CN104394755B - The ophthalmology Wavefront sensor operated in parallel sampling and lock-in detection pattern - Google Patents

Abstract

One embodiment of the present of invention is a kind of is used together with ophthalmic microscope to provide the ophthalmology Wavefront sensor of the test constantly of ophthalmic refractive state.Wavefront sensor by by the pulsation of light source with being operated for detecting multiple position sensor device/detectors of the centroid position before sampled wavelet synchronously with parallel sampling and locking mode.Other embodiments include the light beam scanner sampled to the selected portion of wavefront and realtime graphic sensor and tracking deflector.

Description

The ophthalmology Wavefront sensor operated in parallel sampling and lock-in detection pattern

Related application

This application claims what is submitted on April 30th, 2012 entitled " to be operated in the eye under parallel sampling and lock-in detection pattern Section's Wavefront sensor (Ophthalmic Wavefront Sensor Operating in Parallel Sampling and Lock-In Detection Mode) " U.S. Patent application 13/459,914 priority, April 30 in 2012 submit Shen Please 13/459,914 be entitled " real-time Wavefront sensor (A Large of a kind of big power range that August in 2011 is submitted on the 4th Diopter Range Real Time Wavefront Sensor) " U.S. Patent application 13/198,442 part continue Application, the application 13/198,442 that August in 2011 is submitted on the 4th are that submit on May 28th, 2010 entitled " utilizes programming Control Adaptive order Wavefront sensor (Adaptive Sequential Wavefront Sensor With Programmed Control the part continuation application of S/N 12/790,301) ", the S/N 12/790,301 that on May 28th, 2010 submits are Entitled " adaptive order Wavefront sensor (the Adaptive Sequential Wavefront submitted on June 12nd, 2007 Sensor S/N 11/761,890) ", be now the United States Patent (USP) No.7,815,310 authorized on October 19th, 2010 application Division, the S/N 11/761,890 that on June 12nd, 2007 submits be submit on January 20th, 2006 it is entitled " order wavefront pass The S/N 11/335,980 of sensor (Sequential Wavefront Sensor) ", it is to authorize on November 4th, 2008 now United States Patent (USP) No.7,445,335 part continuation application and apply for that S/N 11/335,980 is equally to carry on June 6th, 2011 Entitled " compact wavefront sensor module and its attached or integrated (the A Compact Wavefront with ophthalmological instrument handed over Sensor Module and Its Attachment to or Integration with an Ophthalmic Instrument the part continuation application of S/N 13/154,293) ".

Invention field

One or more embodiments of the invention relate generally to for determining the refractive status of eyes and the ripple of wave front aberration Front sensor.Specifically, the present invention is refractive status for eyes during determining ophthalmologic operation and the device of wave front aberration.

Background of invention

Wavefront sensor be for measure the equipment of the shape of the wavefront of light (see, e.g., US4141652 and US5164578).In most cases, Wavefront sensor measurement wavefront and reference wavefront or preferable wavefront (such as plane wave Before) deviation.Wavefront sensor can be used to measure the low order and higher order aberratons two of various optical imaging systems (such as human eye) Person (see, for example,：US6595642, J.Liang et al. (1994) " Objective measurement of the wave aberrations of the human eye with the use of a Hartmann–Shack wave-front Sensor (utilizing objective measurement of the Hartmann-Shack Wavefront sensors to the wave aberration of human eye) ", J.Opt.Soc.Am.A 11,1949–1957、T.Dave(2004)“Wavefront aberrometry Part 1:Current theories and Concepts (wave-front optical aberration measurement parts 1：Current theoretical and concept)" Optometry Today, on November 19th, 2004, the 41-45 pages).In addition, Wavefront sensor, which can be used in, wherein can be used such as optical wavefront compensation equipment (such as distorting lens) Come in real time measure with the adaptive optics of the wavefront of compensating distortion (see, for example, the U.S.http://patft.uspto.gov/ netacgi/nph-ParserSect1=PTO1＆Sect2=HITOFF＆d=PA LL＆p=1＆u=%2Fnetahtml% 2FPTO%2Fsrchnum.htm＆r=1＆f=G＆l=50＆s1=68 90076.PN.＆OS=PN/6890076＆RS=PN/ 6890076-h0#h0 http://patft.uspto.gov/netacgi/nph-ParserSect1=PTO1＆Sect2= HITOFF＆d=PALL＆p=1＆u=%2Fnetahtml%2FPTO%2Fsrchnum.htm＆r=1＆ f=G＆l=50＆s1 =6890076.PN.＆OS=PN/6890076＆RS=PN/6890076-h2#h26890076th, US6910770 and US6964480).As the result of such compensation, clearly image can be obtained (see, for example, US5777719).

Term " Phakic eyes " refers to including the eyes of its natural lens, and term " aphacia eyes " refers to Be remove its natural lens eyes and term " pseudo- phakic eyes " refer to implanting the eyes of intraocular lens. Currently, it is designed to for Phakic or pseudo- phakic eyes, most of aberrated wavefront sensors for being used to measure human eye Only cover the limited power range that about -20D arrives+20D.In addition, they are also devised to work when measuring eyes wavefront In relatively dark environment.

, it is necessary to know the refractive status of the eyes when operation is carried out to cause during the ophthalmologic operation of dioptric is influenceed Continuous feedback may be provided to surgeon (see, for example,：US6793654, US7883505 and US7988291).Wherein The natural lens of eyes are synthesized in the cataract operation of crystalline lens replacement and are particularly present such case.In this case, Surgeon is partial to know the refractive status in Phakic, aphacia and the eyes in the pseudo- crystalline lens stage to select Crystalline lens is synthesized, to confirm after natural lens are removed, whether correct, and further acknowledge if synthesizing lenticular refractive power Facing after synthesis crystalline lens is implanted or other expected dioptric optical values.Therefore, it is necessary to which Wavefront sensor covering is larger Diopter measurement scope and also allow surgeon not only in Phakic and pseudo- crystalline lens state but also in aphacia Under state, with the refractive status of defined precision measurement eyes.

Equally during ophthalmologic operation, due to utilizing unpolarized broadband (white) optical illumination eye from surgery microscope Eyeball, thus surgeon can see patient's eye by microscope.This illumination light is also directed into the eyes of patient, from view Film scatters and is back to surgery microscope.Its expected wavefront survey returned is received coupled to the Wavefront sensor of surgery microscope Measure both light and the broadband illumination from surgery microscope.Microscope illumination light source is typically not configured as producing at retina Generation discloses the sufficiently small efficient light sources needed for the wavefront of the refractive status of patient.Due to this, received by Wavefront sensor Any illumination light from surgery microscope can cause the incorrect information of the refractive status on patient.Therefore, it is also desirable to The ophthalmology Wavefront sensor not influenceed by the illumination light from surgery microscope.

For the commercial commercially available Wavefront sensor of cataract operation, such as from WaveTec Vision's Wavefront analyzer (see, for example, US6736510) does not provide continuous feedback, covered in power range in ORange (orange) art Cover limited and also disturbed by the illumination light from surgery microscope.In fact, in order to utilize ORange (orange) ripple Front sensor obtains accurate enough and accurate dioptrometry, and surgeon must suspend surgical procedure, close surgery microscope Illumination light and have to catch more frame data, this causes extra time up to a few minutes to be added to cataract dioptric hand On the art time.

The content of the invention

One embodiment of the present of invention is related to ophthalmology Wavefront sensor, including：Light source, it is configured to receive and is shaken with reference frequency The light beam that the reference signal and generation swung/pulsed are formed by the light pulse under reference frequency；Beam steering elements, it is configured in the future Formed from the beam emissions of light source into patient's eye and wherein from a part for the light beam of patient's eye return with reference to frequency Light pulse under rate is (object wavefront) before the object wave of form；Optical wavefront relay system, it is configured to along light beam Path will relay to wavefront image plane before the object wave from the anterior object plane positioned at patient's eye, and the beam path can will be The incident wavefront relaying light beam at object plane with big power range is guided to wavefront image plane；High frequency response position senses Equipment array, each of which position sensor device be configured to detection image spot barycenter relative to reference position amount of deflection simultaneously The measurement signal of the output indication amount of deflection；Sampling element array before wavelet, it is arranged on high frequency response position sensor device array Before and it is located substantially at wavefront image plane, each sampling element before its neutron deficiency in sampling element array is configured to Sample before the wavelet of repeated wavefront and by sampled wavelet prefocusing into high frequency response position sensor device array On corresponding high frequency response position sensor device, before its neutron deficiency sampling element be physically spaced apart each other in this way from And only it is focused on corresponding to sampling element before the wavelet before causing each sampled wavelet before high power range object wave Corresponding high frequency response position sensor device on；And electronic frequency sensitive detection system, be coupled into receive reference signal and Measurement signal, wherein electronic frequency sensitive detection system are configured to only indicate the frequency point of the measurement signal under about reference frequency All noise signals being sized such that under the frequency different from reference frequency of amount, such as 1/f noise can significantly be pressed down System.

One feature is relayed using the wavefront of two cascades, wherein the second relaying has Fourier transform plane, wherein When the wavefront from eyes is changing on big power range, wavefront relaying light beam is set to be located in particular space volume.Light beam Scanner/deflector is arranged at the Fourier transform plane of the second relaying with angularly scanning light beam so that final Wavefront image plane at repeated wavefront can laterally be moved relative to the array of sampling element before multiple wavelets.Accordingly The PSD of quantity is arranged on behind wavefront sampling element with the locking synchronous with the light-pulse generator for generating the wavefront from eyes Detection pattern operates.Using being moved before lateral wave, any part of repeated wavefront can be sampled and the sky of wavefront sampling Between resolution ratio can also neatly be controlled.

The another feature used during ophthalmologic operation is for generating the output of the light source of wavefront at least two states Between change, wherein the wavefront returned from patient's eye is detected in " bright " state and " dark " state to allow refusal to come from except survey Measure the signal of the light outside light.

Another feature is some using multiple high speed PSD parallel detection wavefront, and the plurality of high speed PSD can be with The lock-in detection pattern of the light source synchronous under frequency more than 1/f noise scope is operated so that DC and low frequency ambient noise can It is actively filtered.

Another feature is to perform the parallel wavefront sampling of active.Active, parallel wavefront sampling element can be according to them Position, sampled aperture size, focal power and open/close state are controlled before wavelet.

Further feature by sampling element is spaced apart sufficiently wide raising diopter coverage so that Crosstalk is not present between wavefront sampling element on big refractive error measurement power range.In another example, activation is passed through The subset of sampling element and also only sampled by only enabling position sensor device/detector (PSD) of respective numbers before wavelet Each other well before separated certain amount of wavelet to avoid crosstalk.In another example, sampling element can before PSD and wavelet It is activated and their lengthwise position and/or their focal power is changed with the refractive status in response to patient respectively to cause Every PSD wavelet top rake sensitivity may be adjusted dynamically.In addition, PSD lateral attitude equally may be in response to patient's Refractive status is adjusted such that every PSD is positioned in optimal lateral position and sentences the centroid position response for providing optimization.

Further feature is using sequential scan or mobile whole wavefront so that sampling element and position before proper parallel wavelet When putting sensor device/detector (PSD) and being fixed in space, any part of incident wavefront can be sampled.On the other hand, scan Instrument/deflector tracking eyes simultaneously automatically adjust the mobile wavefront returned from patient's eye so that depending on pupil using mobile The dioptric optical value of hole size, position and the wavefront from eyes, only some desired parts of wavefront are (such as in patient s pupil 3~4mm diameter regions at center) it is sampled.

Further feature is notifying at once using measured ophthalmic refractive, in this sense, in any of refractive status Change and low delay be present between its report of instrument.This passes through the wave front aberration number that is averagely measured on the desired cycle According to and with desired renewal rate renewal be superimposed real-time eye image qualitatively and/or quantitative measurement result is realized.

Further feature provides the refractive error occurred during ophthalmologic operation and (such as moved in the natural lens of eyes Those errors removed but occurred before manually crystalline lens replaces it) big power range on accurate measurement.Can be with a variety of Mode realizes these accurate measurements.One example is design optics with by changing sampling element and position before wavelet on one's own initiative Put the distance between sensor device/detector or dynamically adjust spirit by changing the focal length of sub-wavefront focusing lens on one's own initiative The slope of sensitivity or wavelet top rake response curve.Another example is (such as focal length can using spherical diopter value offset component Become lens) dynamically offset the spherical diopter value of the wavefront at middle conjugate wavefront image plane.

