CN104358979B - A kind of split type ultraprecise static air pressure single axle table - Google Patents
A kind of split type ultraprecise static air pressure single axle table Download PDFInfo
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- CN104358979B CN104358979B CN201410588399.XA CN201410588399A CN104358979B CN 104358979 B CN104358979 B CN 104358979B CN 201410588399 A CN201410588399 A CN 201410588399A CN 104358979 B CN104358979 B CN 104358979B
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Abstract
The present invention is a kind of split type ultraprecise static air pressure single axle table, including rotation of rotary table axle system, drive shaft system and work top, also include static air pressure shaft coupling, described drive shaft system is connected by static air pressure shaft coupling and drives rotation of rotary table axle system, described work top is coaxially fixed in rotation of rotary table axle and fastens, it is provided with sealed bead bearing in described drive shaft system, the axis hole of described sealed bead bearing is affixed with driving motor coaxle, described static air pressure shaft coupling is the most affixed with sealed bead bearing, it is provided with radial air hydrostatic bearing in described rotation of rotary table axle system, described radial air hydrostatic bearing is the most affixed with static air pressure shaft coupling, it is coaxially arranged with thrust aerostatic bearing in the axis hole end of described aerostatic bearing.Using technical solution of the present invention, installation accuracy requires to reduce, and debugs technique and simplifies, and the rotating accuracy of turntable and plane positioning precision are high, and static air pressure shaft coupling has automatic fine tuning ability, and kinematic accuracy is high.
Description
Technical field
The invention belongs to a kind of ultraprecise drive technology field, be specifically related to a kind of split type ultraprecise static air pressure single axle table.
Background technology
In ultraprecise drive technology field, ultraprecise single axle table is the key foundation element in precision machinery technology field, it is all kinds of high-accuracy scientific instrument, equipment provides ultra-precise revolving motion benchmark and angular displacement mete-wand, is one of the key technical indexes weighing precision mechanical system technical performance.The development process of ultraprecise single axle table covers numerous subjects and the technical fields such as mechanical engineering, electronic engineering, mechanism dynamic, material science, precision engineering design, accurate ultra Technology, accurate ultra detection technique, having condensed the up-to-date scientific and technological achievement in numerous subject and field, it is Modern Design Technology, the comprehensive embodiment of modern advanced manufacturing technique and concrete practice.Traditional single axle table structure is due to reasons such as own structural characteristics, require that structure installation accuracy is high, debug complex process, and vibrate, the harmful effect transmission by drive mechanism such as impact, directly affecting the kinematic accuracy of turntable, this is that existing drive mechanism is inevitable.
Split type ultraprecise static air pressure single axle table in the present invention uses static air pressure Technology design overall structure, and rotation of rotary table axle system uses aerostatic bearing, and radial air hydrostatic bearing ensures the control of turntable radial beat eccentricity, improves the rotating accuracy of turntable；Thrust aerostatic bearing ensures the control of turntable end face run-out amount, improves the plane positioning precision of turntable.Drive shaft system uses the dense ball bearing shafting structure of high rigidity, it is provided that accurate, constant driving force.It is connected by static air pressure shaft coupling between drive shaft system with rotation of rotary table axle system, succinctly effectively reduce the impact on slave unit motion such as the vibration of drive system generation, impact, owing to split type ultraprecise static air pressure single axle table self can carry out the position adjustment of trace by air film etc., installation accuracy requires to be substantially reduced.
Summary of the invention
The problem that it is an object of the invention to overcome prior art to exist, kind of a split type ultraprecise static air pressure single axle table is provided, this device overcomes the vibration that tradition single axle table prior art exists, tilt, installation requirement precision is high, debug the shortcomings such as complex process, rotation of rotary table axle system is independently debug with drive shaft system split and is connected by static air pressure shaft coupling afterwards, the driving force that can realize providing drive system is constant, pass to rotation of rotary table structure accurately, installation accuracy requires to reduce, debug technique to be greatly simplified, in motor process, in static pressure chamber, air film can be with the automatic adjusting position of trace and attitude, will not produce lateral, swing radially, operate steadily, system reliability is high.
