CN104506059B

CN104506059B - A kind of inverter power supply device for high-power gas charging electron gun

Info

Publication number: CN104506059B
Application number: CN201410778975.7A
Authority: CN
Inventors: 许海鹰
Original assignee: AVIC Beijing Aeronautical Manufacturing Technology Research Institute
Current assignee: AVIC Manufacturing Technology Institute
Priority date: 2014-12-15
Filing date: 2014-12-15
Publication date: 2016-11-09
Anticipated expiration: 2034-12-15
Also published as: CN104506059A

Abstract

The present invention provides a kind of inverter power supply device for high-power gas charging electron gun, including with 380V industrial-frequency alternating current joining first order current rectifying and wave filtering circuit, first inverter bridge circuit joining with first order current rectifying and wave filtering circuit, with the first joining first voltage transformation of inverter bridge circuit and current rectifying and wave filtering circuit, with the first joining first drive circuit of inverter bridge circuit and the first current sampling circuit, first pwm control circuit joining with the first current sampling circuit, with the first voltage transformation and the joining second inverter bridge circuit of current rectifying and wave filtering circuit, with the second joining second voltage transformation of inverter bridge circuit and current rectifying and wave filtering circuit, second drive circuit and the second current sampling circuit, second pwm control circuit, high pressure sample circuit.The inverter power supply device of the present invention can effectively suppress the interference to common frequency power network for the electron gun discharge tip pulse, improves the stability of power work.

Description

A kind of inverter power supply device for high-power gas charging electron gun

Technical field

The present invention is with regard to power technique fields, especially with regard to inverter power supply device technical field, is concretely a kind of Inverter power supply device for high-power gas charging electron gun.

Background technology

Electronic torch melting is the melting technique growing up the eighties in 20th century, is that a kind of advanced person producing clean metallic is melted Refining technology.This technology has been used to smelt the precious metals such as titanium, niobium, molybdenum, platinum, zirconium.At present, aviation is rotated by the U.S. The vacuum electron beam cold hearth melting technique of titanium alloy material used by part, structural member is brought in air standard, domestic has opened Begin to use electronic torch melting technology to smelt titanium alloy.The nucleus equipment of electronic torch melting technology is electronic beam current generation system, main Electron gun to be included, acceleration high voltage power supply, beam-control(led) system.

At present, the electron gun of conventional in electron beam furnace electronic beam current generation system is hot-cathode electric rifle, negative electrode Directly or indirectly being heated, producing a large amount of thermoelectron, thermionic emission measure can be flow through by regulation by beam-control(led) system The electric current of filament realizes with bias size.After the high voltage electric field that thermoelectron is applied between cathode in electron gun, anode accelerates, high A large amount of kinetic energy are changed into heat energy, make metal material melting by speed bombardment metal material.

The rifle room vacuum level requirements of hot-cathode electric rifle is higher, and general requirement reaches 10^-3More than Pa, indoor with smelting furnace 10^-2Pa vacuum difference is relatively big, needs independent vacuum system.The life-span of hot cathode is typically comparatively short, the long life It is tens hours.Frequently changing negative electrode will affect technological parameter, and the quality causing metal smelt is unstable.And at metal Under the high metallic vapour environment smelted, conventional hot-cathode electric rifle easily discharges, and is difficult to long-term stable operation.

Gas discharge electron gun belongs to cold-cathode gun, and its basic functional principle is to be passed through in the chamber of electron gun Hydrogen, oxygen gas mixture, make pressure reach a few handkerchief of zero point or tens of handkerchief, applies the high pressure of tens kilovolts, at the moon between negative electrode, anode Producing gas discharge between pole, anode, forming plasma, it is cloudy that the cation in plasma bombards water-cooled under electric field action Pole surface, produces secondary electron, and the electronics in plasma and the secondary electron of emission of cathode are by the high pressure between negative electrode, anode Electric field acceleration, after the electromagnetism collecting system of electron gun focuses on, produces electron beam.

Compared with hot-cathode electric rifle, the electron beam producing method of gas discharge electron gun is unique, cathode life ratio Longer, not strict to vacuum level requirements.At present, single rifle peak power of gas discharge electron gun reaches 600kW, cathode life Up to more than 1000 hours, in 10Pa～10^-2Pa all can normally work.Gas discharge electron gun does not needs independent vacuum system, Do not need frequently to change electrode.

The supporting high voltage power supply of hot-cathode electric rifle not only needs the high-tension circuit accelerating electronics, and needs heating The circuit of negative electrode, the bias circuit of regulation line.Heating cathode circuit, the bias circuit of regulation line are typically suspended in tens very Accelerate to up to a hundred kilovolts on the high-tension circuit of electronics.The design of transformer system of the bias circuit with regulation line for the heating cathode circuit Make technical difficulty big.Owing to needs circuit is more so that power supply architecture is complicated, the space between each circuit high-pressure section circuit Layout is unreasonable, easily guiding discharge, and the equipment that affects normally works.Furthermore, it is necessary to many core high-voltage cables are by power supply and electron gun Coupling, cable connection terminal structure is complicated, and manufacturing technology difficulty is bigger.

Compared with the high voltage power supply supporting with hot-cathode electric rifle, the high voltage power supply of gas discharge electron gun is relatively succinct, A high voltage power supply is only needed for ionized gas and to accelerate electronics.

For the hundreds of KW high-power gas charging electron guns being applied in electronic torch melting furnace apparatus, if using power frequency The pattern of rectification after boosting manufactures high voltage power supply, then owing to step-up transformer power is big so that its volume is extremely huge, iron loss, Copper loss is serious, and power-efficient is low.Electron gun or high voltage power supply electric discharge, be directly coupled to former limit by power transformer, cause electricity Net voltage fluctuation, interference miscellaneous equipment normally works.Additionally, to obtain smooth high-voltage dc voltage output, need big Capacity LC filter circuit could realize, hv filtering original paper manufactures, type selecting is all relatively difficult.

Use inversion transformation technique to manufacture and design the supporting high voltage power supply of high-power gas charging electron gun, frequency is brought up to several KHz even tens kHz, can effectively reduce volume of transformer, reduces high voltage power supply loss.But use rectifying and wave-filtering, Inversion boosting, the high voltage power supply of secondary rectifying and wave-filtering Model Design, still inevitable by electron gun or high voltage power supply high pressure The discharge pulse spike of end is coupled in electrical network.

At present, the supporting high voltage power supply power of high-power electron gun used by electronic torch melting furnace apparatus typically all reaches hundreds of Kilowatt, generally at more than 600kW, this is accomplished by primary side current of transformer and reaches more than 1000A, with single power inverting transformer Be difficult to realize, i.e. enable and realize, transformer to manufacture and design difficulty also very big.Primary side current of transformer reaches kilo-ampere, and mesh The switch element more than 1000A for the front current capacity, operating frequency is all relatively low, is generally individually in noise regions so that power noise is very Greatly.Select the mode that many group inverters are in parallel, although disclosure satisfy that design requirement, however it is necessary that the current-sharing, all carrying out complexity Voltage-controlled system so that Power Management Design difficulty is very big.

