CN104545795A - Wireless connection intraocular pressure sensor with planar inductor and capacitor connected in series - Google Patents

Wireless connection intraocular pressure sensor with planar inductor and capacitor connected in series Download PDF

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Publication number
CN104545795A
CN104545795A CN201510067329.4A CN201510067329A CN104545795A CN 104545795 A CN104545795 A CN 104545795A CN 201510067329 A CN201510067329 A CN 201510067329A CN 104545795 A CN104545795 A CN 104545795A
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intraocular pressure
pressure sensor
electric capacity
inductance
chip
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CN201510067329.4A
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CN104545795B (en
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陈德勇
刘丽娟
王军波
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Institute of Electronics of CAS
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Institute of Electronics of CAS
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Abstract

The invention relates to a wireless connection intraocular pressure sensor with a planar inductor and a capacitor connected in series. The wireless connection intraocular pressure sensor comprises a central capacitor, an inductor and an edge capacitor, wherein the inductor is connected in series with the central capacitor and the edge capacitor so that a C-L-C oscillation circuit is formed. The wireless connection intraocular pressure sensor disclosed by the invention realizes the wireless connection of the inductor and the capacitor in series connection through the edge capacitor, is simple in structure, can prevent the difficulty in leading wire interconnection in a wired bonding process, and can be used for enhancing the working reliability of an integral sensor structure; in addition, the wireless connection intraocular pressure sensor disclosed by the invention is suitable for batch production and is effectively reduced in manufacturing cost.

