CN104485290B - A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching - Google Patents
A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching Download PDFInfo
- Publication number
- CN104485290B CN104485290B CN201410695949.8A CN201410695949A CN104485290B CN 104485290 B CN104485290 B CN 104485290B CN 201410695949 A CN201410695949 A CN 201410695949A CN 104485290 B CN104485290 B CN 104485290B
- Authority
- CN
- China
- Prior art keywords
- motion
- micro
- fixed
- motion platform
- dynamic characteristic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
Abstract
A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching, including Y-direction motion, X to motion and Z-direction precision stamping mechanism, the X is fixed on base to motion by X to support, the Z-direction precision stamping mechanism is installed on X direction guiding rails of the X to motion by X＆Z linkage platforms and X＆Z composite guide rails sliding blocks, and realizes X to motion in the case where the X drives to the X of motion to driving；Workpiece is placed on the Y-direction motion platform of the Y-direction motion, and realizes that Y-direction is moved by the Y-direction motion.Z-direction precision stamping mechanism can obtain consistent dynamic response performance according to different punching press frequencies to dynamic characteristic intense adjustment, it is possible to realize position power switching complex controll, realize the uniformity processing of micro structure array.The present invention proposes a kind of shortening position aligning time, reduces movement warp, improves accurate micro- press machine of processing efficiency and machining accuracy.
Description
Technical field
The present invention relates to precision movement platform, more particularly to a kind of micro structure array of dynamic characteristic Adaptive matching are accurate
Machining tool.
Background technology
In field of semiconductor package, it is often necessary to fabricate some accurate micro-structurals on workpiece.Precision stamping lathe
It is a kind of process equipment for completing above-mentioned operation.The problem of current pressing equipment is present has：(1) punching precision of stamping machine has
Limit；(2) processing efficiency of stamping machine is not high；(3) process adjustments of pressing equipment are complex.Micro- press machine of prior art
In a GeZXiang precision stampings mechanism is set on conventional XY platforms, in Z-direction precision stamping mechanism use piezoelectric ceramic actuator
Micro- staking punch is driven to process micro- shape structure on workpiece with elastic device etc..Wherein, Z-direction punching course is controlled using position
System.Prior art is due to being to set up more stupid in Z-direction precision stamping mechanism, overall structure on conventional XY platforms
Weight.In addition, Z-direction motion uses position control system in prior art, and staking punch is in the contact punching stroke with workpiece
Middle stamping press is changed greatly, and displacement-control mode can cause actual punching precision limited.And be to reach high punching precision, it is existing
Have and generally require to carry out complex technique adjustment process in technical scheme, and processing efficiency would generally be sacrificed.
The content of the invention
It is an object of the invention to propose a kind of shortening position aligning time, movement warp is reduced, processing efficiency and processing is improved
The micro structure array precision finishing machine of the dynamic characteristic Adaptive matching of precision.
For up to this purpose, the present invention uses following technical scheme：
A kind of accurate micro- press machine, including Y-direction motion, X are to motion and Z-direction precision stamping mechanism, the X
It is fixed on to motion by X to support on base, the Z-direction precision stamping mechanism is compound by X＆Z linkage platforms and X＆Z
Guide rail slide block is installed on X direction guiding rails of the X to motion, and is realized in the case where the X drives to the X of motion to driving
X is to motion；
Workpiece is placed on the Y-direction motion platform of the Y-direction motion, and realizes Y by the Y-direction motion 1
To motion.
It is preferred that, the Z-direction precision stamping mechanism includes Z-direction motion platform, Z-direction governor motion and micro- punching mechanism, institute
State Z-direction governor motion and micro- punching mechanism is installed on the Z-direction motion platform；
The Z-direction governor motion includes driving, Z-direction guide rail, ball screw, feed screw nut and nut seat, the driving with
The Z-direction guide rail is fixed on the Z-direction motion platform, and the ball screw is installed on the Z-direction motion platform and by institute
Feed screw nut and the nut seat is stated to be fixedly connected with the X＆Z linkage platforms；
Micro- punching mechanism by the rotation of ball-screw described in the drive control drive the Z-direction motion platform with
The X＆Z linkage platforms realize the adjustment in Z-direction position in the relative motion of Z-direction.
It is preferred that, micro- punching mechanism includes film group, knife rest, motor and micro- staking punch, the motor
The Z-direction motion platform is fixed on, the mover of the motor is connected with the knife rest and drives the knife rest in the micro- of Z-direction
Translation, micro- staking punch is fixed on the knife rest.