Once following detailed descriptions of preferred embodiment are consulted with reference to respective drawings, for those skilled in the art Speech, these and other features and the advantage of exemplary embodiment will be obviously.Each of these features can be individually Or it is used in combination with any embodiment described herein.

Brief description

Fig. 1 shows the schematic diagram in the order Wavefront sensor disclosed in commonly assigned US7445335.

Fig. 2 shows the improved optical arrangement as disclosed in commonly assigned US20120026466.

Fig. 3 a show one embodiment of exemplary Wavefront sensor, wherein light-pulse generator and position sensor device/inspection Device array synchronization is surveyed to enable the sensor to parallel sampling and the work of lock-in detection pattern.

Fig. 3 b show the typical Shack-Hartmann wavefront with corresponding position sensor device/detector array The lenslet array of sensor and the maximum diopter measurement scope that can be realized without cross talk.

The exemplary of sampling element is matched somebody with somebody before Fig. 3 c show the wavelet with corresponding position sensor device/detector array The maximum diopter measurement scope put and can realized without cross talk.

Fig. 4 is the block diagram for an exemplary embodiment for showing lock-in detection amplifier.

Fig. 5 shows the example for moving or scanning before application to the lateral wave of the order of Fig. 3 a optical arrangement.

Fig. 6 shows another embodiment of Fig. 3 a Wavefront sensor, and wherein 8-f wavefront link deployment scans with small light beam Instrument is combined to be scanned with enabling the actual order wavefront in addition to the sampling of parallel wavefront and lock-in detection.

Fig. 7 shows the example for moving or scanning before application to the lateral wave of the order of Fig. 6 optical arrangement.

Fig. 8 shows the example being incorporated into fixed light source and eye image sensor in Fig. 6 configuration.

Fig. 9 shows the integrated example of presently disclosed Wavefront sensor and surgery microscope.

Figure 10 shows the integrated example of presently disclosed Wavefront sensor and slit lamp biomicroscope.

It is described in detail

It reference will now be made in detail to various exemplary embodiments shown in the accompanying drawings.Although it will be described in conjunction with the embodiments The present invention, it will be appreciated that being not intended to limit the present invention in any embodiment.On the contrary, it is intended to cover it may include The selection in spirit and scope of the invention, modification and the equivalence defined such as appended claims.In the following description, illustrate Many details are to provide the thorough understanding to various embodiments.However, in these specific details some or In the case of whole, it can also implement the present invention.In other cases, it is well-known processing operation be not described in detail with Exempt from unnecessarily to obscure the present invention.Further, occurring phrase example embodiment feeding each time and differing everywhere in the description Surely it is related to identical example embodiment.

The ophthalmology Wavefront sensor of most of prior arts for human eye wavefront measurement uses two-dimensional CCD or cmos image Sensor gathers for wavefront information.For example, typical Hartmann-Shack Wavefront sensors (see, for example,： US5777719,6199986 and 6530917) using two dimension lenslet array and two dimension CCD or cmos image sensor. Tscherning Wavefront sensors are (see, for example, Mrochen et al., " Principles of Tscherning Aberrometry (principle of Tscherning aberration measurements) ", " J of Refractive Surgery ", volume 16, September/ten The moon 2000) by the lattice array pattern projection of two dimension on retina and using two dimension CCD or cmos image sensor obtain from The two-dimentional dot pattern that eyes return is to extract wavefront information.Talbot Wavefront sensors are using crossed grating and are placed in crossed grating Extract wavefront information from the CCD at imaging plane or cmos image sensor (see, for example, US6781681).Talbot Moir é Wavefront sensors (see, for example, US6736510) using with the mutual anglec of rotation offset a pair of cross grating and CCD or cmos image sensor obtain the image of Moir é (More) pattern to extract wavefront information.Phase diversity (phase Diversity) Wavefront sensor (see, for example, US7554672 and US20090185132) uses diffractive lens element and two Vc CD or cmos image sensor obtain the image related to different diffraction level to extract wavefront information.

Be attributed to mass data by being collected needed for two-dimensional image sensor and by electronic data transfer line (such as USB cable) on clock rate and/or message transmission rate caused by frame rate on limitation, in all these existing skills The imaging sensor used in the wavefront sensor device of art only can be with relatively low frame rate (per second generally in 25 to 30 frames) Work and therefore sensitive to DC or low frequency ambient noise.Therefore, the Wavefront sensor of these prior arts normally only may operate at To reduce the noise from DC or low frequency background/ambient light in relatively dark environment.

In addition, the diopter measurement scope of these ophthalmology Wavefront sensors is generally limited in ± 20D, this is in very great Cheng Be attributed on degree it is compromise in the spacing or pitch of fixed grid wavefront sampling element, which determine inclination of wave front sensitivity, Wavefront diopter measurement scope and wavefront measurement spatial resolution.

Another Wavefront sensor technology based on laser beam light trace (see, for example, US6409345 and US6932475) Not absolute demand two-dimensional CCD or cmos image sensor extract for wavefront information.However, commercially available prod (comes from Tracey skills The iTrace of art) there is only ± 15D limited measurement range, and still need dark situation for wavefront measurement.

Commonly assigned US7445335, which is disclosed, sequentially moves whole wavefront only to allow the expectation of wavefront to partially pass through The order Wavefront sensor of wavefront sampled aperture.This Wavefront sensor is by using in the light source arteries and veins of wavefront of the generation from eyes It is dynamic and it is synchronously used into lock-in detection to refuse with high frequency response position sensor device/detector (such as quad detectors) DC noises or low frequency optics or electronic noise such as from bias light or electronic interferences.Therefore, this Wavefront sensor need not Dark situation is for wavefront measurement, and the illumination light for being extremely suitable for wherein surgery microscope is always maintained at the continuous of conducting state Real-time art in refractive surgery.Sequentially sample a wavefront and completely eliminated any potential cross-interference issue, this is thus provided The possibility of big wavefront measurement dynamic range.However, US7445335 optical arrangement is not reason for covering big power range Think, because it needs the light beam scanner with relatively large light beam interception area.Another commonly assigned United States Patent (USP) Shen Please (US20120026466) discloses the optical arrangement improved relative to US7445335.These improved configurations can allow to make With relatively small and commercial commercially available light beam scanner (such as MEMS scanners) big power range (reach ± The whole object beam from eyes is scanned on 30D), and therefore, or even the dioptric of the eyes under aphacia state can quilt It is adequately coated.Before neatly advanced wave, any part of wavefront can be sampled and therefore can also realize high-space resolution Rate.

It is restricted to the luminous energy that patient's eye can be transferred into preset time however, being attributed to eye-safe demand 's.Therefore, even with the pulsation and lock detecting method of light source to improve signal to noise ratio, returned but if wanting sampling from eyes Wavefront a large amount of space segments, wavefront measurement turnover rate can be limited.On the other hand, if it is desired to which there is the renewal of high wavefront measurement Rate, the maximum quantity of spatial sampling point can be limited.Therefore need further to improve this ripple being operated under lock-in detection pattern The performance of front sensor.

According to one or more embodiments of the invention, the image spot of multiple parallel wavefront sampling elements and respective numbers Point or facula position sensor device/detector (PSD) be combined, the position sensor device/detector with 1/f noise frequency The lock-in detection pattern that the pulsation of the light source under frequency more than scope is synchronous operates.There is every PSD sufficiently high frequency to ring Should be to cause DC or low frequency bias light generates that noise can be fallen by basic filtering and signal to noise ratio can be enhanced.

In addition to concurrently sampling wavefront, the physics spacing of parallel wavefront sampling element is designed to cause desired There is no crosstalk in ophthalmic refractive errors diopter coverage, in addition, in order to sample any part of wavefront or section, can also profit It is relative with the similar method as disclosed in commonly assigned patent US7445335 with patent application US20120026466 Before wavefront sampling element sequentially advanced wave.

Fig. 1 shows the schematic diagram in the order Wavefront sensor disclosed in commonly assigned US7445335.From light The arrow beam of light in source 134 is directed to the retina of eyes 138 by beam steering elements 136 (such as beam splitter).Leaving eye Object beam during eyeball with the retina from eyes of wavefront 102 is focused on by the first lens 104.Beam propagation passes through before object wave Polarization beam apparatus (PBS) 106, the polarization beam apparatus configures in this way：It penetrates the expectation of polarization direction and object beam Polarization direction alignment.As a result, linear polarization object beam will pass through PBS 106.Quarter-wave plate 108 is placed on After PBS 106, its fast axle is oriented such that light beam circularly polarized light beam occurs afterwards through quarter-wave plate 108.

The object beam for carrying the wavefront information from eyes is focused on the reflecting surface of inclined scanning mirror 112, should Scanning mirror 112 is installed on motor shaft 114.The object beam of scanned mirror reflection is changed to the inclination dependent on scanning mirror 112 The direction of the rotation position of angle and motor 114.Light beam through reflection is still circular polarization, but the circular polarization direction of rotation will Become to turn to the right hand or from the right hand become from left hand and turn to left hand.Therefore, once passing through a quarter for the second time on its return path Wave plate 108, light beam are changed into linear polarization again, but its polarization direction rotate to the polarization direction relative to original incident object beam and Say orthogonal direction.Therefore, at polarization beam apparatus 106, the object beam of return will be reflected onto left side mostly, in Fig. 1 Shown in dotted ray.

Second lens 116, which are placed in, is close to PBS 106 left side to calibrate the object beam of reflection and in wavefront thieff hatch The duplicate (124) for being originally inputted wavefront is produced at the plane in footpath 118.Due to the inclination of scanning mirror, the quilt of wavefront 124 replicated Laterally move.Aperture 118 is placed in before wavelet and replicated before (sub-wavefront) condenser lens 120 with selection Wavefront 124 fraction.Sub-wavefront focusing lens 120 are by selected wavelet prefocusing in position sensor device/detector On 122, the position sensor device/detector 122 is used for determining the focal beam spot of middle generation before the wavelet of sequential selection Barycenter.By electric rotating machine 114 and change the angle of inclination of scanning mirror 112, can control the radial direction and orientation of replicated wavefront Angle moves so that any part of optional replicated wavefront passes through aperture 118 in a sequential manner.As a result, original incident light The whole wavefront of beam can be characterized, as in the case of the Hartmann-Shack Wavefront sensors of standard, difference The barycenter being in before each wavelet is obtained in a sequential manner rather than in a parallel fashion now.

As shown in fig. 1, by the speed for controlling the angle of inclination of scanning mirror and making light source pulse, the wavefront can be sampled Any part.In addition, Electronic Control and detecting system can make light source 134, motor 114, wavefront sampled aperture 118 (if its Equally be active) and the operation of position sensing detector 122 it is synchronous to enable lock-in detection.Therefore, noise can be improved Than and the noise that is generated of DC or low frequency bias light can be filtered.

However, because wavefront movement is by the optical Fourier transform plane of 4-f optical wavefront relay systems Light beam scanner complete, thus when the refractive error dioptric optical value of patient's eye is larger, the thing at Fourier transform plane The size of light beam also will be relatively large.This means in order to cover larger power range, light beam scanner needs relatively large Light beam interception area.In the case of cataract operation, the operating distance between eyes and input port is larger, required light Beam scanning instrument size is unpractical for cost and commercial applicability.

Fig. 2 shows another optical arrangement disclosed in commonly assigned U.S. Patent application US20120026466, should Optical arrangement is using respectively with the first and second Fourier transform plane A and C and respectively with the first and second image plane B With the 4-f relayings of D two cascades.The use of the 4-f wavefront relaying or a 8-f wavefront relaying of two cascades is attributed to the fact that, is led to Cross at or near the second Fourier transform plane C angularly scan wavefront light beam can realize sequential lateral wavefront move, its Width of light beam can be maintained at certain physical size scope (in desired big refractive error diopter measurement scope) before medium wave It is interior to cause object beam fully to be intercepted by relatively small light beam scanner 212.