Relatively big for current beam smelting furnace equipment gases used electric discharge electron gun power, tradition power frequency booster power sets Meter manufacturing technology loss is greatly and high-frequency and high-voltage high-power switch device range of choice needed for job insecurity, conventional inversion transformation technique has The feature of limit, this area is badly in need of a kind of based on the high pressure used by the electron beam furnace of large power cold cathode gas discharge electron gun Inverter power supply device.

Content of the invention

Relatively big in order to solve electronic torch melting furnace apparatus of the prior art gases used electric discharge electron gun power, tradition work Frequently high-frequency and high-voltage high power switch device needed for booster power design and manufacturing technology is lost big and job insecurity, conventional inversion transformation technique The limited difficult problem of part range of choice, the invention provides a kind of inverter power supply device for high-power gas charging electron gun, Have employed two-stage inverter circuit, first order inversion is used for pressure regulation current limliting, and the second level is used for inversion boosting, can effectively suppress electronics The interference to common frequency power network for the rifle discharge tip pulse, improves the stability of power work.

It is an object of the present invention to provide a kind of inverter power supply device for high-power gas charging electron gun, described Inverter power supply device includes: with 380V industrial-frequency alternating current joining first order current rectifying and wave filtering circuit 1；With described first order rectification The joining first inverter bridge circuit 2 of filter circuit 1；With described first joining first voltage transformation of inverter bridge circuit 2 with Current rectifying and wave filtering circuit 3；First drive circuit 10 joining with described first inverter bridge circuit 2 and the first current sampling circuit 11；Joining first pwm control circuit 9 with described first current sampling circuit 11；With described first voltage transformation and rectification Filter circuit 3 and joining first voltage sampling circuit 16 of the first pwm control circuit 9；With described first voltage transformation with The joining second inverter bridge circuit 4 of current rectifying and wave filtering circuit 3；Second voltage joining with described second inverter bridge circuit 4 becomes Change and current rectifying and wave filtering circuit 5；Second drive circuit 13 joining with described second inverter bridge circuit 4 and the second current sample Circuit 14；Joining second pwm control circuit 12 with described second current sampling circuit 14；Respectively with a described PWM control Circuit 9 processed and the joining high pressure sample circuit 7 of the second pwm control circuit 12.

In a preferred embodiment of the invention, described inverter power supply device also includes: with described second voltage transformation The joining current-limiting resistance 6 with current rectifying and wave filtering circuit 5；Described 380V industrial-frequency alternating current is through described first order current rectifying and wave filtering circuit 1 becomes 500V direct current, and described 500V direct current is through described first inverter bridge circuit 2 inversion, through described first voltage change Change and be transformed into, after current rectifying and wave filtering circuit 3, the direct current that 0～500V changes, then through described second inverter bridge circuit 4 inversion, warp Boosting and the rectifying and wave-filtering of crossing described second voltage transformation with current rectifying and wave filtering circuit 5 are transformed into the adjustable voltage of 0～-30kV, After after described current-limiting resistance 6 export.

In a preferred embodiment of the invention, described inverter power supply device also includes: with described second voltage transformation It with current rectifying and wave filtering circuit 5 joining line sample circuit 8, is used for gathering beam current signal, and described beam current signal is fed back to The joining gas mass flow amount control circuit 15 with described line sample circuit 8；Described gas mass flow amount control circuit 15, for comparing described beam current signal with line set in advance, after PID regulation, output control signal, described Control signal is for adjusting the mixed gas flow being input in high-power gas charging electron gun.

In a preferred embodiment of the invention, described first current rectifying and wave filtering circuit 1 includes: with power frequency 380V alternating current The first rectification circuit that input couples, described first rectification circuit is three-phase commutation bridge；One end and described first rectification circuit The joining filter inductance of positive output end；The other end of described filter inductance is connected in circuit D point, described first rectified current The negative output terminal on road couples circuit J point；It is parallel to the filter capacitor between circuit D point and J point.

In a preferred embodiment of the invention, described first inverter bridge circuit 2 includes the first insulated gate bipolar crystal Pipe, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor, every directly Electric capacity and current transformer；Wherein, the colelctor electrode of described first insulated gate bipolar transistor and the 3rd insulated gate bipolar The colelctor electrode of transistor couples, the emitter stage of described first insulated gate bipolar transistor and the second insulated gate bipolar transistor Colelctor electrode couple, the emitter stage of described 3rd insulated gate bipolar transistor and the current collection of the 4th insulated gate bipolar transistor Pole couples, the emitter stage of described second insulated gate bipolar transistor and the emitter stage connection of the 4th insulated gate bipolar transistor Connect, in described capacitance and described first current sampling circuit 11 current transformer coupled in series.

In a preferred embodiment of the invention, described first voltage transformation and current rectifying and wave filtering circuit 3 include the first transformation Device, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer, the second rectification circuit, the 3rd rectification circuit, 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit, filter inductance and filter capacitor, described first transformer, The former limit of the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer is sequentially connected in series, described first transformer, The secondary of the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer couple respectively the second rectification circuit, the 3rd Rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit；Described second rectification circuit, the 3rd rectification The positive output end of circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit is attached to a M after being connected in parallel Point, described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit Negative output terminal is attached to a N point after being connected in parallel；One end of described filter inductance is connected to M point, and other end is connected to H； Described filter capacitor is connected in parallel between circuit H point and circuit N point.

In a preferred embodiment of the invention, described inverter power supply device also includes being parallel between H point and N point Voltage sensor 17, obtains voltage signal for voltage after described first voltage transformation with current rectifying and wave filtering circuit 3 for the sampling, And described voltage signal is fed back to described first pwm control circuit 9.

In a preferred embodiment of the invention, described first drive circuit 10 is respectively to the first insulated gate bipolar crystal Pipe, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor output Pwm pulse signal, couple the first insulated gate bipolar transistor, the 4th insulated gate bipolar transistor pwm signal identical, connection Connect the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor pwm signal identical, drive the first insulated gate double Bipolar transistor, pwm signal and driving second insulated gate bipolar transistor, the 3rd exhausted of the 4th insulated gate bipolar transistor The anti-phase connection of pwm signal of edge grid bipolar transistor.

In a preferred embodiment of the invention, described first pwm control circuit 9 includes outer shroud PID regulation circuit, inner ring PID regulation circuit and PWM regulation circuit, wherein, described PWM regulates circuit, is used for receiving described first current sampling circuit 11 current signals gathering, the described current signal of regulation is with less than a setting value；Described outer shroud PID regulates circuit, is used for connecing Receive a high pressure Setting signal set in advance and the high-voltage feedback signal of described high pressure sample circuit 7 collection, and by described height Pressure feedback signal compares with described high pressure Setting signal, exports a regulated voltage signal extremely described the after PID regulation Inner ring PID regulation circuit in one pwm control circuit 9；Described inner ring PID regulates circuit, for receiving by described first voltage Voltage signal and described outer shroud PID that sample circuit 16 gathers regulate the voltage signal that circuit exports, after PID is processed, Regulated voltage signal output is regulated circuit to described PWM；Described PWM regulates circuit, for according to described regulated voltage signal Produce a pwm signal, described pwm signal through described first drive circuit 10 to change in described first inverter bridge circuit 2 One insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate Bipolar transistor.