It is preferred that, micro- punching mechanism also include film pretightning force regulating bolt, the matrix of the Z-direction motion platform with
The film group junction is provided with strip hole slot, and the film pretightning force regulating bolt is in the hole slot.
It is preferred that, micro- punching mechanism is additionally provided with capacitive displacement transducer.
It is preferred that, the film group is integrally machined mode with knife rest use and is embedded in the Z-direction motion platform.
It is preferred that, it is described to be driven to servomotor or hand power screw adjusting means.
It is preferred that, the Y-direction motion includes base, Y-direction guide rail, Y-direction motion platform, Y-direction driving, Y-direction guide rail cunning
Block, the Y-direction guide rail is fixed on the base, and the Y-direction motion platform is installed on the dynamic of the Y-direction driving by connecting plate
Son, the stator of the Y-direction driving is fixed on the base, and the Y-direction motion platform passes through the Y-direction guide rail sliding block and Y-direction
Guide rail by the Y-direction drive control its Y-direction motion.
It is preferred that, the X direction guiding rails are fixed on the X to support, and the X is fixed on the X to branch to the stator of driving
Frame, the X is fixed in the X＆Z linkage platforms to the mover of driving.
It is preferred that, the Y-direction motion also includes being fixed on Y-direction grating scale on the base, and the X is to fitness machine
Structure also includes being fixed on the X to the X of support to grating scale.
Beneficial effects of the present invention：
1st, the setting of X＆Z linkages, drives Z-direction precision stamping mechanism to complete X to motion, Y-direction motion drives workpiece complete
Into Y-direction motion, shorten position aligning time, reduce movement warp, improve processing efficiency and machining accuracy；
2nd, the Z-direction governor motion in Z-direction precision stamping mechanism makes Z-direction motion flat by servomotor and ball-screw mode
Platform produces Z-direction relative motion with X＆Z linkage platforms, and then drives micro- punching mechanism to complete Z-direction position adjustment, realizes punching press；
3rd, the prestressing force in film group can be changed by the film pretightning force regulating bolt adjusted in micro- punching mechanism, entered
And change the dynamics of micro- punching mechanism, match different operating modes and technological requirement.
Brief description of the drawings
Fig. 1 is the structural representation of one embodiment of the present of invention；
Fig. 2 is that the structure of one embodiment of the present of invention splits schematic diagram；
Fig. 3 is the Z-direction precision stamping mechanism structural representation of one embodiment of the present of invention；
Fig. 4 is micro- punching mechanism structural representation of one embodiment of the present of invention.
Wherein：Y-direction motion 1, X is to motion 2, Z-direction precision stamping mechanism 3, base 101, Y-direction guide rail 102, Y
To the stator 103 of driving, Y-direction guide rail sliding block 104, Y-direction motion platform 105, the mover 106 of Y-direction driving, connecting plate 107, X to
Support 201, X is to the stator 202 of driving, X direction guiding rails 203, and X is to the mover 204 of driving, X＆Z linkage platforms 205, X＆Z composite guides
Rail sliding block 206, Z-direction motion platform 301, driving 303, Z-direction guide rail 304, film pretightning force regulating bolt 307, micro- staking punch
308, ball screw 311, feed screw nut 312, nut seat 313, film group 321, knife rest 322, motor 323, hole slot 325.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching, including Y-direction motion 1, X are to fortune
Motivation structure 2 and Z-direction precision stamping mechanism 3, the X is fixed on base 101 to motion 2 by X to support 201, the Z
The X is installed on to motion 2 by X＆Z linkage platforms 205 and X＆Z composite guide rails sliding block 206 to precision stamping mechanism 3
X direction guiding rails 203, and realize X to motion in the case where the X drives to the X of motion 2 to driving；
Workpiece is placed on the Y-direction motion platform 105 of the Y-direction motion 1, and real by the Y-direction motion 1
Existing Y-direction motion.
Prior art is that Z-direction precision stamping mechanism is set up on conventional XY platforms, and workpiece need to be by the X of XY platforms to fortune
Dynamic and Y-direction is done exercises to below Z-direction precision stamping mechanism, and stamping procedure is completed by Z-direction precision stamping mechanism, overall structure compared with
For heaviness, required run duration is longer, reduces processing efficiency, in addition, the conversion of XY directions motion causes motion platform in movement
There is deviation in Shi Rongyi, makes the precision of workpiece punch process and reduces.As shown in figure 1, the present invention is by Z-direction precision stamping mechanism 3
Link and install to motion 2 with reference to X, realize the X of Z-direction precision stamping mechanism 3 to motion, workpiece is real by Y-direction motion 1
Existing Y-direction motion, Z-direction precision stamping mechanism 3 and workpiece respectively respective X to or Y-direction on relative motion, shorten station alignment
Run duration, improves work pieces process efficiency, and X is disturbed to the motion with Y-direction is irrelevant, and the movement multi-faceted without workpiece subtracts
Few deviations, improve the precision of workpiece punch process, Z-direction precision stamping mechanism 3 and X is installed to the linkage of motion 2 to be made
Overall structure is simpler.