As shown in Figure 2, due to the first lens 204 and the focus difference of the second lens 216, after being relayed before first wave, At wavefront image plane B, object light beam width is reduced, although beam divergence or convergence increase.2nd 4-f wavefront relaying includes 3rd lens 240 and the 4th lens 242, each with relatively large focal power or relatively short focal length and relatively large Numerical aperture footpath (NA) or light beam receive cone angle.Width of light beam at second Fourier transform plane C is now relatively small.Pass through Angularly scan the light beam at the second Fourier transform plane C, the wavefront image at the second wavefront image plane D can be by laterally It is mobile.Wavefront through laterally moving can be sampled and by wavelet by wavefront sampled aperture 218 at the second wavefront image plane D Prefocusing lens 220 are focused on position sensor device/detector (PSD) 222.

Similar to the embodiment shown in Fig. 1, by controlling the light beam scanner at the second Fourier transform plane C 212 and the time of the pulsation of light source is set, any part of the wavefront can be sampled.Equally, Electronic Control and detecting system can make Light source 234, scanner 212, aperture 218 (if it is variable aperture) and PSD 222 operation are synchronous to enable locking inspection Survey to improve signal to noise ratio and filter out noise by DC or low frequency background photogenerated.

Electronic control system 236 with user control interface 238 be coupled to light beam scanner 212 and variable aperture with Allow to control these elements to change scan pattern or aperture size.In other embodiments, electronic control system 236 can be by coupling It is bonded to such as the following other controlled members being more fully described.User interface 238 can be button on instrument, on instrument or coupling The form for the graphic user interface (GUI) being bonded on the computer of electronic control system 236.

Pay attention in fig 1 and 2, an only wavefront sampling element and only one position sensor device, and with pure Sequential system carries out wavefront sampling.In this case, the only one part of whole wavefront is sampled simultaneously therefore profit not yet in effect With the luminous energy returned from eyes.

Fig. 3 a show example, wherein from (such as super spoke of light source 334 being operated under pulse and/or pulse string mode Penetrate diode or SLD) light beam be launched into patient's eye via beam steering elements 306 (such as polarization beam apparatus (PBS)) In with form relatively small Image Speckle on the retina in order to generate from eyes return wavefront.Beam steering elements 306 There should be sufficiently large light beam interception size to ensure to carry from eyes in desired detecting eye diopter measurement range The object beam of wavefront information is intercepted without by the marginal interference of beam steering elements completely.

It can help to suppress anti-from other undesirable optical interfaces (such as cornea and crystalline lenses) of eyes using PBS The interference for the light penetrated or scattered.Because relatively narrow input SLD light beams the first polarization direction linear polarization and from Cornea and crystalline lenses reflect or the light of scattering is also mostly in the first polarization direction linear polarization, and what retina was scattered Light has the big component polarized on the direction orthogonal with the first polarization direction.Therefore PBS uses as beam steering elements 306 Make towards eyes propagate SLD light beams the polarizer and also serve as only by from retina return in the second cross-polarization side The analyzer of upward light beam.

Except needing to filter out specific polarization component, the wavefront for leaving eyes is also required to be relayed to wavefront sampling as flat Face.In fig. 3 a, this is realized using the 4-f wavefront relay optical configuration for including the first lens 304 and the second lens 316.In ripple At preceding image plane B, including sampled aperture annular array 318 and corresponding sub-wavefront focusing lens annular array before such as wavelet Sampling element array concurrently samples and focused on some of the wavefront of relaying at wavefront image plane B before 320 wavelet.Phase The position sensor device answered/detector (PSD) array 322 be (such as transversal effect position sensing detector or quad detectors Annular array) it is arranged on before wavelet behind sampling element array for detecting the image spot before each sampled wavelet Point centroid position.

In order to show the details of sampling element and position sensor device/detector (PSD) before wavelet, we are in fig. 3 a The amplification illustration with centroid detection stage optical element is sampled including wavefront, there is sampled aperture annular array 318 before its neutron deficiency Meaning separates with sub-wavefront focusing lens annular array 320, although actually they more likely contact or close to each other.Amplifying In accompanying drawing, PSD annular array 322 is arranged on the back focal plane of sub-wavefront focusing lens 320 nearby with when wavefront is plane Clearly focusedimage spot relatively is produced on PSD, however, this need not have to be such situation, because PSD annular array 322 may be disposed at before or after the focal plane of sub-wavefront focusing lens 320.In the exemplary embodiment, by from Sampled around the annulus of the wavefront of eyes, it may be determined that the sphere and cylindricalical error and cylindrical axes of eyes.However, simultaneously The pattern of sampling element can be other forms before capable wavelet, such as the linear array form of spoke pattern or two dimension.

Fig. 3 a show lock-in amplifier 343, are coupled into and receive the output signal from PSD arrays 322, for noise Suppress.Display 345 can be coupled to the electronic system 336 for the output for receiving lock-in amplifier 343.Described below with reference to Fig. 4 The operation of lock-in amplifier 343.Electronic system 336 has disposal ability to handle the output of lock-in amplifier 343, including application Algorithm with determine dioptric, aberration and it is other diagnosis or clinical factor.Display 345 can be implemented as associated with surgery microscope Head-up display or large screen display or back throwing type display or the part as personal computer or work station.

Pay attention to compared with the wavefront sensor system of prior art, presently described exemplary embodiment has when with one Kind mode or another way make it be favourable multiple features for refractive eye surgery when combining.First, sampled before wavelet It is that element is a physically separate so that density be generally less than be used in typical Shack-Hartmann Wavefront sensors in mark The density of accurate lenslet array.This be more than by the distance or lenslet pitch of lenslet to lenslet or by The analog value that the diameter of each lenslet is more than the lenslet being used in typical Shack-Hartmann Wavefront sensors comes in fact It is existing.Alternatively, the focal length of the lenslet of lenslet array can be made to be shorter than used in typical Shack-Hartmann Wavefront sensors In lenslet focal length.As a result, sufficiently large diopter measurement scope can be covered without crosstalk, i.e. make sampled Wavelet before Image Speckle fall on the PSD of non-corresponding.

In order to illustrate this point, Fig. 3 b are shown with the typical of corresponding position sensor device/detector array The lenslet array of Shack-Hartmann Wavefront sensors and the hair of maximum diopter measurement scope when showing no crosstalk What has been given birth to.In current description, term " crosstalk " refers to wherein being intended to be focused on corresponding detector by lenslet Part or all of light beam be focused onto situation on adjacent detector.

The lenslet array 342 of typical Shack-Hartmann Wavefront sensors is used without any with gap close to that The lenslet of this arrangement is densely clogged.In the case, per unit area has substantial amounts of lenslet and for measuring ripple Preceding sampling density is very high.Assuming that the wavefront to be measured is 344 before sphere convergent wave as shown, then can measure without cross talk Maximum average wavelet top rake θ_mIt will be limited by the radius r and focal length f of each lenslet, wherein θ_m=tan^-1[r/f].Figure 2 show the curvature of wavefront for big positive or negative dioptric optical value increase.Therefore θ_mShow the diopter measurement value range of maximum.

In fig 3b, will be by before the wavelet that the angular spread of wavelet top rake angle be present and sampled by Far Left lenslet This Far Left lenslet is focused on to form the hot spot at the right margin for falling the PSD1 between PSD1 and PSD2.As can be seen, Any further increase in convergence or absolute dioptric optical value before Convergent Laser Beam will cause angle of inclination more than θ_m And cause to be fallen by the hot spot that Far Left lenslet samples and entering PSD2 more than the border between PSD1 and PSD2, so as to cause Crosstalk.In fact, due to being to assemble before sampled wavelet, thus focused spot is actually before focal plane 346, and And therefore the Image Speckle on corresponding focal plane 346 by it is wider rather than standard focus in like that, therefore wavelet top rake survey Amount scope is slightly smaller than θ_m.Exist for rightmost lenslet and two position sensor device/detector PSD8 with PSD7 similar Situation.

On the other hand, if wavefront is spherical divergence wavefront, the Image Speckle clearly focused on is actually generally by position Behind focal plane 346, thus the hot spot on focal plane 346 also by it is wider rather than in standard focuses on like that, and therefore Wavelet top rake measurement range will be slightly smaller than θ again_m.If wavefront be not sphere and tilted with column and/or astigmatism and/ Or even other higher order aberratons, the then local wavelet top rake sampled by any lenslet can exceed angle of bank measurement scope and limit θ_m。

However, if sampling element is not accumulated closely but is intelligently distributed suitable control two simultaneously before parallel wavelet Center to center between individual element, it is likely that intentionally avoid crosstalk and also realize that some is desired sufficiently large Diopter measurement scope.

Fig. 3 c show showing for the arrangement of sampling element before the wavelet with corresponding position sensor device/detector array Example and shows the maximum diopter measurement scope that can increase no crosstalk at property embodiment.In shown example, each Sampling element includes lenslet 352 and the aperture 359 before corresponding lenslet before wavelet.In other words, patterning The sampling element array before corresponding lenslet array 352 is combined for use as parallel wavelet of array of apertures plate 358.It is assuming that every The focal length of individual lenslet is identical with shown in Fig. 3 b and is represented by identical f, but now from the center of a lenslet D as shown to the border between two sub- wavefront sampling elements or the distance at midpoint, then the maximum that can be measured without cross talk Average wavelet top rake will be β now_m=tan^-1[d/f].Because d is more than r, thus local wavelet top rake measurement range Therefore increase.In fact, Fig. 3 c show the spheric wave front 354 more assembled, the spheric wave front 354 is described relative to Fig. 3 b Wavefront with by β_m=tan^-1The limitation that [d/f] is forced is sampled.Obviously, the convergence in Fig. 3 c that can be sampled without cross talk The absolute dioptric optical value of wavefront 344 of the absolute dioptric optical value of spheric wave front 354 than Fig. 3 b is high.

The width of PSD in Fig. 3 c is increased compared to the width of the PSD in Fig. 3 b, i.e. d is more than r.Using with The broader PSD that spacing is bigger between PSD substitutes narrow PSD to be in order to ensure with the increase of wavelet top rake, falling corresponding PSD on hot spot can be captured by corresponding PSD.Otherwise, if PSD have identical reduced size as shown in figure 3b but It is spaced apart, then hot spot falls in the space between PSD photosensitive region before the increase of wavelet top rake can cause wavelet.Change Yan Zhi, hot spot will not be captured by PSD to produce electric signal.

Equally in figure 3 c, lenslet has the diameter bigger compared to the diameter of the lenslet in Fig. 3 b, but has phase Same focal length.The larger lenslet with identical focal length is designed with advantage, i.e., when such lenslet and variable aperture When being combined, changing the size in aperture can above carry in the size before the wavelet that control is sampled in larger sampling size range For flexibility.For example, the refractive error measurement of the determination for only relating to sphere and cylindricalical angle value and cylindrical axes, larger Wavelet before sampling size can provide equalization and reduce data processing burden benefit.In other words, such as generally will be by marking The high spatial wavefront sampling density that accurate Shack-Hartmann Wavefront sensors provide can be for that class dioptrometry It is still too late and data capture, transmission and processing time can be increased considerably, therefore slow down the operation of Wavefront sensor And make it that it is too slow for the application of real-time refractive surgery.

On the other hand, if only small area cornea needs to use such as LASIK systems to be performed the operation, then on cornea Laser ablation spot size be generally much less than Shack-Hartmann Wavefront sensors typical lenslet size.At this In the case of kind, the aperture that correspondingly can be described in Fig. 3 c is sufficiently small and wavefront as will be discussed can be used to scan To allow the non-average wavefront sensing on ommatidium pupil region so that can realize non-for higher order wavefront aberrations measurement Often high measurement accuracy.In fact, in some exemplary embodiments so that array of apertures is active, in this sense, hole Footpath size can be actively controlled.It should be noted that patterning array of apertures also may be disposed at behind patterning lenslet array And because its function can be provided by the diameter of lenslet, thus it is not absolutely required.

In addition, in view of calculate θ_mFormula, it can be seen that the wavelet top rake measurement range θ without crosstalk_mSelection can also be passed through Smaller focal length value f increases.In this case, each PSD size smaller can be surveyed with still providing wavelet top rake Measure scope.However, inclination measurement sensitivity will also become grain, because for the identical change amount in wavelet top rake, will on PSD Less spot displacement be present, as known to those skilled in the art.

In order to provide more flexibilities, some exemplary embodiments are used with pancratic lenslet array or made With the lenslet array of some subgroups of the lenslet array with different focal.The lenslet subgroup of more long-focus can provide more The lenslet subgroup of good sensitivity and more short focus can provide larger wavelet top rake measurement dynamic range.It may be present two Or three or more lenslet subgroups and it is correspondingly disposed in away from two groups at lenslet different distance or three groups or more Group position sensing detector.

Existing Wavefront sensor in vision correcting surgery it is notable the problem of be background optical or electronics be present The wavefront that detection returns from eyes under noise.The example of problematic background noise component is to incide the ambient light on detector With 1/f noise and other radiation or conduction the electronic noise generated by detector itself.These background noise components exist Significant amplitude is respectively provided with the frame rate of two-dimensional CCD/cmos image sensor of standard.

In some exemplary embodiments, for the light source before object wave of the generation from eyes with pulse and/or train of pulse Pattern works.Pulse recurrence rate or frequency are higher than the typical frame rate of two-dimensional CCD/cmos image sensor of standard.For example, The pulse rate of light source in this exemplary embodiment may be at or higher than kHz scopes.For CCD/CMOS imaging sensors, Frame rate is typically that about 25 to 30 frames are per second.The PSD of the disclosure is two-dimensional position sensor device/detector (PSD), all With sufficiently high temporal frequency respond with allow they with the pulsed light under the frequency higher than 1/f noise frequency range The synchronous lock-in detection pattern operation in source.Electronic Control and detecting system be at least coupled to light source and PSD arrays and by with It is set to lock phase light source and parallel PSD operation.If sampled aperture is active, then Electronic Control and detecting system are also Sampled aperture array can be coupled to before variable wavelet further to control sampled aperture size.

Fig. 4 is the block diagram for an exemplary embodiment for showing lock-in detection amplifier 400.Paying attention to phase sensitivity lock-in detection is For recover can by the small-signal flooded much larger than the noise of signal interested well known to a person skilled in the art powerful Synchronous Detection.Frequency mixer 496 has the first input of the output for being coupled to preamplifier 495, the preamplifier 495 have the signal from PSD A.C. for being coupled to its input.Frequency mixer 496, which has, is coupled to the defeated of phaselocked loop 497 The second input gone out, the reference signal that the phaselocked loop 497 is locked to driving SLD and makes SLD pulse.Input signal passes through mixing Device 496 is mixed (multiplication) to form mixer output signal.Frequency mixer 496 output through low pass filter 498 and Amplified by output amplifier 499 to form the output of lock-in detection amplifier 400.

The operation of lock-in detection amplifier will now be described.495 input signal includes reference from PSD to preamplifier Component under frequency, the deflection before the wavelet that component instruction is measured by position sensor detector.The amplitude of this component is lock The desired output of regular inspection amplifier.Input signal from PSD also includes low frequency and (such as ambient light and carrys out self-detector 1/f noise frequency) under noise signal.

The input of phaselocked loop (PLL) is the signal for having only under reference frequency notable amplitude.

The amplitude of the input signal of frequency mixer is to be multiplied.Each frequency component of the PSD signal of amplification is converted into The first frequency mixer output component under the frequency of PSD frequency components and the frequency of reference frequency sum, and equal to PSD frequencies The second frequency mixer output component under the frequency of the frequency of component and the difference of reference frequency.

Low pass filter 498 is by the signal (D.C. signals) with the frequency close to zero and stops with being connect more than these The signal (A.C. signals) of nearly zero frequency.All noise component(s)s under the frequency different from reference frequency are blocked, because Noise frequency and reference signal sum and difference be all not equal to zero, so two frequency mixer output components are A.C. signals and quilt Low pass filter stops.

It is equal to for the frequency of the first mixer output signal of the frequency component of the PSD signal under reference frequency with reference to frequency Rate and its own sum, it is twice of reference frequency and is therefore low pass filtering device stop for A.C. signals.However, with reference to The frequency of second mixer output signal of the frequency component of the PSD under frequency is equal to reference frequency and the difference of its own, and it is Zero.This is low pass filtering device for D.C. signals and passed through.

Therefore, the output of lock-in amplifier is measuring for the frequency component of the PSD signal only under reference frequency.It is all not Noise signal under same frequency is low pass filtering device stop.Further along signal path, the signal through low-pass filter can enter one Step is amplified by another amplifier 499 to be changed for modulus (A/D).

It should be noted that every PSD can have corresponding to the more than one of more than one photodiode or photodetector Photosensitive region (for example, 4 such as in the case of quad detectors).When performing parallel lock-in detection, the number of required passage Amount is the quantity for the light detecting signal line that parallel PSD quantity is multiplied by every PSD.Using parallel sampling, we can collect simultaneously The sample before multiple wavelets of wavefront.

Not shown in FIG. 4 is A/D converter and remaining detection of electrons and control module.With what is pulsed with making SLD Signal identical frequency activation A/D converter may also allow for before SLD pulses or the collection of the dark and bright sample of period is to enter one Step eliminates electromagnetic interference and the influence from microscopical ambient light that is indoor or being provided with equipment thereon.

Pay attention to prior art Wavefront sensor it is general not with pulse and/or burst mode operation light source (at least with 1/f Frequency range on noise region, i.e., near kHz scopes or more than kHz scopes) because being used for astronomy (such as space In remote fixed star) in Wavefront sensor light source it is unmanageable (see, for example, US6784408), or with pulse or arteries and veins Rushing string pattern operation light source does not have any benefit, because typical CCD/CMOS imaging sensors do not have sufficiently high frame rate To be operated on 1/f noise frequency range.

Hartmann-Shack Wavefront sensors can be by optionally stopping in Hartmann-Shack lenslet array Some lenslets operate (see, for example, US7414712) to cover big diopter measurement scope.However, the method is expensive And identical limitation is still suffered from, i.e., used imaging sensor is scanned with low frame rate rate.

In presently described exemplary embodiment, sampling element physics each other preferably at wavefront image plane B before wavelet Separation, as shown in the amplification illustration in Fig. 3 a.Pay attention in Fig. 3 a exemplary embodiment, sampling element bag before each wavelet Include aperture and focus on lenslet.However, focusing on lenslet can be used directly as aperture or can even be removed.The latter's In the case of, light beam will not be focused but still will fall as hot spot on corresponding PSD before sampled wavelet, wherein for not Same wavelet top rake has different centroid positions, although aperture size usually need to be less than PSD sizes to avoid crosstalk.

For the purposes of individually showing sampled aperture array and sub-wavefront focusing lens array before wavelet, Fig. 3 a illustration is Intentionally both is set to be separated from each other.In fact, they are more likely disposed proximate to.By being sampled before physically designing wavelet The spacing of element ensures big diopter measurement scope to cause in designed big diopter coverage, any sampled Wavelet before inclination will not be focused on its adjacent PSD.

In the exemplary embodiment, can be achieved higher energy efficiency and simultaneously 1/f noise can be greatly reduced so as to Allow DC or low frequency ambient noise (such as by surgery microscope illumination photogenerated noise) effectively filtered out.

These features cause presently described exemplary Wavefront sensor, are integrating or are being additional to ophthalmology surgery microscope During ophthalmology surgery microscope, it is extremely suitable for vision corrective surgery, such as cataract operation.Cataract surgeons can perform Perform the operation without halfway stop go close surgery microscope illumination light and wait the capture of more frame data and the processing of data with Obtain dioptrometry.

Using the present exemplary embodiment, may be such that diopter measurement dynamic range sufficiently large (for example, reaching ± 30D) so that Obtaining the refractive status of even aphacia eyes can be completely covered.In addition, pass through the annulus in the wavefront from patient's eye Before surrounding only samples the wavelet of the quantity properly selected, selection intraocular lens (IOL) can be obtained and confirmed for example pseudo- brilliant Shape body eyes face or expected spherical diopter value needed for sphere and cylindricalical angle value and cylindrical axes.By appropriate Ground selects the wavefront number of samples near each annular array, and required message transmission rate and data processing resources can be big Amplitude is reduced.

The exemplary embodiment that will now be described is provided as can be generally provided by the ophthalmology Wavefront sensor of prior art More spatial sampling points and/or higher spatial resolution, although this can be not the absolute demand of cataract operation institute.This A little also measurable higher order aberrations of embodiment and two-dimentional wave front chart may be provided.These exemplary embodiments include angular light Beam scanning instrument 312 (such as transmission-type electric light or magneto-optic beam deflector), the light beam scanner may be disposed at shown in Fig. 3 a The Fourier transform plane A of 4-f relayings sentence and laterally move or scan wavefront picture relative to sampling element array before wavelet Wavefront at plane B.If doing so, can obtain as the sub-aperture disclosed in US6376819 (sub-aperture) is empty Between resolution ratio and if the wavefront of relaying is static, then also those part junction waves between sampled aperture of sampling Before.

Fig. 5 shows the example for moving or scanning before application to the lateral wave of the order of Fig. 3 a optical arrangement. In this example, 8 sub- wavefront sampling lenslets 501 are arranged in the form of annular array at wavefront image plane B, wherein arbitrarily There is enough spacing to cause crosstalk is not present in expected diopter measurement scope between two adjacent lenslets.In After wavefront be shown to have sampling relaying wavefront 8 parts 8 lenslets 501 disk 502.In no any ripple Relative to wavefront image 502 it is rotational symmetry before 8 sampled wavelets in the case of preceding movement or scanning.

Circle 502-520 represents to incide the Part I of the wavefront of the relaying on lenslet array.Circle, i.e. the first of wavefront Partial position is scanned up to the diverse location as shown in multiple accompanying drawings, and it allows the subdivision of Part I to be sampled.

On 4 rows shown in Fig. 5 right-hand component, two rows (503 to 510) on top are shown relative to 8 lenslets A sequentially laterally example of the influence of the wavefront of mobile relay.From 503 to 510, the wavefront of relaying is illustrated as being divided Sequentially identical distance is not moved to the right, bottom right, following, lower-left, the left side, upper left, top and upper right.

Two beneath rows (513 to 520) are shown to be substituted relative to lenslet array relative to wavefront movement lenslet array Equivalent result before row advanced wave.8 broken circles in each case from 513 to 520 show the wavefront relative to relaying Non-moving Part I 8 lenslets original sampling location.From 513 to 520,8 solid lines circle show if The Part I of the wavefront of relaying is considered as static, and 8 lenslets are relative to the equivalent relative of original lenslet position Motion.Total sample pattern 512 shows the sample effect of accumulation as caused by the movement described by pushing up upper two row.

It is can be seen that from total sample pattern 512 in the case where no wavefront moves, only original 8 circular array of wavefront Row subdivision will be sampled and in the case where being moved with wavefront, and other subdivisions of wavefront can be sampled.

In shown example, show that sampling is overlapping, it is such as visible in total sample pattern 512.This shows can be real Now be less than sampled aperture size (its it is shown here go out example in be lenslet diameter) spatial sampling resolution ratio.In fact, The scanning angle of controllable scanner 312 is to obtain any desired spatial sampling resolution ratio, as long as light beam scanner can be controlled Make to any desired actually accessible angle precision.In addition, total sample pattern 512 also show as laterally moving The result of the wavefront of relaying is moved, not only the non-moving wavefront part between the adjacent lenslet of any two can be sampled, and It can be also sampled toward and away from the wavefront part at the center of non-moving wavefront.Can be with total sample pattern 512 Find out, if desired, three annulus can be sampled.Any part of wavefront can be by controlling beam deviation device 312 to be adopted Sample.

It should be noted that sampling element array need not use annular array form as shown in Figure 3 a before wavelet.For example, its It can be rectangular array form, be bent as long as it is physically separated well each other with ensuring to cover sufficiently large refractive error Photometric measurement dynamic range and without crosstalk.Alternatively, it can more closely be spaced apart, as long as positioned at thieff hatch before each wavelet The focal length of lenslet behind footpath is correspondingly shorter and the distance between lenslet and PSD are correspondingly reduced.It should also be noted that The quantity of lenslet need not be limited to 8 and can be any quantity for setting in any form.

As Fig. 1 configuration is discussed compared with Fig. 2 configuration as before, performed if relayed using 4-f Scanning, then light beam scanner 312 will need that there is big light beam to intercept window size.In order to overcome this limitation and also carry For other various improvement, Fig. 6 shows another exemplary embodiment.Such as can be seen from Fig. 6, in some aspects, optical arrangement class It is similar to shown in Fig. 2.However, multiple new features be present, these features can be individually or in combination with further feature Perform.

It is (such as super from the light source 634 being operated under pulse and/or pulse string mode in Fig. 6 exemplary embodiment Radiation-emitting semiconductor diode (SLD)) relatively narrow beam emissions it is by pancratic lens 637 and (such as inclined by beam steering elements 606 Shake beam splitter or PBS) wavefront of the guiding to patient's eye for generation from eyes return.The focus variations of lens 637 can quilt For ensuring when falling on the retina, the spot size of light beam is relatively small for the various refractive status of eyes.This Outside, the back focal length distance that the first lens 604 are may be disposed at for scanning the scanning mirror 680 of SLD light beams is sentenced so that SLD light beams Position of scanner conjugates to the retina of emmetropia.In this way, SLD light beam scanners 680 has angle sweep to cause SLD light Beam relative to canthus membrane plane transversal scanning, but if if eyes are emmetropia, then still allowing for SLD light beams to fall identical Retinal location.This scanner can be used for scanning SLD light beams to track any eye motion, so that SLD light beams can Enter eyes from identical canthus film location always.

Substitution is relayed using 4-f wavefront as shown in fig. 3a, including the first lens 604, the second lens the 616, the 3rd are saturating The 8-f wavefront relay systems of the lens 642 of mirror 640 and the 4th are used to relay from the wavefront of pupil or canthus membrane plane and transmitted Pass through middle wavefront image plane B to final wavefront image sample plane D.This 8-f wavefront relaying can be considered to include two The 4-f relayings of individual cascade.First relaying include the first lens and the second lens, before first lens and the second lens guide wave in Plane A to middle wavefront image plane B is changed by Fourier after light beam.Second relaying includes the 3rd lens and the 4th lens, should Wavefront relaying from middle wavefront image plane B is further transported through Fourier transform plane by the 3rd lens and the 4th lens C to final wavefront image plane D.Benefit and the more details that this 8-f wavefront relay optical configures are discussed with reference to figure 2 It can be found in commonly assigned patent application US20120026466.

A sub- wavefront sampling element and a PSD as shown in Figure 2, including such as aperture rectangle battle array is used only in substitution Sampling element array can be generally positioned in most before the wavelet of row 618 and corresponding wavelet prefocusing lenslet rectangular array 620 Whole wavefront image plane D sentences sampling and focuses on desired sub- wavefont array.Again, before wavelet sampling element can physically that This is separated and/or the focal length of lenslet array can be selected suitably in this way, you can covers big refractive error Diopter measurement scope is without crosstalk.

These elements can be combined to detect the Image Speckle of sampled sub- wavefont array with corresponding parallel PSD arrays Centroid position, and by making detector and light-pulse generator synchronously realize that the parallel wavefront under lock-in detection samples.

As the replacement being directly generally disposed at PSD at the back focal plane of the lenslet behind sampling element before wavelet Scheme, as shown in Fig. 6 illustration, lens 621 can be used for the virtual image that will be formed at virtual image spot plane 622a Spot is relayed and further preferably optical amplifier to real PSD new plane 622, (is joined as known to those skilled in the art See such as US6595642).

If the relatively highdensity lenslet array with shorter focal length be used to cover desired big diopter model Enclose, then this lens 621 is particularly useful.Generally, this lenslet array has relatively small pitch (that is, small in this array Spacing between the center of lens), such as 0.5mm to 1.0mm, but every PSD can be relatively large (for example, being detected in quadrant In the case of device, diameter about 5mm).Therefore, corresponded to realize, the Image Speckle formed by lenslet array can quilt The optical amplifier of lens 621 and relay to the array of larger pitch to increase the distance between two adjacent PSD so that Obtain PSD and can be configured to the Physical Match on substrate.

Such as Fig. 2 situation, small size light beam scanner or deflector 612 may be disposed at the second Fourier transform plane C is sentenced to be intercepted and angularly scans whole object beam completely, and the whole object beam is in desired big refractive error diopter Ocular wavefront information is carried in scope.However, compared with Fig. 2, required light beam has angle sweep or range of deflection now may be used It is greatly reduced.Because by using sampling element array before wavelet, it is only necessary to scan thing in an angular range Light beam is make it that movement is equal to pitch before the lateral wave at final wavefront image plane D, i.e., before the wavelet in x and the directions of y two The distance between adjacent PSD center of sampling element array.In this way, if the wavefront of relaying is not scanned, All wavefront parts incident between sampling element can be sampled before any two wavelet.This will allow use except reflective Different types of light beam scanner outside MEMS scanners, such as, for example, can normally only cover relatively small angle scanning model The transmission-type electric light or electromagnetic scanning instrument enclosed.

Similar to Fig. 3 a situation, lock-in amplifier 643, which can be coupled into, receives the output signal from PSD arrays 622 For noise suppressed.Display 645 can be coupled to the electronic system 636 for the output for receiving lock-in amplifier 643.Department of Electronics There is system 636 disposal ability to handle the output of lock-in amplifier 643, including application algorithm is to determine dioptric, aberration and other Diagnosis or clinical factor.Display 645 can be implemented as the head-up display associated with surgery microscope or large screen display Device or back throwing type display or the part as personal computer or work station.

Fig. 7 shows the example for moving or scanning before application to the lateral wave of the order of Fig. 6 optical arrangement.Herein In example, 21 sub- wavefront sampling lenslets 701 are arranged at wavefront image plane D with the form of two-dimensional linear array, wherein There is enough spacing to cause between the adjacent lenslet of any two in expected refractive error diopter measurement scope In the absence of crosstalk.As in Figure 5, the Part I before junction waves is illustrated as being incident on the disk 702 on lenslet array, its In 21 lenslets 701 sample 21 subdivisions before Part I junction waves.In the feelings that no any wavefront is mobile or scans Under condition, the subdivision of the Part I before 21 sampled junction waves is advised relative to before junction waves 702 with two-dimensional array form The distribution of rule ground.

On 4 rows shown in Fig. 7, two rows (703 to 710) on top are shown when relaying wavefront is small relative to 21 When mirror sequentially laterally moves the example that a situation arises.From 703 to 710, the Part I of the wavefront of relaying is shown For in the horizontal and/or vertical by respectively sequentially to the right, bottom right, following, lower-left, the left side, upper left, top and Upper right moves identical distance.

Two beneath rows (713 to 720) are shown to be substituted relative to lenslet array relative to wavefront movement lenslet array Equivalent result before row advanced wave.21 dotted lines set with two-dimensional linear array format in each case from 713 to 720 Circle shows the original sampling location of 21 lenslets of the non-moving Part I of the wavefront relative to relaying.From 713 Show that 21 lenslets are relative to original when the Part I of the wavefront of relaying is considered as static to 720,21 solid line circles Lenslet position equivalent relative motion.Total sample pattern 712 shows the sample effect of accumulation.From total sample graph Case 712 it can be seen that no wavefront move in the case of, the original 21 lenslet part before junction waves will be sampled with And in the case where being moved with wavefront, the region around original 21 lenslets can be sampled.

Make in the horizontal and/or vertical by equal to each lenslet in fact, shown example is shown Diameter plus the mesomere between two horizontal or vertical lenslets away from or spacing distance transverse shifting be equal to it is each Three times of the diameter of lenslet.In other words, twice of clearance distance equal to each lenslet diameter.It is as a result, shown Scanning makes it possible to realize the sampling of the wavefront of relaying, just looks like that wavefront is adopted by closelypacked two-dimensional linear lenslet array The situation of sample, such as typical Hartmann-Shack Wavefront sensors.

It should be noted that before the scanning angle of controllable light beam scanner 612 and SLD pulsation are to realize smaller lateral wave Therefore sampling at displacement simultaneously realizes any desired spatial sampling resolution ratio.In addition, shown example also show By using sampling element before two-dimensional linear array wavelet, light beam scanner 612 is only needed in horizontal scan and vertical direction Small angle range is to allow all parts before junction waves to be sampled.

Pay attention to also making wavefront sampled aperture array and/or PSD arrays be active.Using such as iris diaphgram battle array Row or the aperture size Variable Array based on liquid crystal are dynamically adjusted for sampling the aperture size before wavelet.Aperture can also be main Dynamic formula, in this sense, the different piece of the wavefront image of relaying is using the MEMS mirror as disclosed in US6880933 Subarray is directed to different PSD.For example, equally available include liquid crystal microlens array and the liquid based on flexible membrane Lens array changes the focal length of sub-wavefront focusing lens.In addition, PSD position or the position of wavelet prefocusing lenslet array Also can be moved longitudinally through the horizontally extending well section.

In both Fig. 3 a and Fig. 6 exemplary embodiment, electronic system be present, the electronic system is at least coupled to light Source and PSD with the operation of frequency phase lock light source and PSD more than 1/f noise frequency range so that DC or low frequency background Noise can be substantially filtered.In addition, electronic system can also be coupled to Zoom lens 637 for controlling SLD light beams Focus, to SLD light beam scanners 680, to wavefront object beam scanner/deflector 612, to array of apertures 618, to lenslet Array 620 and to lens 621.These electronics coupleds are intended to control the operation of coupled element or equipment.

In addition, although in Fig. 3 a and 6, SLD light beams are reflected behind the first lens, but SLD light beams can be from eyes From anywhere between final wavefront image plane D (such as before the first lens or even behind the second lens) Launch and the diverging of its light beam or convergence can also be by other methods in addition to Zoom lens 637 (such as using axial direction Moving lens) it is adjusted to ensure to form desired hot spot on the retina of various eyes.

The pulsation of light source is interpreted to include all types of time-modulations of light source.For example, SLD can ON/OFF or dark/ It is modulated between on state of；It can also be modulated between the first lighting level state and the second lighting level state；SLD can be with sinusoidal manner It is modulated.Another example is makes light source with burst mode operation to produce optical pulse stream, and each of which pulse is equally by carrying Wave frequency rate or modulating frequency are modulated.Therefore, lock-in detection or synchronous detection should be interpreted any PGC demodulation or phase Dry detection method.Lock-in detection may be at high carrier frequency and/or pulse recurrence rate/frequency.

For launching SLD light beams and being additionally operable to guide the light path of returned object beam to be rolled in a variety of ways Fold to save space and make it that wavefront sensor module is compact.This means the speculum that is used for folding various light paths may be present Or other beam-folding elements.Light beam scanner can be projection-type or reflective.Except 1:Outside 1 ratio wavefront relaying, Image plane is sampled from eyes to the wavefront image plane of centre and to final wavefront, optical amplifier or the contracting of wavefront may be present It is small.This means the lensed focal length of institute being used for before junction waves can have different value.Except in the 4-f wavefront of two cascades It is followed by outer, there can be the 4-f or other wavefront relaying more cascaded.

Due to the fact Fig. 6 middle wavefront image plane B conjugates to object wave frontal plane and final wavefront image plane D, ripple Precompensation device or defocus shift element 689 can be placed at plane B and be controlled by electronic system.If doing so, wavefront Sensing system can be converted into adaptive optics system for various other applications.It is whole except being simply fully compensated Wave front aberration, as adaptive optics system is generally done, it can also partially or completely compensate only one or some wavefront Aberration is to allow remaining wave front aberration of not correcting itself is significantly more presented and to be therefore measured more accurately.For example, ball The degree that face defocuses can be fed back to compensator or offset component 689, and compensator or offset component 689 influence detected wavefront Diverging or convergence.This feedback can change it is measured defocus, therefore it forms closed-loop system and Closed loop Control can quilt For by the diverging of measured wavefront or assembling band to any desired value, most probable by the value bring to close to zero to cause wavefront Substantially plane.In addition, the symbol and the information of degree on defocusing can be used for regulation only influence SLD light beams diverging or The Zoom lens 637 of convergence are to form open-loop control system.

Sampling element and associated PSD space configuration need not be provided with conventional constant pitch or with ring before wavelet Shape array or rectangular array form are set, and can be configured in any format.For example, two or more ring array may be present Arrange, sampling element is more widely separated than sampling element before inner annular array wavelet before its outer annular array wavelet.

In addition, in response to the refractive status of patient's eye, PSD lateral attitude can also be changed on one's own initiative.For example, work as eye When eyeball is aphacia, the wavefront from eyes is typically that relative altitude dissipates and ought be relayed to most at canthus membrane plane During the wavefront image plane at end, this wavefront equally will be high divergence.In the case, if before wavelet sampling element annulus Array is used for the wavefront of sampling relaying, then corresponding PSD annular arrays can be relative to the ring array of sampling element before wavelet Row move radially outward so that, if relaying wavefront be perfect spherical divergence wavefront, then it is each sampled The barycenter of Image Speckle or hot spot before wavelet is located on or near each corresponding PSD center.In this way, when only each , can be with high precision test to the perfect spherical divergence wavefront with the imagination when PSD core is used for centroid detection Any additional inclination of wave front deviation.Further it is to be noted that lenslet array 320 or 620 (Fig. 3 a and Fig. 6) can not be absolute need Want, if Hartmann Shack Wavefront sensors are relative to the situation of Hartmann Wavefront sensors, because Hartmann holes Array will play same purpose.

Further, spatial light modulator (SLM) can be equally combined with high density lenslet array and SLM can be with light Source and PDS array synchronizations are operable so that only open selected quantity on the lenslet of selected quantity during light source works Aperture.For example, one or more lenslet annular arrays can be opened and according to the sphere before object wave or can defocus diopter Value makes the decision on opening which annular array.Therefore, it is desirable to wavefront sampled data annular array can be collected.Only exist Sampling is carried out around one annular array will only provide refractive error rather than higher order aberratons, and this is foot for cataract operation application No more.Using sequential scan or open different lenslets, measurable higher order aberratons.

In addition to sensing detector and quad detectors/sensor except transversal effect position, it can be used with sufficiently high Frequency operates and determines the other types of PSD of the centroid position of Image Speckle before sampled wavelet.For example, every PSD It can be the cluster of 3 or more diodes.Every PSD of PSD arrays can also be the high speed two-dimension image with high frame rate The pixel of some clusters of sensor, although this imaging sensor is probably expensive.Every PSD of PSD arrays can also be Cmos image sensor, the cmos image sensor are programmed to only export come programming of controlling oneself using global shutter exposing operation The data of the certain amount of pixel of area-of-interest (ROI).Currently, conventional big pixel counts imaging sensor generally can be only It is programmed to export the data from a ROI.It is not intended that future not possibly also with global spectrum assignment with enough High frame rate exports multiple ROI data simultaneously.When this possibility comes true, single two dimensional image can be used directly and pass Sensor distributes corresponding ROI arrays, just look like they be there is sufficiently high temporal frequency response be operated in lock-in detection mould PSD arrays under formula.Pulse ON time can be synchronous with camera exposure.In other words, can be within the time that camera collects light, with short Duration opens light source.Alternatively, SLD light sources can be opened the time slightly longer than the camera exposure time to cause effective arteries and veins Rush the duration is determined by the camera exposure time.

In addition to the lock-in detection of standard, dual sampling can be also used further to reduce noise.For example, light source can be It is modulated between on state of and dark-state.The Image Speckle that PSD arrays are formed during being recordable on state of by focuson wavefront Signal and the background signal during being also recorded in dark-state.When subtracting background signal from the signal recorded during on state of, The result is that the improved estimation of the desired barycenter of Image Speckle.In one example, the one of CCD/CMOS imaging sensors Cluster or multiple pixel groups can be programmed to one or more area-of-interests (ROI) can enter for use as PSD arrays and every ROI One step is divided on state of sub-line and son row and dark-state sub-line and son arranges.Can be every with the bright and dark periodic sampling every one Arranged every the sub-line of one and son.In this way, when each frame uses less pixel, identical can be passed through with higher frame rate ROI or PSD realizes bright and dark sampling.In every ROI the pixel of half can be synchronized to SLD light pulse "ON" and second half The pulse "Off" of SLD light can be synchronized to.

Alternatively, electronic signal from PSD arrays can be with the frequency higher than ten times of light source ripple frequency or more times Sampled, and be converted to data signal and then by digital filtering.Once being converted to data signal, can also use other Data signal extraction algorithm, such as Kalman filter.

Further, in addition to the conventional 4-f or 8-f wavefront link deployments shown in Fig. 3 a and Fig. 6, can be used any Disclosed in optical wavefront link deployment, such as US20100208203.

Other functions can also be added into described exemplary embodiment.Fig. 8 shows an embodiment, wherein dichroic Or long wave leads to beam splitter 860 and is used to reflect at least a portion light and fixed for common eye imaging and eyes and substantially Upper transmission near infrared light SLD spectral regions sense for wavefront.Dichroic or the logical beam splitter 860 of long wave should have sufficiently large Light interception window with ensure in desired detecting eye diopter measurement range the wavefront from eyes intercepted completely without By the marginal interference of beam splitter window.

Dichroic or long wave can be used as two functions by the reflection of (long-wavelength-pass) beam splitter.First Individual guided the visible or near infrared spectrum part of the light returned from eyes to imaging sensor 862 to cause real-time eyes pupil Hole pattern picture can be processed and be shown for use as various purposes, such as help clinician to be directed at eyes relative to Wavefront sensor. From eyes return light source be for example used in surgery microscope lighting source, around room light or directly from wavefront biography The light of sensor module transmitting.Second function is it will be seen that the image of fixed target 864 is guided to patient's eye so that eye Eyeball can have the target being fixed thereon, if this fixation is desirable.

What it is further along this reflected beam path is small beam splitter 866, and the small beam splitter 866 separates the/fixed mesh of combination Mark light beam and imaging sensor light beam.This small beam splitter 866 can have various spectral qualities.For example, it can be designed Into operation visible and/or near infrared spectral range simple 50:50 broadband beam splitters.However, if fixed light source 864 has There is relatively narrow spectral width, then for more preferable optical efficiency, may be such that the reflectance spectrum matching of this small beam splitter 866 is solid The good reflection determining light source light spectrum to allow to fix light simultaneously transmits the remainder of the spectrum to imaging sensor 862.

Lens 868 before imaging sensor 862 be designed to for the patient's eye on display anterior chamber or The realtime graphic of iris or pupil provides desired optical amplifier.If desired, it can also be dynamic for what is focused State lens are to ensure image sensor plane and eye pupil planar conjugate in order to obtain clearly eye pupil image.Lens 868 can also be zoom lens so that clinician/surgeon can with it come focus on cornea or retina and by Magnifying power need to be changed.Here digital zoom can also be used.

Lens 870 before fixed target 864 are designed to provide desired size and brightness to patient's eye Comfortable fixed target.It may be additionally used for focusing to ensure to fix that the retina of target and eyes is conjugated, or by eyes It is fixed at different distance or even needs to obscure eyes according to clinician/surgical.Fixed light source 864 can be with The illumination light of itself and such as surgery microscope is distinguished required speed flash of light or flicker or changes color.Fixed target 864 can be the image (such as fire balloon) or micro-display from back lighting by light source, and the micro-display is in clinician/outer Required pattern (array for including point) can be shown under the control of section doctor.In addition, the fixation target based on micro-display can also quilt For guiding patient fixation in different directions in order to generate the 2D array aberration diagrams of eyes, the 2D array aberration diagrams can be used for Evaluate non-central or peripheral vision the visual acuity of patient.

Fixed target, eyes anterior chamber image and/or other information can also be transferred back to microscope and (not shown by eyepiece Go out) become visible.This information is same via the sight of dichroic or beam splitter and observer by a series of lens or physical distance It is projected, the physical distance will be coplanar with microscope or biomicroscope operating distance axle.

Imaging sensor 862 can be black/white or color cmos/ccd image sensor and fixed light source can be red Or green or other colors light emitting diode (LED), its Output optical power based on different background illuminations dynamically It is and/or manually controllable.For example, when the relatively strong illuminating bundle from surgery microscope be switched on when, fixed light source it is bright Degree, which can be enhanced to, to be allowed the patient to easily find out fixed target and is fixed thereon.

In addition to providing real-time eye pupil image, image sensor signal may be additionally used for other purposes.For example, Realtime graphic is displayed on head-up display or is displayed on translucent micro- aobvious in the eyepiece for being merged in surgery microscope Show on device.

Realtime graphic can be used for size and the lateral attitude for detecting eye pupil.When find pupil size it is smaller and/ Or when being moved relative to Wavefront sensor, using the information-driven from imaging sensor be used for select and/or sample and/or Mechanism before advanced wave is only to sample a region of the wavefront in patient s pupil center.In other words, pupil size and position letter Breath can be used for automatic and/or dynamic regulation and/or the scaling of wavefront sampling in a closed loop manner.Therefore, active wavefront Sampled aperture and/or scanner can perform eye tracking.Using internal regulation without mobile Wavefront sensor and/or wavefront sensing Device is additional to be made to run through surgery hand thereon or with it using this ability for constantly tracking pupil of the surgery microscope mutually disturbed The test constantly of patient's wavefront error of art is possibly realized.

Wavefront sensor itself can also provide information and be tracked for eye, because the luminous intensity in sampled wavefront is being suffered from The edge of person's pupil declines, i.e. wherein iris starts to stop the light returned from retina.Therefore, detected by Wavefront sensor The intensity gone out can provide patient s pupil's figure, and patient s pupil's figure can be used for wavefront sampling more accurately concentrating on patient s pupil On.

In addition, the imaging sensor or Wavefront sensor of export eye pupil positional information can be used for providing feedback signal To drive scanning mirror 880 to enable SLD light beams to follow eye motion so that SLD light beams are always from identical cornea Position enters cornea, and this mirror-reflection SLD light beam for being intended to prevent for example to be returned by cornea enters Wavefront sensor PSD.SLD light beams can be also imaged by imaging sensor for eyes centering or make SLD light beams intentionally from eyes Off-centring provides feedback/guiding to determine position of the eyes relative to SLD light beams.Object beam scanner 812 is also available Suitable skew is tuned to follow eye pupil to move.

In addition, when finding barrier to be present in the optical path, when such as eyes are filled with water or optics bubble be present, or eye Eyelid, skin of face, surgical hand or Surigical tool or instrument are located in the visual field of imaging sensor and stop wavefront Relay beam path when, then discardable wave front data to exclude " dark " or " bright " data while, SLD 834 can be closed.

In some exemplary embodiments, qualitatively and/or quantitative wavefront measurements can be added to and be passed by image In the display for the real-time eye pupil image that sensor 862 is captured.In addition, it is superimposed the wavefront measurement knot of real-time eye pupil image Fruit can be updated with a speed with so that refractive status any change and by Wavefront sensor report change bend Low delay between light state be present.This renewal can be by the wave front data that is averagely measured on expectational cycle and using by surgery Doctor preferably the renewal of desired renewal rate be superimposed real-time eye image qualitatively and/or quantitative measurement result come it is real It is existing.

It should be noted that imaging sensor can be individually merged into Fig. 3 a or Fig. 6 configuration to be operating independently fixed mesh Mark.Meanwhile fixed target also can be individually merged into Fig. 3 a or Fig. 6 configuration to be operating independently imaging sensor.

It should also be noted that the Wavefront sensor of exemplary embodiment can be integrated for eyes wavefront with various ophthalmological instruments Measurement.Fig. 9 shows the example that Wavefront sensor integrates with surgery microscope 910, and its permission is continued in eyes wavefront The eyes of patient are observed during measurement.In being integrated at this, inserted along the sight 903 from the eyes of microscope user to patient's eye Beam splitter 915 is to establish the link the second light path of wavefront measurement system 900 and patient's eye 938.Preferably, beam splitter 915 is Reflect near infrared light and allow most visible spectrum to pass through to the dichroic beam splitters of microscopical user.

Using this configuration, wavefront measurement system 900 can launch light, preferably near infrared light to the retina of patient's eye 938, Therefrom some scattering light will be back to Wavefront sensor from retina.Scattering point on retina is returned using wavefront 901 Light, the wavefront 901 are relayed to the wavefront sample plane of wavefront measurement system 900, and if its with plane or natural waves be present Preceding aberration, then disclose the aberration of patient's eye with the skew for inherently having aberrated wavefront of wavefront sensor module or bend Light.

Figure 10 shows the integrated of presently disclosed Wavefront sensor and slit lamp biomicroscope.Equally, along from Slit lamp biomicroscope user inserts beam splitter 1015 to establish connection wavefront measurement system to the sight 1003 of patient's eye 1000 and the second light path of patient's eye 1038.Notice that the identical design of Wavefront sensor can be used in each application, to the greatest extent Pipe is equally to depend on specific ophthalmological instrument with different operating distances and the different designs of associated change The option of demand.

In practice, preferably the Wavefront sensor of same design before the surgery and afterwards with slit lamp biomicroscope one Use is played to check for patient and be used together with surgery microscope during refractive surgery.We use term " ophthalmology Instrument " refers to any type of ophthalmic microscope and/or other ophthalmological instruments, such as fundus camera.Preferably, Wavefront sensor Not in requisition for microscopical special alignment or the normal use of focusing or interference ophthalmological instrument.

In addition, the exemplary embodiment of Wavefront sensor can also be used for LASIK or natural crystalline lenses rupture with And the femto-second laser or excimer laser of cornea incision/cutting integrate.Real-time eye image and wavefront signals can quilts With reference to show before, during or after eye surgery, optics bubble or other optical heterogeneities whether there is in eye In eyeball or anterior chamber.Wavefront information may be additionally used for directly guiding LASIK processes in a closed loop manner.

These embodiments may be additionally configured to measure optics, glasses, IOL and/or guide these optics of establishment Cutting/process equipment.

These embodiments can also be adapted for the microscope of cell and/or analysis of molecules or other metrology applications.Show Example property embodiment may be additionally used for lens making, glasses confirmation, microbiology application etc..

Although have been shown herein and describe the various exemplary embodiments with reference to teachings of this disclosure, people in the art Member can be easy to the embodiment got along still with a lot of other changes of these enlightenments.

Claims (41)

1. a kind of ophthalmology Wavefront sensor, including：

Light source, it is configured to receive the reference signal for vibrating/pulsing with reference frequency and generates by the light arteries and veins under the reference frequency Rush the light beam formed；

Beam steering elements, it is configured to by the beam emissions from the light source into patient's eye, and wherein, from patient's eye A part for the light beam that eyeball returns is formed before object wave of the light pulse under the reference frequency in the form of；

Optical wavefront relay system, it is configured to the object wave from the anterior object plane positioned at patient's eye along beam path Before relay to wavefront image plane, the incident wavefront that the beam path can will have big power range at the object plane Relaying light beam is guided to the wavefront image plane；

High frequency response position sensor device array, each of which position sensor device are configured to detection image spot barycenter phase The measurement signal of amount of deflection for reference position and amount of deflection described in output indication；

Sampling element array before wavelet, it is arranged on the high frequency response position sensor device array before and is located at the ripple At preceding image plane, each sampling element before the wavelet in sampling element array is configured to the son to repeated wavefront Wavefront is sampled and by sampled wavelet prefocusing to the corresponding height in the high frequency response position sensor device array Frequency response is answered on the sensor device of position；And

Electronic frequency sensitive detection system, it is coupled into and receives the reference signal and the measurement signal, wherein electronics frequency Rate sensitive detection system is configured to only indicate being sized such that for the frequency component of the measurement signal under the reference frequency It can be largely suppressed different from all noise signals including 1/f noise under the frequency of the reference frequency,

Characterized in that, sampling element is physically spaced apart so that high diopter each other in this way before the wavelet The corresponding height corresponding to sampling element before the wavelet is only focused on before each sampled wavelet before scope object wave Frequency response is answered on the sensor device of position.

2. ophthalmology Wavefront sensor as claimed in claim 1, it is characterised in that the optical wavefront relay system includes first With the second lens, each lens have diameter, focal length and optical axis, wherein the optical wavefront relay system be configured to along The beam path will be relayed to positioned at described first before the object wave of the object plane at the front portion of the patient's eye And second Fourier transform plane between lens and relay to the wavefront image plane, wherein selecting described first and second saturating The incident wavefront relaying light beam guiding of the focal length and diameter of mirror will there is big power range at the object plane To the wavefront image plane.

3. ophthalmology Wavefront sensor as claimed in claim 1, it is characterised in that the reference frequency of the light source is 1/ On f noisy frequency ranges.

4. Wavefront sensor as claimed in claim 2, it is characterised in that further comprise being arranged on positioned at first He At the Fourier transform plane between second lens and it is configured to move relative to sampling element array before the wavelet First light beam scanner of the repeated wavefront.

5. Wavefront sensor as claimed in claim 4, it is characterised in that first light beam scanner is configured to track institute Eyes are stated so that even if the desired part that the wavefront of the eyes is only from when the eyes move is sampled always.

6. Wavefront sensor as claimed in claim 1, it is characterised in that further comprise being configured to provide real-time eyes anterior chamber The eye image sensor of image and the second induction element that eye imaging offer light path is provided.

7. Wavefront sensor as claimed in claim 6, it is characterised in that further comprise display, be configured to display superposition Have the wavefront measurement qualitatively and/or quantitative result real-time eyes anterior chamber image.

8. Wavefront sensor as claimed in claim 4, it is characterised in that second light beam scanner is arranged on the light At the back focal plane for learning first lens of wavefront relay system.

9. ophthalmology Wavefront sensor as claimed in claim 1, it is characterised in that further comprise：

The lens between sampling element array and the position sensor device array before the wavelet are arranged on, are configured to image Spacing relaying and optical amplifier between the Image Speckle formed at spot plane by sampling element array before the wavelet are extremely The plane that the position sensor device array is arranged on.

10. a kind of ophthalmology Wavefront sensor, including：

Light source, it is configured to receive the reference signal for vibrating/pulsing with reference frequency and generates by the light arteries and veins under the reference frequency Rush the light beam formed；

Beam steering elements, it is configured to the beam emissions from the light source into patient's eye and wherein from described A part for the light beam that patient's eye returns is formed before object wave of the light pulse under the reference frequency in the form of；

First optical wavefront relay system, it is configured to from anterior first positioned at patient's eye along the first beam path Image plane before first wave is relayed to before the object wave of object plane, first beam path can there will be great Qu at the object plane Image plane before the incident wavefront relaying light beam of photometric range is guided to the first wave；

The second optical wavefront relay system with the second object plane before the first wave at image plane, is configured into one Step will relay to the second wavefront image plane along the second beam path before the object wave from second object plane, and described the The incident wavefront relaying light beam guiding that two beam paths can will have big power range at first object plane To the second wavefront image plane；

High frequency response position sensor device array, each of which position sensor device are configured to detection image spot barycenter phase The measurement signal of amount of deflection for reference position and amount of deflection described in output indication；

Sampling element array before wavelet, it is arranged on before the high frequency response position sensor device array and positioned at described second At wavefront image plane, wherein each sampling element before the wavelet in sampling element array is configured to sample repeated ripple Before preceding wavelet and by sampled wavelet prefocusing to the corresponding high frequency in the high frequency response position sensor device array Respond on the sensor device of position；And

Electronic frequency sensitive detection system, it is coupled into and receives the reference signal and the measurement signal, wherein electronics frequency Rate sensitive detection system be configured to only indicate the size of the frequency component of the measurement signal under the reference frequency so that All noise signals including 1/f noise obtained under the frequency different from the reference frequency can be largely suppressed,

Characterized in that, sampling element is physically spaced apart so that high diopter each other in this way before the wavelet The corresponding high frequency corresponding to sampling element before the wavelet is only focused on before each sampled wavelet before scope object wave Respond on the sensor device of position.

11. ophthalmology Wavefront sensor as claimed in claim 10, it is characterised in that the first optical wavefront relay system bag The first and second lens are included, each lens have diameter, focal length and optical axis, wherein selecting the institute of first and second lens Focal length and diameter are stated so that the relaying light beam of the wavefront at first object plane with big power range is guided to described the One wavefront image plane；And

The second optical wavefront relay system includes the third and fourth lens, and each lens have diameter, focal length and optical axis, Wherein select the focal length and diameter of third and fourth lens big will further have at first object plane The incident wavefront relaying light beam of power range is guided to the second wavefront image plane.

12. ophthalmology Wavefront sensor as claimed in claim 11, it is characterised in that the 3rd lens are configured to will be described Object wave leading is directed at the Fourier transform plane between third and fourth lens.

13. ophthalmology Wavefront sensor as claimed in claim 10, it is characterised in that the reference frequency of the light source be On 1/f noise frequency range.

14. Wavefront sensor as claimed in claim 10, it is characterised in that further comprise before being arranged on the first wave Wavefront compensation device at image plane, it is configured to partially or completely to compensate one or more wave front aberration components remaining to cause Wave front aberration component can be measured more accurately.

15. Wavefront sensor as claimed in claim 12, it is characterised in that further comprise being arranged on the described 3rd and At the Fourier transform plane between four lens and it is configured to move institute relative to sampling element array before the wavelet State the first light beam scanner of repeated wavefront.

16. Wavefront sensor as claimed in claim 15, it is characterised in that first light beam scanner is configured to track The eyes are so that even if the desired part that the wavefront of the eyes is only from when the eyes move is adopted always Sample.

17. Wavefront sensor as claimed in claim 10, it is characterised in that further comprise before being configured to provide real-time eyes The eye image sensor of room image and the second beam steering elements that eye imaging offer light path is provided.

18. Wavefront sensor as claimed in claim 17, it is characterised in that further comprise display, it is folded to be configured to display Added with the wavefront measurement qualitatively and/or quantitative result eyes anterior chamber's image in real time.

19. Wavefront sensor as claimed in claim 10, it is characterised in that further comprise the second light beam scanner, configure Generated into by guiding the light beam before the object wave to follow the eyes to track the eyes.

20. ophthalmology Wavefront sensor as claimed in claim 10, it is characterised in that further comprise：

The lens between sampling element array and the position sensor device array before the wavelet are arranged on, are configured to image Spacing relaying and optical amplifier between the Image Speckle formed at spot plane by sampling element array before the wavelet are extremely The plane that the position sensor device array is arranged on.

21. a kind of ophthalmology Wavefront sensor being adapted to coupled to ophthalmic microscope, including：

Light source, it is configured to receive the reference signal for vibrating/pulsing with reference frequency and generates by the light arteries and veins under the reference frequency Rush the light beam formed；

First beam steering elements, be configured to the beam emissions from the light source into patient's eye and wherein from A part for the light beam that the patient's eye returns is formed before object wave of the light pulse under the reference frequency in the form of；

Imaging sensor, it is configured to provide real-time eyes anterior chamber image；

Second beam steering elements, it is configured as eye imaging and light path is provided；

Optical wavefront relay system, it is configured to the object wave from the anterior object plane positioned at patient's eye along beam path Before relay to wavefront image plane, the incident wavefront that the beam path can will have big power range at the object plane Relaying light beam is guided to the wavefront image plane；

High frequency response position sensor device array, it is relative that each of which position sensor device is configured to detection image spot barycenter In the amount of deflection of reference position and the measurement signal of amount of deflection described in output indication；

Sampling element array before wavelet, it is arranged on the high frequency response position sensor device array before and is located at the wavefront At image plane, wherein each sampling element before the wavelet in sampling element array is configured to sample repeated wavefront Before wavelet and by sampled wavelet prefocusing to the corresponding high frequency response in the high frequency response position sensor device array On the sensor device of position；And

Electronic frequency sensitive detection system, it is coupled into and receives the reference signal and the measurement signal and be coupled to image sensing Device, wherein the electronic frequency sensitive detection system is configured to only indicate the frequency of the measurement signal under the reference frequency All noise signals including 1/f noise being sized such that under the frequency different from the reference frequency of rate component can quilt Significantly suppress,

Characterized in that, sampling element is physically spaced apart so that high diopter each other in this way before the wavelet The corresponding high frequency corresponding to sampling element before the wavelet is only focused on before each sampled wavelet before scope object wave Respond on the sensor device of position.

22. ophthalmology Wavefront sensor as claimed in claim 21, it is characterised in that the optical wavefront relay system includes the One and second lens, each lens have diameter, focal length and optical axis, wherein the optical wavefront relay system is configured to edge The beam path will relay to positioned at described the before the object wave of the object plane at the front portion of the patient's eye One and second Fourier transform plane between lens and relays to the wavefront image plane, wherein selecting described first and second The incident wavefront relaying light of the focal length and diameter of lens will there is big power range at the object plane Beam is guided to the wavefront image plane.

23. ophthalmology Wavefront sensor as claimed in claim 21, it is characterised in that further comprise the first light beam scanner, It is configured to generate before the object wave to follow the eyes to track the eyes by guiding the light beam.

24. ophthalmology Wavefront sensor as claimed in claim 21, it is characterised in that described image sensor is further configured Into the information provided on eye pupil position, and second light beam scanner is configured to by relative to the wavelet Preceding sampling element array moves the repeated wavefront to track the eyes so that even if when the eyes move The same section of wavefront from the eyes is sampled.

25. ophthalmology Wavefront sensor as claimed in claim 21, it is characterised in that further comprise：

The lens between sampling element array and the position sensor device array before the wavelet are arranged on, are configured to image Spacing relaying and optical amplifier between the Image Speckle formed at spot plane by sampling element array before the wavelet are extremely The plane that the position sensor device array is arranged on.

26. a kind of ophthalmology Wavefront sensor being adapted to coupled to ophthalmic microscope, including：

Light source, it is configured to receive the reference signal for vibrating/pulsing with reference frequency and generates by the light arteries and veins under the reference frequency Rush the light beam formed；

First beam steering elements, be configured to the beam emissions from the light source into patient's eye and wherein from A part for the light beam that the patient's eye returns is formed before object wave of the light pulse under the reference frequency in the form of；

Imaging sensor, it is configured to provide real-time eyes anterior chamber image；

Second beam steering elements, it is configured to provide light path by the imaging sensor for eye imaging；

First optical wavefront relay system, it is configured to from anterior first positioned at patient's eye along the first beam path Image plane before first wave is relayed to before the object wave of object plane, first beam path can there will be great Qu at the object plane Image plane before the incident wavefront relaying light beam of photometric range is guided to the first wave；

The second optical wavefront relay system with the second object plane before the first wave at image plane, is configured into one Step will relay to the second wavefront image plane along the second beam path before the object wave from second object plane, and described the The incident wavefront relaying light beam guiding that two beam paths can will have big power range at first object plane To the second wavefront image plane；

High frequency response position sensor device array, it is relative that each of which position sensor device is configured to detection image spot barycenter In the amount of deflection of reference position and the measurement signal of amount of deflection described in output indication；

Sampling element array before wavelet, it is arranged on before the high frequency response position sensor device array and positioned at described second At wavefront image plane, wherein each sampling element before the wavelet in sampling element array is configured to sample repeated ripple Before preceding wavelet and by sampled wavelet prefocusing to the corresponding high frequency in the high frequency response position sensor device array Respond on the sensor device of position；And

Electronic frequency sensitive detection system, it is coupled into and receives the reference signal and the measurement signal, wherein electronics frequency Rate sensitive detection system be configured to only indicate the size of the frequency component of the measurement signal under the reference frequency so that All noise signals including 1/f noise obtained under the frequency different from the reference frequency can be largely suppressed,

Characterized in that, sampling element is physically spaced apart so that high diopter each other in this way before the wavelet The corresponding high frequency corresponding to sampling element before the wavelet is only focused on before each sampled wavelet before scope object wave Respond on the sensor device of position.

27. ophthalmology Wavefront sensor as claimed in claim 26, it is characterised in that the first optical wavefront relay system bag The first and second lens are included, each lens have diameter, focal length and optical axis, wherein selecting the institute of first and second lens Focal length and diameter are stated so that the incident wavefront relaying light beam at first object plane with big power range to be drawn It is directed at image plane before the first wave；And

The second optical wavefront relay system includes the third and fourth lens, and each lens have diameter, focal length and optical axis, The focal length and diameter of third and fourth lens are wherein selected will there is big diopter at first object plane The incident wavefront relaying light beam of scope is further directed to the second wavefront image plane.

28. ophthalmology Wavefront sensor as claimed in claim 27, it is characterised in that the 3rd lens configuration is into by the thing Fourier transform plane of the Wavefront leading extremely between third and fourth lens.

29. ophthalmology Wavefront sensor as claimed in claim 26, it is characterised in that further comprise the first light beam scanner, It is configured to generate before the object wave to follow the eyes to track the eyes by guiding the light beam.

30. ophthalmology Wavefront sensor as claimed in claim 28, it is characterised in that further comprise being arranged on the described 3rd And at the 4th Fourier transform plane between lens and it is configured to move relative to sampling element array before the wavelet Move the second light beam scanner of the repeated wavefront.

31. ophthalmology Wavefront sensor as claimed in claim 30, it is characterised in that the imaging sensor is further configured Into the information provided on eye pupil position, and second light beam scanner is configured to by relative to the wavelet Preceding sampling element array moves the repeated wavefront to track the eyes so that even if when the eyes move The same section of wavefront from the eyes is sampled.

32. ophthalmology Wavefront sensor as claimed in claim 26, it is characterised in that further comprise：

The lens between sampling element array and the position sensor device array before the wavelet are arranged on, are configured to image Spacing relaying and optical amplifier between the Image Speckle formed at spot plane by sampling element array before the wavelet are extremely The plane that the position sensor device array is arranged on.

33. a kind of ophthalmology Wavefront sensor, including：

Optical wavefront relay system, it is configured to the object wave from the anterior object plane positioned at patient's eye along beam path Before relay to wavefront image plane, the incident wavefront that the beam path can will have big power range at the object plane Relaying light beam is guided to the wavefront image plane；

Light beam scanner/the deflector set along the beam path, is configured to intercept and scan completely in two dimensions Wavefront relays light beam；

Position sensor device array, each of which position sensor device are configured to detection image spot barycenter relative to reference bit The two-dimensional deflection amount and the measurement signal of output indication two-dimensional deflection amount put；And

Sampling element array before wavelet, it is arranged on before the sensor device array of position and at the wavefront image plane, its Described in each sampling element before wavelet in sampling element array be configured to sample before the wavelet of repeated wavefront and will On corresponding position sensor device in sampled wavelet prefocusing to the position sensor device array,

Characterized in that, sampling element is physically spaced apart so that high diopter each other in this way before the wavelet The corresponding position corresponding to sampling element before the wavelet is only focused on before each sampled wavelet before scope object wave On sensor device.

34. ophthalmology Wavefront sensor as claimed in claim 33, it is characterised in that the optical wavefront relay system includes the One and second lens, each lens have diameter, focal length and optical axis, wherein the optical wavefront relay system is configured to edge The beam path will relay to positioned at described the before the object wave of the object plane at the front portion of the patient's eye One and second Fourier transform plane between lens and relays to the wavefront image plane, wherein selecting described first and second The incident wavefront relaying light of the focal length and diameter of lens will there is big power range at the object plane Beam is guided to the wavefront image plane, and wherein described light beam scanner/deflector is arranged on positioned at described first and At the Fourier transform plane between two lens.

35. ophthalmology Wavefront sensor as claimed in claim 33, it is characterised in that further comprise：

The lens between sampling element array and the position sensor device array before the wavelet are arranged on, are configured to image Spacing relaying and optical amplifier between the Image Speckle formed at spot plane by sampling element array before the wavelet are extremely The plane that the position sensor device array is arranged on.

36. a kind of ophthalmology Wavefront sensor, including：

First optical wavefront relay system, it is configured to from anterior first positioned at patient's eye along the first beam path Image plane before first wave is relayed to before the object wave of object plane, first beam path will can have at first object plane Image plane before the incident wavefront relaying light beam of big power range is guided to the first wave；

The second optical wavefront relay system with the second object plane before the first wave at image plane, is configured into one Step will relay to Fourier transform plane before the object wave from second object plane along the second beam path and relay To the second wavefront image plane, second beam path will can have described in big power range at first object plane Incident wavefront relaying light beam is guided to the second wavefront image plane；

Light beam scanner/the deflector being arranged at the Fourier transform plane, it is configured to intercept and scan completely described Wavefront relays light beam；

Position sensor device array, each of which position sensor device are configured to the barycenter of detection image spot relative to reference The amount of deflection of position and the measurement signal of amount of deflection described in output indication；And

Sampling element array before wavelet, it is arranged on position sensor device array before and is located at the second wavefront image plane Place, wherein before each sampling element before the wavelet in sampling element array is configured to sample the wavelet of repeated wavefront And by the corresponding position sensor device in sampled wavelet prefocusing to the position sensor device array,

Characterized in that, sampling element is physically spaced apart so that high diopter each other in this way before the wavelet The corresponding position corresponding to sampling element before the wavelet is only focused on before each sampled wavelet before scope object wave On sensor device.

37. ophthalmology Wavefront sensor as claimed in claim 36, it is characterised in that the first optical wavefront relay system bag The first and second lens are included, each lens have diameter, focal length and optical axis, wherein selecting the institute of first and second lens Focal length and diameter are stated so that the incident wavefront relaying light beam at first object plane with big power range to be drawn It is directed at image plane before the first wave；And

The second optical wavefront relay system includes the third and fourth lens, and each lens have diameter, focal length and optical axis, Wherein select the focal length and diameter of third and fourth lens big will further have at first object plane The incident wavefront relaying light beam of power range is guided to the second wavefront image plane.

38. ophthalmology Wavefront sensor as claimed in claim 36, it is characterised in that further comprise：

The lens between sampling element array and the position sensor device array before the wavelet are arranged on, are configured to image Spacing relaying and optical amplifier between the Image Speckle formed at spot plane by sampling element array before the wavelet are extremely The plane that the position sensor device array is arranged on.

39. a kind of ophthalmology Wavefront sensor, including：

Light source, it is configured to receive the reference signal for vibrating/pulsing with reference frequency and generates by the light arteries and veins under the reference frequency Rush the light beam formed；

Beam steering elements, it is configured to the beam emissions from the light source into patient's eye and wherein from the patient A part for the light beam that eyes return is formed before object wave of the light pulse under the reference frequency in the form of；

Optical wavefront relay system, it is configured to the object wave from the anterior object plane positioned at patient's eye along beam path Before relay to wavefront image plane, the incident wavefront that the beam path can will have big power range at the object plane Relaying light beam is guided to the wavefront image plane；

High frequency response position sensor device array, it is relative that each of which position sensor device is configured to detection image spot barycenter In the amount of deflection of reference position and the measurement signal of amount of deflection described in output indication；And

Sampling element array before wavelet, it is arranged on the high frequency response position sensor device array before and is located at the wavefront At image plane, wherein each sampling element before the wavelet in sampling element array is configured to sample repeated wavefront Before wavelet and by sampled wavelet prefocusing to the corresponding high frequency response in the high frequency response position sensor device array On the sensor device of position,

Characterized in that, sampling element is physically spaced apart so that high diopter each other in this way before the wavelet The corresponding high frequency corresponding to sampling element before the wavelet is only focused on before each sampled wavelet before scope object wave Respond on the sensor device of position.

40. ophthalmology Wavefront sensor as claimed in claim 39, it is characterised in that the optical wavefront relay system includes the One and second lens, each lens have diameter, focal length and optical axis, wherein selecting Jiao of first and second lens Away from diameter with by the wavefront at the object plane with big power range relaying light beam guide to the wavefront image plane.

41. ophthalmology Wavefront sensor as claimed in claim 39, it is characterised in that further comprise：

The lens between sampling element array and the high frequency response position sensor device array before the wavelet are arranged on, are configured Spacing between the Image Speckle formed at by Image Speckle plane by sampling element array before the wavelet relays and light Be amplified to the plane that the position sensor device array is arranged on.