CN104372313A - Preparation method of back electrode of thin film solar cell and thin film solar cell - Google Patents
Preparation method of back electrode of thin film solar cell and thin film solar cell Download PDFInfo
- Publication number
- CN104372313A CN104372313A CN201410513715.7A CN201410513715A CN104372313A CN 104372313 A CN104372313 A CN 104372313A CN 201410513715 A CN201410513715 A CN 201410513715A CN 104372313 A CN104372313 A CN 104372313A
- Authority
- CN
- China
- Prior art keywords
- substrate
- chitin
- preparation
- back electrode
- film solar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 46
- 239000010409 thin film Substances 0.000 title claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 121
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 65
- 229920002101 Chitin Polymers 0.000 claims abstract description 64
- 238000007747 plating Methods 0.000 claims abstract description 32
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 31
- 239000000126 substance Substances 0.000 claims abstract description 29
- 230000003197 catalytic effect Effects 0.000 claims abstract description 19
- 230000004913 activation Effects 0.000 claims abstract description 18
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- YPTUAQWMBNZZRN-UHFFFAOYSA-N dimethylaminoboron Chemical compound [B]N(C)C YPTUAQWMBNZZRN-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000001035 drying Methods 0.000 claims abstract description 8
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 33
- 239000008367 deionised water Substances 0.000 claims description 27
- 229910021641 deionized water Inorganic materials 0.000 claims description 27
- 150000002815 nickel Chemical class 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 15
- 238000002156 mixing Methods 0.000 claims description 13
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 10
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 9
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 9
- 238000003756 stirring Methods 0.000 claims description 9
- -1 polyethylene terephthalate Polymers 0.000 claims description 7
- 238000002604 ultrasonography Methods 0.000 claims description 7
- 229910000033 sodium borohydride Inorganic materials 0.000 claims description 5
- 239000012279 sodium borohydride Substances 0.000 claims description 5
- 239000001488 sodium phosphate Substances 0.000 claims description 5
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 claims description 5
- 229910000406 trisodium phosphate Inorganic materials 0.000 claims description 5
- 235000019801 trisodium phosphate Nutrition 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 3
- 239000000243 solution Substances 0.000 abstract description 42
- 239000011248 coating agent Substances 0.000 abstract description 12
- 238000000576 coating method Methods 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000006555 catalytic reaction Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 4
- 238000012986 modification Methods 0.000 abstract description 4
- 239000011259 mixed solution Substances 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- 238000007598 dipping method Methods 0.000 abstract 2
- 239000012459 cleaning agent Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000002932 luster Substances 0.000 abstract 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 abstract 1
- 229920002799 BoPET Polymers 0.000 description 16
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 14
- 230000008569 process Effects 0.000 description 9
- 229910052763 palladium Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 241000412565 Argentina sphyraena Species 0.000 description 2
- AILDTIZEPVHXBF-UHFFFAOYSA-N Argentine Natural products C1C(C2)C3=CC=CC(=O)N3CC1CN2C(=O)N1CC(C=2N(C(=O)C=CC=2)C2)CC2C1 AILDTIZEPVHXBF-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 235000016594 Potentilla anserina Nutrition 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- 238000006424 Flood reaction Methods 0.000 description 1
- 229910021617 Indium monochloride Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000010933 acylation Effects 0.000 description 1
- 238000005917 acylation reaction Methods 0.000 description 1
- 230000029936 alkylation Effects 0.000 description 1
- 238000005804 alkylation reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000026030 halogenation Effects 0.000 description 1
- 238000005658 halogenation reaction Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
- 238000006277 sulfonation reaction Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410513715.7A CN104372313B (en) | 2014-09-29 | 2014-09-29 | A kind of preparation method and thin-film solar cells of back electrode of thin film solar cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410513715.7A CN104372313B (en) | 2014-09-29 | 2014-09-29 | A kind of preparation method and thin-film solar cells of back electrode of thin film solar cell |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104372313A true CN104372313A (en) | 2015-02-25 |
CN104372313B CN104372313B (en) | 2018-07-13 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410513715.7A Active CN104372313B (en) | 2014-09-29 | 2014-09-29 | A kind of preparation method and thin-film solar cells of back electrode of thin film solar cell |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104372313B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109999865A (en) * | 2019-05-15 | 2019-07-12 | 台州学院 | A kind of preparation method of nickel phosphorus sulphur selenium elctro-catalyst |
CN116805655A (en) * | 2023-07-26 | 2023-09-26 | 环晟光伏(江苏)有限公司 | TOPCO battery preparation method and TOPCO battery prepared by same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06144811A (en) * | 1992-11-10 | 1994-05-24 | Mitsubishi Pencil Co Ltd | Metal-coated carbonaceous spring |
CN1124301A (en) * | 1994-12-08 | 1996-06-12 | 大伸化学株式会社 | Method for fixation of catalyst metal in the process of surface treatment for electroless plating |
CN101028599A (en) * | 2007-01-26 | 2007-09-05 | 南开大学 | Production of NiB amorphous alloy catalyst by chitose medium dispersing method |
CN101067206A (en) * | 2007-06-06 | 2007-11-07 | 南开大学 | ABS plastic surface non-palladium activating treatment new technology |
-
2014
- 2014-09-29 CN CN201410513715.7A patent/CN104372313B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06144811A (en) * | 1992-11-10 | 1994-05-24 | Mitsubishi Pencil Co Ltd | Metal-coated carbonaceous spring |
CN1124301A (en) * | 1994-12-08 | 1996-06-12 | 大伸化学株式会社 | Method for fixation of catalyst metal in the process of surface treatment for electroless plating |
CN101028599A (en) * | 2007-01-26 | 2007-09-05 | 南开大学 | Production of NiB amorphous alloy catalyst by chitose medium dispersing method |
CN101067206A (en) * | 2007-06-06 | 2007-11-07 | 南开大学 | ABS plastic surface non-palladium activating treatment new technology |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109999865A (en) * | 2019-05-15 | 2019-07-12 | 台州学院 | A kind of preparation method of nickel phosphorus sulphur selenium elctro-catalyst |
CN109999865B (en) * | 2019-05-15 | 2021-08-13 | 台州学院 | Preparation method of nickel-phosphorus-sulfur-selenium electrocatalyst |
CN116805655A (en) * | 2023-07-26 | 2023-09-26 | 环晟光伏(江苏)有限公司 | TOPCO battery preparation method and TOPCO battery prepared by same |
Also Published As
Publication number | Publication date |
---|---|
CN104372313B (en) | 2018-07-13 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: CSST E-CITY TECHNOLOGY (CHINA) CO., LTD. Free format text: FORMER OWNER: SHANGHAI KEHUI SOLAR ENERGY TECHNOLOGY CO., LTD. Effective date: 20150520 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150520 Address after: 518000, C, building 2, wisdom Plaza, 4068 overseas Chinese incense Road, Shenzhen, Guangdong, Nanshan District Applicant after: ANKE SMART CITY TECHNOLOGY (PRC) Co.,Ltd. Address before: 200092, 379, 383, 4024 Quyang Road, Shanghai, Hongkou District, room four Applicant before: SHANGHAI KEHUI SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 518000 room 1306, Press Plaza, Shennan Avenue, Futian District, Shenzhen, Guangdong Patentee after: ANKE ROBOT CO.,LTD. Address before: 518000 2 floor, C 2, wisdom Plaza, 4068 Qiao Qiao Road, Nanshan District, Guangdong. Patentee before: ANKE SMART CITY TECHNOLOGY (PRC) Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180905 Address after: 518000 Shenzhen, Guangdong Guangming New District Guangming Street Wan Dai Heng hi tech Industrial Park 5, 5 floor. Patentee after: SHENZHEN ZHONGZHI KECHUANG ROBOT Co.,Ltd. Address before: 518000 room 1306, Press Plaza, Shennan Avenue, Futian District, Shenzhen, Guangdong Patentee before: ANKE ROBOT CO.,LTD. |