CN104493680A - Polishing production system - Google Patents

Polishing production system Download PDF

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Publication number
CN104493680A
CN104493680A CN201410578267.9A CN201410578267A CN104493680A CN 104493680 A CN104493680 A CN 104493680A CN 201410578267 A CN201410578267 A CN 201410578267A CN 104493680 A CN104493680 A CN 104493680A
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CN
China
Prior art keywords
workpiece
polishing
production system
transfer device
work transfer
Prior art date
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Granted
Application number
CN201410578267.9A
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Chinese (zh)
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CN104493680B (en
Inventor
陈民宗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIANGMEN SHUNZONG POLISHING EQUIPMENT CO Ltd
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JIANGMEN SHUNZONG POLISHING EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201410578267.9A priority Critical patent/CN104493680B/en
Publication of CN104493680A publication Critical patent/CN104493680A/en
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Publication of CN104493680B publication Critical patent/CN104493680B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D29/00Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D29/00Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/62Regenerating the filter material in the filter
    • B01D29/64Regenerating the filter material in the filter by scrapers, brushes, nozzles, or the like, acting on the cake side of the filtering element
    • B01D29/6407Regenerating the filter material in the filter by scrapers, brushes, nozzles, or the like, acting on the cake side of the filtering element brushes
    • B01D29/6415Regenerating the filter material in the filter by scrapers, brushes, nozzles, or the like, acting on the cake side of the filtering element brushes with a rotary movement with respect to the filtering element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/005Feeding or manipulating devices specially adapted to grinding machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

The invention discloses a polishing production system which comprises a workpiece conveying device, a polishing device, a lubricant spraying device, a collecting device, a filtering device and a workpiece cleaning device. During use, a worker only needs to dismount a polished workpiece and mount a new workpiece to be polished repeatedly so as to realize batch polishing of workpieces, and the operation is very simple. A lubricant is sprayed ceaselessly and circularly so as to effectively reduce the noise during polishing, the amount of flying dust and the temperature of polished workpieces and avoid waste. Meanwhile, through the arrangement of a leakage-proof structure on the workpiece conveying device, the lubricant cannot flow to a driving unit and thus cannot affect the normal operation of the driving unit. Besides, since workpiece polishing, lubricant spraying and workpiece dismounting are separated, the worker can dismount and mount workpieces conveniently and is protected very well, and the safety and reliability of the polishing production system are enhanced.

