CN104536151A - Quick alignment device - Google Patents
Quick alignment device Download PDFInfo
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- CN104536151A CN104536151A CN201410805649.0A CN201410805649A CN104536151A CN 104536151 A CN104536151 A CN 104536151A CN 201410805649 A CN201410805649 A CN 201410805649A CN 104536151 A CN104536151 A CN 104536151A
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- mirror surface
- surface position
- position finder
- collimator objective
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- 238000003384 imaging method Methods 0.000 claims abstract description 38
- 230000007246 mechanism Effects 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 abstract description 14
- 238000005259 measurement Methods 0.000 description 4
- 208000032837 Ring chromosome 16 syndrome Diseases 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004904 shortening Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Telescopes (AREA)
Abstract
The invention relates to a quick alignment device. Comprises a mirror surface positioning instrument collimation object lens tube; the lower end of the collimating objective lens tube of the mirror surface positioning instrument is provided with a light beam alignment device; the light beam alignment device comprises an alignment device main body, a light splitting device, a lens device and an imaging device which are sequentially arranged on a light path of laser emitted by a collimating objective lens tube of the mirror surface positioning instrument; a reflecting device is arranged on one side of the reflecting surface of the light splitting device; the reflecting device comprises a mirror frame and a pyramid prism, and the pyramid prism is fixed in the mirror frame. The invention provides a rapid alignment device which improves the interval efficiency and application range of a mirror surface positioning instrument measuring optical system.
Description
Technical field
The invention belongs to precision measurement field of measuring techniques, relate to a kind of alignment device, be specifically related to a kind of device of rapid alignment.
Background technology
In optical system alignment process, mirror surface position finder is widely used in optical lens center thickness non-cpntact measurement and controls the position of lens in systematic optical axis by the length measuring air gap between lenses.Mirror surface position finder adopts the Michelson Interference Principle of short-coherence light source to carry out work, measuring accuracy can reach 1um, but its test visual field is very little, the reflected light of detected element is difficult to enter its test visual field quickly and accurately, the relative angle often needing the operating personnel of specialty to adjust mirror surface position finder collimator objective pipe and detected element for a long time just can reach optimum condition, bothersome effort.Also often occur can not find the bad phenomenon such as reflection image and appearance " ghost image " when measuring.
Summary of the invention
The object of the present invention is to provide a kind of structure simple, the device of easy to operate realized mirror surface position finder light beam rapid alignment.
Technical solution of the present invention is: a kind of fast alignment device, and its special character is: comprise mirror surface position finder collimator objective pipe; Above-mentioned mirror surface position finder collimator objective pipe lower end is provided with beam directing mechanisms; Above-mentioned beam directing mechanisms comprises alignment device main body, light-dividing device, lens devices and imaging device that the light path of mirror surface position finder collimator objective pipe injection laser sets gradually; Above-mentioned light-dividing device reflecting surface side is also provided with reflection unit; Above-mentioned reflection unit comprises picture frame and prism of corner cube, and described prism of corner cube is fixed in picture frame;
The laser axis that above-mentioned light-dividing device light inlet minute surface and mirror surface position finder collimator objective pipe penetrate is at 45 °; The laser axis that the axis of said lens device and mirror surface position finder collimator objective pipe penetrate is in 90 °;
Above-mentioned imaging device is arranged on alignment device body front end;
Above-mentioned imaging device comprises CCD camera and PC; Two picture points that CCD camera one end receiver lens device converges, the other end is connected with PC, and PC shows the relative position of two picture points.
