CN104325738B - A kind of hard coat of cold rolling disc flying shear and preparation method thereof - Google Patents

A kind of hard coat of cold rolling disc flying shear and preparation method thereof Download PDF

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Publication number
CN104325738B
CN104325738B CN201410557025.1A CN201410557025A CN104325738B CN 104325738 B CN104325738 B CN 104325738B CN 201410557025 A CN201410557025 A CN 201410557025A CN 104325738 B CN104325738 B CN 104325738B
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cold rolling
flying shear
rolling disc
metal
disc flying
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CN104325738A (en
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周艳文
王复栋
孟彪
吴法宇
王明磊
李清海
张瑜
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Haian Taiyuan University Of Science And Technology Research And Development Center For High End Equipment And Rail Transit Technology
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University of Science and Technology Liaoning USTL
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B9/041Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering

Abstract

The invention provides hard coat of a kind of cold rolling disc flying shear and preparation method thereof, improve the performance indications of existing cold rolling disc flying shear.Hard coat is divided into three layers: one layer to be the metal transfer bottom connected with substrate, two layers of rich metal intermediate layer being to be deposited on metal transfer bottom end face, and three layers is the ceramic blankets being deposited on rich metal intermediate layer end face.The preparation of hard coat includes: the exterior washings of cold rolling disc flying shear;The internal washing of cold rolling disc flying shear;Metal transfer bottom is applied on cold rolling disc flying shear surface;Metal transfer bottom end face applies rich metal intermediate layer;Nano metal nitride or nitrogen carbide ceramic blankets is applied at rich metal intermediate layer end face.The layer structure of coating of the present invention has good wearability, resistance to impact and corrosion resistance.On the premise of keeping cold rolling disc flying shear original interstice precision, cutting surface accuracy and organizational structure, its hardness can be effectively improved, improve wear-resistant and impact resistance.

Description

A kind of hard coat of cold rolling disc flying shear and preparation method thereof
Technical field
The present invention relates to layer structure of covering and preparation method thereof on metal cutting tool surface, particularly A kind of hard coat of cold rolling disc flying shear and preparation method thereof.
Background technology
Cold rolling disc flying shear generally uses cold work die steel to make, and upper and lower two disc flying shears coordinate to be made With.Circle shear should be able to meet some strict requirements.First, gap precision between two disc flying shears, it ensures Steel plate is cut off and shear surface not crimping under shear action.Second, the dimensional accuracy of disc flying shear body, It is to ensure that between two flying shears gap uniformly, precondition accurately.3rd, disc flying shear cutting edge is sharp.4th, In atmosphere, not there is not corrosion under room temperature in disc flying shear.Therefore, the design of cold rolling disc flying shear requires its size Precision and stability are high, hardness is high, wearability is good, resistance to impact is strong, has certain oxidation resistance.
Existing cold rolling disc flying shear is with cold work die steel as raw material, sets according to long term production data Meter, there is certain dimensional accuracy and stability, wear-resistant, impact resistance and oxidation resistance.For cold rolling circle Dish flying shear is in the margin of tolerance not changing its surface accuracy, it is provided that a kind of non-metal kind hard coat, is into one Step improves its mar proof, resistance to impact and non-oxidizability, thus improves the effective way in its service life.
Consult pertinent literature, open (bulletin) number: the CN102296269B of patent, CN102296271B, CN101208461B and CN102634753A discloses some hard multi-layer coatings and technology of preparing, such as multilamellar gold Belong to and nitride, multilayer diamond-like etc.;Its preparation method has: chemical and physical vapor deposition Deng;And coated part, such as piston, fine measuring instrument, cutting tool etc..Above discussion discloses various multilamellar Ganoine thin film application on multiple parts, does not mention the hard multi-layer coating technology of circle shear.Above-mentioned many Layer hard coat highlights its high-temperature self-lubrication and coating stress Volume control, and low frictional factor DLC is suitableeer For seal wear-resistant part and high temperature workpiece;Titanium silicon proportioning alternation coating strives increasing matrix and coating binding force. Preparation method has the conventional film plating process of the magnetron sputtering in physical vapour deposition (PVD) and arc ion plating, and chemistry CVD method.For disc flying shear in use, to coating abrasion performance, dimensional stability requirements same Time, higher to its impact resistance.For avoiding garden dish flying shear phase structure change, it is unsuitable for using ambient temperature Prepared by too high chemical gaseous phase depositing process.And the hardness of metal and nitride alternate multiple thereof is inadequate, DLC is more It is used for self-lubricating aspect.Therefore the present invention proposes a kind of coating from metal transfer to hard coat knot Structure, and on disc flying shear, prepare this coating with plasma enhancing magnetically controlled sputter method.
Summary of the invention
The invention provides hard coat of a kind of cold rolling disc flying shear and preparation method thereof, improve existing cold rolling circle The performance indications of dish flying shear.
The hard coat of a kind of cold rolling disc flying shear, this coating is divided into three layers: one layer for the metal connected with substrate Transition bottom, thickness is 0.001-1 micron, preferably 0.005-0.5 micron;Two layers for being deposited on metal transfer The rich metal intermediate layer of at least two kinds of elements comprised in V Me and IV V Me race elements of bottom end face, Thickness is 0.001-1 micron, preferably 0.1-0.5 micron;Three layers for being deposited on rich metal intermediate layer end face On nano metal nitride or nitrogen carbide ceramic blankets, surface layer includes V Me or comprises nano amorphous IV V Me race elements of phase, nano metal nitride or nitrogen carbide ceramic surface layer thickness are that 0.1-10 is micro- Rice, preferably 2-5 micron.
IV described group Ⅴ element is a kind in carbon, silicon or nitrogen or the combination of 2-3 kind;Me is in metal material Titanium, aluminum or chromium in a kind or 2-3 kind combination.
Described metal transfer bottom is the one in Ti, Al or Cr, preferred Ti metal.
Described rich metal intermediate layer is: when the reacting gas of interpolation is nitrogen, for rich titanium nitride layer; The reacting gas added is when being nitrogen and silane, for rich titanium containing nano amorphous Si3N4The nitrogen carbide layer of phase; The reacting gas added is nitrogen and silane, when the metal of use is titanium, aluminum and chromium, for rich Titanium, aluminum and Chromium containing nano amorphous Si3N4The metal carbonitrides layer of phase.
In described nano metal nitride or nitrogen carbide ceramic blankets, V Me preferred T iN;Comprise nanometer Amorphous Si3N4IV V Me element preferred nanometer composite Ti SiCN layer or nanometer composite Ti AlCrSiCN.
Described nano amorphous phase be atomic ratio be the Si of 43%Si and 57%N3N4, total content is less than atomic ratio 5%.