Description

Polishing production system
Technical field
The present invention relates to polishing field, particularly relate to a kind of polishing production system.
Background technology
Along with socioeconomic development, people also more and more focus on for the efficiency of producing.At present, market there is various production system, realized the production line balance processing of product, to enhance productivity.But in polishing industry, owing to not having perfect polishing production system, be mostly that workpeople operates burnishing device and carries out polishing to workpiece individually, make the inefficiency of polishing, be difficult to the needs meeting people.
Summary of the invention
In order to overcome the deficiencies in the prior art, the invention provides a kind of polishing production system.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of polishing production system, comprise work transfer device, burnishing device, lubricating fluid flusher, gathering-device, filter and workpiece cleaner, the driver element driving described work transfer device conveying workpieces is provided with in described work transfer device, described work transfer device is provided with some trade union college positions, described work transfer device is provided with the dismounting position for workman's dismounting workpiece, a trade union college position is had at least to be positioned at described dismounting position place, outside described dismounting position, burnishing device is equipped with along described work transfer device each trade union college position corresponding, described flusher comprises fluid reservoir, water circulating pump and sprinkling pipeline, described fluid reservoir is through described water circulating pump and described sprinkling pipeline communication, described sprinkling pipeline is arranged along described work transfer device, outside described dismounting position, shower nozzle is equipped with along described sprinkling pipeline each trade union college position corresponding, described work transfer device is provided with leakage-proof structure, make lubricating fluid cannot flow to described driver element, described gathering-device is positioned on described work transfer device, lubricating fluid can be collected, described gathering-device is communicated with described filter, described filter is communicated with described fluid reservoir, described workpiece cleaner is positioned at described dismounting position place, and the workpiece completed with the trade union college position matching purge polishing at described dismounting position place.
Described work transfer device is workpiece plate, comprise workpiece plate main body, described driver element is arranged on the body, described trade union college position is arrange workpiece spindle on the body, described body top is covered with cover plate, cover plate is provided with the Flange joint portion corresponding with described workpiece spindle, described workpiece spindle top is provided with Coupling Shaft, described Coupling Shaft outer wall extends annular flange seat, described Coupling Shaft passes the Flange joint portion of described cover plate, and described flange seat and described Flange joint portion are connected, realize the sealing between described Coupling Shaft and described cover plate.
Described Flange joint portion and described cover plate split are arranged, and described Flange joint portion is blind flange, and described cover plate is provided with rib, and when described blind flange is in place, described rib injects in described blind flange.
Described main body comprises base and rolling disc, described driver element is positioned on described base, described workpiece spindle is positioned on described rolling disc, and described driver element comprises the drive motors, reduction box and the dispenser that connect successively, and described rolling disc is fixedly connected on the output of described dispenser.
Described filter comprises disk body, is provided with filter screen disk in disk body, and the filtering outlet of described disk body is positioned at the below of described filter screen disk, is provided with roll brush above described disk body, and the inwall that roll brush can rely on described filter screen disk carries out rotation and scrubs.
Be provided with agitating device in described fluid reservoir, the paddle that described agitating device comprises turning cylinder and links with described turning cylinder, described paddle is positioned at the liquid outlet bottom described fluid reservoir.
The liquid outlet of described fluid reservoir is provided with three-way connection, and an interface of described three-way connection is communicated with the liquid outlet of fluid reservoir, and another interface is communicated with described water circulating pump, last interface through pipeline communication in wastewater trough.
Described sprinkling pipeline is provided with pipeline cleaning joint, has a tube cleaning arrangement through described cleaning interface and described sprinkling pipeline communication.
Described tube cleaning arrangement comprises a gas tank and cleaning tracheae, and cleaning tracheae is connected with described pipeline cleaning joint, makes described cleaning tracheae and described sprinkling pipeline communication.
Described workpiece cleaner comprises a gas tank and cleaning shower nozzle, and described gas tank is communicated with by pipe blow-through with described cleaning shower nozzle.
The invention has the beneficial effects as follows: the present invention forms a polishing production system by work transfer device, burnishing device, lubricating fluid flusher, gathering-device, filter and workpiece cleaner.During use, by polished trade union college on the trade union college position at dismounting position place, along with the rotation of work transfer device, workpiece is in turn transported to each burnishing device place and carries out polishing, then each burnishing device only can carry out polishing for certain face of workpiece, effectively improves polishing efficiency; When dismounting position is left in the trade union college position that polished workpiece is housed, follow-up and next trade union college position can enter into dismounting position place, due to the workpiece completing polishing being equipped with in follow-up and next trade union college position, now, workpiece cleaner can clean the surface of the work completing polishing, after having cleaned, under the workpiece completing polishing only need be dismantled by workman, lay equal stress on polished workpiece new on new clothes, cycling like this can realize the batch polishing of workpiece, operates very simple.And in the process of polishing, the lubricating fluid in fluid reservoir, under the effect of water circulating pump, is transported to sprinkling pipeline, and spray to polishing from the shower nozzle spraying pipeline, effectively reduce noise, the amount of flying away of dust and the temperature of polishing workpiece during polishing; The lubricating fluid sprayed out flow to filter through the collection of gathering-device, after device filters the polishing residue in lubricating fluid after filtration, lubricating fluid is back in fluid reservoir, forms the circulatory system of lubricating fluid, lubricating fluid cyclically can be utilized, avoid waste; Further, by the setting of leakage-proof structure on work transfer device, make lubricating fluid cannot flow to driver element place, then lubricating fluid cannot have influence on the normal work of driver element.And; due to burnishing device, shower nozzle be all be positioned at work transfer device dismounting position outside and arrange accordingly along trade union college position; realize the polishing of workpiece, spray the dismounting of lubricating fluid and workpiece and separate; facilitate workman's dismounting workpiece on the one hand; operator can be protected well on the other hand, strengthen security reliability of the present invention.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of work transfer device;
Fig. 3 is the structure broken away view of Fig. 2;
Fig. 4 is the A place enlarged drawing of Fig. 3;
Fig. 5 is the schematic diagram of leakage-proof structure of the present invention;
Fig. 6 is the structural representation of fluid reservoir of the present invention and filter;
Fig. 7 is the sectional view of filter of the present invention;
Fig. 8 is the sectional view of fluid reservoir of the present invention.
Detailed description of the invention
With reference to Fig. 1, a kind of polishing production system, comprise work transfer device 1, burnishing device 2, lubricating fluid flusher 3, gathering-device 4, filter 5 and workpiece cleaner 6, the driver element 11 driving described work transfer device 1 conveying workpieces is provided with in described work transfer device 1, described work transfer device 1 is provided with some trade union college positions 12, described work transfer device 1 is provided with the dismounting position 13 for workman's dismounting workpiece, a trade union college position 12 is had at least to be positioned at described dismounting position 13 place, outside described dismounting position 13, burnishing device 2 is equipped with along described work transfer device 1 each trade union college position 12 corresponding, described flusher 3 comprises fluid reservoir 31, water circulating pump 32 and sprinkling pipeline 33, described fluid reservoir 31 is communicated with described sprinkling pipeline 33 through described water circulating pump 32, described sprinkling pipeline 33 is arranged along described work transfer device 1, outside described dismounting position 13, shower nozzle 34 is equipped with along described sprinkling pipeline 33 each trade union college position 12 corresponding, described work transfer device 1 is provided with leakage-proof structure, make lubricating fluid cannot flow to described driver element 11, described gathering-device 4 is positioned on described work transfer device 1, lubricating fluid can be collected, described gathering-device 4 is communicated with described filter 5, described filter 5 is communicated with described fluid reservoir 31, described workpiece cleaner 6 is positioned at described dismounting position 13 place, and the workpiece completed with the trade union college position 12 matching purge polishing at described dismounting position 13 place.
When the present invention uses, by polished trade union college on the trade union college position 12 at dismounting position 13 place, along with the rotation of work transfer device 1, workpiece is in turn transported to each burnishing device 2 place and carries out polishing, then each burnishing device 2 only can carry out polishing for certain face of workpiece, effectively improves polishing efficiency; When dismounting position 13 is left in the trade union college position 12 that polished workpiece is housed, follow-up and next trade union college position 12 can enter into dismounting position 13 place, due to the workpiece completing polishing being equipped with in follow-up and next trade union college position 12, now, workpiece cleaner 6 can clean the surface of the work completing polishing, after having cleaned, under the workpiece completing polishing only need be dismantled by workman, to lay equal stress on polished workpiece new on new clothes, cycling like this can realize the batch polishing of workpiece, operates very simple.And in the process of polishing, lubricating fluid in fluid reservoir 31 is under the effect of water circulating pump 32, be transported to and spray pipeline 33, and spray to polishing from the shower nozzle 34 spraying pipeline 33, effectively reduce noise, the amount of flying away of dust and the temperature of polishing workpiece during polishing; Have more spray volume to make lubricating fluid and be convenient to the operation of polishing, the present invention each trade union college position 12 corresponding is configured with two shower nozzles 34; The lubricating fluid sprayed out flow to filter 5 through the collection of gathering-device 4, after polishing residue after filtration in device 5 pairs of lubricating fluids filters, lubricating fluid is back in fluid reservoir 31, forms the circulatory system of lubricating fluid, lubricating fluid cyclically can be utilized, avoid waste; Further, by the setting of leakage-proof structure on work transfer device 1, make lubricating fluid cannot flow to driver element 11 place, then lubricating fluid cannot have influence on the normal work of driver element 11.And; due to burnishing device 2, shower nozzle 34 be all be positioned at work transfer device 1 dismounting position 13 outside and arrange accordingly along trade union college position 12; realize the polishing of workpiece, spray the dismounting of lubricating fluid and workpiece and separate; facilitate workman's dismounting workpiece on the one hand; operator can be protected well on the other hand, strengthen security reliability of the present invention.