Above-mentioned imaging device is interconnected by bridge plate and lens devices, and the laser axis penetrated with mirror surface position finder collimator objective pipe is in 90 °;
Above-mentioned alignment device main body becomes " convex " font, comprises top connector, front end connector, bottom connector and middle chamber; Above-mentioned top connector, front end connector, bottom connector are interconnected by middle chamber and form three-port structure;
Above-mentioned light-dividing device is arranged on middle chamber inside; Above-mentioned light-dividing device comprises semi-transparent semi-reflecting spectroscope and cylinder base; Above-mentioned semi-transparent semi-reflecting spectroscope is used for laser beam to be divided into reflection lasering beam and transmission laser bundle; Above-mentioned cylinder base fixes semi-transparent semi-reflecting spectroscope;
Above-mentioned top connector and mirror surface position finder collimator objective pipe are interconnected;
Above-mentioned front end connector is provided with adjusting knob sleeve, stage clip and can regulates the lens combination of laser facula size by straight line;
Above-mentioned bottom connector is provided with the ejection hole of the laser axis coaxle that axis and mirror surface position finder collimator objective pipe penetrate;
Above-mentioned mirror surface position finder collimator objective pipe injection incident light, incident light is divided into the first reflected light and the first transmitted light after light-dividing device; Above-mentioned first reflected light is through lens devices imaging on imaging device; Above-mentioned transmitted light is reflected into the second reflected light through detected element and returns along former road; Second reflected light becomes the 3rd reflected light after light-dividing device reflection; 3rd reflected light is reflected as the 4th reflected light through reflection unit; Above-mentioned 4th reflected light forms the imaging on imaging device of the second transmitted light through light-dividing device transmission and lens devices;
Above-mentioned reflection unit and light-dividing device centre are provided with to repair grinds spacer ring, and the laser axis that reflection unit axis and collimator objective pipe penetrate is in 90 °;
Above-mentioned adjusting knob sleeve is connected by fine thread with front end connector; Said lens group comprises lens barrel, lens barrel outside surface is provided with rectilinear movement locating slot; Said lens group rear end is provided with annular groove; Above-mentioned stage clip is provided with stage clip base, stage clip base is provided with stage clip base annular groove; Above-mentioned stage clip scioptics group rear end annular groove and stage clip base annular groove are located, and stage clip base and alignment device main body are located by the jackscrew that leads; Jackscrew and the lens combination of leading moves linearly locating slot clearance fit, and lens combination straight line microspur is moved forward and backward.
Advantage of the present invention is: the present invention can shorten the regulation time that widely used mirror surface position finder measures optical lens center thickness in actual applications greatly.In laboratory conditions, professional generally needs the longer time to complete the non-cpntact measurement of optical lens center thickness, and layman's required time is then longer.And if use the alignment device of mirror surface position finder light beam rapid alignment of the present invention, picture, aligning time 3 ~ 5 times are looked in the adjustment can shortening mirror surface position finder measuring system optical system interval, further increase efficiency and range of application that mirror surface position finder measures optical system interval.
Accompanying drawing explanation
Fig. 1 is the structural representation of beam directing mechanisms of the present invention;
Fig. 2 is the fundamental diagram of beam directing mechanisms of the present invention;
Wherein, mirror surface position finder collimator objective pipe-1, semi-transparent semi-reflecting spectroscope-2, lens combination-3, imaging device-4, detected element-5, prism of corner cube-6, alignment device main body-7, light-dividing device-8, reflection unit-9, lens devices-10, imaging device-11, bridge plate-12, adjusting knob sleeve-13, guiding jackscrew-14, stage clip-15, repair and grind spacer ring-16, top connecting port-17, front end connecting port-18, bottom connecting port-19, middle chamber-20, ejection hole-21, fixing spectroscopical cylinder base-22, stage clip base-23, PC-24, CCD camera support-25.
Embodiment
See Fig. 1-2, a kind of fast alignment device, comprises mirror surface position finder collimator objective pipe 1; Mirror surface position finder collimator objective pipe 1 lower end is provided with beam directing mechanisms; Beam directing mechanisms comprises mirror surface position finder collimator objective pipe 1 and penetrates alignment device main body 7, light-dividing device 8, lens devices 10 and imaging device 11 that the light path of laser sets gradually; Light-dividing device 8 reflecting surface side is also provided with reflection unit 9; Reflection unit 9 comprises picture frame and prism of corner cube, and prism of corner cube is fixed in picture frame; The laser axis that light-dividing device 8 light inlet minute surface and mirror surface position finder collimator objective pipe 1 penetrate is at 45 °; The laser axis that the axis of lens devices 10 and mirror surface position finder collimator objective pipe 1 penetrate is in 90 °; Imaging device 11 is arranged on alignment device main body 7 front end; Imaging device 11 comprises CCD camera and PC 24; Two picture points that CCD camera one end receiver lens device 10 converges, the other end is connected with PC 24, and PC 24 shows the relative position of two picture points.Imaging device 11 is interconnected by bridge plate 12 and lens devices 10, and the laser axis penetrated with mirror surface position finder collimator objective pipe 1 is in 90 °; Alignment device main body 7 one-tenth " convex " font, comprises top connector 17, front end connector 18, bottom connector 19 and middle chamber 20; Top connector 17, front end connector 18, bottom connector 19 are interconnected by middle chamber 20 and form three-port structure; It is inner that light-dividing device 8 is arranged on middle chamber 20; Light-dividing device 8 comprises semi-transparent semi-reflecting spectroscope 2 and cylinder base; Above-mentioned semi-transparent semi-reflecting spectroscope 2 is for being divided into reflection lasering beam and transmission laser bundle by laser beam; Cylinder base fixes semi-transparent semi-reflecting spectroscope 2; Top connector 17 and mirror surface position finder collimator objective pipe 1 are interconnected; Front end connector 18 is provided with adjusting knob sleeve 13, stage clip 15 and can regulates the lens combination 3 of laser facula size by straight line; Bottom connector 19 is provided with the ejection hole 21 of the laser axis coaxle that axis and mirror surface position finder collimator objective pipe 1 penetrate; Mirror surface position finder collimator objective pipe 1 penetrates incident light, and incident light is divided into the first reflected light and the first transmitted light after light-dividing device; First reflected light is through lens devices imaging on imaging device 11; Transmitted light is reflected into the second reflected light through detected element and returns along former road; Second reflected light becomes the 3rd reflected light after light-dividing device 8 reflects; 3rd reflected light is reflected as the 4th reflected light through reflection unit 9; 4th reflected light forms the imaging on imaging device 11 of the second transmitted light through light-dividing device 8 transmission and lens devices; Reflection unit 9 is provided with to repair with light-dividing device 8 centre and grinds spacer ring 16, and the laser axis that reflection unit 9 axis and collimator objective pipe 1 penetrate is in 90 °; Adjusting knob sleeve 13 is connected by fine thread with front end connector; Lens combination 3 comprises lens barrel, lens barrel outside surface is provided with rectilinear movement locating slot; Lens combination 3 rear end is provided with annular groove; Stage clip 15 is provided with stage clip base 23, stage clip base 23 is provided with stage clip base annular groove; Stage clip 15 scioptics group 3 rear end annular groove and stage clip base annular groove are located, and stage clip base 23 is located by the jackscrew 14 that leads with alignment device main body 7; Jackscrew 14 and the lens combination 3 of leading moves linearly locating slot clearance fit, and lens combination 3 straight line microspur is moved forward and backward.
Below in conjunction with accompanying drawing, the present invention is described in further detail:
See Fig. 1, Fig. 2, realize the alignment device of mirror surface position finder light beam rapid alignment, described alignment device is made up of alignment device main body 7, light-dividing device 8, reflection unit 9, lens devices 10 and imaging device 11; Described alignment device body interior arranges top connecting port 17, front end connecting port 18, bottom connecting port 19 and middle chamber 20, and top connecting port 17, front end connecting port 18, bottom connecting port 19 are interconnected by middle chamber 20 and form three-port structure; Described middle chamber 20 inside arranges semi-transparent semi-reflecting light-dividing device 8; Described top connecting port 17 connects the collimator objective pipe 1 on mirror surface position finder; Described front end connecting port 18 is provided with adjusting knob sleeve 13, guiding jackscrew 14, stage clip 15 and can regulates the lens combination 3 of laser facula size by straight line; Described bottom connecting port 19 arranges the ejection hole 21 of axis and mirror surface position finder laser axis coaxle; Described light-dividing device 8 is made up of semi-transparent semi-reflecting spectroscope 2 and fixing spectroscopical cylinder base 22; Described light-dividing device 8 light inlet minute surface and mirror surface position finder laser axis at 45 °; Described lens devices 10 axis mirror surface position finder laser axis is in 90 °; Described reflection unit is prism of corner cube, is arranged on light-dividing device rear end, and middle setting can be repaiied and be ground spacer ring, ensures that reflection unit, light-dividing device axis and mirror surface position finder laser axis distinguish in 90 ° and 45 °; Described imaging device comprises CCD camera and PC, and CCD camera is arranged on alignment device body front end, is coupled to each other makes itself and mirror surface position finder laser axis in 90 ° by bridge plate, bracing frame.
Described light-dividing device 8 is semi-transparent semi-reflecting level crossings 2, laser beam can be divided into reflection lasering beam and transmission laser bundle.Described reflection unit 9 is prism of corner cube 6.Described imaging device 4 comprises CCD camera 11 and PC 24; Described reflection unit 9, lens devices 10, imaging device 11 are successively along the same axis arrangement perpendicular to collimator objective pipe 1 optical axis on mirror surface position finder.
Realize mirror surface position finder light beam rapid alignment method, in accordance with the following steps:
(1) beam directing mechanisms is installed on mirror surface position finder collimator objective pipe lower end, is contacted with collimator objective pipe by top connecting port step surface and position.
(2) open mirror surface position finder laser instrument, make mirror surface position finder collimator objective pipe 1 penetrate incident light L, incident light L is divided into the first reflected light L0 and the first transmitted light L2 after semi-transparent semi-reflecting spectroscope 2; Described first reflected light L0 becomes the first convergent beam L1 and imaging in CCD camera 4 through lens combination 3; Described first transmitted light L2 is reflected into the second reflected light L3 through detected element 5 and returns along former road; Second reflected light L3 becomes the 3rd reflected light L4 after semi-transparent semi-reflecting spectroscope 2 reflects; 3rd reflected light L4 is reflected as the 4th reflected light L5 through prism of corner cube 6; Described 4th reflected light L5 forms the second transmitted light L6 through the transmission of semi-transparent semi-reflecting spectroscope 2; Described second transmitted light L6 forms the second convergent beam L7 and imaging in CCD camera 11 through lens combination 3.
(3) adjust mirror surface position finder collimator objective pipe 1 and the relative angle of detected element 5, the first convergent beam L1 and the second convergent beam L7 imaging in beam directing mechanisms CCD camera 11 is overlapped.
If the first convergent beam L1 and the second convergent beam L7 imaging in beam directing mechanisms CCD camera 11 overlaps, then beam alignment success, takes off light beam and finds device accurately and can measure.
(5) if the first convergent beam L1 and the second convergent beam L7 imaging in beam directing mechanisms CCD camera 11 do not overlap, then beam alignment success, returns step (3).
The alignment device realizing mirror surface position finder light beam rapid alignment is formed primarily of alignment device main body 7, light-dividing device 8, reflection unit 9, lens devices 10 and imaging device more than 4 part.Wherein, beam directing mechanisms main body 7 is connected with mirror surface position finder collimator objective pipe as the benchmark of alignment device.
Described alignment device main body 7 cavity, light-dividing device 8, reflection unit 9, lens devices 10 are felt relieved on high-precision aligning lathe, and Xiu Qiexiu grinds spacer ring 16, ensure light-dividing device 8, reflection unit 9, lens devices 10, imaging device 4 successively along the same axis arrangement perpendicular to collimator objective pipe 1 optical axis on mirror surface position finder.
Described adjusting knob sleeve 13 is connected by fine thread with front end connecting port 18; Described stage clip 15 scioptics group 3 rear end annular groove and stage clip base 23 annular groove are located, and stage clip base 23 is located by the jackscrew 14 that leads with alignment device main body 7; Jackscrew 14 and the lens combination 3 of leading moves linearly locating slot clearance fit, by rotation of adjustment knob sleeve 13, lens combination 3 straight line microspur is moved forward and backward.
The present invention can shorten the regulation time that widely used mirror surface position finder measures optical lens center thickness in actual applications greatly.In laboratory conditions, professional generally needs the longer time to complete the non-cpntact measurement of optical lens center thickness, and layman's required time is then longer.And if use the alignment device of mirror surface position finder light beam rapid alignment of the present invention, picture, aligning time 3 ~ 5 times are looked in the adjustment can shortening mirror surface position finder measuring system optical system interval, further increase efficiency and range of application that mirror surface position finder measures optical system interval.
Above content is in conjunction with concrete preferred implementation further description made for the present invention; can not assert that the specific embodiment of the present invention is only limitted to this; for general technical staff of the technical field of the invention; without departing from the inventive concept of the premise; some simple deduction or replace can also be made, all should be considered as belonging to the present invention by submitted to claims determination scope of patent protection.
Claims (3)
1. a fast alignment device, is characterized in that: comprise mirror surface position finder collimator objective pipe; Described mirror surface position finder collimator objective pipe lower end is provided with beam directing mechanisms; Described beam directing mechanisms comprises alignment device main body, light-dividing device, lens devices and imaging device that the light path of mirror surface position finder collimator objective pipe injection laser sets gradually; Described light-dividing device reflecting surface side is also provided with reflection unit; Described reflection unit comprises picture frame and prism of corner cube, and described prism of corner cube is fixed in picture frame;
The laser axis that described light-dividing device light inlet minute surface and mirror surface position finder collimator objective pipe penetrate is at 45 °; The laser axis that the axis of described lens devices and mirror surface position finder collimator objective pipe penetrate is in 90 °;
Described imaging device is arranged on alignment device body front end;
Described imaging device comprises CCD camera and PC; Two picture points that CCD camera one end receiver lens device converges, the other end is connected with PC, and PC shows the relative position of two picture points;
Described imaging device is interconnected by bridge plate and lens devices, and the laser axis penetrated with mirror surface position finder collimator objective pipe is in 90 °;
Described alignment device main body becomes " convex " font, comprises top connector, front end connector, bottom connector and middle chamber; Described top connector, front end connector, bottom connector are interconnected by middle chamber and form three-port structure;
Described light-dividing device is arranged on middle chamber inside; Described light-dividing device comprises semi-transparent semi-reflecting spectroscope and cylinder base; Described semi-transparent semi-reflecting spectroscope is used for laser beam to be divided into reflection lasering beam and transmission laser bundle; Described cylinder base fixes semi-transparent semi-reflecting spectroscope;
Described top connector and mirror surface position finder collimator objective pipe are interconnected;
Described front end connector is provided with adjusting knob sleeve, stage clip and can regulates the lens combination of laser facula size by straight line;
Described bottom connector is provided with the ejection hole of the laser axis coaxle that axis and mirror surface position finder collimator objective pipe penetrate;
Described mirror surface position finder collimator objective pipe injection incident light, incident light is divided into the first reflected light and the first transmitted light after light-dividing device; Described first reflected light is through lens devices imaging on imaging device; Described transmitted light is reflected into the second reflected light through detected element and returns along former road; Second reflected light becomes the 3rd reflected light after light-dividing device reflection; 3rd reflected light is reflected as the 4th reflected light through reflection unit; Described 4th reflected light forms the imaging on imaging device of the second transmitted light through light-dividing device transmission and lens devices.
2. a kind of fast alignment device according to claim 1, is characterized in that: described reflection unit and light-dividing device centre are provided with to repair grinds spacer ring, and the laser axis that reflection unit axis and collimator objective pipe penetrate is in 90 °.
3. a kind of fast alignment device according to claim 1 and 2, is characterized in that: described adjusting knob sleeve is connected by fine thread with front end connector; Described lens combination comprises lens barrel, lens barrel outside surface is provided with rectilinear movement locating slot; Described lens combination rear end is provided with annular groove; Described stage clip is provided with stage clip base, stage clip base is provided with stage clip base annular groove; Described stage clip scioptics group rear end annular groove and stage clip base annular groove are located, and stage clip base and alignment device main body are located by the jackscrew that leads; Jackscrew and the lens combination of leading moves linearly locating slot clearance fit, and lens combination straight line microspur is moved forward and backward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410805649.0A CN104536151B (en) | 2014-12-20 | 2014-12-20 | Quick alignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410805649.0A CN104536151B (en) | 2014-12-20 | 2014-12-20 | Quick alignment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104536151A true CN104536151A (en) | 2015-04-22 |
| CN104536151B CN104536151B (en) | 2017-03-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410805649.0A Expired - Fee Related CN104536151B (en) | 2014-12-20 | 2014-12-20 | Quick alignment device |
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| CN (1) | CN104536151B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441141A (en) * | 2016-12-05 | 2017-02-22 | 南京科远自动化集团股份有限公司 | Combustion detection system and combustion detection method thereof |
| CN107589552A (en) * | 2017-10-17 | 2018-01-16 | 歌尔股份有限公司 | Optics module assembles equipment |
| CN108254935A (en) * | 2018-01-12 | 2018-07-06 | 合肥工业大学 | The method of adjustment and equipment that polarizer is aligned with MSE diagnostic system axis of vision |
| CN109061894A (en) * | 2018-08-10 | 2018-12-21 | 中国工程物理研究院激光聚变研究中心 | A kind of the ultraprecise collimation apparatus and alignment method of huge optical flat reflective array device |
| CN109927401A (en) * | 2019-01-31 | 2019-06-25 | 中国科学院西安光学精密机械研究所 | A kind of high accuracy prints machine double light path machine vision device |
| CN111381335A (en) * | 2018-12-28 | 2020-07-07 | 中国科学院长春光学精密机械与物理研究所 | Light path component alignment device used in optical system |
| CN112285939A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Auto-collimation installation and adjustment system and method of infrared optical-mechanical system |
-
2014
- 2014-12-20 CN CN201410805649.0A patent/CN104536151B/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441141A (en) * | 2016-12-05 | 2017-02-22 | 南京科远自动化集团股份有限公司 | Combustion detection system and combustion detection method thereof |
| CN106441141B (en) * | 2016-12-05 | 2023-03-17 | 南京科远智慧科技集团股份有限公司 | Combustion detection system and combustion detection method thereof |
| CN107589552A (en) * | 2017-10-17 | 2018-01-16 | 歌尔股份有限公司 | Optics module assembles equipment |
| CN107589552B (en) * | 2017-10-17 | 2023-08-04 | 歌尔光学科技有限公司 | Optical module assembly equipment |
| CN108254935A (en) * | 2018-01-12 | 2018-07-06 | 合肥工业大学 | The method of adjustment and equipment that polarizer is aligned with MSE diagnostic system axis of vision |
| CN108254935B (en) * | 2018-01-12 | 2020-06-05 | 合肥工业大学 | Method and equipment for adjusting alignment of visual line of polaroid and MSE (mean Square error) diagnostic system |
| CN109061894A (en) * | 2018-08-10 | 2018-12-21 | 中国工程物理研究院激光聚变研究中心 | A kind of the ultraprecise collimation apparatus and alignment method of huge optical flat reflective array device |
| CN109061894B (en) * | 2018-08-10 | 2020-09-08 | 中国工程物理研究院激光聚变研究中心 | Ultra-precise collimating instrument and collimating method of giant optical plane reflection array device |
| CN111381335A (en) * | 2018-12-28 | 2020-07-07 | 中国科学院长春光学精密机械与物理研究所 | Light path component alignment device used in optical system |
| CN111381335B (en) * | 2018-12-28 | 2021-06-15 | 中国科学院长春光学精密机械与物理研究所 | Light path component alignment device used in optical system |
| CN109927401A (en) * | 2019-01-31 | 2019-06-25 | 中国科学院西安光学精密机械研究所 | A kind of high accuracy prints machine double light path machine vision device |
| CN112285939A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Auto-collimation installation and adjustment system and method of infrared optical-mechanical system |
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|---|---|
| CN104536151B (en) | 2017-03-29 |
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Granted publication date: 20170329 Termination date: 20181220 |