CN104458825A - Oxygen gas sensitive element and detection method thereof - Google Patents
Oxygen gas sensitive element and detection method thereof Download PDFInfo
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- CN104458825A CN104458825A CN201410567062.0A CN201410567062A CN104458825A CN 104458825 A CN104458825 A CN 104458825A CN 201410567062 A CN201410567062 A CN 201410567062A CN 104458825 A CN104458825 A CN 104458825A
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Abstract
The invention discloses an oxygen gas sensitive element and a detection method thereof. The oxygen gas sensitive element is characterized in that a comb-shaped electrode is adopted as a substrate to be coated with a nano titanium oxide gas sensitive material, and the variation of the oxygen content is determined according to the variation of current or resistance under the radiation of ultraviolet light. The particle size of the nano titanium oxide is 5nm to 20nm. The comb-shaped electrode is an interdigital micro electrode; the line width of the comb-shaped electrode micro electrode is 5 to 200 micrometers, the clearance width is 5 to 200 micrometers, the line length of the electrode is 10mm to 20mm, and the pair number of the micro electrodes is 5 to 20. The ultraviolet light is the ultraviolet light of 345nm to 400nm. The invention has beneficial effects that the oxygen gas sensitive element which is portable, fast in response and wide in measurement range and the detection method of the oxygen content are provided.
Description
Technical field
The invention belongs to semiconductor gas sensor technical field, be specifically related to a kind of oxygen gas sensor and detection method thereof.
Background technology
The detection of oxygen content is significant for commercial production, animals and plants existence, environmental protection etc.In various aspects such as industry, agricultural, traffic, medical treatment, oxygen needs to detect maximum a kind of elements.By the mensuration to the oxygen content in emission gases in combustion process, the best ratio of components of regulation and control burning gases, can control the best combustion of heating furnace, internal combustion engine etc., thus improves combustion thermal efficiency, save the energy, reduce heating furnace smoke evacuation, vehicle exhaust to the pollution of environment.The assay method of oxygen content mainly contains chemical capacity method, magnet and oxide analysing method, zirconia concentration cell method, electrochemical process, vapor-phase chromatography etc.These methods have their own characteristics each, and also have respective limitation.As most widely used zirconia concentration cell method, although the response time is short, measurement range is wide, must at high temperature use, working temperature 600-1400 DEG C, can't have the existence of reducing impurity gas.Though vapor-phase chromatography is highly sensitive, antijamming capability is strong, and detection speed is low, is not easy to carry and Site Detection.
Exploitation is a kind of portable, and response is fast, and the wide small oxygen gas sensor of measurement range is significant.The quick detection of a lot of gas all adopts semiconductor gas sensor, mainly because semiconductor gas sensor have cheap, react fast, highly sensitive, Site Detection, the advantage such as easy to use.But for oxygen, also there is no direct semiconductor gas sensor at present.
Summary of the invention
The object of the invention is to provide a kind of portable, and response is fast, the oxygen gas sensor that measurement range is wide and detection method thereof.
For achieving the above object, adopt technical scheme as follows:
A kind of oxygen gas sensor, is taken comb electrode as substrate coated with nano titanium dioxide gas sensitive, and under ultraviolet lighting, is measured the change of oxygen content by electric current or resistance variations.
By such scheme, described nano-titanium oxide particle diameter is 5-20nm.
By such scheme, described comb electrode is interdigitation microelectrode; Described comb electrode microelectrode live width 5 ~ 200 μm, relief width 5 ~ 200 μm, electrode line length 10-20mm, microelectrode logarithm 5-20 couple.
By such scheme, described ultraviolet light is 345-400nm ultraviolet light.
A kind of oxygen detection method, comprises the following steps:
Coated with nano titanium dioxide gas sensitive in comb electrode substrate, with wavelength 345-400nm ultraviolet light for excitaton source, measures oxygen content change by the change of electric current or resistance.
By such scheme, described nano-titanium oxide particle diameter is 5-20nm.
By such scheme, described comb electrode is interdigitation microelectrode; Described comb electrode microelectrode live width 5 ~ 200 μm, relief width 5 ~ 200 μm, electrode line length 10-20mm, microelectrode logarithm 5-20 couple.
Under the present invention proposes a kind of new ultraviolet lighting, with TiO
2the mode of semiconductor resistor change detects oxygen content in gas.This gas sensor can use below room temperature to 150 DEG C, only to oxygen, water vapor sensitive, to other gases without response.Gas needs dry process before entering gas sensor, under ultraviolet lighting, and semiconductor TiO
2layer produces a large amount of electron-hole pairs, and the increase of charge carrier makes gas sensor have higher electric current (or lower resistance), under being in oxygenous environment, and TiO
2surface can adsorption of oxygen be combined with light induced electron and form negative oxygen ion thus at TiO
2nano grain surface forms the electronegative barrier layer of one deck, stops the motion of charge carrier, thus the resistance of gas sensitive is increased, and the electric current of element reduces.The increase of gas sensitive resistance and the proportional relation of the content of oxygen, oxygen content is higher, and resistance increase is larger.High temperature can reduce oxygen at TiO
2the adsorbance on surface, gas sensor serviceability temperature must lower than 150 DEG C.
Beneficial effect of the present invention there are provided a kind of portable, and response is fast, the wide oxygen gas sensor of measurement range, and a kind of detection method of oxygen content.
Accompanying drawing explanation
Fig. 1: oxygen gas sensor fundamental diagram of the present invention.
Wherein, 1-uviol lamp; 2-quartz ampoule; 3-plane gas sensor; 4-goes between; 5-resistance measurement unit; 6-air inlet; 7-gives vent to anger.
Embodiment
Following examples explain technical scheme of the present invention further, but not as limiting the scope of the invention.
A kind of oxygen gas sensor, is taken comb electrode as substrate coated with nano titanium dioxide gas sensitive, and under ultraviolet lighting, is measured the change of oxygen content by electric current or resistance variations.
With reference to shown in accompanying drawing 1, the plane gas sensor 3 being coated with nano calcium oxide being arranged in quartz ampoule 2,4 being connected with resistance measurement unit 5 by going between; Quartz ampoule 2 two ends have air intake opening 6 and gas outlet 7, can start working under the irradiation of uviol lamp 1.
Wherein, nano-titanium oxide particle diameter is 5-20nm.Ultraviolet light is 345-400nm ultraviolet light.
Optimally, interdigitation microelectrode is adopted; Described comb electrode microelectrode live width 5 ~ 200 μm, relief width 5 ~ 200 μm, electrode line length 10-20mm, microelectrode logarithm 5-20 couple.
Oxygen gas sensor the key technical indexes of the present invention is as follows:
Element testing scope: 0.1%-50% (gas volume ratio);
Element manipulation temperature: room temperature-150 DEG C;
Detection sensitivity: 10-500;
The element reaction time: be less than 60s;
Element release time: be less than 60s.
Embodiment 1
Weighing 1g average crystal grain particle diameter is the TiO of 10nm
2nano-powder is with absolute ethyl alcohol and a small amount of polyglycol furnishing pasty state, even application is in plane gold interdigital electrode (microelectrode live width 200 μm, relief width 200 μm, electrode line length 10mm, microelectrode logarithm 10) surface, then through 450 DEG C of annealing in process 1 hour, i.e. core---the gas sensing electrode sheet of obtained oxygen gas sensitive device.
The gas sensitive device of preparation is measured at light intensity 200mw/cm with CHI660 electrochemical workstation
2, under the UV-irradiation of wavelength 365nm, its electric current is with the change with oxygen content.Defining its sensitivity is S, S=Iv/Igas, and wherein Iv is gas sensitive device electric current in a vacuum, and Igas is device electric current in oxygen-containing gas.Method of testing is static volumetric method, and working temperature is room temperature, reaches 10 to the sensitivity of the oxygen of 1%, and response time and release time distinguish 60s and 110s, to other gases without response.
Embodiment 2:
Weighing 10g size of microcrystal is the TiO of 13nm
2nano-powder is with absolute ethyl alcohol and a small amount of polyglycol furnishing pasty state, even application is in plane gold interdigital electrode (microelectrode live width 100 μm, relief width 100 μm, electrode line length 10mm, microelectrode logarithm 5) surface, then through 450 DEG C of annealing in process 1 hour, i.e. core---the gas sensing electrode sheet of obtained oxygen gas sensitive device.
The gas sensitive device of preparation is measured at light intensity 500mw/cm with CHI660 electrochemical workstation
2, under the UV-irradiation of wavelength 365nm, its electric current is with the change with oxygen content.Defining its sensitivity is S, S=Iv/Igas, and wherein Iv is gas sensitive device electric current in a vacuum, and Igas is device electric current in oxygen-containing gas.Method of testing is static volumetric method, and working temperature is room temperature, reaches 8 to the sensitivity of the oxygen of 1%, and response time and release time distinguish 60s and 100s, to other gases without response.
Claims (7)
1. an oxygen gas sensor, be is characterized in that taking comb electrode as substrate coated with nano titanium dioxide gas sensitive, and under ultraviolet lighting, is measured the change of oxygen content by electric current or resistance variations.
2. oxygen gas sensor as claimed in claim 1, is characterized in that described nano-titanium oxide particle diameter is 5-20nm.
3. oxygen gas sensor as claimed in claim 1, is characterized in that described comb electrode is interdigitation microelectrode; Described comb electrode microelectrode live width 5 ~ 200 μm, relief width 5 ~ 200 μm, electrode line length 10-20mm, microelectrode logarithm 5-20 couple.
4. oxygen gas sensor as claimed in claim 1, is characterized in that described ultraviolet light is 345-400nm ultraviolet light.
5. an oxygen detection method, is characterized in that comprising the following steps:
Coated with nano titanium dioxide gas sensitive in comb electrode substrate, with wavelength 345-400nm ultraviolet light for excitaton source, measures oxygen content change by the change of electric current or resistance.
6. oxygen detection method as claimed in claim 5, is characterized in that described nano-titanium oxide particle diameter is 5-20nm.
7. oxygen detection method as claimed in claim 5, is characterized in that described comb electrode is interdigitation microelectrode; Described comb electrode microelectrode live width 5 ~ 200 μm, relief width 5 ~ 200 μm, electrode line length 10-20mm, microelectrode logarithm 5-20 couple.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254417A (en) * | 2018-01-04 | 2018-07-06 | 广东美的制冷设备有限公司 | Air detecting device, Detection of Air Quality method and computer readable storage medium |
| CN108289205A (en) * | 2018-02-09 | 2018-07-17 | 唐堂 | A kind of active data information acquisition system of mimic photosynthesis |
| CN111624236A (en) * | 2020-01-14 | 2020-09-04 | 黄辉 | Semiconductor film gas sensor and preparation method thereof |
| CN114965651A (en) * | 2022-05-19 | 2022-08-30 | 湖北大学 | ZnO-based methane sensor and preparation method and application thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254417A (en) * | 2018-01-04 | 2018-07-06 | 广东美的制冷设备有限公司 | Air detecting device, Detection of Air Quality method and computer readable storage medium |
| CN108289205A (en) * | 2018-02-09 | 2018-07-17 | 唐堂 | A kind of active data information acquisition system of mimic photosynthesis |
| CN111624236A (en) * | 2020-01-14 | 2020-09-04 | 黄辉 | Semiconductor film gas sensor and preparation method thereof |
| CN111624236B (en) * | 2020-01-14 | 2023-12-26 | 黄辉 | Semiconductor film gas sensor and preparation method thereof |
| CN114965651A (en) * | 2022-05-19 | 2022-08-30 | 湖北大学 | ZnO-based methane sensor and preparation method and application thereof |
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