The formation of leakage-proof structure can have multiple, as the preferred embodiments of the present invention, with reference to Fig. 2 to 4, described work transfer device 1 is workpiece plate, comprise workpiece plate main body 14, described driver element 11 is arranged in described main body 14, described trade union college position 12 is for being arranged on the workpiece spindle in described main body 14, described main body 14 top is covered with cover plate 15, cover plate 15 is provided with the Flange joint portion 16 corresponding with described workpiece spindle, described workpiece spindle top is provided with Coupling Shaft 17, described Coupling Shaft 17 outer wall extends annular flange seat 18, described Coupling Shaft 17 passes the Flange joint portion 16 of described cover plate 15, and described flange seat 18 is connected with described Flange joint portion 16, realize the sealing between described Coupling Shaft 17 and described cover plate 15, by being covered with cover plate 15 at main body 14 top, the driver element 11 in main body 14 and other parts being covered, making lubricating fluid cannot be sprayed in main body 14, simultaneously, the Flange joint portion 16 of cover plate 15 is passed by the Coupling Shaft 17 of workpiece spindle, trade union college position 12 can be formed, and be connected with Flange joint portion 16 by flange seat 18, form flange sealing surface, realize the sealing between Coupling Shaft 17 and cover plate 15, make lubricating fluid cannot flow in main body 14 along Coupling Shaft 17, and the good sealing effect of flange seal, structural stability are strong, there is the problem revealed without the need to worrying vibrations because polishing brings.By the vibrational power flow of above-mentioned two aspects, make lubricating fluid cannot be left to the normal work affecting driver element 11 and other parts in main body 14, achieve in polishing process, workpiece polishing place in the past can spray lubricating fluid.
In the present invention, gathering-device 4 comprises the collection channel being centered around cover plate 15 periphery, and cover plate 15 tilts from center to periphery, then the lubricating fluid be sprayed on cover plate 15 can flow in the collection channel of cover plate 15 periphery, and structure is simple, is convenient to the collection of lubricating fluid.
In the present embodiment, with reference to Fig. 5, described Flange joint portion 16 is arranged with the split of described cover plate 15, and described Flange joint portion 16 is blind flange, and described cover plate 15 is provided with rib 19, and when described blind flange is in place, described rib 19 injects in described blind flange; Like this, arranged by the split of blind flange and cover plate 15, what be convenient to blind flange and flange seat 18 coordinates dismounting, and, the rib 19 of cover plate 15 injects in blind flange, can prevent lubricating fluid from flowing in main body from the junction of blind flange and cover plate 15, and the installation of blind flange also can be facilitated to locate.
Described main body 14 comprises base 141 and rolling disc 142, described driver element 11 is positioned on described base 141, described workpiece spindle is positioned on described rolling disc 142, described driver element 11 comprises the drive motors 111, reduction box 112 and the dispenser 113 that connect successively, and described rolling disc 142 is fixedly connected on the output of described dispenser 113; Like this, namely rolling disc 142 is driven to rotate by drive motors 111, and under the effect of dispenser 113, drive motors 111 often turns over a circle, rolling disc 142 will turn over certain angle, drive the workpiece being positioned at a trade union college position to turn to the position of next trade union college position, structure is simple, reasonable in design.
The structure of filter 5 also can have multiple, as the preferred embodiments of the present invention, with reference to Fig. 6 and Fig. 7, described filter 5 comprises disk body 51, is provided with filter screen disk 52 in disk body 51, and the filtering outlet 54 of described disk body 51 is positioned at the below of described filter screen disk 52, roll brush 53 is provided with above described disk body 51, when lubricating fluid is back in filter screen disk 52, the polishing residue filter in lubricating fluid can fall by filter screen disk 52, and lubricating fluid then exports 54 after filtration and is left to liquid storing barrel 31; And in order to prevent polishing residue from being blocked by the mesh of filter screen disk 52, the inwall that roll brush 53 can rely on filter screen disk 52 constantly carries out rotation and scrubs.
With reference to Fig. 8, be provided with agitating device 35 in described fluid reservoir 31, the paddle 37 that described agitating device 35 comprises turning cylinder 36 and links with described turning cylinder 36, described paddle 37 is positioned at liquid outlet 38 place bottom described fluid reservoir 37; By the rotation of paddle 37, the solute precipitates in lubricating fluid can be prevented on the one hand, can prevent the solute in lubricating fluid from being blocked by liquid outlet 38 on the other hand, and lubricating fluid of the present invention preferably adopt sodium solution.
Liquid outlet 38 place of described fluid reservoir 31 is provided with three-way connection 7, and an interface of described three-way connection 7 is communicated with the liquid outlet 38 of fluid reservoir 31, and another interface is communicated with described water circulating pump 32, last interface through pipeline communication in wastewater trough; In polishing process, an interface of three-way connection 7 needs to open, and last interface then needs to close, and the liquid outlet 38 of fluid reservoir 31 is only communicated with water circulating pump 32, guarantees that pipeline is unobstructed; And when lubricating fluid needs displacement or needs cleaning liquid storing barrel after long-time use, then open last interface of three-way connection 7, and close an interface of three-way connection 7, lubricating fluid or cleaning fluid can be flowed out through last interface of three-way connection 7.
Described sprinkling pipeline 33 is provided with pipeline cleaning joint 39, has a tube cleaning arrangement 8 to be communicated with described sprinkling pipeline 33 through described cleaning interface 39; Particularly: described tube cleaning arrangement 8 comprises a gas tank 9 and cleaning tracheae 81, and cleaning tracheae 81 is connected with described pipeline cleaning joint 39, and described cleaning tracheae 81 is communicated with described sprinkling pipeline 33; When pipeline 33 is sprayed in needs cleaning, by cleaning tracheae 81 with clean joint 39 and be connected, can toward spraying jet cleaning in pipeline 33, very convenient; Further, use gas to clean, gas can not remain in and spray in pipeline 33, and also can not cause dilution to lubricating fluid, be that the liquid rinse such as water, cleaning solution medium is incomparable.
Described workpiece cleaner 6 comprises a gas tank 9 and cleaning shower nozzle 61, and described gas tank 9 is communicated with by pipe blow-through 62 with described cleaning shower nozzle 61; When workpiece polishing completes, toward the jet residue that promptly can clean out surface of the work of surface of the work; Similarly, use gas to carry out cleaning workpiece, gas can not remain in surface of the work, also can not cause dilution to lubricating fluid, is that the liquid rinse such as water, cleaning solution medium is incomparable.
The present invention forms a perfect polishing production system by work transfer device 1, burnishing device 2, lubricating fluid flusher 3, gathering-device 4, filter 5 and workpiece cleaner 6, the use of workman is facilitated to operate, the efficiency of polishing can be improved widely, and the polishing of workpiece, the dismounting of spraying lubricating fluid and workpiece are separated, security reliability is high.

Claims (10)

1. a polishing production system, it is characterized in that: comprise work transfer device (1), burnishing device (2), lubricating fluid flusher (3), gathering-device (4), filter (5) and workpiece cleaner (6), the driver element (11) driving described work transfer device (1) conveying workpieces is provided with in described work transfer device (1), described work transfer device (1) is provided with some trade union college positions (12), described work transfer device (1) is provided with the dismounting position (13) for workman's dismounting workpiece, a trade union college position (12) is had at least to be positioned at described dismounting position (13) place, outside described dismounting position (13), burnishing device (2) is equipped with along described work transfer device (1) each trade union college position (12) corresponding, described flusher (3) comprises fluid reservoir (31), water circulating pump (32) and sprinkling pipeline (33), described fluid reservoir (31) is communicated with described sprinkling pipeline (33) through described water circulating pump (32), described sprinkling pipeline (33) is arranged along described work transfer device (1), outside described dismounting position (13), shower nozzle (34) is equipped with along described sprinkling pipeline (33) each trade union college position (12) corresponding, (1) is provided with leakage-proof structure to described work transfer device, make lubricating fluid cannot flow to described driver element (11), described gathering-device (4) is positioned on described work transfer device (1), lubricating fluid can be collected, described gathering-device (4) is communicated with described filter (5), described filter (5) is communicated with described fluid reservoir (31), described workpiece cleaner (6) is positioned at described dismounting position (13) place, and the workpiece completed with trade union college position (12) the matching purge polishing at described dismounting position (13) place.
2. polishing production system according to claim 1, it is characterized in that: described work transfer device (1) is workpiece plate, comprise workpiece plate main body (14), described driver element (11) is arranged in described main body (14), described trade union college position (12) is for being arranged on the workpiece spindle in described main body (14), described main body (14) top is covered with cover plate (15), cover plate (15) is provided with the Flange joint portion (16) corresponding with described workpiece spindle, described workpiece spindle top is provided with Coupling Shaft (17), described Coupling Shaft (17) outer wall extends annular flange seat (18), described Coupling Shaft (17) passes the Flange joint portion (16) of described cover plate (15), and described flange seat (18) and described Flange joint portion (16) are connected, realize the sealing between described Coupling Shaft (17) and described cover plate (15).
3. polishing production system according to claim 2, it is characterized in that: described Flange joint portion (16) and described cover plate (15) split are arranged, described Flange joint portion (16) is blind flange, described cover plate (15) is provided with rib (19), when described blind flange is in place, described rib (19) injects in described blind flange.
4. polishing production system according to claim 2, it is characterized in that: described main body (14) comprises base (141) and rolling disc (142), described driver element (11) is positioned on described base (141), described workpiece spindle is positioned on described rolling disc (142), described driver element (11) comprises the drive motors (111), reduction box (112) and the dispenser (113) that connect successively, and described rolling disc (142) is fixedly connected on the output of described dispenser (113).
5. polishing production system according to claim 1, it is characterized in that: described filter (5) comprises disk body (51), filter screen disk (52) is provided with in disk body (51), the filtering outlet (54) of described disk body (51) is positioned at the below of described filter screen disk (52), described disk body (51) top is provided with roll brush (53), and the inwall that roll brush (53) can rely on described filter screen disk (52) carries out rotation and scrubs.
6. polishing production system according to claim 1, it is characterized in that: in described fluid reservoir (31), be provided with agitating device (35), the paddle (37) that described agitating device (35) comprises turning cylinder (36) and links with described turning cylinder (36), described paddle (37) is positioned at liquid outlet (38) place of described fluid reservoir (37) bottom.
7. polishing production system according to claim 1, it is characterized in that: liquid outlet (38) place of described fluid reservoir (31) is provided with three-way connection (7), one interface of described three-way connection (7) is communicated with the liquid outlet (38) of fluid reservoir (31), another interface is communicated with described water circulating pump (32), last interface through pipeline communication in wastewater trough.
8. polishing production system according to claim 1, it is characterized in that: described sprinkling pipeline (33) is provided with pipeline cleaning joint (39) having a tube cleaning arrangement (8) to be communicated with described sprinkling pipeline (33) through described cleaning interface (39).
9. polishing production system according to claim 8, it is characterized in that: described tube cleaning arrangement (8) comprises a gas tank (9) and cleaning tracheae (81), cleaning tracheae (81) is connected with described pipeline cleaning joint (39), and described cleaning tracheae (81) is communicated with described sprinkling pipeline (33).
10. polishing production system according to claim 1, it is characterized in that: described workpiece cleaner (6) comprises a gas tank (9) and cleaning shower nozzle (61), and described gas tank (9) is communicated with by pipe blow-through (62) with described cleaning shower nozzle (61).
CN201410578267.9A 2014-10-24 2014-10-24 Polishing production system Active CN104493680B (en)

