CN104570612B - A kind of work stage contact pin arm device - Google Patents
A kind of work stage contact pin arm device Download PDFInfo
- Publication number
- CN104570612B CN104570612B CN201310513598.XA CN201310513598A CN104570612B CN 104570612 B CN104570612 B CN 104570612B CN 201310513598 A CN201310513598 A CN 201310513598A CN 104570612 B CN104570612 B CN 104570612B
- Authority
- CN
- China
- Prior art keywords
- support
- support component
- contact pin
- fixed
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The present invention relates to a kind of work stage contact pin arm device, including installing pedestal, a support component, driving assembly, measuring unit, gas control unit and auxiliary support assemblies, wherein, described support component is installed on described installation pedestal, is used for carrying and adsorbing workpiece；Described driving assembly is arranged on described installation pedestal, drives described support component catenary motion；Described measuring unit is fixed between described installation pedestal and described support component, measures the displacement of described support component catenary motion；Described gas control unit is fixed on described installation pedestal provides auxiliary to support and power down protection for described workpiece；Described auxiliary support assemblies is fixed on described installation pedestal, and is connected with described support component, and the two is synchronized with the movement to provide into described workpiece and supports.The present invention utilizes gas control unit to solve the motor static thrust that causes because load change, makes that this device is more rapid to move accurately, and a support component uses single motor to drive with auxiliary support assemblies, improves synchronicity.
Description
Technical field
The present invention relates to semiconductor lithography apparatus field, particularly relate to a kind of work stage contact pin arm device.
Background technology
Work stage contact pin arm device (Lift-Pin) belongs to photo-etching machine work-piece platform subsystem, has been used for work stage
The work of lower workpiece (glass substrate or silicon chip).Common contact pin arm device has and pneumatically or electrically drives, should
Acceleration of motion and kinematic accuracy that mechanism can reach will directly influence the productivity of litho machine.Along with photoetching skill
The development of art, proposes the highest requirement to productivity and complete machine integrated level, is accomplished by improve productivity
The speed of lifting workpieces transmission, this is just to the contact pin arm device (Lift-Pin) directly participating in Workpiece circulation in work stage
Movement velocity and acceleration propose requirements at the higher level, cause its powered actuation mechanism volume to increase to a certain extent
Greatly, then the requirement that complete machine is integrated may be affected.For promoting the sport efficiency of contact pin arm device, have following several at present
The solution that kind is different:
The first scheme: propose a contact pin arm device being made up of cylinder and linkage, this device uses gas
Cylinder and linkage realize the fixed point transmission of workpiece.The shortcoming of this method is that workpiece motion s speed is uneven, knot
Structure is complicated, relatively costly, and cannot adapt to become the operating mode of gravity；
First scheme: proposing one by servomotor is the contact pin arm device driving element, and this device uses
The frame for movements such as hinge support load gravity, use and rotate type of drive for vertical location.Although the machines such as hinge
The design of tool supporting way is simple, but its transmission process exists the non-linear factors such as friction and gap, directly affects
Positioning precision, and process and assembly difficulty height, manufacturability is the best；
The third scheme: use linear motor direct drive, the motor caused because of load quality change produces static state
Thrust, can cause that the motor feels hot, causes motor size to strengthen simultaneously.The workpiece deformation that the heating of motor causes,
And owing to change of temperature field affects certainty of measurement, finally affect the precision of contact pin arm device.Larger number vertical
Motor, by enlarging mechanism quality, finally affects kinematic accuracy.
Summary of the invention
The present invention provides a kind of work stage contact pin arm device, multiple to solve contact pin arm device structure in prior art
Miscellaneous, cost is high, processing, assembly difficulty height and the problem of low precision.
For solving above-mentioned technical problem, the present invention provides a kind of work stage contact pin arm device, including install pedestal,
Prop up support component, drive assembly, measuring unit, gas control unit and auxiliary support assemblies, wherein,
Described support component is installed on described installation pedestal, is used for carrying and adsorbing workpiece；
Described driving assembly is arranged on described installation pedestal, drives described support component catenary motion；
Described measuring unit is fixed between described installation pedestal and described support component, measures described support component
The displacement of catenary motion；
Described gas control unit is fixed on described installation pedestal provides auxiliary to support for described workpiece and power down guarantor
Protect；
Described auxiliary support assemblies is fixed on described installation pedestal, and is connected with described support component, and the two is same
Step motion provides for described workpiece and supports.
