CN104363001A - Novel piezoelectric filter - Google Patents

Novel piezoelectric filter Download PDF

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Publication number
CN104363001A
CN104363001A CN201410703892.1A CN201410703892A CN104363001A CN 104363001 A CN104363001 A CN 104363001A CN 201410703892 A CN201410703892 A CN 201410703892A CN 104363001 A CN104363001 A CN 104363001A
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CN
China
Prior art keywords
resonator
piezoelectric
bulk acoustic
film bulk
node
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Pending
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CN201410703892.1A
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Chinese (zh)
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不公告发明人
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Individual
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Individual
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Priority to CN201410703892.1A priority Critical patent/CN104363001A/en
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Abstract

The invention discloses a novel piezoelectric filter. The novel piezoelectric filter is composed of a thin film cavity sound resonator which is of a long-strip-sheet structure and made of ferroelectric ceramic materials through sintering, high-pressure polarizing and other technologies. The inverse piezoelectric effect and the direct piezoelectric effect of the piezoelectric materials are adopted, the energy conversion of electric energy-mechanical energy-electric energy is finished, and a novel paster device of band-pass filtering is achieved. The novel piezoelectric filter has the advantages of being simple in structure, easy to manufacture and free of electromagnetic interference, combustion and short circuit and is suitable for the occasions such as microwaves and radio frequency.

Description

A kind of novel piezoelectric filter
Technical field
The present invention relates to a kind of filter, particularly a kind of piezo strip bandpass filter.Belong to communication and electronic application field, particularly in radio circuit, there is important application.
Background technology
Piezoelectric filter is a kind of novel piezoelectric device starting in later stage the 1950's to develop, and is invented the earliest by c.A.Rosen in 1956.Along with lead zirconate titanate (PbZrTiO3) is contour and height the appearance of piezoelectric, the development of piezoelectric transformer just achieves significant progress.Current piezoelectric filter is in the high-tension apparatuses such as kinescope, tonotron, Xerox, electrostatic precipitation, low-power laser pipe, ion generator.
Due to piezoelectric filter, to have size little, and structure is simple, non-combustible, radiation hardness, the advantage such as highly reliable is the main cause that piezoelectricity obtains extensive use, because piezo strip bandpass filter is a kind of Novel Filter, it has many advantages, piezoelectric filter is just promoted the use of in filter apparatus, piezoelectric filter to start to be applied to radar, laser, in the device such as electrostatic precipitation and duplicating, replace conventional filter.
The present invention is directed to above problem, can effectively solve, to meet system requirements, and stability is high, volume is little, compact conformation, processing are simple, applied widely.
Summary of the invention
The invention provides and a kind of there is the Novel belt bandpass filter that structure is simple, volume is little, stability is high.
The technical scheme realizing the object of the invention is: a kind of novel piezo strip bandpass filter, comprises input port 1, output port 2, five Film Bulk Acoustic: Resonator ; Film Bulk Acoustic: Resonator X1 one end is connected with port one, and the other end is connected with node 1; Film Bulk Acoustic: Resonator X2 one end is connected with node 1, and the other end is connected with node 2; Film Bulk Acoustic: Resonator X3 one end is connected with port 2, and the other end is connected with node 2; Film Bulk Acoustic: Resonator X4 one end is connected with node 1, and the other end is connected to the ground and connects; Film Bulk Acoustic: Resonator X5 one end is connected with node 2, and the other end is connected to the ground and connects; Input port 1 and input port 2 all connect 50 ohmages.Wherein, Film Bulk Acoustic: Resonator adopts string configuration, adopts all-wave mould resonance, make through techniques such as sintering and high voltage polarizations with ferroelectric ceramic material, utilize inverse piezoelectric effect and the direct piezoelectric effect of piezoelectric, complete the power conversion of electric energy-mechanic energy-electric energy, realize bandpass filtering.
Compared with prior art, the invention provides a kind of compact conformation, feature that stability is high.
Accompanying drawing explanation
Fig. 1 is a kind of novel piezoelectric filter thin films chamber of the present invention acoustic resonator.
Fig. 2 is a kind of novel piezoelectric filter circuit configuration figure of the present invention.
Fig. 3 is a kind of novel piezoelectric filter of the present invention S parameter characteristic curve.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
The present invention is a kind of piezo strip bandpass filter, and this piezoelectric filter is made up of Film Bulk Acoustic: Resonator.Described Film Bulk Acoustic: Resonator adopts string configuration, adopt all-wave mould resonance, make through techniques such as sintering and high voltage polarizations with ferroelectric ceramic material, utilize inverse piezoelectric effect and the direct piezoelectric effect of piezoelectric, complete the power conversion of electric energy-mechanic energy-electric energy, realize bandpass filtering.Its Film Bulk Acoustic: Resonator as shown in Figure 1, Film Bulk Acoustic: Resonator is based on positive inverse piezoelectric effect, in energy converting between mechanical process, when piezoelectric filter input adds the alternating voltage of certain frequency, due to inverse piezoelectric effect, make piezoelectric transformer generation stretching vibration along its length, the electric energy of input is converted to mechanical energy.Owing to there is extensional vibration, by direct piezoelectric effect, mechanical energy is converted to electric energy, makes output have voltage to export.Because the reflected umpedance of piezoelectric filter increases with the reduction of load impedance, use piezoelectric filter, power supply is without the need to separately establishing short-circuit protection circuit.Composition graphs 2, a kind of novel piezo strip bandpass filter of the present embodiment, its centre frequency is 503.3KHz, 3dB is 0.1KHz, and its circuit structure comprises input port 1, output port 2, five Film Bulk Acoustic: Resonator ; Piezoelectric resonance unit X1 one end is connected with port one, and the other end is connected with node 1; Piezoelectric resonance unit X2 one end is connected with node 1, and the other end is connected with node 2; Film Bulk Acoustic: Resonator X3 one end is connected with port 2, and the other end is connected with node 2; Film Bulk Acoustic: Resonator X4 one end is connected with node 1, and the other end is connected to the ground and connects; Film Bulk Acoustic: Resonator X5 one end is connected with node 2, and the other end is connected to the ground and connects; Input port 1 and input port 2 all connect 50 ohmages.Composition graphs 3, can be found out by its simulation result, and this is with this kind of piezo strip bandpass filter to can be used in certain pulse multichannel receiver, and through the modulation and demodulation of FSK, Output rusults is good.Result is used to show that this device has good degree of suppression to channel receiver modulating pulse and noise level, effectively overcome and adopt the problem that in traditional design process, design volume is excessive, can ensure that device obtains best channel signal transmission effect, its structure is simple, make easily, without electromagnetic interference, do not burn and the feature of not short circuit.Be applicable to the occasion such as microwave and radio frequency.
The above is the preferred embodiments of the present invention, does not limit the present invention, and for a person skilled in the art, the present invention can have various change and change.Within the spirit and principles in the present invention all, institute changes, equivalent replacement, improvement etc., is all included within protection scope of the present invention.

Claims (2)

1. a novel piezoelectric filter, is characterized in that: comprise input port 1, output port 2, five Film Bulk Acoustic: Resonator ; Film Bulk Acoustic: Resonator X1 one end is connected with port one, and the other end is connected with node 1; Film Bulk Acoustic: Resonator X2 one end is connected with node 1, and the other end is connected with node 2; Film Bulk Acoustic: Resonator X3 one end is connected with port 2, and the other end is connected with node 2; Film Bulk Acoustic: Resonator X4 one end is connected with node 1, and the other end is connected to the ground and connects; Film Bulk Acoustic: Resonator X5 one end is connected with node 2, and the other end is connected to the ground and connects; Input port 1 and input port 2 all connect 50 ohmages.
2. according to the piezoelectric filter described in claim 1, it is characterized in that: described Film Bulk Acoustic: Resonator adopts string configuration, adopt all-wave mould resonance, make through techniques such as sintering and high voltage polarizations with ferroelectric ceramic material, utilize inverse piezoelectric effect and the direct piezoelectric effect of piezoelectric, complete the power conversion of electric energy-mechanic energy-electric energy, realize bandpass filtering.
CN201410703892.1A 2014-11-30 2014-11-30 Novel piezoelectric filter Pending CN104363001A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410703892.1A CN104363001A (en) 2014-11-30 2014-11-30 Novel piezoelectric filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410703892.1A CN104363001A (en) 2014-11-30 2014-11-30 Novel piezoelectric filter

Publications (1)

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CN104363001A true CN104363001A (en) 2015-02-18

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112557774A (en) * 2020-11-18 2021-03-26 瑞声新能源发展(常州)有限公司科教城分公司 Piezoelectric performance testing method and structure
CN112557775A (en) * 2020-11-18 2021-03-26 瑞声新能源发展(常州)有限公司科教城分公司 Film layer structure test system and film layer electrical parameter test structure
CN112615599A (en) * 2020-11-27 2021-04-06 中国电子科技集团公司第十三研究所 Mason model of film chamber acoustic resonator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1758535A (en) * 2004-10-08 2006-04-12 因芬尼昂技术股份公司 Filter structure and method for designing filter
US20060244552A1 (en) * 2004-11-10 2006-11-02 Samsung Electronics Co., Ltd. Monolithic RF filter
US20080055021A1 (en) * 2006-09-01 2008-03-06 Fujitsu Media Limited Acoustic wave device, filter and duplexer
CN204206130U (en) * 2014-11-30 2015-03-11 王少夫 A kind of novel piezoelectric filter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1758535A (en) * 2004-10-08 2006-04-12 因芬尼昂技术股份公司 Filter structure and method for designing filter
US20060244552A1 (en) * 2004-11-10 2006-11-02 Samsung Electronics Co., Ltd. Monolithic RF filter
US20080055021A1 (en) * 2006-09-01 2008-03-06 Fujitsu Media Limited Acoustic wave device, filter and duplexer
CN204206130U (en) * 2014-11-30 2015-03-11 王少夫 A kind of novel piezoelectric filter

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
马元: "低温烧结PZT基压电陶瓷的研究与制备", 《万方学位论文数据库》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112557774A (en) * 2020-11-18 2021-03-26 瑞声新能源发展(常州)有限公司科教城分公司 Piezoelectric performance testing method and structure
CN112557775A (en) * 2020-11-18 2021-03-26 瑞声新能源发展(常州)有限公司科教城分公司 Film layer structure test system and film layer electrical parameter test structure
CN112557774B (en) * 2020-11-18 2022-03-29 瑞声新能源发展(常州)有限公司科教城分公司 Piezoelectric performance testing method and structure
WO2022104961A1 (en) * 2020-11-18 2022-05-27 瑞声声学科技(深圳)有限公司 Piezoelectric property testing method and structure
CN112615599A (en) * 2020-11-27 2021-04-06 中国电子科技集团公司第十三研究所 Mason model of film chamber acoustic resonator

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Application publication date: 20150218