CN104391366B - A kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof - Google Patents
A kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof Download PDFInfo
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- CN104391366B CN104391366B CN201410690280.3A CN201410690280A CN104391366B CN 104391366 B CN104391366 B CN 104391366B CN 201410690280 A CN201410690280 A CN 201410690280A CN 104391366 B CN104391366 B CN 104391366B
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- reference block
- mirror
- precision reference
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof, belong to off axis reflector imaging optical system technical field.Described terahertz wave band off-axis incidence system includes measuring pedestal, primary mirror, secondary mirror, three mirrors, it is characterized in that, also include being arranged on the first measuring probe measured on pedestal, second measuring probe, 3rd measuring probe, and it is fixed on the first high-precision reference block of primary mirror side, it is fixed on the second high-precision reference block of secondary mirror side and is fixed on the 3rd high-precision reference block of three mirror sides, described first measuring probe, it is provided with range sensor on second measuring probe and the 3rd measuring probe, the first high-precision reference block is measured by range sensor, second high-precision reference block and the position of the 3rd high-precision reference block, attitude and degree of freedom information, then can get primary mirror, secondary mirror and the position of three mirrors, attitude and degree of freedom information, thus realize accurately debuging of large-scale off-axis incidence system.
Description
Technical field
The invention belongs to off axis reflector imaging optical system technical field, be specifically related to a kind of terahertz wave band off-axis
Three-mirror system and Method of Adjustment thereof.
Background technology
Computer-aided alignment due to have can realize simultaneously long-focus and big visual field, non-stop layer block,
Modulation transfer function (MTF) is high, to advantages such as veiling glare rejection ability are strong, become space remote sensing and measure one of system
Important component part.Its structure is as it is shown in figure 1, include primary mirror (1), secondary mirror (2), three mirrors (3) and picture
Face (4), the installation quality of computer-aided alignment mainly by the mutual locus of these three reflecting mirror,
Error between attitude and theoretical value is determined.But due to the complexity of its structure, (each optical element has 6
Individual degree of freedom) and asymmetry, and each reflecting mirror degree of freedom between separate, span relatively big, realize be
The high accuracy of system is debug extremely difficult.
At present, the assembling and setting method of computer-aided alignment mainly has two kinds: one to be auto-interference method,
As in figure 2 it is shown, i.e. send ball by being placed on the sphericity interferometer (5) of computer-aided alignment focus
Face light wave, complanation ripple after computer-aided alignment, outgoing beam is by one piece of standard flat mirror
(6) reflection after, form tested corrugated by backtracking, this corrugated again by after optical system with interferometer
Internal canonical reference spherical wave interferes, obtain interference fringe thus by Computer Aided Assembly Process Planning optimization at
Reason obtains unbalance of system amount.The application premise of the method is to be required to produce light source and the interference of spherical light wave
Stripe observable, therefore near ultraviolet, visible ray, near infrared band computer-aided alignment many
Use the method.But, for terahertz wave band off-axis incidence system: first terahertz wave band is anti-
Reflective surface is aluminized and rougher, it is impossible to reflection visible ray, therefore can not carry out auto-interference by visible ray；Its
Secondary terahertz light source power is more weak, is only miniature or small-sized terahertz optics system and provides light source, therefore terahertz
Hereby debuging of wave band off-axis incidence system cannot use auto-interference method.
The another kind of assembling and setting method of computer-aided alignment is space-location method, for small-sized from
Axle three-mirror system, can utilize high precision machine tool to process installation positioning datum when processing mounting bracket,
Ensure the accuracy of each reflector position, in installation process, utilize the high-precision measuring tool inspections such as slide gauge simultaneously
The site error of reflecting mirror；And for medium-sized off-axis incidence system, then use total powerstation, theodolite, survey
Locus, the attitude of reflecting mirror are measured by the instrument of surveying and mappings such as distance meter.The method is current terahertz wave band
The main Method of Adjustment of off-axis incidence system, but it is as volume and span increase, the operating wave of reflecting mirror
Long reduce, the position of reflecting mirror, attitude installation accuracy more and more higher, progressivelyed reach even more than
The ultimate precision of the instrument of surveying and mappings such as total powerstation, theodolite, diastimeter.Therefore for large-scale, the terahertz of short wavelength
Hereby for off-axis incidence system, high-precision debuging becomes a difficult problem.