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CN104493680B CN104493680B (en) 2017-02-15

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0864562A (en) * 1994-08-24 1996-03-08 Matsushita Electric Ind Co Ltd Polishing of semiconductor wafer and device
US6299516B1 (en) * 1999-09-28 2001-10-09 Applied Materials, Inc. Substrate polishing article
CN201824228U (en) * 2010-08-02 2011-05-11 杨建河 Environmental protection polishing machine
CN201856155U (en) * 2010-10-09 2011-06-08 东莞市天昊金属表面处理设备有限公司 Plasma polishing machine
CN103273410A (en) * 2013-06-29 2013-09-04 冯会民 Automatic stainless pan polishing equipment
CN103372805A (en) * 2013-07-12 2013-10-30 中国科学院上海光学精密机械研究所 Large immersion type ring polishing machine
CN203566503U (en) * 2013-10-22 2014-04-30 南京旭上数控技术有限公司 Extinguishment mechanism of large numerical control full-automatic polishing machine

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0864562A (en) * 1994-08-24 1996-03-08 Matsushita Electric Ind Co Ltd Polishing of semiconductor wafer and device
US6299516B1 (en) * 1999-09-28 2001-10-09 Applied Materials, Inc. Substrate polishing article
CN201824228U (en) * 2010-08-02 2011-05-11 杨建河 Environmental protection polishing machine
CN201856155U (en) * 2010-10-09 2011-06-08 东莞市天昊金属表面处理设备有限公司 Plasma polishing machine
CN103273410A (en) * 2013-06-29 2013-09-04 冯会民 Automatic stainless pan polishing equipment
CN103372805A (en) * 2013-07-12 2013-10-30 中国科学院上海光学精密机械研究所 Large immersion type ring polishing machine
CN203566503U (en) * 2013-10-22 2014-04-30 南京旭上数控技术有限公司 Extinguishment mechanism of large numerical control full-automatic polishing machine

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