CN104568808A - Multi-functional infrared gas sensor - Google Patents
Multi-functional infrared gas sensor Download PDFInfo
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- CN104568808A CN104568808A CN201410833057.XA CN201410833057A CN104568808A CN 104568808 A CN104568808 A CN 104568808A CN 201410833057 A CN201410833057 A CN 201410833057A CN 104568808 A CN104568808 A CN 104568808A
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Abstract
The invention designs a multi-functional infrared gas sensor which comprises an infrared characteristic filter and a thermopile infrared detector, wherein the thermopile infrared detector comprises a plurality of sensing units; each sensing unit comprises a silicon substrate, a frame, thermopiles, a support arm, an infrared absorption layer and an etching opening; the etching opening is arranged in the center of the silicon substrate by the frame; the support arm is arranged on the silicon substrate; thermopiles are arranged on the support arm at intervals; the infrared absorption layer is suspended in the middle of the frame and is fixedly connected with the frame by the support arms; the silicon substrate and the infrared absorption layer suspended in the middle of the frame respectively form a cold junction region and a hot junction region of the thermopiles.
Description
Technical field
Sensor field, particularly a kind of infrared gas sensor.
Background technology
The infrared gas sensor ubiquity function singleness can bought on the market at present, greatly, structural design is poor, and fastness is poor for volume, and the film problems such as easily cracked, temperature drift is serious, also have complex manufacturing, the shortcoming that yield rate is low simultaneously.Cause the reason of the above results to be, the production technology comparatively backwardness of its optical filter, and the integration degree of sensor is low, if desired detects different gas, then can only be realized by Multi-window structure, and the volume of whole sensor cannot be reduced.
Summary of the invention
In order to solve the problem, it is high that the present invention devises a kind of integration degree, and reasonable in design is multi-functional.The Multifunction infrared gas sensor of small words.
In order to achieve the above object, Multifunction infrared gas sensor designed by the present invention, comprise infrared signature optical filter and thermopile IR detector, thermopile IR detector comprises multiple sensing cell, each sensing cell comprises silicon substrate, framework, thermoelectric pile, sway brace, infrared absorption layer and etching opening, silicon substrate center arranges etching opening by framework, silicon substrate arranges sway brace, sway brace is arranged at intervals with thermoelectric pile, infrared absorption layer is suspended in the middle of framework, be fixedly connected with framework by sway brace, silicon substrate and the infrared absorption layer be suspended in the middle of framework form cold junction district and the thermojunction district of thermoelectric pile respectively.
Wherein said sway brace and infrared absorption layer are made up of the monox of deposit on the monosilicon and silicon nitride composite membrane.
Wherein said etching opening is that dry etching silicon substrate is formed.
Wherein said infrared signature optical filter is divided into multiple region, and each region is coated with different narrow-band-filter films, and each region correspondence is provided with multiple sensing cell simultaneously.
Further scheme is, Multifunction infrared gas sensor, be provided with multiple focus to be connected in parallel infrared eye, and thermopile IR detector connects logical operation circuit by field effect transistor, logical operation circuit connects automatic display device, automatic alarm, automatic exhaust fan equipment wherein one or more again.
Multifunction infrared gas sensor designed by the present invention, sensing cell reasonable in design, devises for special suspension structure, and can be used for the etching opening of dry etching, makes total can adapt to dry etching preferably.Due to the isotropy of dry etching, the shape of corrosion opening can be varied, is different from wet etching opening and strictly along particular crystal orientation arrangement, must considerably increases the dirigibility of design.Greatly reduce technology difficulty simultaneously, avoid the problems of wet etching.On the other hand, dry etching makes the design of etching opening more diversified, and then the geometric configuration of detector can be optimized, its all structure is all be made up of material modal in standard CMOS technique, is convenient to the back end signal treatment circuits such as analogue amplifier to be incorporated in sensor.Thermocouple logarithm 20 can be realized, resistance in series 16 ~ 18k Ω in mm region, physical dimension 2 mm × 2.By adjustment ion implantation dosage and energy, resistance in series can be reduced further, and then improve detectivity and responsiveness.What finally reach high success rate produces multiunit sensor, achieves the multifunctionality of sensor thermoelectric pile chip, intellectuality, integrated and microminiaturization.
For infrared signature optical filter, adopt the photoresist of heatproof 200 DEG C, to filter sheet base plate to be produced, carry out a kind of method that every mask is once coated with narrow-band-filter film, produce the infrared signature optical filter that subregion on discrete component is coated with different characteristic absorption spectrum.Can realize at present in 5mm × 5mm region, plate out 4 ~ 5 kinds infrared narrow-band-filter films.Compare the sensor with existing multiwindow, single infrared signature optical filter hyperchannel infrared sensor has following advantage:
Single infrared signature optical filter hyperchannel infrared sensor can accomplish volume more miniaturization;
The packaging process of single infrared signature optical filter is simple, and yield rate is high, and efficiency height becomes, this is lower;
The impermeability of single infrared signature optical filter encapsulation generally can reach 10-9 Pa, and the air tightness test of traditional multiwindow sensor can only reach 10-5 ~ 10-6 Pa usually.
In sum, the innovation point major embodiment of this product that obtains of the present invention is in the following areas:
Innovative point one: the hyperchannel of infrared signature optical filter is integrated
Realize the multifunctionality of Multifunction infrared gas sensor, the problem of hyperchannel through different characteristic absorbing wavelength of infrared signature optical filter must be solved.Based on MEMS technology technology, adopt photo etched mask technology, complete manufacturing and designing of hyperchannel arrowband infrared signature optical filter.By carrying out repeatedly photolithographic masking process to coated basal plate, the production of multiple infrared narrow band filter successively.Thus for the multifunctionality that realizes product with integratedly stepped the first step.
Innovative point two: many thermoelectric pile designs realize intelligent
On the basis having hyperchannel infrared signature optical filter, IC design technology based on MEMS technology has designed and produced the multiple thermoelectric pile distribution equalizing structures with infrared signature optical filter Corresponding matching, each sensing element in parallel, after monitoring the electric signal of detected gas with various component, through carrying out logical operation by back-end circuit by the program woven after being amplified by field effect transistor, realizing automatic display or the corresponding automatic alarm of Monitoring Data, automatically starting the intelligent Trigger Functions such as vent fan ventilation.
Innovative point three: the high compactness of infrared signature optical filter and Low Drift Temperature, improve product stability, due to the window that infrared signature optical filter is sensor, be exposed in physical environment in use, so the reliability of infrared signature optical filter is the key factor affecting sensor performance.This project infrared signature optical filter adopts ion gun assisted deposition technique, substantially increases the compactness of rete.Make infrared signature optical filter can meet under the environment of-50 DEG C to 150 DEG C, characteristic wavelength because temperature becomes the drift value of generation within 0.5 ‰, and there will not be and breaks, and rolls the physical damnifications such as peeling.Thus maintaining high stability and the reliability of sensor.
Accompanying drawing explanation
Fig. 1 is sensing cell structural representation.
Embodiment
Below by embodiment, the invention will be further described by reference to the accompanying drawings.
Embodiment 1.
As shown in Figure 1, Multifunction infrared gas sensor designed by the present invention, comprise infrared signature optical filter and thermoelectric pile 3 infrared eye, thermoelectric pile 3 infrared eye comprises multiple sensing cell, each sensing cell comprises silicon substrate 1, framework 2, thermoelectric pile 3, sway brace 4, infrared absorption layer 5 and etching opening 6, silicon substrate 1 center arranges etching opening 6 by framework 2, silicon substrate 1 arranges sway brace 4, sway brace 4 is arranged at intervals with thermoelectric pile 3, infrared absorption layer 5 is suspended in the middle of framework 2, be fixedly connected with framework 2 by sway brace 4, silicon substrate 1 and the infrared absorption layer 5 be suspended in the middle of framework 2 form cold junction district and the thermojunction district of thermoelectric pile 3 respectively.
Wherein said sway brace 4 and infrared absorption layer 5 are made up of the monox of deposit on the monosilicon and silicon nitride composite membrane.
Wherein said etching opening 6 is that dry etching silicon substrate 1 is formed.
Wherein said infrared signature optical filter is divided into multiple region, and each region is coated with different narrow-band-filter films, and each region correspondence is provided with multiple sensing cell simultaneously.
Multifunction infrared gas sensor, be provided with multiple focus to be connected in parallel infrared eye, and thermopile IR detector connects logical operation circuit by field effect transistor, logical operation circuit connects automatic display device, automatic alarm, automatic exhaust fan equipment wherein one or more again.
The detection performance of this Project Product to following gas all arrives, exceedes same kind of products at abroad.Its specific performance is as shown in the table:
Claims (5)
1. a Multifunction infrared gas sensor, comprise infrared signature optical filter and thermopile IR detector, it is characterized in that: thermopile IR detector comprises multiple sensing cell, each sensing cell comprises silicon substrate, framework, thermoelectric pile, sway brace, infrared absorption layer and etching opening, silicon substrate center arranges etching opening by framework, silicon substrate arranges sway brace, sway brace is arranged at intervals with thermoelectric pile, infrared absorption layer is suspended in the middle of framework, be fixedly connected with framework by sway brace, silicon substrate and the infrared absorption layer be suspended in the middle of framework form cold junction district and the thermojunction district of thermoelectric pile respectively.
2. want the Multifunction infrared gas sensor described in 1 according to right, it is characterized in that: described sway brace and infrared absorption layer are made up of the monox of deposit on the monosilicon and silicon nitride composite membrane.
3. multifunctional infrared gas sensor according to claim 1, is characterized in that: described etching opening is that dry etching silicon substrate is formed.
4. Multifunction infrared gas sensor according to claim 1, is characterized in that: described infrared signature optical filter is divided into multiple region, and each region is coated with different narrow-band-filter films, and each region correspondence is provided with multiple sensing cell simultaneously.
5. the Multifunction infrared gas sensor according to claim 1 or 2 or 3 or 4, it is characterized in that: be provided with multiple thermopile IR detector and be connected in parallel, and thermopile IR detector connects logical operation circuit by field effect transistor, logical operation circuit connects automatic display device, automatic alarm, automatic exhaust fan equipment wherein one or more again.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410833057.XA CN104568808A (en) | 2014-12-29 | 2014-12-29 | Multi-functional infrared gas sensor |
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| CN201410833057.XA CN104568808A (en) | 2014-12-29 | 2014-12-29 | Multi-functional infrared gas sensor |
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| CN104568808A true CN104568808A (en) | 2015-04-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110687068A (en) * | 2019-09-17 | 2020-01-14 | 中国科学院上海微***与信息技术研究所 | Infrared detector and infrared gas sensor |
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| JP2000065639A (en) * | 1998-08-26 | 2000-03-03 | Omron Corp | Infrared sensor |
| DE102004020685B3 (en) * | 2004-04-28 | 2005-09-01 | Robert Bosch Gmbh | Getter layer for use in IR sensor is installed on inside surface of sensor cap, and has gap through which IR passes to absorber and signal-generating layer |
| CN101776483A (en) * | 2009-12-29 | 2010-07-14 | 中国科学院上海微***与信息技术研究所 | Non-refrigerant thermopile infrared detector and manufacturing method thereof |
| CN102435578A (en) * | 2011-09-21 | 2012-05-02 | 河南汉威电子股份有限公司 | Full-scale range infrared gas detector and measuring method thereof |
| CN102819058A (en) * | 2012-08-30 | 2012-12-12 | 广州中国科学院先进技术研究所 | Making method of multi-channel integrated optical filter |
| CN103969209A (en) * | 2013-01-24 | 2014-08-06 | 上海朝辉压力仪器有限公司 | Concentration sensor |
| CN204374076U (en) * | 2014-12-29 | 2015-06-03 | 杭州麦乐克电子科技有限公司 | Multifunction infrared gas sensor |
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- 2014-12-29 CN CN201410833057.XA patent/CN104568808A/en active Pending
Patent Citations (7)
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| JP2000065639A (en) * | 1998-08-26 | 2000-03-03 | Omron Corp | Infrared sensor |
| DE102004020685B3 (en) * | 2004-04-28 | 2005-09-01 | Robert Bosch Gmbh | Getter layer for use in IR sensor is installed on inside surface of sensor cap, and has gap through which IR passes to absorber and signal-generating layer |
| CN101776483A (en) * | 2009-12-29 | 2010-07-14 | 中国科学院上海微***与信息技术研究所 | Non-refrigerant thermopile infrared detector and manufacturing method thereof |
| CN102435578A (en) * | 2011-09-21 | 2012-05-02 | 河南汉威电子股份有限公司 | Full-scale range infrared gas detector and measuring method thereof |
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| CN103969209A (en) * | 2013-01-24 | 2014-08-06 | 上海朝辉压力仪器有限公司 | Concentration sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110687068A (en) * | 2019-09-17 | 2020-01-14 | 中国科学院上海微***与信息技术研究所 | Infrared detector and infrared gas sensor |
| CN110687068B (en) * | 2019-09-17 | 2022-03-22 | 中国科学院上海微***与信息技术研究所 | Infrared detector and infrared gas sensor |
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Address after: Xingguo Qianjiang Economic Development Zone 503-2-101 311188 Hangzhou Road, Zhejiang Province Applicant after: Hangzhou Mai peak Polytron Technologies Inc Address before: Xingguo Qianjiang Economic Development Zone 503-2-101 311188 Hangzhou Road, Zhejiang Province Applicant before: Multi IR Optoelectronics Co., Ltd. |
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