CN104576272A - Beam current detection and analysis device - Google Patents
Beam current detection and analysis device Download PDFInfo
- Publication number
- CN104576272A CN104576272A CN201310507655.3A CN201310507655A CN104576272A CN 104576272 A CN104576272 A CN 104576272A CN 201310507655 A CN201310507655 A CN 201310507655A CN 104576272 A CN104576272 A CN 104576272A
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- CN
- China
- Prior art keywords
- line
- light hurdle
- analytical equipment
- detects
- faraday
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
Abstract
The invention discloses a beam current detection and analysis device, which comprises a Faraday transmission mechanism (1), a beam receiving Faraday cup (2), a diaphragm movement mechanism (3), an analysis diagram (4) and a water cooling module (5), wherein the Faraday transmission mechanism (1) is used for the rapid and gentle movement of the beam receiving Faraday cup (2); the diaphragm movement mechanism (3) is used for guiding the bidirectional equidistant movement of the analysis diaphragm (4); the water cooling module (5) is used for cooling the whole beam current detection and analysis device. The invention relates to an ion implantation device, and belongs to the field of semiconductor manufacturing.
Description
Technical field
The present invention relates to a kind of semiconductor device manufacturing control system, i.e. implanter, especially, relate to a kind of for the detection of ion implantor line and analytical equipment.
Background technology
Along with the development of semiconductor technology, the accurate detection of line and analysis, for ion implant systems ever more important, have very large impact to the injection quality of product and the industrialization of ion implantor.If when ion implantor beam-out energy is very low, the particularly occasion of large line, transmission path length, due to the impact of space charge effect, divergence of ion beam is serious, and its efficiency of transmission is extremely low, and the line making last arrival inject wafer is little, bundle poor quality, can not meet injection technology requirement; The accurate detection of line and the control of analysis have special meaning for the transmission of ultra-low energy large beam ion bundle.
The precision that line detects is the basis finally obtaining high-quality product, measures at present and analyze the active demand requiring to have become industry development for ion source educt beaming flow.
Summary of the invention
The invention discloses a kind of line to detect and analytical equipment, can be used for ion implantation machine system; It detects for existing line, analyze, obtain accurate line value, even if the line produced for the transmission of ultra-low energy line, extraction electrode or transmitting device position is departed to some extent, transmission path is long situation accurately measures and problem analysis, well can both solve, and can not have an impact to the product quality of final ion implantation.
The present invention is achieved through the following technical solutions:
1. a line detects and analytical equipment, comprise: faraday's transmission mechanism (1), connect bundle Faraday cup (2), light hurdle motion (3), analyze light hurdle (4), water cooling module (5), it is characterized in that: adjusting device is arranged symmetrically in beam channel (1) both sides up and down.
2. a kind of beam homogeneity adjusting device as claimed in claim 1, faraday's transmission mechanism (1) comprises a cylinder and a vacuum welding bellows, ensures that it runs stably.
3. a kind of line as claimed in claim 1 detects and analytical equipment, connect device permanent magnet in bundle Faraday cup (2), it is characterized in that guarantee connects bundle Faraday cup (2) and can also play focussing force to line while line exact value being detected.
4. a kind of line as claimed in claim 1 detects and analytical equipment, and light hurdle motion (3) is made up of a motor and two drive blocks, it is characterized in that the distance size that can control light hurdle bidirectional-movement.
5. a kind of line as claimed in claim 1 detects and analytical equipment, analyze the width that light hurdle (4) can limit line, play and analyze the effect of line, it is characterized in that: analyzing light hurdle (4) can the width on two-way simultaneous equidistant adjustment light hurdle.
6. a kind of line as claimed in claim 1 detects and analytical equipment, it is characterized in that: water cooling module (5) supplies water by periphery and is transformed on the detection of this line and analytical equipment, ensures cooling and the stability of its device.
The present invention has following remarkable advantage:
1. structure is simple, is easy to processing and manufacturing.
2. reliable in function, good stability.
3. be easy to control, do not need often to safeguard and change.
Accompanying drawing explanation
Fig. 1 detects and analytical equipment scantling plan
Fig. 2 analyzes light hurdle and motion structure chart
Fig. 3 faraday connects bundle cup and transmission mechanism structure chart
Embodiment
Below in conjunction with accompanying drawing 1, accompanying drawing 2 and accompanying drawing, 3 couples of the present invention are further introduced, but not as a limitation of the invention.
See Fig. 1, Fig. 2 and Fig. 3, a kind of beam homogeneity adjusting device divides four parts, faraday's transmission mechanism (1), connects bundle Faraday cup (2), light hurdle motion (3), analyzes light hurdle (4), water cooling module (5).Wherein the easy motion connecing bundle Faraday cup (2) is responsible for by faraday's transmission mechanism (1).
Light hurdle motion (3) is responsible for regulating the distance size analyzing light hurdle (4) bidirectional-movement.Water cooling module (5) cools the temperature of whole system when connecing bundle.
In this embodiment, faraday's transmission mechanism (1) is made up of a cylinder and a vacuum welding bellows critical piece, cylinder is driver part, drive vacuum welding bellows, the drive of vacuum welding bellows connects bundle Faraday cup (2) and moves, and adopts vacuum welding bellows to be connect bundle Faraday cup (2) easy motion in a vacuum to ensure better.
In this embodiment, light hurdle motion (3) is made up of a motor and two drive blocks, motor rotation drives via drive block and analyzes light hurdle (4) bidirectional-movement, and on drive block, installation site transducer ensures the accuracy analyzing light hurdle (4) bidirectional-movement position.
In this embodiment, connect with permanent magnet in bundle Faraday cup (2), magnet two ends symmetry is installed, and connects bundle Faraday cup (2) and can receive while line carries out accurately measuring, also play the focussing force of logarithm stream in guarantee.
In this embodiment, to noncontinuous electrode (7) and long electrode (8) play install the electrode chamber (2) of positioning action, electric lids (3) form alternative, the effect of location can be played.
In this embodiment, analyzing light hurdle (4) can regulate by twocouese, and carries out the calculating of movement position by position transducer, serves by the restriction of line and dissection.
The specific embodiment of patent of the present invention elaborates the content of patent of the present invention.For persons skilled in the art, to any apparent change that it does under the prerequisite not deviating from patent spirit of the present invention, all form the infringement to patent of the present invention, corresponding legal liabilities will be born.
Claims (6)
1. a line detects and analytical equipment, comprise: faraday's transmission mechanism (1), connect bundle Faraday cup (2), light hurdle motion (3), analyze light hurdle (4), water cooling module (5), it is characterized in that: adjusting device is arranged symmetrically in beam channel (1) both sides up and down.
2. a kind of beam homogeneity adjusting device as claimed in claim 1, faraday's transmission mechanism (1) comprises a cylinder and a vacuum welding bellows, ensures that it runs stably.
3. a kind of line as claimed in claim 1 detects and analytical equipment, connect device permanent magnet in bundle Faraday cup (2), it is characterized in that guarantee connects bundle Faraday cup (2) and can also play focussing force to line while line exact value being detected.
4. a kind of line as claimed in claim 1 detects and analytical equipment, and light hurdle motion (3) is made up of a motor and two drive blocks, it is characterized in that the distance size that can control light hurdle bidirectional-movement.
5. a kind of line as claimed in claim 1 detects and analytical equipment, analyze the width that light hurdle (4) can limit line, play and analyze the effect of line, it is characterized in that: analyzing light hurdle (4) can the width on two-way simultaneous equidistant adjustment light hurdle.
6. a kind of line as claimed in claim 1 detects and analytical equipment, it is characterized in that: water cooling module (5) supplies water by periphery and is transformed on the detection of this line and analytical equipment, ensures cooling and the stability of its device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507655.3A CN104576272A (en) | 2013-10-24 | 2013-10-24 | Beam current detection and analysis device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507655.3A CN104576272A (en) | 2013-10-24 | 2013-10-24 | Beam current detection and analysis device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104576272A true CN104576272A (en) | 2015-04-29 |
Family
ID=53092071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310507655.3A Pending CN104576272A (en) | 2013-10-24 | 2013-10-24 | Beam current detection and analysis device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104576272A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019006914A1 (en) * | 2017-07-04 | 2019-01-10 | 合肥中科离子医学技术装备有限公司 | Beam energy dissipation adjusting mechanism used for superconducting proton cyclotron |
| CN110780335A (en) * | 2019-10-24 | 2020-02-11 | 中国科学院近代物理研究所 | Two-dimensional distribution monitoring device for high-current charged particle beams |
| CN111308540A (en) * | 2019-10-15 | 2020-06-19 | 北京烁科中科信电子装备有限公司 | Telescopic device for transmitting Faraday cylinder probe |
-
2013
- 2013-10-24 CN CN201310507655.3A patent/CN104576272A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019006914A1 (en) * | 2017-07-04 | 2019-01-10 | 合肥中科离子医学技术装备有限公司 | Beam energy dissipation adjusting mechanism used for superconducting proton cyclotron |
| CN111308540A (en) * | 2019-10-15 | 2020-06-19 | 北京烁科中科信电子装备有限公司 | Telescopic device for transmitting Faraday cylinder probe |
| CN110780335A (en) * | 2019-10-24 | 2020-02-11 | 中国科学院近代物理研究所 | Two-dimensional distribution monitoring device for high-current charged particle beams |
| CN110780335B (en) * | 2019-10-24 | 2021-10-08 | 中国科学院近代物理研究所 | Two-dimensional distribution monitoring device for high-current charged particle beams |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification of before Expiration of Request of Examination as to Substance |
|
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150429 |
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| WD01 | Invention patent application deemed withdrawn after publication |