It is preferred that described installation pedestal includes that X is to top board, installation base plate and support, described installation pedestal
Plate and described support are all fixedly installed on the described X center to top board, build described support component of support
Motion platform；Described auxiliary support assemblies is fixed on the described X periphery to top board.
It is preferred that described installation pedestal also includes that preloading spring, the two ends of described preloading spring are respectively connecting to institute
State X to top board and described support component.
It is preferred that described support component includes gripper shoe, some hollow pillar stands and contact pin finger, described some
Hollow pillar stand is distributed in described gripper shoe, and the top of described hollow pillar stand has been respectively fixedly connected with contact pin finger,
Described driving assembly is fixing with described gripper shoe to be connected.
It is preferred that be additionally provided with loading end and sucker on described contact pin finger, described sucker passes through described hollow pillar stand
It is connected to negative pressure source.
It is preferred that described driving assembly includes linear electric motors, line slideway, guide rail splice, described guide rail is even
Fishplate bar slides along described line slideway under the drive of described linear electric motors, and described guide rail splice passes through the first torr
Lift plate to be connected with described gripper shoe, and drive described gripper shoe to be synchronized with the movement.
It is preferred that described measuring unit include glass raster chi, grating scale installing plate, encoder count head and
Read head support, described glass raster chi is fixed on described support by described grating scale installing plate, described volume
Code device read head is fixed in described gripper shoe by described read head support.
It is preferred that described gas control unit includes that Rodless cylinder and second lifts plate, described Rodless cylinder is fixed on
On described installation base plate, described second lifts that plate and described Rodless cylinder are fixing to be connected, and described second lifts
Plate is installed on the lower section of described gripper shoe.
It is preferred that described gas control unit also including, choke valve, described choke valve are installed in described Rodless cylinder.
It is preferred that described auxiliary support assemblies includes bracing frame, flexible cable, directive slide track, linked block, auxiliary
Thimble and three pulley mechanisms, described directive slide track is vertical to be fixed on support frame as described above, and described linked block leads to
Crossing described directive slide track vertically to slide, described auxiliary thimble is fixed on the top of described linked block, described flexibility
The two ends of rope are respectively connecting to described gripper shoe and described linked block, and described flexible cable passes through described three turbines
Structure turns to.
It is preferred that described auxiliary support assemblies also to include that a spring, the two ends of described spring are respectively connecting to described
Bracing frame and described linked block.
Compared with prior art, the invention have the advantages that
1. use measuring unit that the vertical deviation of a support component is measured, feed back to this displacement information drive
Assembly, can realize quickly being accurately positioned；
2. use gas control unit to provide auxiliary to support for workpiece, reduce and drive exerting oneself of assembly, it is ensured that this device is high
Speed high-precision motion ability, in case of emergency case drives assembly power down, described gas control unit can continue to support workpiece,
Prevent because a support component loses the damage that workpiece is likely to result in by power landing；
3. a support component and auxiliary support assemblies use single motor to drive, cost-effective, and sync rates is high.
Accompanying drawing explanation
A kind of structural representation of the work stage contact pin arm device of Fig. 1 embodiment of the invention；
A support component and driving assembly in a kind of work stage contact pin arm device of Fig. 2 embodiment of the invention
Structural representation；
Fig. 3 be the embodiment of the invention work stage contact pin arm device in the structural representation of gas control unit
Figure；
Fig. 4 be the embodiment of the invention work stage contact pin arm device in the structural representation of measuring unit
Figure；
Fig. 5 be the embodiment of the invention work stage contact pin arm device in auxiliary support assemblies and support group
The structural representation that part connects；
Fig. 6 be the embodiment of the invention work stage contact pin arm device in the structure of auxiliary support assemblies show
It is intended to；
Fig. 7 be the embodiment of the invention work stage contact pin arm device in the controller chassis of active suspension system
Figure.
In Fig. 1-6: 100-installs pedestal, 110-X installs base plate, 130-support, 140-to top board, 120-
Preloading spring, 200-prop up support component, 210-gripper shoe, 220-hollow pillar stand, 230-contact pin finger, 300-driving
Assembly, 310-linear electric motors, 320-line slideway, 330-guide rail splice, 340-first lift plate, 400-
Measuring unit, 410-glass raster chi, 420-grating scale installing plate, 430-encoder count head, 440-reading
Head bracket, 500-gas control unit, 510-Rodless cylinder, 520-second lift plate, 600-auxiliary support assemblies,
610-bracing frame, 620-flexible cable, 630-directive slide track, 640-linked block, 650-assist thimble, 660-pulley
Mechanism, 670-spring.
Detailed description of the invention
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with the accompanying drawings to this
The detailed description of the invention of invention is described in detail.It should be noted that, accompanying drawing of the present invention all uses the form of simplification
And all use non-ratio accurately, only in order to facilitate, to aid in illustrating lucidly the purpose of the embodiment of the present invention.
The work stage contact pin arm device that the present invention provides, as it is shown in figure 1, and combine Fig. 2 to Fig. 6, including peace
Dress pedestal 100, support component 200, drive assembly 300, measuring unit 400, gas control unit 500 and auxiliary
Help and prop up a support component 600, wherein,
Described support component 200 is installed on described installation pedestal 100, is used for carrying and adsorb workpiece (in figure
Not shown)；
Described driving assembly 300 is installed on described installation pedestal 100, drives described support component 200 vertical
(i.e. Z-direction in figure) moves；
Described measuring unit 400 is fixed between described installation pedestal 100 and described support component 200, measures
The displacement of described support component 200 catenary motion；
Described gas control unit 500 be fixed on described installation pedestal 100 for described workpiece provide auxiliary support and
Power down protection；
Described auxiliary support assemblies 600 is fixed on described installation pedestal 100, and with described support component 200
Connecting, the two is synchronized with the movement to provide into described workpiece and supports.
The present invention utilizes gas control unit 500 to solve the motor static thrust caused because of load change, makes this device
More rapid move accurately, and a support component 200 uses single motor to drive with auxiliary support assemblies 600, carries
High synchronicity.
It is preferred that refer to Fig. 1 to Fig. 4, described installation pedestal 100 includes that X is to top board 110, installation base
Seat board 120 and support 130, described installation base plate 120 and described support 130 are all fixedly installed on described
X is to the center of top board 110, and described auxiliary support assemblies 600 is fixed on described X outside top board 110
Enclosing, specifically, described installation pedestal 100 is the support of whole device, and described X is whole dress to top board 110
The bracket put, described installation base plate 120 and support 130, jointly build the fortune of described support component 200
Moving platform.
It is preferred that refer to Fig. 2 to Fig. 4, described installation pedestal 100 also includes preloading spring 140, described
The two ends of preloading spring 140 are respectively connecting to described X to top board 110 and described support component 200, to increase
The rigidity of device.
It is preferred that please continue to refer to Fig. 2 to Fig. 4, described support component 200 includes gripper shoe 210, some
Hollow pillar stand 220 and contact pin finger 230, described some hollow pillar stands 220 are distributed in described gripper shoe 210
On, the top of described hollow pillar stand 220 has been respectively fixedly connected with contact pin finger 230, in the present embodiment, described
Gripper shoe 210 is rectangle, and described hollow pillar stand 220 is four, is distributed in four tops of rectangular supporting board 210
At angle, the quantity of described contact pin finger 230 is corresponding with the quantity of described hollow pillar stand 220, is also four,
Four contact pin fingers 230 are individually fixed in described hollow pillar stand 220 top, and outwards launch, specifically, and institute
Stating and be additionally provided with loading end and sucker (not shown) on contact pin finger 230, described sucker is by described hollow
Column 220 is connected to negative pressure source, and described loading end is used for and described absorption surface, and provides support force, negative pressure
When source is opened, described sucker is evacuated to vacuum state by hollow pillar stand 220, adsorbs workpiece.
It is preferred that as depicted in figs. 1 and 2, described driving assembly 300 includes that linear electric motors 310, straight line are led
Rail 320, guide rail splice 330, described guide rail splice 330 is edge under the drive of described linear electric motors 310
Described line slideway 320 slides, and described guide rail splice 330 lifts plate 340 and described support with by first
Plate 210 connects, and drives described gripper shoe 210 to be synchronized with the movement.Specifically, described linear electric motors 310 are dress
Uniquely drive element in putting, be responsible for providing described the power that support component 200 moves along Z-direction, described straight line
Guide rail 320 is synchronized with the movement under the linkage of guide rail splice 330 with linear electric motors 310, and driving force is by the first torr
Lift plate 340 and pass to a support component 200；Described first lifts plate 340 one end is connected with described gripper shoe 210,
The other end is connected with described guide rail splice 330.
It is preferred that ask emphasis with reference to Fig. 4, described measuring unit 400 includes glass raster chi 410, grating scale
Installing plate 420, encoder count head 430 and read head support 440, described glass raster chi 410 passes through
Described grating scale installing plate 420 is fixed on described support 130, and described encoder count head 430 is by described
Read head support 440 is fixed in described gripper shoe 210.Described measuring unit 400 is to a support component 200
Vertical deviation measures, and this displacement information feeds back to described driving assembly 300, thus realizes quickly essence
Determine position.
It is preferred that described gas control unit 500 includes that Rodless cylinder 510 and second lifts plate 520, described nothing
Bar cylinder 510 is fixed on described installation base plate 120, and described second lifts plate 520 is installed on described support
The lower section of plate 210, and one end is fixing with described Rodless cylinder 510 is connected, specifically, described Rodless cylinder 510
Including cylinder body and slide block two parts, described cylinder body is fixed on described installation base plate 120, and described slide block is vertical
Motion, described slide block is lifted with described second that plate 520 is fixing to be connected, thus is transmitted to described gripper shoe 210 and prop up
Support force.Use this gas control unit 500 to described gripper shoe 210, i.e. prop up support component 200 and carry out auxiliary support,
The gravity of mechanism loading part, demand to linear electric motors 310 power output during reducing mechanism upwards accelerated motion,
Ensureing the ability of the work stage contact pin arm device high-speed, high precision motion of the present invention, employing Rodless cylinder 510 can also
Enough increase kinetic damping, improve the rigidity of system, strengthen the stationarity of motion.It addition, such as emergency case institute
Stating linear electric motors 310 power down, described gas control unit 500 can continue to support described gripper shoe 210, prevents because propping up
Fagging 210 loses the damage that other parts and workpiece are likely to result in by power landing.
It is preferred that also include choke valve (not shown) in described gas control unit 500, described choke valve is pacified
It is loaded in described Rodless cylinder 510, the static thrust of Active Compensation linear electric motors 310 output, it is ensured that support group
During part 200 descending motion, top lift keeps constant, improves the effect that auxiliary supports further, makes this
The bright motor capacity possessing high-speed, high precision.
It is preferred that refer to Fig. 5 and Fig. 6, described auxiliary support assemblies 600 includes bracing frame 610, flexibility
Rope 620, directive slide track 630, linked block 640, auxiliary thimble 650 and three pulley mechanisms 660, described
Directive slide track 630 is vertical to be fixed on support frame as described above 610, and described linked block 640 is by described directive slide track
630 vertically slide, and described auxiliary thimble 650 is fixed on the top of described linked block 640, described flexible cable
The two ends of 620 are respectively connecting to described gripper shoe 210 and described linked block 640, and described flexible cable 620 passes through
Described three pulley mechanisms 660 turn to, when described support component 200 moves upward, and described flexible cable 620
The upper each section of stressing conditions after described pulley mechanism 660 turns to is as shown in the direction of arrow in Fig. 5, specifically,
The quantity of described auxiliary support assemblies 600 and arrangement mode can be adjusted according to the form and dimension of workpiece, this
In embodiment, described auxiliary support assemblies 600 is arranged on the described X corner to top board 110, described gripper shoe
210 bottom surfaces connect flexible cable 620, is connected with linked block 640 by three pulley mechanisms 660, it is achieved
Fagging 210 and the function that is synchronized with the movement of linked block 640, namely realize described contact pin finger 230 auxiliary with described
Help being synchronized with the movement of thimble 650, thus provide auxiliary support force for workpiece.It is preferred that described auxiliary support group
Part 600 also includes that a spring 670, the two ends of described spring 670 are respectively connecting to support frame as described above 610 and institute
State linked block 640, use for auxiliary support assemblies 600 playback.
Please continue to refer to Fig. 1 to Fig. 6, the concrete action specification of the work stage contact pin arm device that the present invention provides is such as
Under:
Original state:
The mover of linear electric motors 310 is not initial position (exerting oneself), and Rodless cylinder 510 is by described second
Lift plate 520 and provide certain power of upwards lifting to described gripper shoe 210, namely carry for a support component 200
Support for auxiliary；Described auxiliary support assemblies 600 is also at initial position, and described linked block 640 is by flexibility
Rope 620 is connected along pulley mechanism 660 with gripper shoe 210.
Enhancing action:
The mover of described linear electric motors 310 moves upward, and guide rail splice 330 is in the guiding of line slideway 320
Being lifted up under effect, lifting force is lifted plate 340 by first and is transferred to gripper shoe 210, a support component 200
Moving upward, measuring unit 400 is to the phase para-position of control unit (not shown) feedback support component 200
Move；Rodless cylinder 510 receives control unit signal, and the slide block of Rodless cylinder 510 is determined with linear electric motors 310
Son synchronizes to move upward, and continuing as a support component 200 provides auxiliary to support, wherein, and described linear electric motors 310
Driving force needed for support component 200 is propped up in lifting has a big chunk all to be digested by Rodless cylinder 510；
Described gripper shoe 210 does Z-direction positive movement, drives the flexible cable 620 being connected to below, flexible cable 620
It is connected with the linked block 640 in auxiliary support assemblies 600 by pulley mechanism 660, by pulley drive, even
Motion block 640 and gripper shoe 210 Tong Bu move upward, and described auxiliary thimble 650 is that workpiece provides auxiliary to support；
Described measuring unit 400 reads support component 200 displacement, when displacement arrives upper limit, described straight-line electric
Machine 310 stops with Rodless cylinder 510, support component 200 stop motion, and described Rodless cylinder 510 increases system
System damping, makes that support component 200 is more rapid tends towards stability；Linked block 640 in described auxiliary support assemblies 600
On flexible cable 620 lose upwards acceleration, be issued to stress balance in spring 670 pretightning force effect, synchronize
Stop motion.
Down maneuver:
Described linear electric motors 310 drive a support component 200 to move downward, and acceleration of motion is a, Rodless cylinder
Slide block in 510 moves down simultaneously, under the choke valve effect of gas control unit 500, to described support component
The top lift of 200 ensures constant, and Rodless cylinder 510 increases the damping of this device, adds the stability of device,
And the burden of linear electric motors 310 driving force will not be increased；
Described gripper shoe 210 moves downward, under the gearing of pulley mechanism 660, and auxiliary support assemblies 600
In linked block 640 on flexible cable 620 relax, auxiliary thimble 650 under the active force of spring 670, with
Prop up support component 200 to synchronize to move downward；
Described measuring unit 400 reads the Z-direction displacement of a support component 200, when displacement arrives lower limit, straight line
Motor 310 stops with Rodless cylinder 510, and support component 200 and auxiliary support assemblies 600 Tong Bu return to initially
Position.
Cylinder control loop:
It should be noted that in the actual application of prior art, workpiece is lifted position by contact pin arm device
During shifting, the driving force of linear electric motors 310 is the curve that an elder generation is the most slow.Owing to load quality changes
The linear electric motors 310 caused produce static thrust, linear electric motors 310 can be caused to generate heat, affect precise motion platform
Precision.And gas control unit 500 is improved by the present invention, use in position loop, increase compensation loop
Control method, its control principle block diagram is as shown in Figure 7.In the present embodiment, gas control unit 500 is in support group
The support force provided in part 200 motor process up and down is constant, not with change in displacement；Rodless cylinder
The pneumatic controller of 510 uses choke valve to add a low-pass first order filter composition, is used for eliminating load gravity and becomes
Change the motor static force caused.Its form is:Wherein 1≤kp≤ 50 is gain,
F≤10Hz is the cut-off frequency of low pass filter, thus allows Rodless cylinder 510 provide dynamically and assist support force.
