electrode interior space, bottom surface are become by the stress that such heat carrier produces when phase transformation
For burden, it is possible to because the lighting, extinguish and in electrode inner wall generation chap of lamp is repeated.But, if simply
Consider heat conduction scale of construction when lighting simply, then can not realize the maintenance of long-standing pole strength.
Therefore, when switching the extinguishing/light of lamp, it has to make heat carrier carry out phase transformation in the way of reducing stress.
Means for solving the above
The discharge lamp of the present invention is characterised by having: discharge tube；And a pair electricity being arranged in described discharge tube
Pole, at least one electrode has heat carrier, and this heat carrier is sealing in the confined space that electrode interior is formed,
When lamp is lighted, described heat carrier is liquid condition, lamp extinguish after, described heat carrier solidification and with towards with electrode before
The mode of the electrode support rod side that side is contrary forms recess.Stress is reduced by forming recess.
Such as, heat carrier forms recess in the way of meeting following formula.
1/4≤a/b≤3/4
Wherein, a represents from heat carrier recess end to the distance at the bottom of recess, and b represents from heat carrier recess end to institute
State the distance of the bottom surface of confined space.
Additionally, heat carrier forms recess in the way of meeting following formula.
1/10≤e/f≤1/4
Wherein, e represents the volume of described recess, and f represents the volume of described heat carrier.
The shape of recess is any, as long as meeting above-mentioned formula.In such a case it is possible to adjust the solidifying of heat carrier
Gu at least any one in shrinkage factor, viscosity, pyroconductivity determines the recess shapes of described heat carrier.Additionally,
In at least one electrode, radiating part can be set at electrode surface.
Invention effect
In accordance with the invention it is possible to obtain maintaining pole strength and the electrode of refrigerating function excellence.
Accompanying drawing explanation
Fig. 1 is the plane graph schematically showing the discharge lamp as the 1st embodiment.
Fig. 2 is the diagrammatic sectional view of anode.
Fig. 3 is the diagrammatic sectional view during the lamp of anode is lighted.
Fig. 4 is that excess height is too small and be unsatisfactory for the diagrammatic sectional view of the anode of conditional.
Fig. 5 is that excess height is excessive and be unsatisfactory for the diagrammatic sectional view of the anode of conditional.
Detailed description of the invention
Below, it is described with reference to embodiments of the present invention.
Fig. 1 is the plane graph schematically showing the discharge lamp as the 1st embodiment.
Short arc discharge lamp 10 is the light source etc. of the exposure device (not shown) that can be applied to carry out pattern formation
Discharge lamp, has the discharge tube (luminous tube) 12 of transparent quartz glass.In discharge tube 12, negative electrode 20
Separate predetermined distance with anode 30 and be oppositely disposed.
In the both sides of discharge tube 12, sealing pipe 13A, 13B of quartz glass in an opposing fashion with discharge tube 12
Being wholely set, the two ends sealing pipe 13A, 13B are closed by lamp holder 19A, 19B.
Discharge lamp 10 with anode 30 as upside, the negative electrode 20 mode as downside configures along vertical direction.Sealing
The inside of pipe 13A, 13B, is equipped with the electrode support rod of the electric conductivity of the negative electrode 20 of bearing metal, anode 30
17A, 17B, respectively via becket (not shown), molybdenum etc. metal forming 16A, 16B and with the guiding of electric conductivity
Rod 15A, 15B connect.
Seal pipe 13A, 13B and be arranged on glass tubing (not shown) welding sealed in pipe 13A, 13B, thus,
The discharge space DS being sealed with hydrargyrum and noble gas is sealed.
Rod 15A, 15B is guided to be connected with outside power supply unit (not shown), via guiding rod 15A, 15B, gold
Belong to paper tinsel 16A, 16B and electrode support rod 17A, 17B to applying voltage between negative electrode 20, anode 30.When to
When discharge lamp 10 supplies electric power, between electrode, produce arc discharge, the bright light (ultraviolet that radiation is produced by hydrargyrum
Light).
Fig. 2 is the diagrammatic sectional view during lamp extinguishing of anode 30.Fig. 3 be the lamp of anode 30 when lighting schematically
Sectional view.
Anode 30 is made up of with the circular cone shape leading section 34 with anode front end face 34S columnar body portion 32.Main
Body 32 is configured to engage with the closed cover 45 being provided with electrode support rod 17B, removes the main body after closed cover 45
Portion 32 and leading section 34 are shaped by same metal material.
In main part 32, in center of inside to be formed with columned confined air in the way of electrode axis coaxial line
Between 50.The upper limit of confined space 50 is the end face 45S connected with closed cover 45, and lower limit is side end face, electrode leading section
I.e. bottom surface 50D.Length c of the side 50S of confined space 50 is more than the diameter d of confined space 50.
Inside confined space 50, it is sealed with heat carrier 40.Heat carrier 40 by fusing point less than main part 32, airtight
The metal (such as silver) of lid 45 is constituted.As it is shown on figure 3, in lamp is lighted, melt and become liquid condition, profit
The temperature suppressing leading section 34 with thermal convection current rises.
When being switched to lamp and extinguishing, heat carrier 40 shrinks and solidifies, becomes solid.Main part surface at anode 30
Near, temperature declines fast, and therefore, heat carrier 40 starts solidification near the side 50S of confined space 50.Along with
Time process, while shrinking, the solidification of heat carrier proceeds to central part.
Then, heat carrier 40 finally becomes solid near the bottom surface 50D central part of confined space 50, finally,
Heat carrier 40 becomes the concavity of central part depression and solidifies.Near the central part of bottom surface 50D, contraction produce
Stress acts on from multiple directions, thus there is hole 70.Additionally, a part for heat carrier 40 is the most attached
The end face 45S in closed cover 45.
The recess shapes that such closed cover 45 towards heat carrier 40 opens wide play reduce produce when lamp is lighted should
The effect of power.That is, when lamp is lighted, the stress making heat carrier 40 produce because of thermal expansion dissipates to central part, by
This, it is possible to reduce and put on the bottom surface 50D of confined space 50, the stress of side 50S.Whenever be repeated light/
During extinguishing, heat carrier 40 as shown in Figure 2,3, carries out the immobilization of recess shapes, liquefaction repeatedly.
It is attached to the heat carrier of closed cover 45 because lamp extinguishes and separates due to the heat carrier 40 with recess shapes, so
Melt earlier when being switched to light and wander recess surface 40J, thus, accelerate the liquefaction of heat carrier 40.
Additionally, on the main part side 32S of anode 30, by circumferentially shape in the way of anode leading section 34
Become to have the laser groove 60 with heat sinking function.Prevent anode leading section 34 temperature from becoming too high during lamp is lighted, and
And, the solidification of quickening heat carrier 40 within confined space 50.
The shape of the recess of the heat carrier 40 shown in Fig. 2 depends on the heat dissipation characteristics of anode 30, the spy of heat carrier 40
Property, heat carrier 40 are relative to the volume ratio of confined space 50, the size etc. of confined space 50.Especially, recess
Cup depth change according to the heat dissipation characteristics of laser groove 60, the characteristic of heat carrier 40 of anode 30.Herein,
The personality presentation solidification shrinkage rate of heat carrier 40, viscosity, pyroconductivity.
In the present embodiment, determine enclosed volume and characteristic, the position etc. of laser groove 60 of heat carrier 40, so that
Excess height as the feature of recess shapes meets rated condition.Wherein, the height of recess is defined as from airtight
The recess two ends 40T of the heat carrier 40 that the side 50S in space 50 connects and is in extreme higher position plays 40D at the bottom of recess
Till distance.
Excess height a preferably meets following conditional.
1/4≤a/b≤3/4·····(1)
Wherein, a represents the distance from heat carrier recess end 40T to 40D at the bottom of recess, and b represents from heat carrier recess
End 40T represents the difference of b Yu a to the distance of the bottom surface 50D of described confined space, the g in Fig. 2.
More preferably meet following conditional.
1/10≤e/f≤1/4·····(2)
Wherein, e represents the volume of the recess of heat carrier 40, and f represents the volume of heat carrier 40.
When the height of recess is too small, the stress produced when lamp extinguishes makes pole strength decline.Specifically, from lamp
When illuminating state transfers extinguishing to, solidification the starting above near the closed cover 45 that temperature is relatively low of heat carrier 40.
Accordingly, it would be desirable to decline accelerating temperature at the lower section of anode leading section 34, thus accelerate by contraction during phase transformation
The liquid level caused declines.
In order to make excess height be formed sufficiently high, the thermolysis of groove 60 is effective.In addition it is necessary to consider
The characteristic of heat carrier 40.When solidification shrinkage rate is relatively low, the ratio that volume reduces is less, therefore, and the decline of liquid level
It is suppressed.Additionally, when viscosity is less, residue in the side 50S of confined space 50 because of viscosity near above
Part tails off, and excess height diminishes.Further, when pyroconductivity is higher, the temperature difference near central part and side is relatively
Little, therefore, liquid level difference when solidification starts disappears, and excess height diminishes.
Additionally, because of when from extinguishing is switched to light, heat carrier 40 melts again, if excess height is less, then
The maximum stress dissipation produced near the 50D of confined space bottom surface can not be made, it is impossible to realize stress and alleviate.
