CN104459534B - 一种振镜电机线性度的检测方法及装置 - Google Patents
一种振镜电机线性度的检测方法及装置 Download PDFInfo
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CN107907073A (zh) * | 2017-11-17 | 2018-04-13 | 北京长峰科威光电技术有限公司 | 一种基于ccd的摆镜线性度测试方法 |
CN108007390A (zh) * | 2017-11-17 | 2018-05-08 | 北京长峰科威光电技术有限公司 | 一种基于ccd的摆镜线性度测试*** |
CN109031243A (zh) * | 2018-08-15 | 2018-12-18 | 北京大汉正源科技有限公司 | 一种激光雷达发射装置及发射方法 |
CN109738795B (zh) * | 2018-12-09 | 2023-06-09 | 西安航天精密机电研究所 | 一种多级电机转子磁极检测装置 |
CN109827505B (zh) * | 2019-03-26 | 2020-05-19 | 北京航空航天大学 | 一种高精度激光扫描振镜位置传感器标定*** |
CN110412463A (zh) * | 2019-07-30 | 2019-11-05 | 中国船舶重工集团公司第七0七研究所 | 一种面向高速扫描电机的快速在线检测装置 |
CN117686186A (zh) * | 2022-09-05 | 2024-03-12 | 华为技术有限公司 | 振镜性能检测***、方法和存储介质 |
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CN2245515Y (zh) * | 1995-03-11 | 1997-01-22 | 武汉楚天激光(集团)股份有限公司 | 转镜式激光打标机 |
CN2776618Y (zh) * | 2004-12-10 | 2006-05-03 | 上海市激光技术研究所 | 一种带反馈控制的激光刻蚀机 |
CN1857845A (zh) * | 2006-05-25 | 2006-11-08 | 上海市激光技术研究所 | 一种控制振镜扫描速度的滴管带打孔装置 |
CN103063189A (zh) * | 2013-01-07 | 2013-04-24 | 中国科学院云南天文台 | 基于光杠杆的测角器件检定方法 |
CN103212880A (zh) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | 精密振镜校正*** |
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JP2004195473A (ja) * | 2002-12-16 | 2004-07-15 | Sumitomo Heavy Ind Ltd | レーザ加工方法及びレーザ加工装置 |
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CN2245515Y (zh) * | 1995-03-11 | 1997-01-22 | 武汉楚天激光(集团)股份有限公司 | 转镜式激光打标机 |
CN2776618Y (zh) * | 2004-12-10 | 2006-05-03 | 上海市激光技术研究所 | 一种带反馈控制的激光刻蚀机 |
CN1857845A (zh) * | 2006-05-25 | 2006-11-08 | 上海市激光技术研究所 | 一种控制振镜扫描速度的滴管带打孔装置 |
CN103212880A (zh) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | 精密振镜校正*** |
CN103063189A (zh) * | 2013-01-07 | 2013-04-24 | 中国科学院云南天文台 | 基于光杠杆的测角器件检定方法 |
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