Summary of the invention
In order to overcome Terahertz off-axis incidence system large-scale, short wavelength present in prior art to debug
A difficult problem, the invention provides a kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof, and this system exists
Each reflecting mirror picture frame side arranges a high-precision reference block, arranges measuring probe measuring, pass through on pedestal
Range sensor on measuring probe measures the position of high-precision reference block, attitude and degree of freedom information, obtains anti-
Penetrate the degree of freedom information of mirror, thus reach the purpose accurately debug.
A kind of terahertz wave band off-axis incidence system, including measuring pedestal, primary mirror, secondary mirror, three mirrors, its
Be characterised by, also include being arranged on measure on pedestal the first measuring probe, the second measuring probe, the 3rd measurement
Probe, and it is fixed on the first high-precision reference block of primary mirror side, it is fixed on the second high accuracy of secondary mirror side
Reference block and the 3rd high-precision reference block being fixed on three mirror sides, described first measuring probe, the second measurement are visited
It is provided with range sensor on head and the 3rd measuring probe, measures the first high-precision reference by range sensor
Block, the second high-precision reference block and the position of the 3rd high-precision reference block, attitude and degree of freedom information, then can obtain
To primary mirror, secondary mirror and the position of three mirrors, attitude and degree of freedom information, thus realize debuging of reflecting mirror.
Further, described high-precision reference block is fixed on the side of reflecting mirror by the way of welding.
The Method of Adjustment of a kind of terahertz wave band off-axis incidence system, comprises the following steps:
Step 1: be fixed on by three measuring probes on measurement pedestal, uses high precision machine tool to measuring on pedestal
Three measuring probes demarcate；
Step 2: use the result of laser interferometer three measuring probes calibrated to step 1 to compensate；
Step 3: be fixedly installed the first high-precision reference block in the side of primary mirror picture frame, the side of secondary mirror picture frame is solid
Surely arranging the second high-precision reference block, the side of three mirror picture frames is fixedly installed the 3rd high-precision reference block, through third wheel
Wide inspection obtains the position of high-precision reference block, attitude, degree of freedom and the position of reflecting mirror, attitude, degree of freedom
Corresponding relation；
Step 4: primary mirror, secondary mirror and three mirrors are individually fixed on moveable support, by primary mirror, secondary mirror and
Three mirrors are moved respectively near theoretical position, and first position and attitude to three reflecting mirrors adjusts roughly,
Then measuring probe measures the position of high-precision reference block, attitude and degree of freedom information by range sensor, i.e.
The available position of reflecting mirror, attitude and the information of degree of freedom, thus realize the accurate debugging of each reflecting mirror.
Wherein, above-mentioned primary mirror and corresponding first measuring probe of the first high-precision reference block, secondary mirror and the second high accuracy
Corresponding second measuring probe of reference block, three mirrors and corresponding 3rd measuring probe of the 3rd high-precision reference block.
The invention have the benefit that
1, the present invention is fixedly installed high-precision reference block by the picture frame side at each reflecting mirror, is debuging process
In with this reference block for measure object, the information of the position of reference block, attitude and 6 degree of freedom can by measure
Probe obtains, thus converses the information of each 6 degree of freedom of reflecting mirror, it is achieved large-scale Three mirror optical system
Accurately debug.
2, the present invention uses high precision machine tool to demarcate the absolute position of 3 measuring probes, and utilizes sharp
Optical interferometer kinematic error to lathe own corrects further, thus compensate 3 measuring probes of measurement system
The calibrated error of absolute position, obtains 3 more accurate absolute positions of measuring probe.