For realizing above-mentioned technical purpose, reaching above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of split type ultraprecise static air pressure single axle table, including rotation of rotary table axle system, drive shaft system and work top, also include static air pressure shaft coupling, described drive shaft system is connected by static air pressure shaft coupling and drives rotation of rotary table axle system, described work top is coaxially fixed in rotation of rotary table axle and fastens, it is provided with sealed bead bearing in described drive shaft system, the axis hole of described sealed bead bearing is affixed with driving motor coaxle, described static air pressure shaft coupling ensures coaxial with sealed bead bearing by rim of the mouth, location, and fasten with screw, it is provided with radial air hydrostatic bearing in described rotation of rotary table axle system, described radial air hydrostatic bearing ensures coaxial with static air pressure shaft coupling by rim of the mouth, location, and fasten with screw, it is coaxially arranged with thrust aerostatic bearing in the axis hole end of described aerostatic bearing.
Further, described drive shaft system includes drive shaft system support, and described sealed bead bearing is coaxially mounted in the axis hole of drive shaft system support.
Further, described rotation of rotary table axle system includes rotation of rotary table axle system support, and described radial air hydrostatic bearing is coaxially mounted in the axis hole of static air pressure axle system overcoat, and static air pressure axle system overcoat is coaxially mounted in the axis hole of rotation of rotary table axle system support.
Further, described drive shaft system support bottom is provided with multiple leveling lower margin for adjusting drive shaft system level.
Further, described drive shaft system support top is provided with and multiple supports seat with the leveling of the relative position of drive shaft system for adjusting rotation of rotary table axle system.
Further, described leveling lower margin is for leveling drive shaft system.
Further, described leveling supports seat for leveling rotation of rotary table axle system.
The invention has the beneficial effects as follows:
1, split type ultraprecise static air pressure single axle table can independently ensure rotation of rotary table axle system, drive shaft system, the structure precision of static air pressure shaft coupling, and installation accuracy requires to reduce, and debugs technique and is greatly simplified.
2, rotation of rotary table axle system uses aerostatic bearing, and radial air hydrostatic bearing ensures the control of turntable radial beat eccentricity, improves the rotating accuracy of turntable；Thrust aerostatic bearing ensures the control of turntable end face run-out amount, improves the plane positioning precision of turntable.
3, static air pressure coupling device is in normal operation, static air pressure thrust plate can be with the automatic adjusting position of trace and attitude in static pressure chamber, ensure the precision of static air pressure shaft coupling motion, swing lateral, radially will not be produced, the most there is not rotary motion etc..
Accompanying drawing explanation
Fig. 1 is overall structure axonometric chart of the present invention；
Fig. 2 is overall structure sectional view of the present invention；
Fig. 3 is rotation of rotary table of the present invention axle system schematic views；
Fig. 4 is turntable of the present invention drive shaft system schematic views；
Fig. 5 is static air pressure shaft coupling structure schematic views of the present invention；
Fig. 6 is work top structural representation of the present invention.
Label declaration in figure: 1, rotation of rotary table axle system, 2, static air pressure shaft coupling, 3, leveling support seat, 4, drive shaft system, 5, leveling lower margin, 6, drive shaft system support, 7, drive motor, 8, dense ball bearing shafting, 9, rotation of rotary table axle system support, 10, static air pressure axle system overcoat, 11, radial air hydrostatic bearing, 12, thrust aerostatic bearing, 13, work top.
Detailed description of the invention
Below with reference to the accompanying drawings and in conjunction with the embodiments, the present invention is described in detail.
nullReferring to figs. 1 through shown in Fig. 6，A kind of split type ultraprecise static air pressure single axle table，Including rotation of rotary table axle system 1、Drive shaft is 4 and work top 13，Also include static air pressure shaft coupling 2，Described drive shaft is 4 to be connected by static air pressure shaft coupling 2 and drive rotation of rotary table axle system 1，Described work top 13 is coaxially fixed in rotation of rotary table axle system 1，Described drive shaft is to be provided with sealed bead bearing 8 in 4，The axis hole of described sealed bead bearing 8 is the most affixed with driving motor 7，Described static air pressure shaft coupling 2 ensures coaxial with sealed bead bearing 8 by rim of the mouth, location，And fasten with screw，It is provided with radial air hydrostatic bearing 11 in described rotation of rotary table axle system 1，Described radial air hydrostatic bearing 11 ensures coaxial with static air pressure shaft coupling 2 by rim of the mouth, location，And fasten with screw，It is coaxially arranged with thrust aerostatic bearing 12 in the axis hole end of described aerostatic bearing 11.
In the present embodiment, dense ball bearing shafting 8 is coaxially mounted in the axis hole of drive shaft system support 6, it is ensured that the rotating accuracy of axle system and end face run-out amount are in claimed range；Fix after further drivings motor 7 and dense ball bearing shafting 8 being co-axially mounted, it is ensured that drive shaft be 4 operate steadily under electric machine operation state, friction, noiselessness etc..
It is 4 appointment Support Positions that leveling lower margin 5 is installed to the drive shaft after assembling, and by adjusting height and the angle of leveling lower margin 5, adjusting drive shaft is the level of 4.
Leveling supporting seat 3 and is fixedly installed to drive shaft is the Support Position of 4, supports height and the angle of seat 3 by adjusting leveling, adjusts level.
It is the output shaft end of 4 that static air pressure shaft coupling 2 is coaxially mounted to drive shaft.
Static air pressure axle system overcoat 10 is coaxially mounted in the axis hole of rotation of rotary table axle system support 9, further, radial air hydrostatic bearing 11 is coaxially mounted in the axis hole of static air pressure axle system overcoat 10, it is ensured that the rotating accuracy of axle system and end face run-out amount are in claimed range；Further thrust aerostatic bearing 12 is coaxially mounted to the axis hole end of radial air hydrostatic bearing 11, it is ensured that the rotating accuracy of axle system and end face run-out amount are in claimed range；Ensure rotation of rotary table axle system 1 operate steadily down, friction, noiselessness etc..
Work top 13 is coaxially fixedly mounted in rotation of rotary table axle system 1, it is ensured that the rotating accuracy of work top 13 and end face run-out amount are in claimed range.
Rotation of rotary table axle system 1 is co-axially mounted with static air pressure shaft coupling 2, and rotation of rotary table axle system 1 is fixedly installed to leveling supports the Support Position of seat 3；Adjusting rotation of rotary table axle system 1 and drive shaft is the relative position of 4, when drive shaft is 4 offer driving force, rotation of rotary table axle system 1 can be passed to driving force is constant, accurate, smoothly, it is ensured that operate steadily under working state of system, friction, noiselessness etc. by static air pressure shaft coupling 2.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.All within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. made, should be included within the scope of the present invention.
Claims (7)
- null1. a split type ultraprecise static air pressure single axle table，Including rotation of rotary table axle system (1)、Drive shaft system (4) and work top (13)，It is characterized in that，Also include static air pressure shaft coupling (2)，Described drive shaft system (4) is connected by static air pressure shaft coupling (2) and is driven rotation of rotary table axle system (1)，Described work top (13) is coaxially fixed on rotation of rotary table axle system (1)，It is provided with sealed bead bearing (8) in described drive shaft system (4)，The axis hole of described sealed bead bearing (8) is the most affixed with driving motor (7)，Described static air pressure shaft coupling (2) ensures coaxial with sealed bead bearing (8) by rim of the mouth, location，And fasten with screw，It is provided with radial air hydrostatic bearing (11) in described rotation of rotary table axle system (1)，Described radial air hydrostatic bearing (11) ensures coaxial with static air pressure shaft coupling (2) by rim of the mouth, location，And fasten with screw，It is coaxially arranged with thrust aerostatic bearing (12) in the axis hole end of described aerostatic bearing (11).
- Split type ultraprecise static air pressure single axle table the most according to claim 1, it is characterised in that described drive shaft system (4) includes drive shaft system support (6), described sealed bead bearing (8) is coaxially mounted in the axis hole of drive shaft system support (6).
- Split type ultraprecise static air pressure single axle table the most according to claim 1, it is characterized in that, described rotation of rotary table axle system (1) includes rotation of rotary table axle system's support (9), described radial air hydrostatic bearing (11) is coaxially mounted in the axis hole of static air pressure axle system's overcoat (10), and static air pressure axle system's overcoat (10) is coaxially mounted in the axis hole of rotation of rotary table axle system's support (9).
- Split type ultraprecise static air pressure single axle table the most according to claim 2, it is characterised in that described drive shaft system support (6) bottom is provided with multiple leveling lower margin (5) for adjusting drive shaft system (4) level.
- Split type ultraprecise static air pressure single axle table the most according to claim 2, it is characterized in that, described drive shaft system support (6) top is provided with multiple leveling support seat (3) for adjusting rotation of rotary table axle system (1) and the relative position of drive shaft system (4).
- Split type ultraprecise static air pressure single axle table the most according to claim 4, it is characterised in that described leveling lower margin (5) is used for leveling drive shaft system (4).
- Split type ultraprecise static air pressure single axle table the most according to claim 5, it is characterised in that described leveling supports seat (3) for leveling rotation of rotary table axle system (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410588399.XA CN104358979B (en) | 2014-10-29 | 2014-10-29 | A kind of split type ultraprecise static air pressure single axle table |
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| CN201410588399.XA CN104358979B (en) | 2014-10-29 | 2014-10-29 | A kind of split type ultraprecise static air pressure single axle table |
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| CN104358979A CN104358979A (en) | 2015-02-18 |
| CN104358979B true CN104358979B (en) | 2016-08-31 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109356999A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder high precision overloading |
| CN109356998A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder heavy duty |
| CN109386590A (en) * | 2018-12-12 | 2019-02-26 | 中核新科（天津） 精密机械制造有限公司 | Retarder high precision dense bead shafting |
| CN113124055B (en) * | 2021-04-27 | 2023-03-14 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN117086655B (en) * | 2023-10-19 | 2024-01-19 | 无锡星微科技有限公司杭州分公司 | High-precision microminiature air static pressure air floatation turntable |
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| ES2176092B1 (en) * | 2000-07-26 | 2004-01-16 | Palomer Enrique Pedro | OPERATING DEVICE FOR ROTATING PLATFORM. |
| CN101338790B (en) * | 2008-08-13 | 2010-05-12 | 哈尔滨工业大学 | Gas/ solid two-phase composite gyration basic method and device |
| TW201224310A (en) * | 2010-12-01 | 2012-06-16 | Prec Machinery Res & Amp Dev Ct | Gas bearing device |
| CN203317051U (en) * | 2013-07-18 | 2013-12-04 | 北京微纳精密机械有限公司 | Ultraprecise aerostatic rotating table |
| CN103542241B (en) * | 2013-09-25 | 2016-06-29 | 广州市昊志机电股份有限公司 | A kind of air-float turntable |
| CN204254186U (en) * | 2014-10-29 | 2015-04-08 | 中国科学院苏州生物医学工程技术研究所 | A kind of split type ultraprecise static air pressure single axle table |
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Effective date of registration: 20170524 Address after: No. 25, No. 32, science and technology road, Miyun Economic Development Zone, Beijing, -14 Patentee after: Zhongke fine sense of intelligence (Beijing) Technology Co., Ltd. Address before: Kolding road high tech Zone of Suzhou City, Jiangsu Province, No. 88 215000 Patentee before: Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences |
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Effective date of registration: 20190724 Address after: Kolding road high tech Zone of Suzhou City, Jiangsu Province, No. 88 215000 Patentee after: Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences Address before: No. 25, No. 32, science and technology road, Miyun Economic Development Zone, Beijing, -14 Patentee before: Zhongke fine sense of intelligence (Beijing) Technology Co., Ltd. |