In a preferred embodiment of the invention, described second inverter bridge circuit 4 includes the 5th insulated gate bipolar transistor Pipe, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, every directly Electric capacity and current transformer；Wherein, the colelctor electrode of described 5th insulated gate bipolar transistor and the 7th insulated gate bipolar The colelctor electrode of transistor couples, the emitter stage of described 5th insulated gate bipolar transistor and the 6th insulated gate bipolar transistor Colelctor electrode couple, the emitter stage of described 7th insulated gate bipolar transistor and the current collection of the 8th insulated gate bipolar transistor Pole couples, the emitter stage of described 6th insulated gate bipolar transistor and the emitter stage connection of the 8th insulated gate bipolar transistor Connect, in described capacitance and described second current sampling circuit 14 current transformer coupled in series.

In a preferred embodiment of the invention, described second voltage transformation and current rectifying and wave filtering circuit 5 include the 6th transformation Device, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer, the 7th rectification circuit, the 8th rectification circuit, 9th rectification circuit, the tenth rectification circuit and the 11st rectification circuit, filter inductance and filter capacitor, described 6th transformation The former limit of device, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer is in parallel, described 6th transformer, the The secondary of seven transformers, the 8th transformer, the 9th transformer and the tenth transformer couples the 7th rectification circuit, the 8th whole respectively Current circuit, the 9th rectification circuit, the tenth rectification circuit and the 11st rectification circuit；The anode of described 7th rectification circuit couples To the negative terminal of the 8th rectification circuit, the anode of the 8th rectification circuit is connected to the negative terminal of the 9th rectification circuit, the 9th rectification circuit Anode be connected to the negative terminal of the tenth rectification circuit, the anode of the tenth rectification circuit is connected to the negative terminal of the 11st rectification circuit, The positive ending grounding of the 11st rectification circuit；Described filter capacitor is connected in parallel on negative terminal and the 11st rectification of described 7th rectification circuit The anode of circuit；It is connected to output after the described current-limiting resistance 6 of negative terminal series connection of described 7th rectification circuit.

In a preferred embodiment of the invention, described second drive circuit 10 is respectively to the 5th insulated gate bipolar transistor Pipe, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor output Pwm pulse signal, couple the 5th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor pwm signal identical, connection Connect the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor pwm signal identical, drive the 5th insulated gate double Bipolar transistor, pwm signal and driving the 6th insulated gate bipolar transistor, the four-line poem with seven characters to a line of the 8th insulated gate bipolar transistor The anti-phase connection of pwm signal of edge grid bipolar transistor.

In a preferred embodiment of the invention, described second current sampling circuit 14 is used for gathering current signal, and will Described current signal feeds back to described second pwm control circuit 12.

In a preferred embodiment of the invention, described second pwm control circuit 12 is used for detecting described current signal and is No more than a setting value, when being judged as YES, the 5th insulated gate bipolar transistor in described second inverter bridge circuit 4, Six insulated gate bipolar transistors, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor worked in stream State, when described over-current state is more than 10 μ s, turns off the 5th insulated gate bipolar transistor in described second inverter bridge circuit 4 Pipe, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor.

In a preferred embodiment of the invention, described high pressure sample circuit 7 is used for gathering high-voltage signal, and by described height Pressure signal feeds back to described second pwm control circuit 12；Described second pwm control circuit 12, detects described high pressure for working as When signal is more than maximum set value and more than 0.1ms, then turn off in described second inverter bridge circuit 4

5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor, 8th insulated gate bipolar transistor, exports the pwm signal of full pulsewidth, by described second drive circuit 13 after 1ms again Export two groups of complementary pwm signals with control the 5th insulated gate bipolar transistor in described second inverter bridge circuit 4, the 8th Insulated gate bipolar transistor and the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor are alternately opened/are closed It is disconnected,

Described second pwm control circuit 12, for when detecting that described high-voltage signal returns to setting value, exports full arteries and veins Width, otherwise, when detecting that described high pressure letter is more than maximum set value and during more than 0.1ms for continuous 5 times, output PWM duty cycle is 0, close the 5th insulated gate bipolar transistor in described second level inverter circuit 4, the 6th insulated gate bipolar transistor, Seven insulated gate bipolar transistors, the 8th insulated gate bipolar transistor, simultaneously output alarm signal.

In a preferred embodiment of the invention, described current-limiting resistance 6 uses high-power high voltage resistance series-parallel system to obtain ?.

In a preferred embodiment of the invention, described first transformer, the second transformer, the 3rd transformer, the 4th change The no-load voltage ratio of the primary and secondary side of depressor and the 5th transformer is 1:5, described first transformer, the second transformer, the 3rd change The power of depressor, the 4th transformer and the 5th transformer is 60kW.

In a preferred embodiment of the invention, described 6th transformer, the 7th transformer, the 8th transformer, the 9th change The no-load voltage ratio of the primary and secondary side of depressor and the tenth transformer is 1:12, described 6th transformer, the 7th transformer, the 8th change Depressor, the 9th transformer and the tenth transformer are 60kW.

The beneficial effects of the present invention is, provide a kind of inverter dress for high-power gas charging electron gun Put, be a kind of to use Novel AC-DC-AC-DC-AC-DC topological circuit structure to manufacture and design high-power gas charging electron gun High voltage power supply, have employed two-stage inverter circuit, and first order inversion is used for pressure regulation current limliting, and the second level is used for inversion boosting, Neng Gouyou The effect suppression interference to common frequency power network for the electron gun discharge tip pulse, it is ensured that high-power gas charging electron gun long-term stable operation, Improve reliability, the stability of the high voltage power supply work of gas discharge electron gun.

For the above and other objects, features and advantages of the present invention can be become apparent, preferred embodiment cited below particularly, And coordinate institute's accompanying drawings, it is described in detail below.

Brief description

In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing In having technology to describe, the accompanying drawing of required use is briefly described, it should be apparent that, the accompanying drawing in describing below is only this Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, all right Obtain other accompanying drawing according to these accompanying drawings.

The reality of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 1 provides for the embodiment of the present invention Execute the circuit block diagram of mode one；

The reality of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 2 provides for the embodiment of the present invention Execute the circuit block diagram of mode two；

The reality of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 3 provides for the embodiment of the present invention Execute the circuit block diagram of mode three；

Opening up of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 4 provides for the embodiment of the present invention Flutter circuit structure diagram；

Fig. 5 (a) is the PWM drive waveforms schematic diagram of IGBT Q1, IGBTQ4 in the first inverter bridge circuit；

Fig. 5 (b) is the PWM drive waveforms schematic diagram of IGBT Q2, IGBTQ3 in the first inverter bridge circuit；

Fig. 5 (c) is the PWM drive waveforms schematic diagram of IGBT Q5, IGBTQ8 in the second inverter bridge circuit；

Fig. 5 (d) is the PWM drive waveforms schematic diagram of IGBT Q6, IGBTQ7 in the second inverter bridge circuit.

Drawing reference numeral:

First order current rectifying and wave filtering circuit 1

First inverter bridge circuit 2

First voltage transformation and current rectifying and wave filtering circuit 3

Second inverter bridge circuit 4

Second voltage transformation and current rectifying and wave filtering circuit 5

Current-limiting resistance 6

High pressure sample circuit 7

Line sample circuit 8

First pwm control circuit 9

First drive circuit 10

First current sampling circuit 11

Second pwm control circuit 12

Second drive circuit 13

Second current sampling circuit 14

Gas mass flow amount control circuit 15

First voltage sampling circuit 16

Voltage sensor 17

Detailed description of the invention

Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Describe, it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments wholely.Based on Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work Embodiment, broadly falls into the scope of protection of the invention.

The present invention relates to a kind of inverter power supply device for high-power gas charging electron gun, specifically, be a kind of The inverter power supply device of high pressure is provided for high-power gas charging electronic beam current generation system, particularly relates to a kind of based on high-power High voltage inverting power source device used by the electron beam furnace of cold-cathode gas discharge electron gun.

In order to ensure high-power gas charging electron gun long-term stable operation, improve the high voltage power supply of gas discharge electron gun The reliability of work, stability, the invention provides a kind of inverter power supply device for high-power gas charging electron gun, be Novel AC-DC-AC-DC-AC-DC topological circuit structure is used to manufacture and design the high voltage power supply of high-power gas charging electron gun.

The reality of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 1 provides for the embodiment of the present invention Executing the circuit block diagram of mode one, as shown in Figure 1, in embodiment one, described inverter power supply device includes:

With 380V industrial-frequency alternating current joining first order current rectifying and wave filtering circuit 1；

First inverter bridge circuit 2 joining with described first order current rectifying and wave filtering circuit 1；

With described first joining first voltage transformation of inverter bridge circuit 2 and current rectifying and wave filtering circuit 3；

First drive circuit 10 joining with described first inverter bridge circuit 2 and the first current sampling circuit 11；

Joining first pwm control circuit 9 with described first current sampling circuit 11；

With described first voltage transformation and current rectifying and wave filtering circuit 3 and joining first voltage of the first pwm control circuit 9 Sample circuit 16；

With described first voltage transformation and the joining second inverter bridge circuit 4 of current rectifying and wave filtering circuit 3；

With described second joining second voltage transformation of inverter bridge circuit 4 and current rectifying and wave filtering circuit 5；

Second drive circuit 13 joining with described second inverter bridge circuit 4 and the second current sampling circuit 14；

Joining second pwm control circuit 12 with described second current sampling circuit 14；

Respectively with described first pwm control circuit 9 and the joining high pressure sample circuit 7 of the second pwm control circuit 12.

The reality of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 2 provides for the embodiment of the present invention Executing the circuit block diagram of mode two, as shown in Figure 2, in embodiment two, described inverter power supply device also includes:

With described second voltage transformation and the joining current-limiting resistance of current rectifying and wave filtering circuit 56；

Described 380V industrial-frequency alternating current becomes 500V direct current, described 500V through described first order current rectifying and wave filtering circuit 1 Direct current is through described first inverter bridge circuit 2 inversion, be transformed into after current rectifying and wave filtering circuit 3 through described first voltage transformation The direct current of 0～500V change, then through described second inverter bridge circuit 4 inversion, through described second voltage transformation and rectification The boosting of filter circuit 5 and rectifying and wave-filtering are transformed into the adjustable voltage of 0～-30kV, defeated after eventually passing described current-limiting resistance 6 Go out.It is AC-DC-AC-DC-AC-DC from being input to output current transformation mode.

Described current-limiting resistance R3 is the 30 Ω/6kW resistance using high-power high voltage resistance series-parallel system to obtain, and is used for subtracting Little discharge pulse spike, protects power supply.

The reality of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 3 provides for the embodiment of the present invention Execute the circuit block diagram of mode three, from the figure 3, it may be seen that in embodiment three, described inverter power supply device also includes:

It with described second voltage transformation and current rectifying and wave filtering circuit 5 joining line sample circuit 8, is used for gathering line letter Number, and described beam current signal is fed back to described line sample circuit 8 joining gas mass flow amount control circuit 15；

Described gas mass flow amount control circuit 15, for comparing described beam current signal with line set in advance Relatively, output control signal after PID regulation, described control signal is input in high-power gas charging electron gun for adjustment Mixed gas flow.

Beam current signal IBf that line sample circuit 8 gathers feeds back to gas mass flow amount control circuit 15, and described line is believed Number comparing with given line, through the PID regulation of gas mass flow amount control circuit, output control letter closes, and adjusts input Mixed gas flow in electron gun so that the electronic beam current of output remains stable.

Inverter power supply device peak power 300kW that the present invention provides, for the gas discharge electronics of other power level Rifle, can be increased or decreased the transformer in the first voltage transformation and current rectifying and wave filtering circuit and rectification circuit quantity thereof, adjusts the Transformer efficiency in two voltage transformations and current rectifying and wave filtering circuit and and rectification circuit capacity, and be the first inverter bridge electricity The suitable insulated gate bipolar transistor of apolegamy in road, the second inverter bridge circuit so that electric source topology circuit key components Capacity meets the demand of electron gun.

Opening up of a kind of inverter power supply device for high-power gas charging electron gun that Fig. 4 provides for the embodiment of the present invention Flutterring circuit structure diagram, as shown in Figure 4, described first current rectifying and wave filtering circuit 1 includes:

The first rectification circuit coupling with the input of power frequency 380V alternating current, described first rectification circuit is three phase rectifier Bridge；

One end and the joining filter inductance of positive output end of described first rectification circuit；

The other end of described filter inductance is connected in circuit D point, and the negative output terminal of described first rectification circuit couples circuit J Point；

It is parallel to the filter capacitor between circuit D point and J point.

I.e. in the detailed description of the invention of the present invention, the first rectification circuit MD1 in the first current rectifying and wave filtering circuit 1 is by greatly The three-phase commutation bridge of power diode composition；The connecting mode of each several part in first current rectifying and wave filtering circuit, power frequency 380V alternating current U, V, W input couple the 1st, the 2nd, 3 end of MD1 respectively, MD1 "+" output is connected in 4 with one end of filter inductance L1, electricity The other end of sense L1 is connected in circuit D point, and the "-" of MD1 couples circuit J point, filter capacitor C1 be parallel to circuit D point and J point it Between.

As shown in Figure 4, described first inverter bridge circuit 2 includes that the first insulated gate bipolar transistor, the second insulated gate are double Bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor, capacitance and Current Mutual Inductance Device；

Wherein, the current collection of the colelctor electrode of described first insulated gate bipolar transistor and the 3rd insulated gate bipolar transistor Pole couples, the emitter stage of described first insulated gate bipolar transistor and the colelctor electrode connection of the second insulated gate bipolar transistor Connecing, the emitter stage of described 3rd insulated gate bipolar transistor and the colelctor electrode of the 4th insulated gate bipolar transistor couple, institute The emitter stage of the emitter stage and the 4th insulated gate bipolar transistor of stating the second insulated gate bipolar transistor couples, described every directly In electric capacity and described first current sampling circuit 11 current transformer coupled in series.

I.e. in the detailed description of the invention of the present invention, the first inverter bridge circuit 2 mainly includes insulated gate bipolar transistor Q1, insulated gate bipolar transistor Q2, insulated gate bipolar transistor Q3, insulated gate bipolar transistor Q4, capacitance Cx, Current transformer Tf1.