3, the present invention uses 18 high accuracy range sensors on measuring probe to determine 3 reflecting mirror reference blocks
Between relative position, attitude, thus obtain the relative position of reflecting mirror, attitude, it is achieved terahertz wave band from
Accurately debuging of axle three-mirror system.
Accompanying drawing explanation
Fig. 1 is the light path schematic diagram of computer-aided alignment.
Fig. 2 is the schematic diagram that auto-interference method debugs off-axis incidence system.
The schematic diagram of the terahertz wave band off-axis incidence system that Fig. 3 provides for the present invention.
Fig. 4 is high-precision reference block and measuring probe and the position relationship schematic diagram of reflecting mirror.
Fig. 5 is the schematic diagram using high precision machine tool to calibrate measuring probe.
Fig. 6 is the schematic diagram using high precision machine tool to demarcate measuring probe.
In figure, (1) is primary mirror, and (2) are secondary mirror, and (3) are three mirrors, and (4) are image planes, and (5) are that sphere is done
Interferometer, (6) are standard flat mirror, and (7) are the first measuring probe, and (8) are the second measuring probe, and (9) are
3rd measuring probe, (10) are the first high-precision reference block, and (11) are the second high-precision reference block, (12)
Being the 3rd high-precision reference block, (13), for measuring pedestal, (14) are machine tool reference block, and (15) are lathe master
Axle, (16) are machine tool movement platform.1,2,3,4,5,6 represent arrange on the measurement probe 6 away from
From sensor.
Detailed description of the invention
With embodiment the present invention done below in conjunction with the accompanying drawings and introduce further.
The schematic diagram of the terahertz wave band off-axis incidence system that Fig. 3 provides for the present invention, described Terahertz from
Axle three-mirror system includes measuring pedestal, primary mirror, secondary mirror and three mirrors, it is characterised in that also include being arranged on
Measure the first measuring probe (7) on pedestal, the second measuring probe (8), the 3rd measuring probe (9), and
It is fixed on the first high-precision reference block (10) of primary mirror side, is fixed on the second high-precision reference of secondary mirror side
Block (11) and be fixed on the 3rd high-precision reference block (12) of three mirror sides, described first measuring probe,
Being provided with range sensor on two measuring probes and the 3rd measuring probe, described first measuring probe passes through distance
Position, attitude and the degree of freedom information of sensor measurement the first high-precision reference block, described second measuring probe leads to
Crossing range sensor and measure the position of the second high-precision reference block, attitude and degree of freedom information, the described 3rd measures
Pop one's head in and measure the position of the 3rd high-precision reference block, attitude and degree of freedom information, then root by range sensor
Primary mirror, secondary mirror and the position of three mirrors is i.e. can get according to the corresponding relation between each high-precision reference block and each reflecting mirror
Put, attitude and degree of freedom information, thus realize debuging of reflecting mirror.
Further, described high-precision reference block is fixed on the side of reflecting mirror by the way of welding.
The Method of Adjustment of a kind of terahertz wave band off-axis incidence system, comprises the following steps:
Step 1: use high precision machine tool that three measuring probes on pedestal are demarcated: as it is shown in figure 5,
3 measuring probes are fixed in measurement pedestal (13), then measurement pedestal are installed to large-scale high-precision machine
On the mobile platform of bed, main shaft (15) 1 machine tool reference block (14) of upper installation of lathe, utilize this machine
The relative position of three measuring probes is demarcated by bed reference block with attitude.
Concrete calibration principle is: the original position of machine tool reference block is primary mirror measuring probe (the first measuring probe)
Near, now, primary mirror probe can be recorded by range sensor with the relative position between reference block, be respectively (d2,
d4)；When machine tool reference block is moved the distance of (D1, D2) to time at secondary mirror measuring probe by high precision machine tool,
Secondary mirror probe can be recorded by range sensor with the relative position between machine tool reference block, is respectively (d1, d3)；
Owing to the overall dimensions of high-precision reference block is known, for (W, L), then primary mirror probe is popped one's head in secondary mirror
Relative position be (d2+D1+W+d1, d4+D2+L+d3), between other reflecting mirrors relative position or
Throw off restraint the calibration principle of state ibid.
