CN104392881A - Ion source - Google Patents
Ion source Download PDFInfo
- Publication number
- CN104392881A CN104392881A CN201410521376.7A CN201410521376A CN104392881A CN 104392881 A CN104392881 A CN 104392881A CN 201410521376 A CN201410521376 A CN 201410521376A CN 104392881 A CN104392881 A CN 104392881A
- Authority
- CN
- China
- Prior art keywords
- microwave
- discharge cavity
- ion source
- window
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention brings forward an ion source. The ion source is composed of a microwave system, a cooling system, a microwave window, a discharge cavity, a lead-out system, a magnet and an air inlet pipe, and is characterized in that the magnet is composed of multiple separate permanent magnetic rings, the discharge cavity is made of transparent quartz glass, the discharge cavity is arranged in a microwave shielding casing, the microwave shielding casing is provided with multiple observation windows, the microwave window is composed of a ceramic sheet with a thickness of 15 mm and three boron nitride sheets each with a thickness of 3 mm, the microwave shielding casing is of an aluminum structure which is square-shaped outside and circular-shaped inside, and the microwave shielding casing is provided with multiple holes respectively for installing the microwave window, water charging and discharging of the cooling system, and the lead-out of the observation windows and ion beams.
Description
Technical field
The present invention relates to a kind of ion source.
Background technology
Along with developing rapidly of science and technology, because it has, ion source produces that many, the beam intensity of ionic species is large, good stability, repeatability are high, long service life, the advantage such as easy to maintenance, its range of application is increasingly extensive, although technology of ion source existing wide coverage in the prior art at present, but along with going deep into further of research, existing ionogenic performance can not meet current actual needs, needs a kind of novel ion source badly.
Summary of the invention
The invention provides a kind of ion source, it is by microwave system, cooling system, microwave window, discharge cavity, guiding system, magnet and air inlet pipe composition, it is characterized in that, magnet is made up of the permanent-magnetic clamp of multiple separation, discharge cavity is made up of transparent quartz glass, discharge cavity is arranged in micro-wave screening shell, micro-wave screening shell has multiple watch window, microwave window is made up of the boron nitride of a slice thickness to be the potsherd of 15mm and three thickness be 3mm, micro-wave screening shell is the structure of square-outside and round-inside made of aluminum, it has multiple hole, be respectively used to the installation of microwave window, the Inlet and outlet water of cooling system, the extraction of observation window and ion beam.
Embodiment
Below in conjunction with specific embodiment, set forth the present invention further.Should be understood that these embodiments are only not used in for illustration of the present invention to limit the scope of the invention.In addition should be understood that those skilled in the art can make various changes or modifications the present invention, and these equivalent form of values fall within the application's appended claims limited range equally after the content of having read the present invention's instruction.
Embodiment 1
This ion source, it is by microwave system, cooling system, microwave window, discharge cavity, guiding system, magnet and air inlet pipe composition, magnet is made up of the permanent-magnetic clamp that 4 are separated, discharge cavity is made up of transparent quartz glass, discharge cavity is arranged in micro-wave screening shell, micro-wave screening shell has multiple watch window, the size of observation window is 36mm × 36mm, microwave window is made up of the boron nitride of a slice thickness to be the potsherd of 15mm and three thickness be 3mm, micro-wave screening shell is the structure of square-outside and round-inside made of aluminum, it has multiple hole, be respectively used to the installation of microwave window, the Inlet and outlet water of cooling system, the extraction of observation window and ion beam.
Embodiment 2
This ion source, it is by microwave system, cooling system, microwave window, discharge cavity, guiding system, magnet and air inlet pipe composition, magnet is made up of the permanent-magnetic clamp that 5 are separated, 4 width are had to be the space of 5mm between permanent-magnetic clamp, discharge cavity is made up of transparent quartz glass, discharge cavity is arranged in micro-wave screening shell, micro-wave screening shell has multiple watch window, microwave window is made up of the boron nitride of a slice thickness to be the potsherd of 15mm and three thickness be 3mm, micro-wave screening shell is the structure of square-outside and round-inside made of aluminum, it has multiple hole, be respectively used to the installation of microwave window, the Inlet and outlet water of cooling system, the extraction of observation window and ion beam.
Embodiment 3
This ion source, it is by microwave system, cooling system, microwave window, discharge cavity, guiding system, magnet and air inlet pipe composition, magnet is made up of the permanent-magnetic clamp that 6 are separated, discharge cavity is made up of transparent quartz glass, discharge cavity is arranged in micro-wave screening shell, the external diameter of discharge cavity is 60mm, internal diameter is 50mm, for ion produces district, micro-wave screening shell has multiple watch window, microwave window is made up of the boron nitride of a slice thickness to be the potsherd of 15mm and three thickness be 3mm, micro-wave screening shell is the structure of square-outside and round-inside made of aluminum, it has multiple hole, be respectively used to the installation of microwave window, the Inlet and outlet water of cooling system, the extraction of observation window and ion beam.。
Above ion source, it meets the demand of user, and reduces production cost, is conducive to making full use of of energy-saving and emission-reduction and resource.
Claims (4)
1. an ion source, it is by microwave system, cooling system, microwave window, discharge cavity, guiding system, magnet and air inlet pipe composition, it is characterized in that, magnet is made up of the permanent-magnetic clamp of multiple separation, discharge cavity is made up of transparent quartz glass, discharge cavity is arranged in micro-wave screening shell, micro-wave screening shell has multiple watch window, microwave window is made up of the boron nitride of a slice thickness to be the potsherd of 15mm and three thickness be 3mm, micro-wave screening shell is the structure of square-outside and round-inside made of aluminum, it has multiple hole, be respectively used to the installation of microwave window, the Inlet and outlet water of cooling system, the extraction of observation window and ion beam.
2. ion source as claimed in claim 1, is characterized in that, described magnet is made up of the permanent-magnetic clamp that 4 are separated, and the size of described observation window is 36mm × 36mm.
3. ion source as claimed in claim 1, is characterized in that, described magnet is made up of the permanent-magnetic clamp that 5 are separated, and has 4 width to be the space of 5mm between described permanent-magnetic clamp.
4. ion source as claimed in claim 1, is characterized in that, described magnet is made up of the permanent-magnetic clamp that 6 are separated, and the external diameter of described discharge cavity is 60mm, and internal diameter is 50mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410521376.7A CN104392881A (en) | 2014-09-30 | 2014-09-30 | Ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410521376.7A CN104392881A (en) | 2014-09-30 | 2014-09-30 | Ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104392881A true CN104392881A (en) | 2015-03-04 |
Family
ID=52610764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410521376.7A Pending CN104392881A (en) | 2014-09-30 | 2014-09-30 | Ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104392881A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3920566C2 (en) * | 1989-06-23 | 1993-04-01 | Bruker - Franzen Analytik Gmbh, 2800 Bremen, De | |
| CN102117727A (en) * | 2011-01-25 | 2011-07-06 | 北京大学 | Electron cyclotron resonance ion source |
| CN103715054A (en) * | 2013-12-26 | 2014-04-09 | 青岛永通电梯工程有限公司 | Electro cyclotron resonance ion source |
-
2014
- 2014-09-30 CN CN201410521376.7A patent/CN104392881A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3920566C2 (en) * | 1989-06-23 | 1993-04-01 | Bruker - Franzen Analytik Gmbh, 2800 Bremen, De | |
| CN102117727A (en) * | 2011-01-25 | 2011-07-06 | 北京大学 | Electron cyclotron resonance ion source |
| CN103715054A (en) * | 2013-12-26 | 2014-04-09 | 青岛永通电梯工程有限公司 | Electro cyclotron resonance ion source |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150304 |