It is preferred that, the Z-direction precision stamping mechanism 3 includes Z-direction motion platform 301, Z-direction governor motion and micro- stamping machine
Structure, the Z-direction governor motion and micro- punching mechanism are installed on the Z-direction motion platform 301；
The Z-direction governor motion includes driving 303, Z-direction guide rail 304, ball screw 311, feed screw nut 312 and nut seat
313, the driving 303 and the Z-direction guide rail 304 are fixed on the Z-direction motion platform 301, and the ball screw 311 is installed on
On the Z-direction motion platform 301 and pass through the feed screw nut 312 and the nut seat 313 and the X＆Z linkage platforms 205
It is fixedly connected；
Micro- punching mechanism drives the Z-direction to move by the rotation of the control of driving 303 ball-screw 311
Platform 301 realizes the adjustment in Z-direction position with the X＆Z linkage platforms 205 in the relative motion of Z-direction.
As shown in figure 3, the Z-direction governor motion in Z-direction precision stamping mechanism combines ball screw 311 by driving 303
Mode makes Z-direction motion platform 301 and X＆Z linkage platforms 205 produce Z phase relative motions, and then drives micro- punching mechanism to complete Z-direction
The adjustment of position, simple in construction, controlling is strong.Put down as shown in figure 3, driving 303 is fixed on Z-direction motion by electric machine support 302
On platform 301, ball-screw is fixed on Z-direction motion platform 301 by ball-screw support base 310,314.Feed screw nut 312 leads to
Nut seat 313 is crossed to be fixed in X＆Z linkage platforms 205.
It is preferred that, micro- punching mechanism includes film group 321, knife rest 322, motor 323 and micro- staking punch 308,
The motor 323 is fixed on the Z-direction motion platform 301, and the mover of the motor 323 connects with the knife rest 322
Connect and drive the knife rest 322 in micro- translation of Z-direction, micro- staking punch 308 is fixed on the knife rest 322.Z-direction precision punching
Press mechanism can be adjusted according to different punching press frequencies to dynamic characteristic, obtain consistent dynamic response performance, it is possible to realize position
Power switches complex controll, realizes the uniformity processing of micro structure array.
As shown in figure 4, micro- punching mechanism drives the knife rest 322 with micro- staking punch 308 to complete to rush by motor 323
Press through journey.
It is preferred that, micro- punching mechanism also includes film pretightning force regulating bolt 307, the Z-direction motion platform 301
Matrix is provided with strip hole slot 325 with the junction of film group 321, and the film pretightning force regulating bolt 307 is in described
Hole slot 325.By the film pretightning force regulating bolt 307 adjusted in micro- punching mechanism can change in film group 321 it is pre- should
Power, and then change the dynamics of micro- punching mechanism, match different operating modes and technological requirement.
It is preferred that, micro- punching mechanism is additionally provided with capacitive displacement transducer.Z maintenance and operations for measuring knife rest 322
It is dynamic.
It is preferred that, the film group 321 is integrally machined mode with the knife rest 322 use and is embedded in the Z-direction motion platform
301.Obtained by the mode such as milling, electrical discharge machining by whole block material, it is to avoid the rigging error of part, platform can be improved
Kinematic accuracy.
It is preferred that, the driving 303 is servomotor or hand power screw adjusting means.Servomotor makes control speed and position
Put precision all very accurate, small volume, response is fast, and speed is high, the rotation available for control ball screw 311.Use manual spiral shell
Regulating device is tuned, mechanical manipulation is reduced, the movement inertia of machinery can be further reduced, the accuracy of punching press is improved.
It is preferred that, the Y-direction motion 1 include base 101, Y-direction guide rail 102, Y-direction motion platform 105, Y-direction driving,
Y-direction guide rail sliding block 104, the Y-direction guide rail 102 is fixed on the base 101, and the Y-direction motion platform 105 passes through connecting plate
107 are installed on the mover 106 of the Y-direction driving, and the stator 103 of the Y-direction driving is fixed on the base 101, the Y-direction
Motion platform 105 by the Y-direction guide rail sliding block 104 and Y-direction guide rail by the Y-direction drive control its Y-direction motion.As schemed
Shown in 2, the stator 103 of Y-direction driving is installed on X to support, and the Y-direction for driving Y-direction motion by its mover 106 is moved, quality
Gently, vibration kinetic energy is small, and frequency is fast.
It is preferred that, the X direction guiding rails 203 are fixed on the X to support 201, and the X is fixed on to the stator 202 of driving
The X is fixed in the X＆Z linkage platforms 205 to support, the X to the mover 204 of driving.As shown in Fig. 2 X is to driving
Stator 202 be installed on X to support, drive the motion of X＆Z linkage platforms by its mover 204, light weight, vibration kinetic energy is small, frequency
Rate is fast.
It is preferred that, the Y-direction motion also includes being fixed on Y-direction grating scale on the base 101, and the X is to fortune
Motivation structure also includes being fixed on the X to the X of support 201 to grating scale.It is respectively used to measure the Y-direction position of Y-direction motion platform
With the X of X＆Z linkage platforms and Z-direction precision stamping mechanism to position.
The technical principle of the present invention is described above in association with specific embodiment.These descriptions are intended merely to explain the present invention's
Principle, and limiting the scope of the invention can not be construed in any way.Based on explanation herein, the technology of this area
Personnel, which would not require any inventive effort, can associate other embodiments of the present invention, and these modes are fallen within
Within protection scope of the present invention.
Claims (7)
1. a kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching, including Y-direction motion, X are to motion
Mechanism and Z-direction precision stamping mechanism, it is characterised in that：
The X is fixed on base to motion by X to support, and the Z-direction precision stamping mechanism passes through X＆Z linkage platforms
X direction guiding rails of the X to motion is installed on X＆Z composite guide rails sliding blocks, and in the X to the X of motion to driving
Realize X to motion under drive；
Workpiece is placed on the Y-direction motion platform of the Y-direction motion 1, and realizes that Y-direction is transported by the Y-direction motion
It is dynamic；
The Z-direction precision stamping mechanism includes Z-direction motion platform, Z-direction governor motion and micro- punching mechanism, and the Z-direction adjusts machine
Structure and micro- punching mechanism are installed on the Z-direction motion platform；
The Z-direction governor motion includes driving, Z-direction guide rail, ball screw, feed screw nut and nut seat, the driving and the Z
Direction guiding rail is fixed on the Z-direction motion platform, and the ball screw is installed on the Z-direction motion platform and by the screw mandrel
Nut and the nut seat are fixedly connected with the X＆Z linkage platforms；
Micro- punching mechanism by the rotation of ball-screw described in the drive control drive the Z-direction motion platform with it is described
X＆Z linkage platforms realize the adjustment in Z-direction position in the relative motion of Z-direction；
Micro- punching mechanism includes film group, knife rest, motor and micro- staking punch, and the motor is fixed on the Z
To motion platform, the mover of the motor is connected with the knife rest and drives the knife rest in micro- translation of Z-direction, described micro-
Staking punch is fixed on the knife rest；
The film group is integrally machined mode with knife rest use and is embedded in the Z-direction motion platform.
2. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, its feature exists
In：Micro- punching mechanism also includes film pretightning force regulating bolt, and the matrix of the Z-direction motion platform connects with the film group
The place of connecing is provided with strip hole slot, and the film pretightning force regulating bolt is in the hole slot.
3. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1 or 2, its feature
It is：Micro- punching mechanism is additionally provided with capacitive displacement transducer.
4. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, its feature exists
In：It is described to be driven to servomotor or hand power screw adjusting means.
5. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, its feature exists
In：The Y-direction motion includes base, Y-direction guide rail, Y-direction motion platform, Y-direction driving, Y-direction guide rail sliding block, and the Y-direction is led
Rail is fixed on the base, and the Y-direction motion platform is installed on the mover that the Y-direction drives by connecting plate, and the Y-direction is driven
Dynamic stator is fixed on the base, and the Y-direction motion platform is by the Y-direction guide rail sliding block and Y-direction guide rail by the Y-direction
Drive control its Y-direction motion.
6. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, its feature exists
In：The X direction guiding rails are fixed on the X to support, and the X is fixed on the X to support to the stator of driving, and the X is to drive
Dynamic mover is fixed in the X＆Z linkage platforms.
7. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, its feature exists
In：The Y-direction motion also includes the Y-direction grating scale being fixed on the base, and the X also includes fixing to motion
In the X to the X of support to grating scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410695949.8A CN104485290B (en) | 2014-11-26 | 2014-11-26 | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410695949.8A CN104485290B (en) | 2014-11-26 | 2014-11-26 | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104485290A CN104485290A (en) | 2015-04-01 |
| CN104485290B true CN104485290B (en) | 2017-10-27 |
Family
ID=52759826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410695949.8A Active CN104485290B (en) | 2014-11-26 | 2014-11-26 | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104485290B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107471504A (en) * | 2017-08-22 | 2017-12-15 | 广东工业大学 | A kind of micro-structural hits the regulation platform and its adjusting method of a machining tool light-conducting board mold |
| CN108194504A (en) * | 2017-12-29 | 2018-06-22 | 深圳力合精密装备科技有限公司 | A kind of guide rail and the baseline instrument with the guide rail |
| CN111320132B (en) * | 2020-02-18 | 2023-03-31 | 杭州电子科技大学 | Method and device for preparing multi-scale functional microstructure with high-hardness surface |
| CN113070390B (en) * | 2021-03-31 | 2023-08-18 | 安徽中佳自动化科技有限公司 | High-efficient numerical control die-cut mechanism |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3071758B2 (en) * | 1998-05-20 | 2000-07-31 | ヤマザキマザック株式会社 | Three-dimensional laser beam machine and processing control method for processing program in three-dimensional laser beam machine |
| JP2005095958A (en) * | 2003-09-26 | 2005-04-14 | Takashima Sangyo Kk | Press |
| US7618809B2 (en) * | 2005-03-23 | 2009-11-17 | Gebing Ronald A | Microarrayer with coaxial multiple punches |
| JP5172293B2 (en) * | 2007-11-26 | 2013-03-27 | 株式会社アルゴグラフィックス | Press die machining method, machining program, machining program generation program, and machining apparatus |
| CN101433929A (en) * | 2008-12-24 | 2009-05-20 | 哈尔滨工业大学 | Controllable accurate minitype stamping machines based on servo motor |
| CN101666859B (en) * | 2009-10-13 | 2012-05-30 | 上海理工大学 | Drive feeding mechanism of dual-linear motor |
| CN202169470U (en) * | 2011-06-09 | 2012-03-21 | 东莞市真永精密机械设备有限公司 | Piezoelectric processing device |
| CN103481106B (en) * | 2013-07-05 | 2016-06-22 | 哈尔滨工业大学 | A kind of piezoelectric ceramic type micro-feeding device of ultraprecise fly-cutting machining tool |
| CN203876251U (en) * | 2014-05-16 | 2014-10-15 | 苏州工业职业技术学院 | Double-station numerically controlled punching machine |
| CN204303757U (en) * | 2014-11-26 | 2015-04-29 | 广东工业大学 | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching |
-
2014
- 2014-11-26 CN CN201410695949.8A patent/CN104485290B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104485290A (en) | 2015-04-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104485290B (en) | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching | |
| CN104440344B (en) | Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor | |
| CN100391643C (en) | Die cushion mechanism, and apparatus and method for controlling the same | |
| US7739894B2 (en) | Die cushion controller | |
| CN101146630B (en) | Method and device for controlling and regulating servo-electric die cushions | |
| CN103316990A (en) | Micro-blanking automation device of pulsed laser driven flying sheet loading plate and method thereof | |
| CN203680808U (en) | Rapid prototyping three-directional moving device | |
| CN103318839A (en) | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method | |
| US20100064907A1 (en) | Die changing method of press machine and press machine | |
| US9310797B2 (en) | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | |
| US9114583B2 (en) | Plunger drive with load profile adaptation | |
| CN104440345A (en) | Heterogeneous motor common-stator multi-drive macro and micro integrated high-speed precise movement two-dimensional platform | |
| CN101279337A (en) | Large-sized bender bidirectional deflection compensation mechanism | |
| CN101214626A (en) | Thin wall micro-structure part grinding and polishing device | |
| CN109296895A (en) | A kind of X-Z long stroke high-speed scanning device | |
| CN205978318U (en) | Many nuts of ball screw unipolar linkage control device | |
| CN109940566B (en) | Planar linear displacement driving device and control method thereof | |
| CN204248537U (en) | Isomery motor is the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether | |
| CN101758631B (en) | Electromagnetic lead screw driving type precise-punching presser | |
| CN203269552U (en) | High-speed high-accuracy macro-micro platform based on piezoelectric ceramics | |
| CN204303757U (en) | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching | |
| CN211030459U (en) | Material increasing and decreasing composite machining machine head and equipment | |
| CN209431013U (en) | A kind of X-Z long stroke high-speed scanning device | |
| CN201619254U (en) | Electromagnetic screw rod drive type fine blanking press | |
| JP2021070041A (en) | Control device for processing machine for processing work-piece on die cushion |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |