CN104576436A - Film magazine position detecting device, transmitting system and semiconductor processing equipment - Google Patents
Film magazine position detecting device, transmitting system and semiconductor processing equipment Download PDFInfo
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- CN104576436A CN104576436A CN201310475803.8A CN201310475803A CN104576436A CN 104576436 A CN104576436 A CN 104576436A CN 201310475803 A CN201310475803 A CN 201310475803A CN 104576436 A CN104576436 A CN 104576436A
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Abstract
The invention relates to a film magazine position detecting device, a transmitting system and semiconductor processing equipment. The film magazine position detecting device comprises a status switching unit and a laser detecting unit, wherein the laser detecting unit is arranged outside a loading chamber, and is used for emitting a laser to the status switching unit arranged in the loading chamber and receiving the laser reflected by the status switching unit; the status switching unit is arranged in a film magazine fixing plate and is used for switching a gap between the bottom surface of a film magazine and the film magazine fixing plate into an angle change of the laser reflected to the laser detecting unit. The film magazine position detecting device can be used for detecting a smaller gap between the bottom surface of the film magazine and the film magazine fixing plate and accurately detecting that the gap exists between the bottom surface of the film magazine and the film magazine fixing plate, so as to achieve a relatively high sensitivity.
Description
Technical field
The present invention relates to semiconductor equipment and manufacture field, particularly, relate to a kind of film magazine position detecting device, transmission system and semiconductor processing equipment.
Background technology
In semiconductor processing equipment, load chamber in order to be equipped with the film magazine of workpiece to be machined therein.As shown in Figure 1, after the film magazine 102 that workpiece to be machined is housed being loaded into the assigned address loaded in chamber 101, the manipulator 106 being located at transmission chamber 107 inside gets sheet with the window loading chamber 101 from the film magazine 102 loaded chamber 101 by being communicated with transmission chamber 107, and transmit it in reaction chamber 108, carry out PROCESS FOR TREATMENT, and taken out from reaction chamber 108 by the workpiece to be machined completing PROCESS FOR TREATMENT, and transfer to the film magazine 102 being arranged in and loading chamber 101.In above process, whether film magazine 102 is loaded into the assigned address loaded in chamber 101 exactly directly affects the success rate that manipulator 106 gets sheet and film releasing.In actual applications, generally film magazine position detecting device is set on loading chamber 101, load in chamber 101 whether be placed with film magazine 102 in order to detect, and detect film magazine 102 and whether tilt relative to assigned address, to confirm whether film magazine 102 is in the assigned address loaded in chamber 101.
Fig. 2 is the structural representation of existing loading chamber.As shown in Figure 2, load chamber 101 inside and be provided with film magazine fixed head 302, for carrying film magazine 102; Sheet box lifting device 303 is provided with, in order to drive film magazine fixed head 302 and elevating movement done by the film magazine 102 be placed on film magazine fixed head 302 below film magazine fixed head 302; Film magazine fixed head 302 is provided with guide vane end stop 305, for the film magazine be placed on film magazine fixed head 302 102 is fixed on assigned address.
As shown in Figure 3, this film magazine position detecting device is specially the transducer 304 be located on film magazine fixed head 302 to existing a kind of film magazine position detecting device.It is realized by following manner the detection of film magazine 102 position: when film magazine 102 is placed on film magazine fixed head 302, transducer 304 is in below film magazine 102, if film magazine 102 does not tilt relative to assigned address, then film magazine 102 contacts with transducer 304, transducer 304 is triggered, and it sends and represents that film magazine 102 is accurately placed to the signal of assigned address; If film magazine 102 tilts relative to assigned address, then there is gap between film magazine 102 and film magazine fixed head 302, when gap is enough large, film magazine 102 does not contact with transducer 304, transducer 304 cannot be triggered, and it sends and represents to load in chamber 101 do not have film magazine 102 or film magazine 102 not to be in the signal of assigned address.
In actual applications, inevitably there is following problems in above-mentioned film magazine position detecting device:
One, when film magazine 102 tilts relative to assigned address, and angle of inclination less time, gap between film magazine 102 and film magazine fixed head 302 is not enough to film magazine 102 and transducer 304 are disengaged, transducer 304 still can be triggered in the case, make it send and represent that film magazine 102 is accurately placed to the signal of assigned address, thus make in the case, manipulator cannot complete exactly and get sheet and film releasing, even making manipulator produce when getting sheet or film releasing and between workpiece to be machined to collide, causing workpiece to be machined to be damaged.
Its two, in some cases, load chamber 101 inside and there is higher temperature, make transducer 304 in use be subject to loading the restriction of chamber 101 internal temperature; Such as, when the temperature of loading chamber 101 inside exceedes the serviceability temperature of transducer 304, transducer 304 possibly cannot use or cannot judge whether film magazine 102 is in assigned address exactly.
Its three, transducer 304 is located at that to load chamber 101 inner, makes its cable such as holding wire and power line need to run through the perisporium loading chamber 101 and is connected to that to load chamber 101 outside; Further, its cable the elevating movement that it need be made not hinder film magazine lowering or hoisting gear 303 is set, and make the circulation not producing gas between the inner and external world of loading chamber 101.Easy understand, above-mentioned setting has higher difficulty, not easily arranges; And require that loading chamber 101 has higher assembly precision, causes its manufacturing cost higher.
Another kind of film magazine position detecting device as shown in Figure 4, the loading chamber 101 that this film magazine position detecting device is housed respectively has a transparent window (not shown) in its relative both sides, and, the assigned address of film magazine 102 is between above-mentioned two transparent windows, when film magazine 102 is accurately placed on assigned address, the line between two transparent windows is through film magazine 102.Above-mentioned film magazine position detecting device is specially laser beam emitting device 406, it has transmitting terminal and receiving terminal, this transmitting terminal and receiving terminal are positioned at and load chamber 101 outside, and be located on the transparent window of loading chamber 101 both sides respectively, it is realized by following manner the detection of film magazine 102 position: be first loaded on film magazine fixed head by film magazine 102, and then the transmitting terminal of laser beam emitting device 406 is to being positioned at the receiving terminal Emission Lasers bundle loading chamber 101 opposite side; If receiving terminal receives the laser beam that transmitting terminal sends, then above-mentioned film magazine position detecting device judges that film magazine 102 is not in assigned address or loads in chamber 101 and do not have film magazine 102; If receiving terminal cannot receive the laser beam that transmitting terminal sends, then above-mentioned film magazine position detecting device judges that film magazine 102 is placed in assigned address.
In actual applications, inevitably there is following problems in above-mentioned film magazine position detecting device, that is: whether the laser beam sent by means of only transmitting terminal due to above-mentioned film magazine position detecting device is blocked by film magazine 102, the position of film magazine 102 is detected, whether this detection mode cannot detect film magazine 102 exactly and tilt relative to assigned address, so above-mentioned film magazine position detecting device only can detect exactly load in chamber 101 whether there is film magazine 102, and whether can not be accurately placed on assigned address film magazine 102 and detect exactly.Such as, when film magazine 102 tilts relative to assigned address, and when the laser beam shielding that transmitting terminal sends by film magazine 102 is lived, above-mentioned film magazine position detecting device judges that film magazine 102 is placed on assigned address; In the case, manipulator probably cannot successfully get sheet or film releasing, even can cause getting in sheet or film releasing process, produces collision, and then cause the damage of workpiece to be machined between manipulator and workpiece to be machined.
Summary of the invention
The present invention is intended at least to solve one of technical problem existed in prior art, propose a kind of film magazine position detecting device, transmission system and semiconductor processing equipment, when its gap that can tilt to produce due to film magazine between film magazine bottom surface and film magazine fixed head is less, state conversion unit is reflected and between the laser and laser detector of laser detector, there is larger deviation, make laser detector cannot receive the laser reflected by state conversion unit, thus make it can detect exactly between film magazine bottom surface and film magazine fixed head to there is gap, film magazine position detecting device is made to have higher sensitivity.
A kind of film magazine position detecting device is provided for realizing object of the present invention, it is for detecting the gap whether existed between film magazine bottom surface and the film magazine fixed head supporting described film magazine because film magazine tilts to produce, it comprises state conversion unit and laser detection unit, wherein said laser detection cellular installation is outdoor in load chamber, described laser detection unit is used for the state conversion unit Emission Lasers being located at load chamber indoor, and receives the laser reflected by described state conversion unit; Further, if described laser detection unit receives the laser reflected by described state conversion unit, represent that there is film magazine load chamber indoor and there is not gap between film magazine bottom surface and film magazine fixed head; Otherwise represent that load chamber indoor do not have film magazine or gap between film magazine bottom surface and film magazine fixed head; Described state conversion unit is arranged in described film magazine fixed head, and described state conversion unit is used for that the gap between film magazine bottom surface and film magazine fixed head is converted to its angle reflected to the laser of described laser detection unit and changes.
Wherein, described state conversion unit comprises lever assembly and reflecting element fixed thereon, lever assembly comprises rotating shaft, lever, jackscrew and elastomeric element, wherein said rotating shaft be fixed on described film magazine fixed head upper surface is arranged have in the heavy stand of lateral openings; Described lever is rotatably connected with described rotating shaft, and described lever turns around described rotating shaft at the plane internal rotation perpendicular to described film magazine fixed head place plane; The bottom of described jackscrew, and described reflecting element is connected with described lever, and lay respectively at the both sides of described rotating shaft, or be positioned at the same side of described rotating shaft; Described elastomeric element is positioned at described heavy stand, for when described load chamber indoor do not exist film magazine, applies upwards elastic force, to make the top of described jackscrew higher than the upper surface of described film magazine fixed head towards described lever with the part of described jackscrew phase the same side; Described reflecting element is positioned at outside the lateral openings of described heavy stand.
Wherein, described laser detection unit comprises transmitting terminal, receiving terminal and angle detection unit, wherein: described transmitting terminal, for the reflecting surface Emission Lasers towards described reflecting element corresponding thereto; Described receiving terminal, receives the laser come by the reflective surface of described reflecting element during for there is not gap between described film magazine bottom surface and film magazine fixed head; Described angle detection unit, for carrying out amplification detection amount, to calculate described angle of inclination according to the reflection of described reflecting element to the change at laser reflection angle of described receiving terminal and the optical path distance of setting.