In sum, the work stage contact pin arm device that the present invention provides, including installing pedestal 100, a support component
200, assembly 300, measuring unit 400, gas control unit 500 and auxiliary support assemblies 600 are driven, wherein,
Described support component 200 is installed on described installation pedestal 100, is used for carrying and adsorbing workpiece；Described driving
Assembly 300 is installed on described installation pedestal 100, drives described support component 200 catenary motion；Described survey
Amount unit 400 is fixed between described installation pedestal 100 and described support component 200, measures described support group
The displacement of part 200 catenary motion；Described gas control unit 500 is fixed on described installation pedestal 100 for described work
Part provides auxiliary to support and power down protection；Described auxiliary support assemblies 600 is fixed on described installation pedestal 100
On, and be connected with described support component 200, the two is synchronized with the movement to provide into described workpiece and supports.Present invention profit
Solve the motor static thrust caused because of load change with gas control unit 500, make this device more rapid accurately
Move, and a support component 200 uses single motor to drive with auxiliary support assemblies 600, improves synchronicity.
Obviously, those skilled in the art can carry out various change and modification without deviating from the present invention's to invention
Spirit and scope.So, if these amendments of the present invention and modification belong to the claims in the present invention and equivalent thereof
Within the scope of technology, then the present invention is also intended to change and including modification include these.
Claims (7)
1. a work stage contact pin arm device, it is characterised in that include installing pedestal, support component, driving
Assembly, measuring unit, gas control unit and auxiliary support assemblies, wherein,
Described support component is installed on described installation pedestal, is used for carrying and adsorbing workpiece；
Described driving assembly is arranged on described installation pedestal, drives described support component catenary motion；
Described measuring unit is fixed between described installation pedestal and described support component, measures described support group
The displacement of part catenary motion；
Described gas control unit is fixed on described installation pedestal provides auxiliary to support for described workpiece and power down guarantor
Protect；
Described auxiliary support assemblies is fixed on described installation pedestal, and is connected with described support component, the two
It is synchronized with the movement to provide for described workpiece and supports；
Described installation pedestal includes that X is to top board, installation base plate and support, described installation base plate and institute
State support and be all fixedly installed on the described X center to top board, build the fortune supporting described support component
Moving platform；Described auxiliary support assemblies is fixed on the described X periphery to top board；
Described support component includes gripper shoe, some hollow pillar stands and contact pin finger, and described some hollows are stood
Post is distributed in described gripper shoe, and the top of described hollow pillar stand has been respectively fixedly connected with contact pin finger；
Described gas control unit includes that Rodless cylinder and second lifts plate, and described Rodless cylinder is fixed on described peace
On dress base plate, described second lifts plate is installed on the lower section of described gripper shoe, and one end and described gas without bar
Cylinder is fixing to be connected；Described Rodless cylinder includes cylinder body and slide block two parts, and described cylinder body is fixed on described installation
On base plate, described slide block catenary motion, described slide block lifts with described second that plate is fixing to be connected, thus to
Described gripper shoe transmission support force；
Described auxiliary support assemblies include bracing frame, flexible cable, directive slide track, linked block, auxiliary thimble with
And three pulley mechanisms, described directive slide track is vertical to be fixed on support frame as described above, and described linked block passes through institute
Stating directive slide track vertically to slide, described auxiliary thimble is fixed on the top of described linked block, described flexible cable
Two ends be respectively connecting to described gripper shoe and described linked block, described flexible cable pass through described three turbines
Structure turns to.
2. work stage contact pin arm device as claimed in claim 1, it is characterised in that described installation pedestal is also
Including preloading spring, the two ends of described preloading spring are respectively connecting to described X to top board and described support component.
3. work stage contact pin arm device as claimed in claim 1, it is characterised in that on described contact pin finger
Being additionally provided with loading end and sucker, described sucker is connected to negative pressure source by described hollow pillar stand.
4. work stage contact pin arm device as claimed in claim 1, it is characterised in that described driving assembly bag
Including linear electric motors, line slideway, guide rail splice, described guide rail splice is in the drive of described linear electric motors
Lower sliding along described line slideway, described guide rail splice is lifted plate by first and is connected with described gripper shoe,
And drive described gripper shoe to be synchronized with the movement.
5. work stage contact pin arm device as claimed in claim 1, it is characterised in that described measuring unit bag
Include glass raster chi, grating scale installing plate, encoder count head and read head support, described glass raster
Chi is fixed on described support by described grating scale installing plate, and described encoder count head passes through described reading
Head bracket is fixed in described gripper shoe.