On the contrary, if the height of recess is excessive, then can be to the bottom surface 50D of anode inwall, i.e. confined space 50, side
Face 50S applies excessive stress.Solidification shrinkage rate at heat carrier 40 is higher, viscosity is relatively big and pyroconductivity is higher
Time, the height of recess becomes big.But, when recess is too high, 40D at the bottom of recess close to confined space bottom surface 50D,
Solidification along with stronger stress can be to bottom surface 50D generation effect, it is possible to produce be full of cracks at anode inwall.
Fig. 4 is that excess height is too small and be unsatisfactory for the diagrammatic sectional view of the anode of conditional.In this case, again
Secondary when lighting, the stress near the 50D of bottom surface can not fully dissipate to recess, therefore, it is possible to produce at anode inwall
Raw be full of cracks.
Fig. 5 is that excess height is excessive and be unsatisfactory for the diagrammatic sectional view of the anode of conditional.Last in liquid phase 40B
In the part of solidification, produce stronger stress towards complicated direction, thus produce hole 70.That is, in the situation of Fig. 5
Under, near the 50D of bottom surface, produce this stress, it is possible to produce be full of cracks at bottom surface 50D.
Additionally, in the case of again lighting, the melted of heat carrier 40 proceeds to the top time to be expended.Therefore,
Time to be expended before thermal convection current starts, electrode leading section 34 overheats.
Additionally, the forming position of groove 60 affects excess height.If groove 60 is formed near closed cover 45, then go up
Solidification at Fang accelerates, and forms recess when remaining not solidified liquid phase part.On the other hand, when only existing
When close beneath forms groove 60, the solidification of close beneath is promoted, and therefore, excess height can become excessive.
As such, it is desirable to make heat carrier solidify in the way of not having extreme excess height, in the present embodiment, with
Meet the mode of conditional (1) to form groove 60, and, determine the characteristic of heat carrier 40.
So, according to present embodiment, it is internally formed confined space 50, wherein, with recess at anode 30
Shape encloses the heat carrier 40 being made up of metals such as silver.Now, come really in the way of meeting conditional (1), (2)
Fixed electrode size, the forming position of groove 60 of heat transmission, the characteristic etc. of heat carrier 40.When being switched to lamp and lighting,
Heat carrier 40 liquefies.
Additionally, as cooling mechanism, in addition to can forming groove, it is also possible to that applies microgranule blows attachment, oxidation
The structure of aluminum processing etc., is used as the radiating part that heat dissipation characteristics is different from other electrode surface part.In addition it is also possible to
Negative electrode is set to identical structure.
Even if additionally, in the case of being unsatisfactory for (1), (2) formula, it is also possible to improve electrode by following manner strong
Degree: avoid becoming confined space and be full of such state, or the heat carrier when solidification by heat carrier with aqueous completely
Such state near confined space bottom surface is arrived at the bottom of recess, say, that, it is to avoid become and cannot be formed as recess
Extreme state.
About the present invention, without departing from the intent and scope of the present invention being defined by the appended claims, it is possible to enter
The various changes of row, replace, substitute.Additionally, it will be appreciated that in the present invention, it is not limited to the spy described in description
The process of fixed embodiment, device, manufacture, works, means, method and steps.It can be appreciated that, as long as
Those skilled in the art, then can derive essence according to disclosure of the invention and play identical with described embodiment function
Function or essence play equivalent effect, the device of effect, means, method.Thus, it will be appreciated that appended request
Scope comprises the scope of such device, means, method.
The application is Shen based on Japanese publication (Patent 2012-211104, JIUYUE in 2012 application on the 25th)
Please and ask the application of priority, the disclosure of specification, drawings and the claims comprising basis application is led to
Cross with reference to being combined in whole the application.
Label declaration
10 discharge lamps
30 anodes
40 heat carriers
A excess height
Claims (6)
1. a discharge lamp, it is characterised in that described discharge lamp has:
Discharge tube；And
It is arranged in the pair of electrodes in described discharge tube,
At least one electrode has heat carrier, and this heat carrier is sealing in the confined space that electrode interior is formed,
When lamp is lighted, described heat carrier is liquid condition, lamp extinguish after, described heat carrier solidification and with towards with
The mode of the electrode support rod side that electrode front is contrary forms recess.
Discharge lamp the most according to claim 1, it is characterised in that
Described heat carrier forms recess in the way of meeting following formula,
1/4≤a/b≤3/4
Wherein, a represents from heat carrier recess end to the distance at the bottom of recess, and b represents from heat carrier recess end to institute
State the distance of the bottom surface of confined space.
Discharge lamp the most according to claim 1, it is characterised in that
Described heat carrier forms recess in the way of meeting following formula,
1/10≤e/f≤1/4
Wherein, e represents the volume of described recess, and f represents the volume of described heat carrier.
4. according to the discharge lamp described in any one in claims 1 to 3, it is characterised in that
Adjust at least any one in the solidification shrinkage rate of described heat carrier, viscosity, pyroconductivity determine described in lead
The recess shapes of hot body.
5. according to the discharge lamp described in any one in claims 1 to 3, it is characterised in that
At least one electrode described has radiating part at electrode surface.
Discharge lamp the most according to claim 4, it is characterised in that
At least one electrode described has radiating part at electrode surface.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012211104A JP6180716B2 (en) | 2012-09-25 | 2012-09-25 | Discharge lamp |
| JP2012-211104 | 2012-09-25 | ||
| PCT/JP2013/075440 WO2014050728A1 (en) | 2012-09-25 | 2013-09-20 | Discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104584186A CN104584186A (en) | 2015-04-29 |
| CN104584186B true CN104584186B (en) | 2016-08-24 |
Family
ID=50388132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380044279.7A Active CN104584186B (en) | 2012-09-25 | 2013-09-20 | Discharge lamp |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6180716B2 (en) |
| KR (1) | KR101986402B1 (en) |
| CN (1) | CN104584186B (en) |
| TW (1) | TWI578372B (en) |
| WO (1) | WO2014050728A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI601183B (en) * | 2013-04-24 | 2017-10-01 | Orc Manufacturing Co Ltd | Discharge lamp |
| JP6098676B2 (en) * | 2015-06-29 | 2017-03-22 | ウシオ電機株式会社 | Short arc type discharge lamp |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004259644A (en) * | 2003-02-27 | 2004-09-16 | Ushio Inc | Discharge lamp |
| CN101055829A (en) * | 2006-04-13 | 2007-10-17 | 优志旺电机株式会社 | Discharge lamp |
| CN101373696A (en) * | 2007-08-20 | 2009-02-25 | 优志旺电机株式会社 | Discharge lamp |
| JP2009135054A (en) * | 2007-12-03 | 2009-06-18 | Ushio Inc | High pressure discharge lamp |
| JP2009152046A (en) * | 2007-12-20 | 2009-07-09 | Ushio Inc | Discharge lamp |
| JP2010003594A (en) * | 2008-06-21 | 2010-01-07 | Ushio Inc | Discharge lamp |
| CN102376522A (en) * | 2010-07-23 | 2012-03-14 | 优志旺电机株式会社 | Short Arc Type Discharge Lamp |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4512968B2 (en) * | 2000-08-03 | 2010-07-28 | ウシオ電機株式会社 | Short arc type high pressure discharge lamp |
| JP4295527B2 (en) * | 2003-02-27 | 2009-07-15 | 株式会社アライドマテリアル | Discharge lamp and its electrode structure |
| JP5093304B2 (en) | 2010-07-02 | 2012-12-12 | ウシオ電機株式会社 | Short arc type discharge lamp |
-
2012
- 2012-09-25 JP JP2012211104A patent/JP6180716B2/en active Active
-
2013
- 2013-09-14 TW TW102133330A patent/TWI578372B/en active
- 2013-09-20 KR KR1020157004197A patent/KR101986402B1/en active IP Right Grant
- 2013-09-20 WO PCT/JP2013/075440 patent/WO2014050728A1/en active Application Filing
- 2013-09-20 CN CN201380044279.7A patent/CN104584186B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004259644A (en) * | 2003-02-27 | 2004-09-16 | Ushio Inc | Discharge lamp |
| CN101055829A (en) * | 2006-04-13 | 2007-10-17 | 优志旺电机株式会社 | Discharge lamp |
| CN101373696A (en) * | 2007-08-20 | 2009-02-25 | 优志旺电机株式会社 | Discharge lamp |
| JP2009135054A (en) * | 2007-12-03 | 2009-06-18 | Ushio Inc | High pressure discharge lamp |
| JP2009152046A (en) * | 2007-12-20 | 2009-07-09 | Ushio Inc | Discharge lamp |
| JP2010003594A (en) * | 2008-06-21 | 2010-01-07 | Ushio Inc | Discharge lamp |
| CN102376522A (en) * | 2010-07-23 | 2012-03-14 | 优志旺电机株式会社 | Short Arc Type Discharge Lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104584186A (en) | 2015-04-29 |
| KR101986402B1 (en) | 2019-06-05 |
| JP6180716B2 (en) | 2017-08-16 |
| KR20150060673A (en) | 2015-06-03 |
| JP2014067540A (en) | 2014-04-17 |
| TW201423830A (en) | 2014-06-16 |
| WO2014050728A1 (en) | 2014-04-03 |
| TWI578372B (en) | 2017-04-11 |
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