Step 2: use the result of laser interferometer three measuring probes calibrated to step 1 to compensate:
Although the repetitive positioning accuracy of current common large-sized numerical control machining center all can reach ± 5um within, but due to machine
The certainty of measurement of this measurement system is eventually impacted, in order to ensure lathe calibration result by the kinematic accuracy of bed
More accurate, more reliable, the kinematic accuracy of lathe is detected by available laser interferometer, and to calibration result
It is modified.
Step 3: be welded and fixed the first high-precision reference block in the side of primary mirror picture frame, the side weldering of secondary mirror picture frame
Connecing and fix the second high-precision reference block, the side of three mirror picture frames is welded and fixed the 3rd high-precision reference block, then profit
Carry out profile inspection with high-precision three-coordinate instrument, i.e. can get the position of high-precision reference block, attitude, freedom
Degree and the position of reflecting mirror, attitude, the corresponding relation of degree of freedom；
Step 4: primary mirror, secondary mirror and three mirrors are individually fixed on moveable support, first by each reflecting mirror
Be installed near theoretical position, carry out the adjustment of rough position and attitude, then by measuring probe away from
From the position of sensor measurement each high-precision reference block, attitude and its 6 degree of freedom in space coordinates
Information, i.e. can get the position of reflecting mirror, attitude and degree of freedom information, according to the relative position of each reflecting mirror and
Attitude and the difference of theoretical value, be adjusted the position of each reflecting mirror.
The laser interferance method used when the calibration result of measuring probe is compensated by the present embodiment is high accuracy machine
The common method of bed accuracy test, its certainty of measurement is high, generally reaches several nm, by laser interferometer pair
High precision machine tool calibration result compensates, and lathe can be made more accurate to the calibration result of the system of measurement；This reality
Execute the method utilizing 6DOF to position, be fixedly installed high-precision reference block in the picture frame side of each reflecting mirror,
During debuging, with this reference block for measuring reference, the information of its position, attitude and 6 degree of freedom can be by
Range sensor on measuring probe obtains, thus obtains the information of 6 degree of freedom of each reflecting mirror, it is achieved each
The accurate adjustment of reflecting mirror.
Claims (3)
1. a terahertz wave band off-axis incidence system, including measuring pedestal, primary mirror, secondary mirror, three mirrors,
It is characterized in that, also include being arranged on measure on pedestal the first measuring probe, the second measuring probe, the 3rd survey
Amount probe, and be fixed on the first high-precision reference block of primary mirror side, is fixed on the second high-precision of secondary mirror side
Degree reference block and the 3rd high-precision reference block being fixed on three mirror sides, described first measuring probe, the second measurement
It is provided with range sensor on probe and the 3rd measuring probe, measures the first high accuracy ginseng by range sensor
Examine block, the second high-precision reference block and the position of the 3rd high-precision reference block, attitude and degree of freedom information, then may be used
Obtain primary mirror, secondary mirror and the position of three mirrors, attitude and degree of freedom information, thus realize debuging of reflecting mirror.
Terahertz wave band off-axis incidence system the most according to claim 1, it is characterised in that institute
State the side that high-precision reference block is fixed on the reflecting mirror of correspondence by the way of welding.
3. a Method of Adjustment for terahertz wave band off-axis incidence system, comprises the following steps:
Step 1: be fixed on by three measuring probes on measurement pedestal, uses high precision machine tool to measuring on pedestal
Three measuring probes demarcate；
Step 2: use the result of laser interferometer three measuring probes calibrated to step 1 to compensate；
Step 3: be fixedly installed the first high-precision reference block in the side of primary mirror picture frame, the side of secondary mirror picture frame is solid
Surely arranging the second high-precision reference block, the side of three mirror picture frames is fixedly installed the 3rd high-precision reference block, through third wheel
Wide inspection obtains the position of high-precision reference block, attitude, degree of freedom and the position of reflecting mirror, attitude, degree of freedom
Corresponding relation；
Step 4: primary mirror, secondary mirror and three mirrors are individually fixed on moveable support, by primary mirror, secondary mirror and
Three mirrors are moved respectively near theoretical position, and first position and attitude to three reflecting mirrors adjusts roughly,
Then measuring probe measures the position of high-precision reference block, attitude and degree of freedom information by range sensor, i.e.
The available position of reflecting mirror, attitude and the information of degree of freedom, thus realize the accurate debugging of each reflecting mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410690280.3A CN104391366B (en) | 2014-11-25 | 2014-11-25 | A kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof |
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| CN201410690280.3A CN104391366B (en) | 2014-11-25 | 2014-11-25 | A kind of terahertz wave band off-axis incidence system and Method of Adjustment thereof |
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| CN104391366A CN104391366A (en) | 2015-03-04 |
| CN104391366B true CN104391366B (en) | 2016-12-07 |
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105116515A (en) * | 2015-07-30 | 2015-12-02 | 北京理工大学 | Off-axis tri-reflector zooming optical system adjusting method |
| CN106568578B (en) * | 2016-10-12 | 2019-01-25 | 中国电子科技集团公司第五十研究所 | A kind of the adjustment detector and its Method of Adjustment of off-axis reflection terahertz imaging system |
| CN106526884B (en) * | 2016-11-28 | 2018-11-09 | 中国科学院长春光学精密机械与物理研究所 | Large-caliber space optical camera lens assembling & adjusting system and Method of Adjustment |
| CN106405860B (en) * | 2016-12-08 | 2019-03-12 | 中国科学院长春光学精密机械与物理研究所 | Method of Adjustment based on refraction-reflection type infrared imaging optical system |
| CN110737082A (en) * | 2019-10-09 | 2020-01-31 | 电子科技大学 | terahertz wave long-distance quasi-optical transmission system |
| CN111175989A (en) * | 2020-01-14 | 2020-05-19 | 湖北航天技术研究院总体设计所 | Method and system for adjusting reference of main mirror and three mirrors of off-axis three-mirror system |
| KR102287242B1 (en) * | 2020-02-05 | 2021-08-10 | 한국표준과학연구원 | Optical having Mirror united with Body and Manufacturing Method thereof |
| CN111552054B (en) * | 2020-06-09 | 2021-12-28 | 河南平原光电有限公司 | Off-axis three-mirror optical system assembling and adjusting method |
| CN111879238B (en) * | 2020-07-31 | 2022-01-28 | 北京环境特性研究所 | Device and method for rapidly adjusting size of terahertz time-domain spectroscopy measurement quiet zone |
| CN112051233B (en) * | 2020-08-13 | 2021-06-01 | 中国科学院国家空间科学中心 | Small off-axis three-counter ionosphere imager frame device |
| CN113031296B (en) * | 2021-03-24 | 2022-08-19 | 长春长光智欧科技有限公司 | Method for assembling and adjusting metal-based free-form surface three-reflection optical system capable of being assembled and adjusted quickly |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144496A (en) * | 1989-07-19 | 1992-09-01 | Olympus Optical Co., Ltd. | Reflecting objective system including a negative optical power second mirror with increasing negative optical power off-axis |
| JP2772777B2 (en) * | 1995-10-12 | 1998-07-09 | 環境庁長官 | Sun tracking device |
| CN201331617Y (en) * | 2009-01-16 | 2009-10-21 | 中国科学院西安光学精密机械研究所 | Perfect reflection optic system |
| CN102062936B (en) * | 2010-12-24 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Off-axis TMA optical system for reducing processing and resetting difficulty |
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