6. work stage contact pin arm device as claimed in claim 1, it is characterised in that in described gas control unit
Also include that choke valve, described choke valve are installed in described Rodless cylinder.
7. work stage contact pin arm device as claimed in claim 1, it is characterised in that described auxiliary support group
Part also includes that a spring, the two ends of described spring are respectively connecting to support frame as described above and described linked block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310513598.XA CN104570612B (en) | 2013-10-25 | 2013-10-25 | A kind of work stage contact pin arm device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310513598.XA CN104570612B (en) | 2013-10-25 | 2013-10-25 | A kind of work stage contact pin arm device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104570612A CN104570612A (en) | 2015-04-29 |
| CN104570612B true CN104570612B (en) | 2016-09-28 |
Family
ID=53087032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310513598.XA Active CN104570612B (en) | 2013-10-25 | 2013-10-25 | A kind of work stage contact pin arm device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104570612B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561870A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of sports platform adsorbent equipment and lithographic equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101905444A (en) * | 2009-06-04 | 2010-12-08 | 株式会社荏原制作所 | Trimming device, method for trimming and burnishing device |
| CN102243440A (en) * | 2010-05-10 | 2011-11-16 | 上海微电子装备有限公司 | Lithography machine for monitoring positional precision of wafer stage |
| CN102272914A (en) * | 2008-12-31 | 2011-12-07 | 伊雷克托科学工业股份有限公司 | Monolithic stage positioning system and method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008235470A (en) * | 2007-03-19 | 2008-10-02 | Nikon Corp | Planar motor apparatus, stage apparatus, exposure apparatus, and device manufacturing method |
| NL2003854A (en) * | 2008-12-22 | 2010-06-23 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
-
2013
- 2013-10-25 CN CN201310513598.XA patent/CN104570612B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102272914A (en) * | 2008-12-31 | 2011-12-07 | 伊雷克托科学工业股份有限公司 | Monolithic stage positioning system and method |
| CN101905444A (en) * | 2009-06-04 | 2010-12-08 | 株式会社荏原制作所 | Trimming device, method for trimming and burnishing device |
| CN102243440A (en) * | 2010-05-10 | 2011-11-16 | 上海微电子装备有限公司 | Lithography machine for monitoring positional precision of wafer stage |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104570612A (en) | 2015-04-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104266837B (en) | Ball screw performance testing testbed based on motor servo loading | |
| CN106973518A (en) | A kind of efficient automatic chip mounting equipment | |
| CN101533226B (en) | Leveling and focusing mechanism and microstage and workpiece stage using same | |
| CN101458102A (en) | Running fix test mechanism | |
| CN112893018B (en) | Adhesive dispensing packaging device for automobile integrated circuit chip | |
| CN108533712A (en) | A kind of high-precision vertical lift control system | |
| CN109896410A (en) | A kind of vertical mounting platform of four-degree-of-freedom | |
| CN102444670A (en) | Gas floating structure | |
| CN102537049A (en) | Radial air floatation guide module and photoetching machine motion platform applying same | |
| CN109264399A (en) | PCB plate putting machine | |
| CN206498599U (en) | A kind of efficient automatic chip mounting equipment | |
| CN106933045B (en) | A kind of auxiliary support apparatus and the photoetching machine equipment with Auxiliary support | |
| CN104570612B (en) | A kind of work stage contact pin arm device | |
| CN101290477A (en) | Balancing damping station | |
| CN209023787U (en) | PCB plate putting machine | |
| CN107900838A (en) | A kind of optical mirror plane polissoir | |
| CN106292196B (en) | A kind of litho machine vibration damping frame | |
| CN112750712A (en) | Measuring device | |
| US11143529B2 (en) | Cantilever linear motion reference device employing two-layer air suspension | |
| CN103672328A (en) | Lifting device controlling measuring head to move and be positioned on Z axis | |
| CN103681436B (en) | Absorptive table | |
| CN106078637A (en) | A kind of carrying apparatus of position adjustable | |
| CN115648132A (en) | High-bearing precision motion platform for flip chip bonding | |
| CN107265071A (en) | A kind of material carries streamline | |
| CN207896071U (en) | Silicon chip lifting apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |