CN104330470A - SAW sensor-based detection apparatus - Google Patents
SAW sensor-based detection apparatus Download PDFInfo
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- CN104330470A CN104330470A CN201410522221.5A CN201410522221A CN104330470A CN 104330470 A CN104330470 A CN 104330470A CN 201410522221 A CN201410522221 A CN 201410522221A CN 104330470 A CN104330470 A CN 104330470A
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Abstract
The present invention discloses a SAW sensor-based detection apparatus capable of achieving sealing of a biological detection liquid and having characteristics of low sealing cost, simplicity and efficiency. The SAW sensor-based detection apparatus comprises a bottom plate, a substrate and a SAW wafer, wherein the bottom plate is provided with a detection circuit, the substrate is fixed on the bottom plate, the substrate surface contacting the bottom plate is provided with a wafer groove and a plurality of conducting wire grooves, the SAW wafer is arranged in the wafer groove and is fixed on the bottom plate, the bottom of the wafer groove is provided with an annular groove, a sealing ring is arranged in the annular groove, the sealing ring, the sensing film of the SAW, and the bottom of the wafer groove enclose to form a sealed detection space, and the middle portion of the annular groove is provided with a draining hole. With the detection apparatus, the biological detection liquid does not leak, it can be ensured that the detection result is accurate, the biological detection liquid easily flows into the detection space due to the presence of the draining hole, and the apparatus is suitable for popularization and application in the technical field of detection equipment.
Description
Technical field
The present invention relates to checkout equipment technical field, especially relate to a kind of pick-up unit based on SAW sensor.
Background technology
SAW is that British scientist Rayleigh finds in the process of the Study of Seismic ripple eighties in 19th century, but Technology Restriction at that time, SAW does not obtain practical application; Nineteen sixty-five American scientist White, Voltmer invention can piezoelectric crystal material on the surface excitation table ground roll metal interdigital transducers and surface acoustic wave signal effectively detected, make SAW widespread use.
SAW belongs to piezo-type sensor, be substrate with piezoelectric, utilize piezoelectric effect, realize electric signal by interdigital transducer and acoustical signal is changed mutually, have that structure is simple, volume is little, cost is low, the response time is short, the advantage such as highly sensitive, good reliability, be applied to the aspects such as analytical chemistry, environmental monitoring and gas on-site detection.
SAW sensor is divided into delay line type resonator type sensor by structure.Resonator type volume is little, quality factor value is high, frequency characteristic good, return loss is less, but sensitive area is smaller, is usually used in physical sensors; Delay-line structure has long sonic transmissions approach, can obtain very large sensitive area, simultaneously simplicity of design, require low to SAW (Surface Acoustic Wave) device craft precision, but frequency characteristic does not have resonator good.
Delay line type SAW sensor wafer structure comprises electrode, piezoelectric substrate, sensor film, input interdigital transducer, output interdigital transducer five parts.Pumping signal acts on input interdigital transducer, is converted to surface acoustic wave signal by inverse piezoelectric effect, and surface acoustic wave signal is propagated through piezoelectric substrate and arrived output interdigital transducer, is converted to electric signal by direct piezo electric effect.Under SAW device sensor film is exposed to certain environment, because environment is as the change of humidity, temperature, pressure, quality, viscosity, density etc., surface acoustic wave velocity of wave is caused to change, thus cause input/output signal frequency, phase place, amplitude to produce difference, get final product heat transfer agent according to input, output signal difference.
The existing pick-up unit bodily form based on SAW sensor is huge, manufacturing cost is high, detection efficiency is low, real-time detection demand cannot be met, and the existing pick-up unit based on SAW sensor to liquid without sealing or take plastics solidification sealing means, without sealing, tracer liquid is leaked, testing result is inaccurate simultaneously, plastics solidification sealing forms permanent seal, and device is difficult to dismounting.In addition, the existing pick-up unit based on SAW sensor adopts wire, electrode slice, electrode needle to connect detection line, and configuration is loaded down with trivial details, processing cost is high.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of can realization biological detection liquid sealing and low, the simple and effective pick-up unit based on SAW sensor of sealing means cost.
The present invention solves the problems of the technologies described above adopted technical scheme: based on the pick-up unit of SAW sensor, should comprise base plate, matrix, SAW wafer, described base plate is provided with testing circuit, described SAW wafer comprises piezoelectric substrate, sensor film, input interdigital electrode, output interdigital electrode, described sensor film, input interdigital electrode, output interdigital electrode are all arranged on the same surface of piezoelectric substrate, described input interdigital electrode, output interdigital electrode are separately positioned on the both sides of sensor film, described input interdigital electrode is connected with the input electrode for accessing external signal, described input electrode is connected with testing circuit, described output interdigital electrode is connected with the output electrode for outputing signal, described output electrode is connected with testing circuit, described matrix is fixed on base plate, the surface that described matrix contacts with base plate is provided with wafer slots and multiple metallic channel, described SAW wafer to be arranged in wafer slots and to be fixed on base plate, described multiple metallic channel is separately positioned on the both sides of wafer slots, the bottom land of described wafer slots is provided with ring groove, O-ring seal is provided with in described ring groove, the sensor film of described SAW wafer is towards the bottom land of wafer slots and the sensor film of described O-ring seal and SAW, the bottom land of wafer slots surrounds an airtight detection space jointly, the middle part of described ring groove has conduction hole, described detection space is in communication with the outside by conduction hole.
Further, described base plate adopts pcb board to be made.
Be further, described testing circuit comprises signal incoming end, signal output part, the first connecting electrode, the second connecting electrode, described signal incoming end is connected with the first connecting electrode, described signal output part is connected with the second connecting electrode, between described signal incoming end and the first connecting electrode, between signal output part and the second connecting electrode, be provided with build-out resistor, described input electrode is connected with the first connecting electrode, and described output electrode is connected with the second connecting electrode.
Further, the surface area of described sensor film is greater than the circle inner area of O-ring seal.
Further, described base plate and matrix are bolted.
Further, described bolt adopt in hexagonal round head bolt and interior hexagonal round head bolt adopts nylon material to be made.
Further, described matrix adopts polymethyl methacrylate materials to be made.
Further, described piezoelectric substrate adopts S-T quartz to be made.
Further, described sensor film, input interdigital electrode, output interdigital electrode, input electrode, output electrode all adopt Au material to be made.
Further, described O-ring seal adopts silica gel material to be made.
The invention has the beneficial effects as follows: by the bottom land in wafer slots, ring groove is set, in ring groove, O-ring seal is set, the sensor film of SAW wafer is towards the bottom land of wafer slots and the sensor film of described O-ring seal and SAW, the bottom land of wafer slots surrounds an airtight detection space jointly, the middle part of ring groove has conduction hole, described detection space is in communication with the outside by conduction hole, when detecting biological detection liquid, biological detection liquid flows in detection space by conduction hole, because detection space is airtight, biological detection liquid can not be leaked, can ensure that testing result is more accurate simultaneously, and due to the existence of conduction hole, biological detection liquid can be made easily to flow in detection space, without the need to carrying out any dismounting work, very easy to use, in addition, the sealing of detection space adopts O-ring seal pressurized to produce, sealing means is simply effective, cost is low, moreover SAW wafer is placed in wafer slots, SAW wafer can be effectively prevented to be subjected to displacement in vibration processes.
Accompanying drawing explanation
Fig. 1 is the three-dimensional structure schematic diagram of the pick-up unit based on SAW sensor of the present invention;
Fig. 2 is the cross sectional representation of the pick-up unit based on SAW sensor of the present invention;
Fig. 3 is SAW chip architecture schematic diagram of the present invention;
Fig. 4 is the S11 transport property figure of the pick-up unit that the present invention is based on SAW sensor;
Fig. 5 is the S12 transport property figure of the pick-up unit that the present invention is based on SAW sensor;
Fig. 6 is the S12 time-delay characteristics figure of the pick-up unit that the present invention is based on SAW sensor;
Fig. 7 is the impedance Smith chart of the pick-up unit that the present invention is based on SAW sensor;
Fig. 8 be the present invention is based on the pick-up unit reality of SAW sensor during the theory and practice parameter contrast figure that tests;
Description of reference numerals: base plate 1, matrix 2, SAW wafer 3, piezoelectric substrate 301, sensor film 302, input interdigital electrode 303, output interdigital electrode 304, input electrode 305, output electrode 306, wafer slots 4, metallic channel 5, ring groove 6, O-ring seal 7, conduction hole 8, bolt 9.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described.
As shown in Figure 1, 2, 3, based on the pick-up unit of SAW sensor, base plate 1, matrix 2, SAW wafer 3 should be comprised, described base plate 1 be provided with testing circuit, described SAW wafer 3 comprises piezoelectric substrate 301, sensor film 302, input interdigital electrode 303, output interdigital electrode 304, described sensor film 302, input interdigital electrode 303, output interdigital electrode 304 is all arranged on the same surface of piezoelectric substrate 301, described input interdigital electrode 303, output interdigital electrode 304 is separately positioned on the both sides of sensor film 302, described input interdigital electrode 303 is connected with the input electrode 305 for accessing external signal, described input electrode 305 is connected with testing circuit, described output interdigital electrode 304 is connected with the output electrode 306 for outputing signal, described output electrode 306 is connected with testing circuit, described matrix 2 is fixed on base plate 1, the surface that described matrix 2 contacts with base plate 1 is provided with wafer slots 4 and multiple metallic channel 5, described SAW wafer 3 to be arranged in wafer slots 4 and to be fixed on base plate 1, described multiple metallic channel 5 is separately positioned on the both sides of wafer slots 4, the bottom land of described wafer slots 4 is provided with ring groove 6, O-ring seal 7 is provided with in described ring groove 6, the sensor film 302 of described SAW wafer 3 is towards the bottom land of wafer slots 4 and the sensor film 302 of described O-ring seal 7 and SAW, the bottom land of wafer slots 4 surrounds an airtight detection space jointly, the middle part of described ring groove 6 has conduction hole 8, described detection space is in communication with the outside by conduction hole 8.By arranging ring groove 6 at the bottom land of wafer slots 4, O-ring seal 7 is set in ring groove 6, the sensor film 302 of SAW wafer 3 is towards the bottom land of wafer slots 4 and the sensor film 302 of described O-ring seal 7 and SAW, the bottom land of wafer slots 4 surrounds an airtight detection space jointly, the middle part of ring groove 6 has conduction hole 8, described detection space is in communication with the outside by conduction hole 8, when detecting biological detection liquid, biological detection liquid flows in detection space by conduction hole 8, because detection space is airtight, biological detection liquid can not be leaked, can ensure that testing result is more accurate simultaneously, and due to the existence of conduction hole 8, biological detection liquid can be made easily to flow in detection space, without the need to carrying out any dismounting work, very easy to use, in addition, the sealing of detection space adopts O-ring seal 7 pressurized to produce, sealing means is simply effective, cost is low, moreover SAW wafer 3 is placed in wafer slots 4, SAW wafer 3 can be effectively prevented to be subjected to displacement in vibration processes.
In order to guarantee the qualitative and quantitative analysis of biological detection liquid, should be that single use, cost are low based on pick-up unit of SAW sensor.
In order to simplify the testing circuit layout that base plate 1 is arranged, cut down finished cost height.Base plate 1 of the present invention preferably adopts pcb board to be made, such testing circuit can be printed on pcb board, realize wireless layout, pcb board volume is little, quality light, be beneficial to mechanization production, the overall volume of pick-up unit can be reduced, cut down finished cost, select pcb board as base plate 1, its circuit has the advantages such as highly integrated, high reliability, productibility are strong.
In order under the prerequisite of detection accuracy ensureing testing circuit, simplify the structure of testing circuit as much as possible, described testing circuit comprises signal incoming end, signal output part, first connecting electrode, second connecting electrode, described signal incoming end is connected with the first connecting electrode, described signal output part is connected with the second connecting electrode, between described signal incoming end and the first connecting electrode, build-out resistor is provided with between signal output part and the second connecting electrode, described input electrode 305 is connected with the first connecting electrode, described output electrode 306 is connected with the second connecting electrode.The testing circuit structure of this structure is simple, easy to process, can greatly cut down finished cost.Input electrode 305 is connected with the first connecting electrode, output electrode 306 is connected with the second connecting electrode, SAW wafer 3 is made to be connected into testing circuit, signal incoming end, signal output part facilitate being connected into of external resonant frequency measuring instrument, and build-out resistor can reduce reflection wave on transmission line, realize the maximum transmitted of energy.
In order to ensure detect accuracy, ensure biological detection also with sensor film 302 Full connected, therefore, the surface area of described sensor film 302 should be greater than the circle inner area of O-ring seal 7.
In order to avoid SAW wafer 3 to be subjected to displacement in vibration processes further, described base plate 1 is fixed by bolt 9 with matrix 2.
Described bolt 9 adopts interior hexagonal round head bolt 9 and interior hexagonal round head bolt 9 adopts nylon material to be made.Interior hexagonal round head bolt 9, in pick-up unit, except connecting bottom board 1 and matrix 2 play except fastening effect, plays the effect of balance, bracing or strutting arrangement simultaneously.The material of bolt 9 is nylon plastic(s), has the advantages such as good electrical insulating property, wear-resistant, weatherability.
Described matrix 2 adopts polymethyl methacrylate materials to be made, and polymetylmethacrylate has the high grade of transparency, is convenient to observe testing process, and PMMA is macromolecule light transmissive material the most excellent at present, reaches 92%; Secondly, polymetylmethacrylate has chemical-resistant reagent, solvent resistance, can avoid matrix 2 and biological detection liquid generation chemical reaction; Moreover polymetylmethacrylate has can resistance to bases, can resistance to salt and grease class, resistance to fat hydrocarbon, water insoluble, methyl alcohol, glycerine etc., can avoid matrix 2 and biological detection liquid generation etching reaction; In addition, polymetylmethacrylate has resistance to weathering, its serviceable life is longer, PMMA has excellent resistance to weathering, test through natural ageing test, transmittance slightly declines, color and luster slightly yellowing, other physical property does not almost change, finally, polymetylmethacrylate has workability-organic glass by lathe grinding, drilling machine Drilling operation, also can with the molding bonded such as acetone, chloroform, simultaneously also can with blowing, inject, to extrude etc. the method processing of plastic shaping
In order to make SAW wafer 3, there is good Detection results, described piezoelectric substrate 301 adopts S-T quartz to be made, and described sensor film 302, input interdigital electrode 303, output interdigital electrode 304, input electrode 305, output electrode 306 all adopt Au material to be made.
Further, described O-ring seal 7 adopts silica gel material to be made.The acting as of O-ring seal 7 prevents because biological detection liquid invades electrode, circuit and the short circuit that causes, silica gel material, and sealing property is fabulous, effectively can prevent leakage; Silica gel totally nontoxic is tasteless, do not produce objectionable impurities at high temperature simultaneously, can ensure not produce any impact to detection.
Fig. 4 is the S11 transport property of the pick-up unit that the present invention is based on SAW sensor, Fig. 5 is the S12 transport property of the pick-up unit that the present invention is based on SAW sensor, Fig. 6 is the S12 time-delay characteristics of the pick-up unit that the present invention is based on SAW sensor, Fig. 7 is the impedance Smith chart of the pick-up unit that the present invention is based on SAW sensor, can draw according to Fig. 4,5,6,7: should be 78.600000MHz based on the pick-up unit resonance frequency of SAW sensor, propagation delay time is 2.5 μ s, and the pick-up unit equiva lent impedance based on SAW sensor is 46.802-j*22.123 Ω.
Fig. 8 be the present invention is based on the pick-up unit reality of SAW sensor during test theory and practice parameter contrast, as can be seen from the figure the pick-up unit resonance frequency based on SAW sensor is 78.600000MHz, its theoretical value is 78.950000MHz, mass effect is caused by the Au electrode on ST-quartz substrate top, the known pick-up unit based on SAW sensor has excellent transport property, its transmission delay is 2.5 μ s, can ignore on the impact of device practical application; Its impedance is 46.802-j*22.123 Ω, close with theoretical value 50 Ω, ensure that the energy of test macro can maximizedly put on sensor, thus improves the sensitivity of pick-up unit further.Can draw according to mass effect, the sensitivity that the present invention is based on the pick-up unit of SAW sensor can arrive 10
-12g, the error effect of this pick-up unit is minimum, can ignore.
Claims (10)
1. based on the pick-up unit of SAW sensor, it is characterized in that: comprise base plate (1), matrix (2), SAW wafer (3), (1) is provided with testing circuit to described base plate, described SAW wafer (3) comprises piezoelectric substrate (301), sensor film (302), input interdigital electrode (303), output interdigital electrode (304), described sensor film (302), input interdigital electrode (303), output interdigital electrode (304) is all arranged on the same surface of piezoelectric substrate (301), described input interdigital electrode (303), output interdigital electrode (304) is separately positioned on the both sides of sensor film (302), described input interdigital electrode (303) is connected with the input electrode (305) for accessing external signal, described input electrode (305) is connected with testing circuit, described output interdigital electrode (304) is connected with the output electrode (306) for outputing signal, described output electrode (306) is connected with testing circuit, described matrix (2) is fixed on base plate (1), the surface that described matrix (2) contacts with base plate (1) is provided with wafer slots (4) and multiple metallic channel (5), described SAW wafer (3) to be arranged in wafer slots (4) and to be fixed on base plate (1), described multiple metallic channel (5) is separately positioned on the both sides of wafer slots (4), the bottom land of described wafer slots (4) is provided with ring groove (6), O-ring seal (7) is provided with in described ring groove (6), the sensor film (302) of described SAW wafer (3) is towards the bottom land of wafer slots (4) and the sensor film (302) of described O-ring seal (7) and SAW, the bottom land of wafer slots (4) surrounds an airtight detection space jointly, the middle part of described ring groove (6) has conduction hole (8), described detection space is in communication with the outside by conduction hole (8).
2. as claimed in claim 1 based on the pick-up unit of SAW sensor, it is characterized in that: described base plate (1) adopts pcb board to be made.
3. as claimed in claim 2 based on the pick-up unit of SAW sensor, it is characterized in that: described testing circuit comprises signal incoming end, signal output part, first connecting electrode, second connecting electrode, described signal incoming end is connected with the first connecting electrode, described signal output part is connected with the second connecting electrode, between described signal incoming end and the first connecting electrode, build-out resistor is provided with between signal output part and the second connecting electrode, described input electrode (305) is connected with the first connecting electrode, described output electrode (306) is connected with the second connecting electrode.
4., as claimed in claim 1 based on the pick-up unit of SAW sensor, it is characterized in that: the surface area of described sensor film (302) is greater than the circle inner area of O-ring seal (7).
5. as claimed in claim 1 based on the pick-up unit of SAW sensor, it is characterized in that: described base plate (1) is fixed by bolt (9) with matrix (2).
6. as claimed in claim 5 based on the pick-up unit of SAW sensor, it is characterized in that: described bolt (9) adopts interior hexagonal round head bolt (9) and interior hexagonal round head bolt (9) adopts nylon material to be made.
7. as claimed in claim 1 based on the pick-up unit of SAW sensor, it is characterized in that: described matrix (2) adopts polymethyl methacrylate materials to be made.
8. as claimed in claim 1 based on the pick-up unit of SAW sensor, it is characterized in that: described piezoelectric substrate (301) adopts S-T quartz to be made.
9. as claimed in claim 1 based on the pick-up unit of SAW sensor, it is characterized in that: described sensor film (302), input interdigital electrode (303), output interdigital electrode (304), input electrode (305), output electrode (306) all adopt Au material to be made.
10. as claimed in claim 1 based on the pick-up unit of SAW sensor, it is characterized in that: described O-ring seal (7) adopts silica gel material to be made.
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| CN105445366A (en) * | 2015-10-30 | 2016-03-30 | 中国人民解放军理工大学气象海洋学院 | Duplex surface acoustic wave device-based compensation dew-point sensor |
| CN107209153A (en) * | 2015-02-27 | 2017-09-26 | 京瓷株式会社 | Detect the assay method and detection body fluid sensor of body fluid |
| CN107415726A (en) * | 2016-05-11 | 2017-12-01 | 福特全球技术公司 | Wireless traction battery force snesor |
| CN108474764A (en) * | 2015-11-06 | 2018-08-31 | Qorvo美国公司 | Acoustic resonator equipment and offer air-tightness and surface-functionalized manufacturing method |
| CN112649128A (en) * | 2020-11-30 | 2021-04-13 | 华东理工大学 | Sensing device and method for measuring three-dimensional contact stress |
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| CN109765269B (en) * | 2018-12-27 | 2020-07-28 | 西安交通大学 | Sound wave driven blood coagulation testing system |
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| CN105445366B (en) * | 2015-10-30 | 2018-08-17 | 中国人民解放军理工大学气象海洋学院 | Dew point transducer based on two-way SAW device offset-type |
| CN108474764A (en) * | 2015-11-06 | 2018-08-31 | Qorvo美国公司 | Acoustic resonator equipment and offer air-tightness and surface-functionalized manufacturing method |
| CN108474764B (en) * | 2015-11-06 | 2021-12-10 | Qorvo美国公司 | Acoustic resonator device and manufacturing method providing gas tightness and surface functionalization |
| CN107415726A (en) * | 2016-05-11 | 2017-12-01 | 福特全球技术公司 | Wireless traction battery force snesor |
| CN112649128A (en) * | 2020-11-30 | 2021-04-13 | 华东理工大学 | Sensing device and method for measuring three-dimensional contact stress |
| CN112649128B (en) * | 2020-11-30 | 2021-11-26 | 华东理工大学 | Sensing device and method for measuring three-dimensional contact stress |
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