Description

The wireless connections intraocular pressure sensor of planar inductor and capacitances in series
Technical field
The present invention relates to intraocular pressure sensor field, especially relate to the wireless connections intraocular pressure sensor of a kind of planar inductor and capacitances in series, with for the drawback of existing wireless and passive intraocular pressure sensor structure in preparation technology, propose the new structure improved.
Background technology
Glaucoma is because pathologic intraocular pressure raises a kind of disease causing characteristic optic nerve lesion and defect of visual field, is the irreversible blinding oculopathy in the 2nd, the whole world.The rising of intraocular pressure is the glaucomatous important indicator of Diagnosis and Treat.Some patients detection of eyeball tension within the consulting hours is normal, but still has occurred glaucoma blinding.Analyze and find, the fluctuation of glaucoma patient intraocular pressure in 24h (hour) is comparatively large, the some time beyond outpatient service, such as, reaches peak value when sleep or early morning.Thus accurately and timely detection of eyeball tension has very important significance to glaucomatous diagnosis and treatment in time.Can carry out 24h to intraocular pressure at present to monitor continuously, the intraocular pressure sensor of correct record varieties of intraocular pressure comprises implanted intraocular pressure sensor and non-intrusion type intraocular pressure sensor in real time.
Implanted intraocular pressure sensor the need of eye outer controller feed, is divided into wireless and passive and wireless feed two kinds of forms according to implanted sensor.Passive type implanted sensor requires to minimize device size on the one hand, thus minimizes implantation infringement; Require sensor and external monitor portion coupling effect on the other hand by force, thus increase the distance detected, this forces sensors inductance unsuitable too small.Feed device needs integrated circuit, and circuit design is more complicated; System power dissipation is comparatively large, and heating is comparatively serious, and the comfort implanted is reduced; The size of device is larger.But owing to adopting integrated equipment to realize radio communication, make its communication quality better, communication distance is farther.But no matter be passive type or feed formula, device all need implant ocular tissue by surgical operation, causes irreversible wound.
Along with the development of non-invasive sensors, realize the tonometry pattern without the need to Operation, avoid the irreversible damage that ocular tissue is caused.Such sensor is classified according to the communication mode between inside and outside, and can be divided into two large classes, be radio communication and wire communication respectively.For radio communication class device, the mode according to communication mainly can be divided into two large classes, and a class is based on ic-type, and a class is based on inductive coupling.Intraocular pressure sensor to the development of wireless measurement, avoids the sense of discomfort that wired measuring brings from wired.For based in radio communication from the intraocular pressure sensor based on ic-type to the development of the intraocular pressure sensor based on inductance type, solve the defect that integrated circuit brings.But at present based on the connection that the wireless non-invasive sensors of inductance type adopts the mode of wired bonding to realize between inductance and electric capacity, there is certain difficulty in wired bonding technology operation.
Specifically, the non-invasive sensors structure based on inductive is a simple L-C circuit, and capacity substrate lays respectively at upper and lower two chips, and inductance is connected with capacity substrate, is positioned at chip, and another substrate of electric capacity is positioned at lower chip.The mode of what at present existing bibliographical information adopted during the connecting of chip capacity substrate and upper chip inductance under realizing is wired bonding, processing technique has great difficulty.Fig. 1 gives the structural representation of the chip up and down of this sensor, Fig. 2 gives the Equivalent conjunction schematic diagram of the upper and lower chip of this sensor without wire bonding, can find now can not form LC series loop, namely when not forming wired bonding, whole sensor construction just cannot normally work.
Summary of the invention
For above-mentioned technical problem, one of main purpose of the present invention is the wireless and passive intraocular pressure sensor how providing a kind of new structure, to avoid the interconnected difficulty of lead-in wire in above-mentioned wired bonding process, improves the reliability of whole sensor construction work.
To achieve these goals, the sensor in the present invention adopts the series circuit configuration of a kind of C-L-C.More specifically, the invention provides the wireless connections intraocular pressure sensor of a kind of planar inductor and capacitances in series, comprise central electric capacity, inductance and edge capacitance, it is characterized in that, described inductance is all connected with described central electric capacity and edge capacitance, thus forms C-L-C oscillation circuit.
Wherein, the capacitance of described edge capacitance is much larger than the capacitance of central electric capacity.
Wherein, described inductance is ring-shaped inductors.
Wherein, described wireless connections intraocular pressure sensor comprises chip and lower chip, described upper chip is formed with the top crown of described central electric capacity and edge capacitance, and the inductance of all connecting with described top crown; And
Described lower chip is formed with the bottom crown of described central electric capacity and edge capacitance, and both are conducted by wire.
Wherein, described wireless connections intraocular pressure sensor adopts biocompatible flexible material as substrate.
Wherein, in described wireless connections intraocular pressure sensor, the value of ring-shaped inductors is between 0-5 μ H scope, and the value of central electric capacity is between 1-25pF scope.
Known based on technique scheme, main advantage of the present invention is as follows: adopt extra edge capacitance to realize connecting of electric capacity and inductance, structure is simple; The present invention only need adopt additional edge capacitance, utilizes this electric capacity upper and lower base plate to be connected with ring-shaped inductors with central electric capacity respectively, thus realizes connecting of inductance and central electric capacity.In addition, edge capacitance is much larger than central electric capacity, and the total capacitance after series connection depends on central electric capacity, and the effect of edge capacitance is only to connect inductance and electric capacity, therefore, adopts this structure, can realize connecting of inductance and electric capacity simply; Technique of the present invention is simple, is conducive to promoting chip manufacturing yield rate, reduces costs, is suitable for mass production; The present invention is when realizing bonding, and without the need to lead-in wire, only simply need aim at bonding, technological operation is simple, effectively can improve the yield rate of sensor chip thus; And multiple upper and lower chip structure can carry out bonding operation, batched operation, is suitable for mass production, effectively reduces manufacturing cost simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of the upper and lower chip of LC sensor of the prior art, and wherein (a) is lower chip, and (b) is upper chip;
Fig. 2 is the upper and lower chip of L-C sensor of the prior art without the Equivalent conjunction schematic diagram of inductance during wire bonding and electric capacity;
Fig. 3 is the structural representation of chip on intraocular pressure sensor of the present invention;
Fig. 4 is the structural representation of chip under intraocular pressure sensor of the present invention;
Fig. 5 is the Equivalent conjunction schematic diagram of inductance and electric capacity after the upper and lower chip bonding of intraocular pressure sensor C-L-C structure of the present invention.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The present invention be directed to the drawback of existing wireless and passive intraocular pressure sensor structure in preparation technology, for solving the interconnected difficulty of lead-in wire in bonding process, and propose the new structure of improvement, namely the series circuit configuration of a kind of C-L-C is adopted, this structure comprises central electric capacity, inductance and edge capacitance, inductance is all connected with central electric capacity and edge capacitance, thus forms C-L-C oscillation circuit.Wherein, the capacitance of edge capacitance, much larger than the capacitance of central electric capacity, plays a part to connect ring-shaped inductors and central electric capacity.This circuit total capacitance is obtained by edge capacitance and central capacitances in series, and because edge capacitance is much larger than central electric capacity, total capacitance is approximately equal to central electric capacity.Therefore, this C-L-C oscillation circuit is formed by central electric capacity and ring-shaped inductors.Figure 5 provides the Equivalent conjunction schematic diagram of inductance and electric capacity after the upper and lower chip bonding of intraocular pressure sensor C-L-C structure of the present invention.
As shown in Figure 3,4, Fig. 3 and Fig. 4 sets forth the schematic diagram of the upper and lower chip of this C-L-C structure.Wherein, upper chip is formed with the top crown of central electric capacity and edge capacitance, and the inductance of all connecting with top crown; And lower chip is formed with the bottom crown of central electric capacity and edge capacitance, and both are conducted by wire.
In wireless and passive intraocular pressure sensor structure of the present invention, electric capacity and inductance can adopt structure well known in the art to be formed, such as by forming relative Copper Foil region (pole plate) on chip, and filled dielectric material forms electric capacity betwixt, dielectric material is such as air or non-conductive medium, capacitor's capacity is according to specific needs chosen, and also can carry out the capacitance of control capacittance according to the distance between pole plate.Can form inductance by the copper conductor forming helix in substrate, as a preferred embodiment, inductance can be ring-shaped inductors, thus processing technology is simple, is easy to mass manufacture.
In a preferred embodiment, intraocular pressure sensor adopts flexible material as the substrate of upper and lower chip, be preferably biocompatible flexible material, such as Parylene (Parylene), polyimides, hydroxyethyl methylacrylate (HEMA), polydimethylsiloxane (PDMS) etc.Electric capacity and inductance can adopt the techniques such as plating, etching or sputtering to form copper film and make, and copper film thickness is 5-15 μm.The inductance value of ring-shaped inductors depends on thickness and the number of turn of electrode, and value, between 0-5 μ H scope, is preferably between 1-5 μ H scope; The size of capacitance and the medium between pole plate and substrate pitch are from relevant, and wherein central electric capacity value is between 1-25pF scope.
In order to specifically describe further technical scheme of the present invention by reference to the accompanying drawings.
Fig. 1 is the structural representation of the upper and lower chip of LC sensor of the prior art, and wherein (a) is lower chip, and (b) is upper chip.Upper as can be seen from figure, two capacity substrates 1,3 lay respectively at upper and lower two chips, and ring-shaped inductors 2 is connected with a capacity substrate 3, is positioned at chip, another capacity substrate 1 is positioned at lower chip, and the non-invasive sensors based on inductive formed thus is a simple L-C circuit.
Fig. 2 is the upper and lower chip of L-C sensor of the prior art without the Equivalent conjunction schematic diagram of inductance during wire bonding and electric capacity.The inductance 2 being wherein positioned at chip is connected with capacity substrate 3, and the capacity substrate 3 being positioned at chip is relative with the capacity substrate 1 being positioned at lower chip, forms the upper bottom crown of an electric capacity, thus an overall formation L-C circuit.
Fig. 3 is the structural representation of chip on intraocular pressure sensor of the present invention.Wherein the thick annulus of outer ring is edge capacitance substrate 5, and the center of circle of central authorities is central capacity substrate 6, and ring-shaped inductors 2 is all connected in series with edge capacitance substrate 5 and central capacity substrate 6.
Fig. 4 is the structural representation of chip under intraocular pressure sensor of the present invention.Wherein the thick annulus of outer ring is edge capacitance substrate 7, and the center of circle of central authorities is central capacity substrate 8, is communicated with between the two with wire.
Fig. 5 is the Equivalent conjunction schematic diagram of inductance and electric capacity after the upper and lower chip bonding of C-L-C structure of intraocular pressure sensor of the present invention.Wherein 2 is ring-shaped inductors, and 5 is central capacity substrate, and 6 is edge capacitance substrate, and 5,2,6 are all arranged in chip structure on sensor, and 7 is central capacity substrate, and 8 is edge capacitance substrate, and 7,8 are all arranged in chip structure under sensor.
By trial-production checking, intraocular pressure sensor of the present invention only need adopt additional edge capacitance, simply can realize connecting of inductance and electric capacity, thus avoid the processing technique of wired bonding complexity, and processing technique simply, is suitable for mass production.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (5)

1. a wireless connections intraocular pressure sensor for planar inductor and capacitances in series, comprises central electric capacity, inductance and edge capacitance, it is characterized in that, described inductance is all connected with described central electric capacity and edge capacitance, thus forms C-L-C oscillation circuit.
2. wireless connections intraocular pressure sensor according to claim 1, the capacitance of wherein said edge capacitance is much larger than the capacitance of central electric capacity.
3. wireless connections intraocular pressure sensor according to claim 1, wherein said inductance is ring-shaped inductors.
4. wireless connections intraocular pressure sensor according to claim 1, wherein said wireless connections intraocular pressure sensor comprises chip and lower chip, described upper chip is formed with the top crown of described central electric capacity and edge capacitance, and the inductance of all connecting with described top crown; And
Described lower chip is formed with the bottom crown of described central electric capacity and edge capacitance, and both are conducted by wire.
5. wireless connections intraocular pressure sensor according to claim 1, in wherein said wireless connections intraocular pressure sensor, the value of ring-shaped inductors is between 0-5 μ H scope, and the value of central electric capacity is between 1-25pF scope.
CN201510067329.4A 2015-02-09 2015-02-09 Planar inductor and the wireless connections intraocular pressure sensor of capacitances in series Active CN104545795B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105919551A (en) * 2016-04-13 2016-09-07 华中科技大学 Micro-fluid technique based non-implantable intraocular pressure detection sensor
CN105962887A (en) * 2016-04-13 2016-09-28 华中科技大学 Non-invasive ocular pressure detection sensor based on micro-fluidic technology

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CN103293337A (en) * 2013-05-15 2013-09-11 中北大学 Wireless passive capacitive accelerometer
CN103860160A (en) * 2012-12-12 2014-06-18 中国科学院电子学研究所 Wireless passive gastrointestinal tract pressure detection system

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Publication number Priority date Publication date Assignee Title
US20050268722A1 (en) * 2004-06-07 2005-12-08 Yu-Chong Tai Implantable mechanical pressure sensor and method of manufacturing the same
US20060117859A1 (en) * 2004-12-02 2006-06-08 Honeywell International, Inc. Disposable and trimmable wireless pressure sensor for medical applications
US20060270933A1 (en) * 2005-05-25 2006-11-30 Benson Randall J Apparatus and method for tagging and detecting surgical implements
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Publication number Priority date Publication date Assignee Title
CN105919551A (en) * 2016-04-13 2016-09-07 华中科技大学 Micro-fluid technique based non-implantable intraocular pressure detection sensor
CN105962887A (en) * 2016-04-13 2016-09-28 华中科技大学 Non-invasive ocular pressure detection sensor based on micro-fluidic technology

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