Wherein, the thickness of described lever is run through in the bottom of described jackscrew, and the two is threaded; And on the bottom surface of described heavy stand, and the position corresponding with described jackscrew is provided with through hole, the instrument of the relative position of jackscrew and described lever is regulated to pass with for for rotating described jackscrew.
Wherein, the sidewall corresponding with the sidewall opening of described heavy stand of described loading chamber is provided with transparency window, and described transmitting terminal and receiving terminal are located at the outside of described transparency window.
Wherein, described laser detection unit also comprises adjusting device, and described adjusting device is for regulating the relative position of described transmitting terminal, receiving terminal and described transparency window.
Wherein, described laser detection unit comprises laser reflection type transducer or laser opposite-radiation transducer.
As another technical scheme, the present invention also provides a kind of transmission system, and it comprises reaction chamber, loads chamber and transmission chamber, and wherein, described transmission chamber is respectively with described reaction chamber with load chamber, in order to transmit workpiece to be machined between; Described loading chamber is used for loading and holding film magazine when technique, and on described loading chamber, be provided with film magazine position detecting device, in order to detect the gap whether existed between film magazine bottom surface and the film magazine fixed head supporting described film magazine because film magazine tilts to produce, further, described film magazine position detecting device adopts above-mentioned film magazine position detecting device provided by the invention.
Wherein, the quantity of described film magazine position detecting device is at least two, and described at least two film magazine position detecting devices are used for detecting between film magazine bottom surface and film magazine fixed head whether there is gap respectively from different positions.
Wherein, the horizontal cross-section of described film magazine fixed head is square, and the quantity of described film magazine position detecting device is two, and the lever assembly of the two is diagonal distribution relative to the upper surface of described film magazine fixed head.
As another technical scheme, the present invention also provides a kind of semiconductor processing equipment, and it comprises the transmission system for transmitting workpiece to be machined, and described transmission system adopts above-mentioned transmission system provided by the invention.
The present invention has following beneficial effect:
Film magazine position detecting device provided by the invention determines there is not the gap produced because film magazine tilts between film magazine bottom surface and film magazine fixed head when its laser detection unit receives the laser reflected by state conversion unit, determine between film magazine bottom surface and film magazine fixed head, to there is the gap produced because film magazine tilts when its laser detection unit does not receive the laser reflected by state conversion unit, in above process, if there is gap between film magazine bottom surface and film magazine fixed head, the angle that gap between film magazine bottom surface and film magazine fixed head is converted to himself by state conversion unit changes, and the angle change of himself makes the incidence angle of the laser of laser detection unit directive state conversion unit reduce or increase, correspondingly, the angle of reflection reflected to the laser of laser detection unit by state conversion unit reduces or increases, and the numerical value that the angle that incidence angle and angle of reflection reduce or the numerical value of increase is equal to state conversion unit changes, thus to make state conversion unit reflect the angle departed to laser and the laser detection unit of laser detection unit be the twice that state conversion unit angle changes, and then when making the gap between film magazine bottom surface and film magazine fixed head less, the angle that the laser reflected by state conversion unit and laser detection unit depart from is larger, correspondingly, distance between the flare that this laser is formed on the sidewall of loading chamber and laser detection unit is larger, make laser detection unit cannot receive the laser reflected by state conversion unit, thus make film magazine position detecting device provided by the invention can the gap produced because film magazine tilts between film magazine bottom surface and film magazine fixed head less time, detect exactly between film magazine bottom surface and film magazine fixed head and there is gap, film magazine position detecting device is made to have higher sensitivity.
Transmission system provided by the invention, it is by adopting film magazine position detecting device provided by the invention, can the gap produced because film magazine tilts between film magazine bottom surface and film magazine fixed head less time, detect exactly between film magazine bottom surface and film magazine fixed head and there is gap, thus carry out getting sheet or film releasing when can prevent manipulator from there is gap between film magazine bottom surface and film magazine fixed head, avoid the collision between consequent manipulator and workpiece to be machined, even the damage of workpiece to be machined.
Semiconductor processing equipment provided by the invention, it is by adopting transmission system provided by the invention, can the gap produced because film magazine tilts between film magazine bottom surface and film magazine fixed head less time, detect exactly between film magazine bottom surface and film magazine fixed head and there is gap, thus carry out getting sheet or film releasing when can prevent manipulator from there is gap between film magazine bottom surface and film magazine fixed head, avoid the collision between consequent manipulator and workpiece to be machined, even the damage of workpiece to be machined.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing semiconductor processing equipment;
Fig. 2 is the structural representation of existing loading chamber;
Fig. 3 is the structural representation of the existing film magazine position detecting device be installed on film magazine fixed head;
Fig. 4 is the existing structural representation being installed on the film magazine position detecting device of load chamber outdoor;
The structural representation of the film magazine position detecting device that Fig. 5 provides for first embodiment of the invention;
Fig. 6 is the principle schematic of the position detecting device of film magazine shown in Fig. 5;
Fig. 7 is schematic diagram when jackscrew and reflecting element in the position detecting device of film magazine shown in Fig. 5 lay respectively at rotating shaft both sides;
The structural representation of the film magazine position detecting device that Fig. 8 provides for second embodiment of the invention;
The internal structure schematic diagram of chamber is loaded in the transmission system that Fig. 9 provides for embodiments of the invention; And
Figure 10 loads film magazine state table corresponding to the testing result of two film magazine position detecting devices in chamber shown in Fig. 9.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, below in conjunction with accompanying drawing, film magazine position detecting device provided by the invention, transmission system and semiconductor processing equipment are described in detail.
Please refer to Fig. 5, the structural representation of the film magazine position detecting device that Fig. 5 provides for first embodiment of the invention.Film magazine position detecting device is for detecting between film magazine 50 bottom surface and the film magazine fixed head 55 supporting film magazine 50 whether there is the gap produced because film magazine 50 tilts, and it comprises state conversion unit and laser detection unit.Wherein, laser detection cellular installation is outdoor in load chamber, and it is for the state conversion unit Emission Lasers being located at load chamber indoor, and receives the laser reflected by state conversion unit; And, if laser detection unit receives the laser reflected by state conversion unit, represent that there is film magazine 50 load chamber indoor and there is not gap between film magazine 50 bottom surface and film magazine fixed head 55, otherwise represent that load chamber indoor do not have film magazine 50 or gap between film magazine 50 bottom surface and film magazine fixed head 55; State conversion unit is arranged in film magazine fixed head 55, and it changes for the gap between film magazine 50 bottom surface and film magazine fixed head 55 being converted to its angle reflected to the laser of laser detection unit.
Particularly, state conversion unit comprises lever assembly 51 and reflecting element 52 fixed thereon; Wherein, lever assembly 51 changes for the angle gap between film magazine 50 bottom surface and film magazine fixed head 55 being converted to reflecting element 52; Lever assembly 51 comprises rotating shaft 510, lever 511, jackscrew 512 and elastomeric element 513; Wherein rotating shaft 510 be fixed on film magazine fixed head 55 upper surface is arranged have in the heavy stand of lateral openings; Lever 511 is rotatably connected with rotating shaft 510, and lever 511 turns around rotating shaft 510 at the plane internal rotation perpendicular to film magazine fixed head 55 place plane; The bottom of jackscrew 512, and reflecting element 52 is connected with lever 511, and lay respectively at the both sides of rotating shaft 510; Elastomeric element 513 is positioned at above-mentioned heavy stand, for when load chamber indoor do not exist film magazine 50, applies upwards elastic force, to make the top of jackscrew 512 higher than the upper surface of film magazine fixed head 55 towards lever 511 with the part of jackscrew 512 phase the same side; Thus the top of jackscrew 512 is contacted with the bottom surface of film magazine 50 when film magazine 50 is placed in load chamber chamber interior; Reflecting element 52 for by the laser reflection of laser detection unit directive state conversion unit to laser detection unit, and reflecting element 52 is positioned at outside the lateral openings of above-mentioned heavy stand.In the present embodiment, elastomeric element 513 is spring.
Laser detection unit comprises transmitting terminal 53 and receiving terminal 54; Wherein, transmitting terminal 53 is for the reflecting surface Emission Lasers towards reflecting element 52 corresponding thereto; The laser come by the reflective surface of reflecting element 52 is received when receiving terminal 54 for not existing gap between film magazine 50 bottom surface and film magazine fixed head 55.In the present embodiment, laser detection unit is laser opposite-radiation transducer, and its transmitting terminal 53 and receiving terminal 54 vertically interval are arranged, and receiving terminal 54 is positioned at above transmitting terminal 53.
In the present embodiment, as shown in Figure 5, the sidewall of the loading chamber corresponding with the lateral openings of heavy stand is provided with transparency window, transmitting terminal 53 and receiving terminal 54 are arranged at the outside of transparency window.
The film magazine position detecting device provided first embodiment of the invention below detects the principle that whether there is the gap produced because film magazine 50 tilts between film magazine 50 bottom surface and film magazine fixed head 55 and is described in detail.
Please in the lump referring to Fig. 5 and Fig. 6, in the present embodiment, when there is not film magazine 50 in loading chamber, the top of jackscrew 512 is higher than the upper surface of film magazine fixed head 55, thus when film magazine 50 is positioned on film magazine fixed head 55, no matter whether there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55, the top of jackscrew 512 contacts with the bottom surface of film magazine 50 all the time under the effect of elastomeric element 513.
In above process, if there is not gap between film magazine 50 bottom surface and film magazine fixed head 55, transmitting terminal 53 is to the reflecting surface transmitted beam 506 of reflecting element 52, this light beam 506 reflects on the reflecting surface of reflecting element 52 as incident beam, its folded light beam 507 is reflected onto receiving terminal 54, form flare 508 at receiving terminal 54 place, receiving end 54 receives, and film magazine position detecting device determines to there is not gap between the bottom surface of film magazine 50 and film magazine fixed head 55 accordingly.
Otherwise, in above process, if there is gap between film magazine 50 bottom surface and film magazine fixed head 55, easy understand, now, compared to when there is not gap between the bottom surface of film magazine 50 and film magazine fixed head 55, jackscrew 512 moves up certain distance, to make its top contact with the bottom surface of film magazine 50, and in the process, lever 511 and reflecting element 52 movements with jackscrew 512 have rotated certain angle, with this angle for Δ.Now, transmitting terminal 53 is to the reflecting surface transmitted beam 506 of reflecting element 52, and after the reflective surface of reflecting element 52, folded light beam 507 ' forms flare 508 ' on the sidewall loading chamber; In above process, the anglec of rotation due to reflecting element 52 is Δ, and the incidence angle of light beam 506 and the angle of reflection of folded light beam 507 ' reduce Δ, thus its folded light beam 507 ' is departed from receiving terminal 54, and the angle departed from is 2 Δs.
In actual applications, if the gap between the bottom surface of film magazine 50 and film magazine fixed head 55 is less, then angle delta also can be less, and after the reflection of the reflecting surface of reflecting element 52, folded light beam 507 ' and receiving terminal 54 deviate from larger angle, also larger distance is deviate between flare 508 ' and receiving terminal 54, cause receiving terminal 54 cannot receive the laser come by the reflective surface of reflecting element 52, thus the film magazine position detecting device that the present embodiment is provided can gap between the bottom surface of film magazine 50 and film magazine fixed head 55 less time, detect exactly between the bottom surface of film magazine 50 and film magazine fixed head 55 and there is gap, thus improve the detection sensitivity of film magazine position detecting device.
Particularly, following setting is done in the present embodiment: during there is not gap between the bottom surface of film magazine 50 and film magazine fixed head 55, the reflecting surface of reflecting element 52 and the angle of vertical direction are α; With the distance between the connecting portion of lever 511 and jackscrew 512 and rotating shaft 510 for L; With the gap between the bottom surface of film magazine 50 and the upper surface of film magazine fixed head 55 for h; With the distance between transmitting terminal 53 and receiving terminal 54 for H; With the horizontal range between transmitting terminal 53 and the reflecting surface of reflecting element 52 for S; With the distance between flare 508 ' and receiving terminal 54 for δ.In the present embodiment,
δ=H-S*tan(2α-2Δ) （1）
Wherein, H=S*tan2 α, (2)
It is known according to formula (2),
In equation (3), because Δ is less, so
such formula (3) can be reduced to:
It is known according to formula (4),
Easy understand, in specifically arranging in the present embodiment, the distance L arranged between the connecting portion of lever 511 and jackscrew 512 and rotating shaft 510 is less, horizontal range S between the reflecting surface arranging transmitting terminal 53 and reflecting element 52 is larger, arrange when to there is not gap between the bottom surface of film magazine 50 and film magazine fixed head 55, the reflecting surface of reflecting element 52 and the angle of vertical direction are that α is larger, during to make the gap between the bottom surface of film magazine 50 and film magazine fixed head 55 less, the distance that flare 508 ' departs from receiving terminal 54 still can make receiving terminal 54 cannot receive the laser come by the reflective surface of reflecting element 52, and then the film magazine position detecting device enabling the present embodiment provide detects to there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55 exactly.
Below by illustrate film magazine position detecting device that the present embodiment provides can gap between the bottom surface of film magazine 50 and film magazine fixed head 55 less time detect to there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55 exactly.
Such as, using common laser-correlation transducer as laser detection unit, the light receiving window diameter of its receiving terminal is 6.5mm, and the diameter of its transmitting terminal transmitted beam is 2mm.In actual applications, following design parameter being set to respectively: α=12 °, S=120mm, L=20mm, h=0.5mm, by above-mentioned parameter being brought into formula (4), can learning, H=53.4mm, δ=7mm; Obviously, flare 508 ' departs from the distance of receiving terminal 7mm, be enough to make it go out light receiving window from light receiving window central offset, thus making receiving terminal 54 can not receive the laser come by the reflective surface of reflecting element 52, the film magazine position detecting device that the present embodiment provides can determine to there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55 accordingly.According to above-mentioned known, even if use common laser-correlation transducer, the film magazine position detecting device that the present embodiment provides still can detect the less gap between the bottom surface of film magazine 50 and film magazine fixed head 55 exactly, and when the light receiving window diameter of the receiving terminal 54 of laser detection unit is less, the film magazine position detecting device that the present embodiment provides can detect the less inclination between the bottom surface of film magazine 50 and film magazine fixed head 55 more delicately.
In sum, the film magazine position detecting device that the present embodiment provides receives at its receiving terminal 54 to be launched by transmitting terminal 53, and determines not exist between the bottom surface of film magazine 50 and film magazine fixed head 55 gap during the laser come by the reflective surface of reflecting element 52, do not receive at its receiving terminal 54 and launched by transmitting terminal 53, and determine to exist between the bottom surface of film magazine 50 and film magazine fixed head 55 gap during the laser come by the reflective surface of reflecting element 52, in above process, if there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55, the angle that gap between the bottom surface of film magazine 50 and film magazine fixed head 55 is converted to reflecting element 52 by lever assembly 51 changes, and the angle change of reflecting element 52 makes the incidence angle of the laser of the reflecting surface of directive reflecting element 52 reduce, correspondingly, reduced to the angle of reflection of the laser of receiving terminal 54 by the reflective surface of reflecting element 52, and the numerical value that incidence angle and angle of reflection reduce is equal to the numerical value of the angle change of reflecting element 52, thus angle that laser and receiving terminal 54 to receiving terminal 54 depart from is the twice that reflecting element 52 angle changes to make reflecting element 52 reflect, and then when making the gap between the bottom surface of film magazine 50 and film magazine fixed head 55 less, the angle departed from by laser and the receiving terminal 54 of the reflective surface of reflecting element 52 is larger, correspondingly, distance between the flare 508 ' that this laser is formed on the sidewall of loading chamber and receiving terminal 54 is larger, make receiving terminal 54 cannot receive the laser come by the reflective surface of reflecting element 52, thus make film magazine position detecting device provided by the invention can gap between the bottom surface of film magazine 50 and film magazine fixed head 55 less time, detect to there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55 exactly, film magazine position detecting device is made to have higher sensitivity,
In the present embodiment, before whether there is gap between the bottom surface of use film magazine position detecting device detection film magazine 50 and film magazine fixed head 55, need to calibrate film magazine position detecting device; Particularly, below film magazine fixed head 55, be provided with lowering or hoisting gear, rise in order to drive film magazine fixed head 55 and to be fixed on film magazine on film magazine fixed head 55 or drop to assigned address, being convenient to the reflecting surface Emission Lasers of transmitting terminal 53 to reflecting element 52; The thickness of lever 511 is run through in the bottom of jackscrew 512, and the two is threaded; And, on the bottom surface of heavy stand, the position corresponding with jackscrew 512 is provided with through hole, with for instruments such as inner hexagon spanners through this through hole be located on heavy stand bottom surface, by rotating jackscrew 512, the relative position of adjustment jackscrew 512 and lever 511, and then the angle of adjustment reflecting element 52, when making there is not gap between the bottom surface of film magazine 50 and film magazine fixed head 55, the laser reflection that transmitting terminal 53 can be launched by the reflecting surface of reflecting element 52 is to receiving terminal 54.
In the present embodiment, laser detection unit also comprises adjusting device, and this adjusting device is for regulating the relative position of transmitting terminal 53 and receiving terminal 54 and transparency window.
It should be noted that, in the present embodiment, laser detection unit comprises laser opposite-radiation transducer, but the present invention is not limited to this, in actual applications, above-mentioned laser detection unit can also comprise laser reflection type transducer, in the case, the transmitting terminal 53 of laser detection unit and receiving terminal 54 are in same position, easy understand, now, the angle of reflecting element 52 transmitting terminal 53 is launched to the reflecting surface of reflecting element 52 laser vertical in the reflecting surface of reflecting element 52.
Also it should be noted that, in the present embodiment, laser detection unit comprises transmitting terminal 53 and receiving terminal 54, but the present invention is not limited to this, in actual applications, laser detection unit can also comprise angle detection unit, it carrys out amplification detection amount for the change of angle of reflection and the optical path distance of setting of reflecting the laser to receiving terminal 54 according to reflecting element 52, change with the angle according to above-mentioned formula (4) computational reflect part 52, and and then the gap calculated between film magazine 50 bottom surface and film magazine fixed head 55.
Also it should be noted that, in the present embodiment, jackscrew 512 and reflecting element 52 lay respectively at the both sides of rotating shaft 510, but the present invention is not limited to this, in actual applications, jackscrew 512 and reflecting element 52 can also be in the same side of rotating shaft 510, as shown in Figure 7, in the case, elastomeric element 513 need drive jackscrew 512, lever 511 and reflecting element 52 to rotate around rotating shaft 510 simultaneously, although this makes elastomeric element 513 need have larger elastic force, it still can meet needs of the present invention.
Also it should be noted that, in the present embodiment, transmitting terminal 53 and receiving terminal 54 vertically interval are arranged, and receiving terminal 54 is positioned at above transmitting terminal 53, but the present invention is not limited to this, in actual applications, transmitting terminal 53 also can be positioned at above receiving terminal 54, in the case, when there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55, the incidence angle that transmitting terminal 53 is launched to the incident beam 506 of the reflecting surface of reflecting element 52 increases, correspondingly, the angle of reflection of folded light beam 507 ' increases, but the angle that folded light beam 507 ' and receiving terminal 54 depart from is similarly the twice that reflecting element 52 angle changes, its do not affect receiving terminal 54 cannot receive reflecting element 52 reflecting surface launch and come laser.In addition, in actual applications, transmitting terminal 53 and receiving terminal 54 are also not limited to vertically arrange, when only need there is not gap in its position relationship between the bottom surface of film magazine 50 and film magazine fixed head 55, the laser that transmitting terminal 53 is launched via the reflective surface of reflecting element 52 to receiving terminal 54.
Please refer to Fig. 8, the structural representation of the film magazine position detecting device that Fig. 8 provides for second embodiment of the invention.In the present embodiment, film magazine position detecting device comprises state conversion unit and laser detection unit equally, because its 26S Proteasome Structure and Function has a detailed description in the above-described first embodiment, does not repeat them here.
Only be described in detail with regard to the difference of the present embodiment and the first embodiment below.In the present embodiment, reflecting element 52 ' comprises first reflecting element 521 and at least one second reflecting element 522, and wherein, the first reflecting element 521 is fixedly connected with lever 511, and the second reflecting element 522 is located at load chamber chamber interior; When in order to there is not gap between the bottom surface of film magazine 50 and film magazine fixed head 55 in the first reflecting element 521 and the second reflecting element 522, the laser that transmitting terminal 53 is launched reflects between the first reflecting element 521 and the second reflecting element 522, and reflexes to receiving terminal 54 by the first reflecting element 521 or the second reflecting element 522.
Particularly, in the present embodiment, the first reflecting element 521 acts on identical with the reflecting element 52 in the first embodiment, and when there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55, the first reflecting element 521 rotates to an angle with lever, with this angle for Δ; The angle change of the first reflecting element 521 makes the incidence angle of the incident beam of directive first reflecting element 521 reduce or increase Δ, correspondingly, the angle of reflection of folded light beam reduces or increases Δ, thus folded light beam when this folded light beam being compared not exist between the bottom surface of film magazine 50 and film magazine fixed head 55 gap deviate from 2 Δs; Second reflecting element 522 reflects the reflecting surface to the first reflecting element 521 again for the laser gone out by the reflective surface of the first reflecting element 521, makes the reflecting surface of the first reflecting element 521 carry out multiple reflections to laser.
The film magazine position detecting device that the present embodiment provides, it is by arranging at least one second reflecting element 522, laser in order to be gone out by the reflective surface of the first reflecting element 521 reflects the reflecting surface to the first reflecting element 521 again, thus the laser making transmitting terminal 53 send is through the first reflecting element 521 multiple reflections, and finally reflect to receiving terminal 54 by the first reflecting element 521 or the second reflecting element 522, in the case, first reflecting element 521 often reflects once, the angle that the laser of directive receiving terminal 54 and receiving terminal 54 depart from is twice with regard to increasing, thus make film magazine position detecting device can gap between the bottom surface of film magazine 50 and film magazine fixed head 55 less time, detect to there is gap between the bottom surface of film magazine 50 and film magazine fixed head 55 exactly, the sensitivity of film magazine position detecting device is improved further.
As another technical scheme, embodiments of the invention also provide a kind of transmission system, and it comprises reaction chamber, loads chamber and transmission chamber, and wherein, transmission chamber is respectively with reaction chamber with load chamber, in order to transmit workpiece to be machined between; Load chamber to be used for loading and holding film magazine when technique, and be provided with film magazine position detecting device, in order to detect the gap whether existing between film magazine bottom surface and film magazine fixed head and produce because film magazine tilts on loading chamber; Further, the film magazine position detecting device film magazine position detecting device that adopts the above embodiment of the present invention to provide.
In the present embodiment, the film magazine fixed head of loading chamber is provided with at least two film magazine position detecting devices, and these at least two film magazine position detecting devices are used for whether there is gap between different position probing film magazine bottom surfaces and film magazine fixed head; Arrange when can there is gap between film magazine bottom surface and film magazine fixed head like this, detect between film magazine bottom surface and film magazine fixed head whether there is gap more accurately.
Particularly, as shown in Figure 9, the horizontal cross-section of film magazine fixed head is square, it is arranged two film magazine position detecting devices (A, B), and the lever assembly of two film magazine position detecting devices (A, B) is diagonal distribution relative to the upper surface of film magazine fixed head.In actual applications, the lower right corner of the upper surface of film magazine fixed head in Fig. 9 is in film magazine position detecting device A, the upper left corner that film magazine position detecting device B is in the upper surface of film magazine fixed head in Fig. 9 is example, as shown in Figure 10, the incline direction of film magazine bottom surface relative to film magazine fixed head can be judged exactly by two film magazine position detecting devices (A, B); Particularly, gap is there is not between its film magazine bottom surface, position place and film magazine fixed head when film magazine position detecting device A detects, when film magazine position detecting device B detects and there is gap between its film magazine bottom surface, position place and film magazine fixed head, can determine that film magazine or turn forward to the right; Gap is there is between its film magazine bottom surface, position place and film magazine fixed head when film magazine position detecting device A detects, when film magazine position detecting device B detects and there is not gap between its film magazine bottom surface, position place and film magazine fixed head, can determine that film magazine or tilt backwards left; When film magazine position detecting device A and film magazine position detecting device B all detect there is not gap between its film magazine bottom surface, position place and film magazine fixed head time, can determine to there is not gap between film magazine bottom surface and film magazine fixed head; When film magazine position detecting device A and film magazine position detecting device B all do not detect there is gap between its film magazine bottom surface, position place and film magazine fixed head time, can determine to load in chamber and there is not film magazine.
The transmission system that the present embodiment provides, its film magazine position detecting device provided by adopting the above embodiment of the present invention, can gap between film magazine bottom surface and film magazine fixed head less time, detect exactly between film magazine bottom surface and film magazine fixed head and there is gap, thus can prevent manipulator from carrying out getting sheet or film releasing when film magazine tilts relative to film magazine fixed head, avoid the collision between consequent manipulator and workpiece to be machined, even the damage of workpiece to be machined.
As another technical scheme, embodiments of the invention also provide a kind of semiconductor processing equipment, and it comprises the transmission system for transmitting workpiece to be machined, and this transmission system have employed the transmission system that the above embodiment of the present invention provides.
The semiconductor processing equipment that the present embodiment provides, its transmission system provided by adopting the above embodiment of the present invention, can gap between film magazine bottom surface and film magazine fixed head less time, detect exactly between film magazine bottom surface and film magazine fixed head and there is gap, thus can prevent manipulator from carrying out getting sheet or film releasing when film magazine tilts relative to film magazine fixed head, avoid the collision between consequent manipulator and workpiece to be machined, even the damage of workpiece to be machined.
Be understandable that, the illustrative embodiments that above execution mode is only used to principle of the present invention is described and adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (11)
1. a film magazine position detecting device, it is for detecting the gap whether existed between film magazine bottom surface and the film magazine fixed head supporting described film magazine because film magazine tilts to produce, it is characterized in that, described film magazine position detecting device comprises state conversion unit and laser detection unit, wherein
Described laser detection cellular installation is outdoor in load chamber, and described laser detection unit is used for the state conversion unit Emission Lasers being located at load chamber indoor, and receives the laser reflected by described state conversion unit; Further, if described laser detection unit receives the laser reflected by described state conversion unit, represent that there is film magazine load chamber indoor and there is not gap between film magazine bottom surface and film magazine fixed head; Otherwise represent that load chamber indoor do not have film magazine or gap between film magazine bottom surface and film magazine fixed head;
Described state conversion unit is arranged in described film magazine fixed head, and described state conversion unit is used for that the gap between film magazine bottom surface and film magazine fixed head is converted to its angle reflected to the laser of described laser detection unit and changes.
2. film magazine position detecting device according to claim 1, is characterized in that, described state conversion unit comprises lever assembly and reflecting element fixed thereon, and lever assembly comprises rotating shaft, lever, jackscrew and elastomeric element, wherein
Described rotating shaft be fixed on described film magazine fixed head upper surface is arranged have in the heavy stand of lateral openings;
Described lever is rotatably connected with described rotating shaft, and described lever turns around described rotating shaft at the plane internal rotation perpendicular to described film magazine fixed head place plane;
The bottom of described jackscrew, and described reflecting element is connected with described lever, and lay respectively at the both sides of described rotating shaft, or be positioned at the same side of described rotating shaft;
Described elastomeric element is positioned at described heavy stand, for when described load chamber indoor do not exist film magazine, applies upwards elastic force, to make the top of described jackscrew higher than the upper surface of described film magazine fixed head towards described lever with the part of described jackscrew phase the same side;
Described reflecting element is positioned at outside the lateral openings of described heavy stand.
3. film magazine position detecting device according to claim 2, is characterized in that, described laser detection unit comprises transmitting terminal, receiving terminal and angle detection unit, wherein:
Described transmitting terminal, for the reflecting surface Emission Lasers towards described reflecting element corresponding thereto;
Described receiving terminal, receives the laser come by the reflective surface of described reflecting element during for there is not gap between described film magazine bottom surface and film magazine fixed head;
Described angle detection unit, for carrying out amplification detection amount, to calculate described angle of inclination according to the reflection of described reflecting element to the change at laser reflection angle of described receiving terminal and the optical path distance of setting.
4. film magazine position detecting device according to claim 2, is characterized in that, the thickness of described lever is run through in the bottom of described jackscrew, and the two is threaded; And
On the bottom surface of described heavy stand, and the position corresponding with described jackscrew is provided with through hole, regulates the instrument of the relative position of jackscrew and described lever to pass with for for rotating described jackscrew.
5. film magazine position detecting device according to claim 3, is characterized in that, the sidewall corresponding with the sidewall opening of described heavy stand of described loading chamber is provided with transparency window, and described transmitting terminal and receiving terminal are located at the outside of described transparency window.
6. film magazine position detecting device according to claim 5, is characterized in that, described laser detection unit also comprises adjusting device, and described adjusting device is for regulating the relative position of described transmitting terminal, receiving terminal and described transparency window.
7. film magazine position detecting device according to claim 1, is characterized in that, described laser detection unit comprises laser reflection type transducer or laser opposite-radiation transducer.
8. a transmission system, comprises reaction chamber, loads chamber and transmission chamber, and wherein, described transmission chamber is respectively with described reaction chamber with load chamber, in order to transmit workpiece to be machined between; Described loading chamber is used for loading and holding film magazine when technique, and on described loading chamber, be provided with film magazine position detecting device, in order to detect the gap whether existed between film magazine bottom surface and the film magazine fixed head supporting described film magazine because film magazine tilts to produce, it is characterized in that, described film magazine position detecting device adopts the film magazine position detecting device described in claim 1-7 any one.
9. transmission system according to claim 8, it is characterized in that, the quantity of described film magazine position detecting device is at least two, and described at least two film magazine position detecting devices are used for detecting between film magazine bottom surface and film magazine fixed head whether there is gap respectively from different positions.
10. transmission system according to claim 9, is characterized in that, the horizontal cross-section of described film magazine fixed head is square, and
The quantity of described film magazine position detecting device is two, and the lever assembly of the two is diagonal distribution relative to the upper surface of described film magazine fixed head.
11. 1 kinds of semiconductor processing equipments, comprising the transmission system for transmitting workpiece to be machined, it is characterized in that, described transmission system adopts the transmission system described in claim 8-10 any one.
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| CN201310475803.8A CN104576436B (en) | 2013-10-12 | 2013-10-12 | Film magazine position detecting device, Transmission system and semiconductor processing equipment |
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| CN201310475803.8A CN104576436B (en) | 2013-10-12 | 2013-10-12 | Film magazine position detecting device, Transmission system and semiconductor processing equipment |
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| CN104576436B (en) | 2018-05-08 |
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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