In first inverter bridge circuit 2, the coupling method between each element is: the collection of colelctor electrode C, IGBT Q3 of IGBT Q1 Electrode C is connected in circuit D point, and the emitter E of IGBT Q1 couples the colelctor electrode C of IGBT Q2 in circuit A point, the transmitting of IGBTQ3 The colelctor electrode C that pole E couples IGBT Q4 is connected in circuit J in circuit B point, emitter E, the emitter E of IGBT Q4 of IGBT Q2 It after current transformer Tf1 series connection in point, capacitance Cx and the first current sampling circuit, is connected in circuit A point and F point.

As shown in Figure 4, described first voltage transformation and current rectifying and wave filtering circuit 3 include the first transformer, the second transformer, the Three transformers, the 4th transformer and the 5th transformer, the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th Rectification circuit and the 6th rectification circuit, filter inductance and filter capacitor,

The former limit of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer depends on Secondary series connection, the secondary of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer divides Do not couple the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit；

Described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectified current The positive output end on road is attached to a M point, described second rectification circuit, the 3rd rectification circuit, the 4th rectified current after being connected in parallel The negative output terminal of road, the 5th rectification circuit and the 6th rectification circuit is attached to a N point after being connected in parallel；

One end of described filter inductance is connected to M point, and other end is connected to H；

Described filter capacitor is connected in parallel between circuit H point and circuit N point.

I.e. in the detailed description of the invention of the present invention, the transformer T1 of the first voltage transformation and current rectifying and wave filtering circuit 3, T2, The no-load voltage ratio of the primary and secondary side of T3, T4, T5 is 1:5, and the power of described each transformer is 60kW；Described each transformer primary side depends on After secondary series connection, the terminal do not connected in the former limit of transformer T1 is connected to circuit B point, and the end do not connected in the former limit of transformer T5 couples To circuit F point, the secondary of described each transformer couples rectification circuit MD2, MD3, MD4, MD5, MD6, each rectification described respectively Circuit "+" output is attached to " M " point after being connected in parallel, the "-" output of each rectification circuit described is connected in parallel After be attached to " N " point；One end of filter inductance L2 is connected to " M " point, and other end is connected to " H " point, and filter capacitor C2 is in parallel Between circuit " H " point and circuit " N " point.

As shown in Figure 4, described inverter power supply device also includes the voltage sensor 17 being parallel between H point and N point, uses Obtain voltage signal in voltage after described first voltage transformation with current rectifying and wave filtering circuit 3 for the sampling, and by described voltage Signal feeds back to described first pwm control circuit 9.

I.e. described voltage after the first voltage transformation with current rectifying and wave filtering circuit 3 can be in parallel in " H " and " N " point Between voltage sensor 17 sample, the voltage signal UMf of sampling feeds back to the first pwm control circuit 9.

As shown in Figure 4, described first drive circuit 10 is double to the first insulated gate bipolar transistor, the second insulated gate respectively Bipolar transistor, the 3rd insulated gate bipolar transistor, the 4th insulated gate bipolar transistor output pwm pulse signal, couple First insulated gate bipolar transistor, the 4th insulated gate bipolar transistor pwm signal identical, couple the second insulated gate bipolar Transistor npn npn, the 3rd insulated gate bipolar transistor pwm signal identical, drive the first insulated gate bipolar transistor, the 4th The pwm signal of insulated gate bipolar transistor and driving the second insulated gate bipolar transistor, the 3rd insulated gate bipolar crystal The pwm signal of pipe is anti-phase to be coupled.

I.e. first drive circuit 10 exports 4 road pwm pulse signals, described pwm signal adjustable pulse width.Connection IGBT Q1, The pwm signal of IGBT Q4 is identical；Couple IGBT Q2, IGBT Q3 pwm signal identical, and with described driving IGBT Q1, The pwm signal of IGBT Q4 is anti-phase.

Fig. 5 (a) is the PWM drive waveforms schematic diagram of IGBT Q1, IGBTQ4 in the first inverter bridge circuit, and Fig. 5 (b) is The PWM drive waveforms schematic diagram of IGBT Q2, IGBTQ3 in one inverter bridge circuit, Fig. 5 (c) is IGBT in the second inverter bridge circuit The PWM drive waveforms schematic diagram of Q5, IGBTQ8, Fig. 5 (d) is that the PWM of IGBT Q6, IGBTQ7 in the second inverter bridge circuit drives Waveform diagram.SD therein is Dead Time.

As shown in Figure 4, described first pwm control circuit 9 include outer shroud PID regulation circuit, inner ring PID regulation circuit and PWM regulates circuit,

Wherein, described PWM regulation circuit, for receiving the current signal that described first current sampling circuit 11 gathers, adjusts The described current signal of joint is with less than a setting value；

Described outer shroud PID regulates circuit, is used for receiving a high pressure Setting signal set in advance and the sampling of described high pressure The high-voltage feedback signal that circuit (7) gathers, and described high-voltage feedback signal is compared with described high pressure Setting signal, pass through The inner ring PID regulation circuit in a regulated voltage signal extremely described first pwm control circuit 9 is exported after PID regulation；

Described inner ring PID regulates circuit, for receiving the voltage signal being gathered by described first voltage sampling circuit (16) And the voltage signal of described outer shroud PID regulation circuit output, after PID is processed, by regulated voltage signal output to described PWM regulates circuit；

Described PWM regulates circuit, and for producing a pwm signal according to described regulated voltage signal, described pwm signal passes through Described first drive circuit 10 is to change the first insulated gate bipolar transistor in described first inverter bridge circuit 2, the second insulation Grid bipolar transistor, the 3rd insulated gate bipolar transistor, the service time of the 4th insulated gate bipolar transistor.

The high-voltage feedback signal UHf that i.e. high pressure sample circuit 7 gathers feeds back to the outer shroud PID in the first pwm control circuit Regulation circuit, the outer shroud PID regulation circuit that high pressure Setting signal UHg is input in the first pwm control circuit, anti-with described high pressure Feedback signal UHf compares, and through PID regulation, it is interior that the regulated voltage signal Ug of generation is input in the first pwm control circuit Ring PID regulates circuit, and the inner ring PID regulation circuit in described first pwm control circuit receives the first voltage sampling circuit 16 and adopts After the voltage signal Umf, described voltage signal Umf and Ug of collection carries out PID process, by described inner ring PID regulation circuit output electricity Pressure regulation signal Ugg to PWM regulation circuit, the pwm signal that described PWM regulation circuit produces, through the first drive circuit, changes The service time of insulated gate bipolar transistor in first inverter bridge so that after the first voltage transformation with current rectifying and wave filtering circuit Voltage UM adjusted so that output high pressure UH adjusted.

The current signal If1 that first current sampling circuit 11 gathers feeds back to the PWM regulation electricity in the first pwm control circuit Road, whether described PWM regulation electric circuit inspection If1 exceedes setting value, if it does, reduce PWM pulsewidth, until described electric current If1 Less than setting value.

First pwm control circuit 9 includes that outer shroud PID regulation circuit, inner ring PID regulation circuit, PWM regulate circuit.First The current signal If1 of current sampling circuit collection feeds back to the PWM regulation circuit in the first pwm control circuit, and described PWM is regulated Whether electric circuit inspection If1 exceedes setting value, if it does, reduce PWM pulsewidth, until described electric current If1 is less than setting value.

As shown in Figure 4, described second inverter bridge circuit 4 includes that the 5th insulated gate bipolar transistor, the 6th insulated gate are double Bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, capacitance and Current Mutual Inductance Device；

Wherein, the current collection of the colelctor electrode of described 5th insulated gate bipolar transistor and the 7th insulated gate bipolar transistor Pole couples, the emitter stage of described 5th insulated gate bipolar transistor and the colelctor electrode connection of the 6th insulated gate bipolar transistor Connecing, the emitter stage of described 7th insulated gate bipolar transistor and the colelctor electrode of the 8th insulated gate bipolar transistor couple, institute The emitter stage of the emitter stage and the 8th insulated gate bipolar transistor of stating the 6th insulated gate bipolar transistor couples, described every directly In electric capacity and described second current sampling circuit 14 current transformer coupled in series.

I.e. second inverter bridge circuit 4 mainly include IGBT Q5, IGBT Q6, IGBT Q7, IGBT Q8, capacitance Cy, Current transformer Tf2；

Connection between each element in second inverter bridge circuit 4 is: the colelctor electrode C of colelctor electrode C, IGBT Q7 of IGBT Q5 Being connected in circuit H point, the emitter E of IGBT Q5 couples the colelctor electrode C of IGBT Q6 in circuit G point, the emitter E of IGBT Q7 The colelctor electrode C coupling IGBT Q8 is connected in circuit N point in circuit F point, the emitter E of IGBT Q6, the emitter E of IGBT Q8, It after current transformer Tf2 series connection in capacitance Cy and the second current sampling circuit, is connected in circuit G point and P point.

As shown in Figure 4, described second voltage transformation and current rectifying and wave filtering circuit 5 include the 6th transformer, the 7th transformer, the Eight transformers, the 9th transformer and the tenth transformer, the 7th rectification circuit, the 8th rectification circuit, the 9th rectification circuit, the tenth Rectification circuit and the 11st rectification circuit, filter inductance and filter capacitor,

The former limit of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer is simultaneously Connection, the secondary of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer joins respectively Connect the 7th rectification circuit, the 8th rectification circuit, the 9th rectification circuit, the tenth rectification circuit and the 11st rectification circuit；

The anode of described 7th rectification circuit is connected to the negative terminal of the 8th rectification circuit, and the anode of the 8th rectification circuit couples To the negative terminal of the 9th rectification circuit, the anode of the 9th rectification circuit is connected to the negative terminal of the tenth rectification circuit, the tenth rectification circuit Anode be connected to the negative terminal of the 11st rectification circuit, the positive ending grounding of the 11st rectification circuit；

Described filter capacitor is connected in parallel on the negative terminal of described 7th rectification circuit and the anode of the 11st rectification circuit；

It is connected to output after the described current-limiting resistance 6 of negative terminal series connection of described 7th rectification circuit.

The change of the primary and secondary side with transformer T6, T7, T8, T9, T10 of current rectifying and wave filtering circuit 5 for i.e. second voltage transformation Ratio is 1:12, and the power of described each transformer is 60kW；After described each transformer primary side is in parallel, one end is connected to " F " point, separately Outer one end is connected to " P " point, and the secondary of described each transformer couples rectification circuit MD7, MD8, MD9, MD10, MD11 respectively, whole Current circuit MD7 "+" end is connected to the "-" end of rectification circuit MD8, rectification circuit MD8 "+" end is connected to rectification circuit MD9 "-" end, rectification circuit MD9 "+" end is connected to the "-" end of rectification circuit MD10, rectification circuit MD10 "+" end is connected to The "-" end of rectification circuit MD11, rectification circuit MD11 "+" end ground connection, filter capacitor C3 is connected in parallel on the "-" of rectification circuit MD7 End and rectification circuit MD11 "+" end, be connected to output " X " after "-" end series limiting resistor R3 of rectification circuit MD7.

As shown in Figure 4, described second drive circuit 10 is double to the 5th insulated gate bipolar transistor, the 6th insulated gate respectively Bipolar transistor, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor output pwm pulse signal, couple 5th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor pwm signal identical, couple the 6th insulated gate bipolar Transistor npn npn, the 7th insulated gate bipolar transistor pwm signal identical, drive the 5th insulated gate bipolar transistor, the 8th The pwm signal of insulated gate bipolar transistor and driving the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor The anti-phase connection of pwm signal of pipe.

As shown in Figure 4, described second current sampling circuit 14 is used for gathering current signal, and feeds back described current signal To described second pwm control circuit 12.Described second pwm control circuit 12 is used for detecting whether described current signal sets more than one Definite value, when being judged as YES, the IGBT Q5 in described second inverter bridge circuit 4, IGBT Q6, IGBT Q7, IGBT Q8 work In over-current state, when described over-current state is more than 10 μ s, turn off IGBT Q5, the IGBT in described second inverter bridge circuit 4 Q6、IGBT Q7、IGBT Q8.The current signal If2 that i.e. second current sampling circuit 14 gathers feeds back to the 2nd PWM control electricity Road, whether the second pwm control circuit detection If2 exceedes setting value, if it does, then each IGBT work in the second inverter bridge circuit Making in over-current state, described over-current state more than 10 μ s, then turns off all IGBT in the second inverter bridge circuit, and over-current state disappears Lose, then recover normal work.

The current signal If2 that second current sampling circuit 14 gathers feeds back to the second pwm control circuit 12, the 2nd PWM control Whether electric circuit inspection If2 processed exceedes setting value, if it does, then each IGBT worked in stream shape in the second inverter bridge circuit State, described over-current state more than 10 μ s, then turns off all IGBT in the second inverter bridge circuit, and over-current state disappears, then just recover Often work.

When the second pwm control circuit 12 detect high-voltage signal UHf more than maximum set value more than 0.1ms, then turn off the All IGBT in two inverter bridge circuit, export full pulsewidth, when continuous 5 times detect that high-voltage signal UHf is more than after 1ms again Maximum set value is more than 0.1ms, then the second pwm control circuit output PWM duty cycle is 0, closes in the inverter circuit of the second level All IGBT, simultaneously output alarm signal, fixed a breakdown by manual intervention.

As shown in Figure 4, described high pressure sample circuit 7 is used for gathering high-voltage signal, and described high-voltage signal is fed back to institute State the second pwm control circuit 12；

For working as, described second pwm control circuit 12, detects that described high-voltage signal is more than maximum set value and exceedes During 0.1ms, then turn off in described second inverter bridge circuit 4

The high-voltage signal UHf that i.e. high pressure sample circuit 7 gathers feeds back to the second pwm control circuit, when the 2nd PWM control electricity Road detect high-voltage signal UHf more than maximum set value more than 0.1ms, then turn off all IGBT in the second inverter bridge circuit, Again export the pwm signal of full pulsewidth after 1ms, by the second drive circuit, export two groups of complementary pwm signals controls second IGBT Q5 in inverter bridge circuit, IGBT Q8 replace on/off with IGBT Q6, IGBT Q7, when the second pwm control circuit Detect that high-voltage signal UHf returns to stable setting value, then the second pwm control circuit normally exports full pulsewidth.Otherwise, when even Continuous detect for 5 times high-voltage signal UHf more than maximum set value more than 0.1ms, then the second pwm control circuit output PWM duty cycle It is 0, close all IGBT in the inverter circuit of the second level, output alarm signal simultaneously, fixed a breakdown by manual intervention.

In sum, the invention provides a kind of inverter power supply device for high-power gas charging electron gun, be one Plant the high-tension electricity using Novel AC-DC-AC-DC-AC-DC topological circuit structure to manufacture and design high-power gas charging electron gun Source, have employed two-stage inverter circuit, and first order inversion is used for pressure regulation current limliting, and the second level is used for inversion boosting, can effectively suppress The interference to common frequency power network for the electron gun discharge tip pulse, it is ensured that high-power gas charging electron gun long-term stable operation, improves gas The reliability of the high voltage power supply work of body electric discharge electron gun, stability.

It will appreciated by the skilled person that all or part of flow process realizing in above-described embodiment, can pass through Analog circuit or digital circuit complete.

Those skilled in the art are it will also be appreciated that various functions that the embodiment of the present invention is listed are by hardware or soft Part realizes depending on specifically applying the design with whole inverter power supply device to require.Those skilled in the art can be for often Plant specific application, it is possible to use various methods realize described function, but this realization is understood not to beyond the present invention The scope of embodiment protection.

The present invention applies principle and embodiment to the present invention for the specific embodiment be set forth, above example Explanation be only intended to help to understand method and the core concept thereof of the present invention；Simultaneously for one of ordinary skill in the art, According to the thought of the present invention, all will change in specific embodiments and applications, in sum, in this specification Hold and should not be construed as limitation of the present invention.

Claims

1. the inverter power supply device for high-power gas charging electron gun, is characterized in that, described inverter power supply device Including:

With 380V industrial-frequency alternating current joining first order current rectifying and wave filtering circuit (1)；

First inverter bridge circuit (2) joining with described first order current rectifying and wave filtering circuit (1)；

With described first joining first voltage transformation of inverter bridge circuit (2) and current rectifying and wave filtering circuit (3)；

With described first joining first drive circuit (10) of inverter bridge circuit (2) and the first current sampling circuit (11)；

With described first current sampling circuit (11) and joining first pulse width modulation (PWM) of the first drive circuit (10) Control circuit (9)；

With described first voltage transformation and current rectifying and wave filtering circuit (3) and joining first voltage of the first pwm control circuit (9) Sample circuit (16)；

With described first voltage transformation and the joining second inverter bridge circuit (4) of current rectifying and wave filtering circuit (3)；

With described second joining second voltage transformation of inverter bridge circuit (4) and current rectifying and wave filtering circuit (5)；

With described second joining second drive circuit (13) of inverter bridge circuit (4) and the second current sampling circuit (14)；

With described second current sampling circuit (14) and joining second pwm control circuit of the second drive circuit (13) (12)；

Respectively with described first pwm control circuit (9) and the joining high pressure sample circuit of the second pwm control circuit (12) (7)。

2. the inverter power supply device for high-power gas charging electron gun according to claim 1, is characterized in that, described Inverter power supply device also include:

With described second voltage transformation and the joining current-limiting resistance of current rectifying and wave filtering circuit (5) (6)；

Described 380V industrial-frequency alternating current becomes 500V direct current through described first order current rectifying and wave filtering circuit (1), and described 500V is straight Stream electricity is through described first inverter bridge circuit (2) inversion, convert after current rectifying and wave filtering circuit (3) through described first voltage transformation Become 0～500V change direct current, then through described second inverter bridge circuit (4) inversion, through described second voltage transformation with The boosting of current rectifying and wave filtering circuit (5) and rectifying and wave-filtering are transformed into the adjustable voltage of 0～-30kV, eventually pass described current-limiting resistance (6) export afterwards.

3. the inverter power supply device for high-power gas charging electron gun according to claim 2, is characterized in that, described Inverter power supply device also include:

It with described second voltage transformation and the joining line sample circuit of current rectifying and wave filtering circuit (5) (8), is used for gathering line letter Number, and described beam current signal is fed back to the joining gas mass flow amount control circuit with described line sample circuit (8) (15)；

Described gas mass flow amount control circuit (15), for comparing described beam current signal with line set in advance Relatively, output control signal after PID regulation, described control signal is input in high-power gas charging electron gun for adjustment Mixed gas flow.

4. the inverter power supply device for high-power gas charging electron gun according to Claims 2 or 3, is characterized in that, Described first order current rectifying and wave filtering circuit (1) includes:

The first rectification circuit coupling with the input of power frequency 380V alternating current, described first rectification circuit is three-phase commutation bridge；

It is parallel to the filter capacitor between circuit D point and J point.

5. the inverter power supply device for high-power gas charging electron gun according to claim 4, is characterized in that, described First inverter bridge circuit (2) includes the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulated gate Bipolar transistor, the 4th insulated gate bipolar transistor, capacitance and current transformer；

Wherein, the colelctor electrode of described first insulated gate bipolar transistor and the colelctor electrode of the 3rd insulated gate bipolar transistor join Connecing, the emitter stage of described first insulated gate bipolar transistor and the colelctor electrode of the second insulated gate bipolar transistor couple, institute The colelctor electrode of the emitter stage and the 4th insulated gate bipolar transistor of stating the 3rd insulated gate bipolar transistor couples, and described second The emitter stage of the emitter stage of insulated gate bipolar transistor and the 4th insulated gate bipolar transistor couples, described capacitance with In described first current sampling circuit, the current transformer of (11) is connected.

6. the inverter power supply device for high-power gas charging electron gun according to claim 5, is characterized in that, described First voltage transformation and current rectifying and wave filtering circuit (3) include the first transformer, the second transformer, the 3rd transformer, the 4th transformer And the 5th transformer, the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th are whole Current circuit, filter inductance and filter capacitor,

The former limit of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer is gone here and there successively Connection, the secondary of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer joins respectively Connect the second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit；

Described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, the 5th rectification circuit and the 6th rectification circuit Positive output end is attached to a M point after being connected in parallel, described second rectification circuit, the 3rd rectification circuit, the 4th rectification circuit, The negative output terminal of five rectification circuits and the 6th rectification circuit is attached to a N point after being connected in parallel；

7. the inverter power supply device for high-power gas charging electron gun according to claim 6, is characterized in that, described Inverter power supply device also include the voltage sensor (17) that is parallel between H point and N point, for sampling through described first electricity Buckling is changed and the voltage after current rectifying and wave filtering circuit (3) obtains voltage signal, and described voltage signal is fed back to described first Pwm control circuit (9).

8. the inverter power supply device for high-power gas charging electron gun according to claim 6, is characterized in that, described First drive circuit (10) is respectively to the first insulated gate bipolar transistor, the second insulated gate bipolar transistor, the 3rd insulation Grid bipolar transistor, the 4th insulated gate bipolar transistor output pwm pulse signal, couple the first insulated gate bipolar crystal Pipe, the 4th insulated gate bipolar transistor pwm signal identical, couple the second insulated gate bipolar transistor, the 3rd insulated gate The pwm signal of bipolar transistor is identical, drives the first insulated gate bipolar transistor, the 4th insulated gate bipolar transistor Pwm signal is anti-phase with the pwm signal driving the second insulated gate bipolar transistor, the 3rd insulated gate bipolar transistor.

9. the inverter power supply device for high-power gas charging electron gun according to claim 8, is characterized in that, described First pwm control circuit (9) includes outer shroud PID regulation circuit, inner ring PID regulation circuit and PWM regulation circuit,

Wherein, described PWM regulation circuit, is used for receiving the current signal that described first current sampling circuit (11) gathers, regulation Described current signal is with less than a setting value；

Described outer shroud PID regulates circuit, is used for receiving a high pressure Setting signal set in advance and described high pressure sample circuit (7) high-voltage feedback signal gathering, and described high-voltage feedback signal is compared with described high pressure Setting signal, through PID The inner ring PID regulation circuit in a regulated voltage signal extremely described first pwm control circuit (9) is exported after regulation；

Described inner ring PID regulates circuit, for receive the voltage signal that gathered by described first voltage sampling circuit (16) and Regulated voltage signal output, after PID is processed, is adjusted by the voltage signal of described outer shroud PID regulation circuit output to described PWM Economize on electricity road；

Described PWM regulates circuit, and for producing a pwm signal according to described regulated voltage signal, described pwm signal is through described First drive circuit (10) is to change the first insulated gate bipolar transistor in described first inverter bridge circuit (2), the second insulation Grid bipolar transistor, the 3rd insulated gate bipolar transistor, the service time of the 4th insulated gate bipolar transistor.

10. the inverter power supply device for high-power gas charging electron gun according to claim 8, is characterized in that, institute State the second inverter bridge circuit (4) and include the 5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, four-line poem with seven characters to a line edge Grid bipolar transistor, the 8th insulated gate bipolar transistor, capacitance and current transformer；

Wherein, the colelctor electrode of described 5th insulated gate bipolar transistor and the colelctor electrode of the 7th insulated gate bipolar transistor join Connecing, the emitter stage of described 5th insulated gate bipolar transistor and the colelctor electrode of the 6th insulated gate bipolar transistor couple, institute The colelctor electrode of the emitter stage and the 8th insulated gate bipolar transistor of stating the 7th insulated gate bipolar transistor couples, and the described 6th The emitter stage of the emitter stage of insulated gate bipolar transistor and the 8th insulated gate bipolar transistor couples, described capacitance with In described second current sampling circuit, the current transformer of (14) is connected.

11. inverter power supply devices for high-power gas charging electron gun according to claim 10, is characterized in that, institute State the second voltage transformation and include the 6th transformer, the 7th transformer, the 8th transformer, the 9th transformation with current rectifying and wave filtering circuit (5) Device and the tenth transformer, the 7th rectification circuit, the 8th rectification circuit, the 9th rectification circuit, the tenth rectification circuit and the tenth One rectification circuit, filter inductance and filter capacitor,

The former limit of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer is in parallel, The secondary of described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer couples respectively Seven rectification circuits, the 8th rectification circuit, the 9th rectification circuit, the tenth rectification circuit and the 11st rectification circuit；

The anode of described 7th rectification circuit is connected to the negative terminal of the 8th rectification circuit, and the anode of the 8th rectification circuit is connected to The negative terminal of nine rectification circuits, the anode of the 9th rectification circuit is connected to the negative terminal of the tenth rectification circuit, and the tenth rectification circuit is just End is connected to the negative terminal of the 11st rectification circuit, the positive ending grounding of the 11st rectification circuit；

It is connected to output after the described current-limiting resistance (6) of negative terminal series connection of described 7th rectification circuit.

12. inverter power supply devices for high-power gas charging electron gun according to claim 11, is characterized in that, institute State the second drive circuit (10) respectively to the 5th insulated gate bipolar transistor, the 6th insulated gate bipolar transistor, four-line poem with seven characters to a line Edge grid bipolar transistor, the 8th insulated gate bipolar transistor output pwm pulse signal, couple the 5th insulated gate bipolar brilliant Body pipe, the 8th insulated gate bipolar transistor pwm signal identical, couple the 6th insulated gate bipolar transistor, four-line poem with seven characters to a line edge The pwm signal of grid bipolar transistor is identical, drives the 5th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor Pwm signal with driving the 6th insulated gate bipolar transistor, the 7th insulated gate bipolar transistor pwm signal anti-phase.

13. inverter power supply devices for high-power gas charging electron gun according to claim 12, is characterized in that, institute State the second current sampling circuit (14) and be used for gathering current signal, and described current signal is fed back to described 2nd PWM control Circuit (12).

14. inverter power supply devices for high-power gas charging electron gun according to claim 13, is characterized in that, institute State the second pwm control circuit (12) and whether be used for detecting described current signal more than a setting value, when being judged as YES, described The 5th insulated gate bipolar transistor in two inverter bridge circuit (4), the 6th insulated gate bipolar transistor, the 7th insulated gate are double Bipolar transistor, the 8th insulated gate bipolar transistor work in over-current state, when described over-current state is more than 10 μ s, turn off The 5th insulated gate bipolar transistor in described second inverter bridge circuit (4), the 6th insulated gate bipolar transistor, four-line poem with seven characters to a line Edge grid bipolar transistor, the 8th insulated gate bipolar transistor.

15. inverter power supply devices for high-power gas charging electron gun according to claim 14, is characterized in that, institute State high pressure sample circuit (7) and be used for gathering high-voltage signal, and described high-voltage signal is fed back to described second pwm control circuit (12)；

For working as, described second pwm control circuit (12), detects that described high-voltage signal is more than maximum set value and more than 0.1ms When, then turn off the 5th insulated gate bipolar transistor, the 6th insulated gate bipolar crystal in described second inverter bridge circuit (4) Pipe, the 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, after 1ms, the PWM of the full pulsewidth of output believes again Number, export two groups of complementary pwm signals to control in described second inverter bridge circuit (4) by described second drive circuit (13) The 5th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor and the 6th insulated gate bipolar transistor, the 7th Insulated gate bipolar transistor replaces on/off,

Described second pwm control circuit (12), for when detecting that described high-voltage signal returns to setting value, exports full arteries and veins Width, otherwise, when detecting that described high pressure letter is more than maximum set value and during more than 0.1ms for continuous 5 times, output PWM duty cycle is 0, close the 5th insulated gate bipolar transistor in described second inverter bridge circuit (4), the 6th insulated gate bipolar transistor, 7th insulated gate bipolar transistor, the 8th insulated gate bipolar transistor, simultaneously output alarm signal.

16. inverter power supply devices for high-power gas charging electron gun according to claim 2, is characterized in that, institute Stating current-limiting resistance (6) uses high-power high voltage resistance series-parallel system to obtain.

17. inverter power supply devices for high-power gas charging electron gun according to claim 6, is characterized in that, institute State the no-load voltage ratio of the primary and secondary side of the first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer Being 1:5, the power of described first transformer, the second transformer, the 3rd transformer, the 4th transformer and the 5th transformer is equal For 60kW.

18. inverter power supply devices for high-power gas charging electron gun according to claim 11, is characterized in that, institute State the no-load voltage ratio of the primary and secondary side of the 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer Being 1:12, described 6th transformer, the 7th transformer, the 8th transformer, the 9th transformer and the tenth transformer are 60kW。