Described containing nano amorphous phase Si3N4In phase coating, C atom is from forming Si during plated film3N4Needed for mutually three Methyl-monosilane (Si (CH3)3H) amount.Form atomic ratio 1% amorphous Si3N4Phase, produces the metal carbides of 12% Phase, remaining is metal nitride phase.
In described nanometer composite Ti SiCN coating, Ti atomic ratio is the 50% of total atom ratio;Nano combined In TiAlCrSiCN coating, Ti, Al and Cr sum is the 50% of total atom ratio, and wherein Ti, Al, Cr divide Wei 0-35%, 0-15% and 0-15% of total atom ratio.
The preparation method of the hard coat of a kind of cold rolling disc flying shear, the method comprises the steps:
The exterior washings of the most cold rolling disc flying shear: use percentage by weight 1-10% sodium hydroxide aqueous alkali, Ultrasonic cleaning 5-30 minute at 30 DEG C-50 DEG C, clear water rinses 2-3 time, and aerator is dried, the most ultrasonic Ripple alcohol washes 10-30 minute, after deionized water rinses 1-2 time, compressed air or nitrogen dry up, drying baker Interior 50 DEG C-200 DEG C are incubated 30-60 minute, and work piece hoisting enters coater;
The internal washing of the most cold rolling disc flying shear: coater base vacuum is evacuated to 3x10-3Below Pa, vacuum chamber adds Heat, to 100 DEG C-300 DEG C °, is incubated 30-120 minute, removes residual gas in vacuum chamber, returns to vacuum chamber Benefit argon, to 1-2Pa, opens tungsten filament, and to heater current 10-30A, pulsed bias power supply is biasing on matrix Pressure, Pulse Process Parameters is 100-300W power, 60KHz frequency, 50% dutycycle;Tungsten filament biasing 50~150V, produce and strengthen plasma, disc flying shear is implemented internal plasma and cleans 10-60 minute;
C. on cold rolling disc flying shear, hard coat is applied: this coating is divided into three layers, i.e. at the bottom of metal transfer Layer, rich metal intermediate layer and nano metal nitride or nitrogen carbide ceramic blankets, use magnetic control to spatter Penetrating and plasma enhancing magnetically controlled sputter method, specific implementation process is as follows:
(1), after cold rolling disc flying shear internal washing, reduce argon flow amount, be 0.2-1Pa to vacuum pressure, Set workpiece rotary speed 30-100 rev/min, open matrix Dc bias 25-150V, open magnetic control target electricity Source;
(2) metal transfer bottom is applied on cold rolling disc flying shear surface: target power set is 1-5KW, 60KHz Frequency and 50-80% dutycycle.Plated film 1-10 minute;
(3) on metal transfer bottom end face, rich metal intermediate layer is applied: open reacting gas, reaction The GN 2 intake is 5-15sccm, trimethyl silane 15-40sccm, continues plated film 15-60 minute;
(4) in rich metal intermediate layer end face applying nano metal nitride or nitrogen carbide ceramic blankets: Increase nitrogen flow to 10-50sccm, continuation plated film 5 hours;
(5) close all power supplys and gas, keep vacuum cooled 2-3 hour, open coater, take out plating Cold rolling disc flying shear after film.
In order to layer structure of the present invention has gratifying result, the hardness level of each layer is critically important.Gold Belong to the hardness of transition bottom and rich metal intermediate layer less than nano metal nitride or nitrogen carbide ceramic watch Surface layer, plays cushion effect between matrix and nano metal nitride or nitrogen carbide ceramic blankets.Layer The surface layer of shape structure can be selected according to its required performance and purposes.When nano metal titanium nitride configures Time on laminar surface, it is adaptable to shear general carbon steel sheet;Containing nano amorphous Si3N4The nano metal nitrogen of phase When compound or nitrogen carbide are arranged on laminar surface, while being adapted to cut through ordinary carbon steel, it is also suitably for shearing and closes Gold cold-rolled steel sheet, and be suitable to shearing steel plate in antioxidation, corrosion-resistant environment.
The present invention is compared with existing similar technique, and it significantly has the beneficial effect that: the present invention forms coating Layer structure has good wearability, resistance to impact and corrosion resistance.Keeping original of cold rolling disc flying shear Gap precision, cut surface accuracy and organizational structure on the premise of, its hardness can be effectively improved, improve wear-resistant and resistance to Impact property.
Accompanying drawing explanation
Fig. 1 is the hard coat schematic cross-section of a kind of cold rolling disc flying shear.
Fig. 2 is the hard coat photo of a kind of cold rolling disc flying shear.
Fig. 3 is the process chart of the hard coat preparation method of a kind of cold rolling disc flying shear.
Detailed description of the invention
Specifically describing the present invention with example below in conjunction with the accompanying drawings, this example is only an exemplary applications of the present invention, no It is understood that as the restriction to the claims in the present invention protection domain.
As it is shown in figure 1, the hard coat of a kind of cold rolling disc flying shear, the hard coat of a kind of cold rolling disc flying shear, This coating is divided into three layers:
Ground floor is the metal transfer bottom 2 on cold-rolling flying shear matrix 1 surface, and this metal transfer bottom is metal Titanium or titanium, aluminum and chromium, thickness is 0.05-0.5 micron;
The second layer is rich metal intermediate layer 3, this richness metal intermediate layer be richness titanium metal nitride, Or rich titanium containing nano amorphous phase (Si3N4) metal carbonitrides or rich titanium, aluminum and chromium containing nano amorphous Phase (Si3N4) metal carbonitrides, its thickness is 0.1-0.5 micron;
Third layer is nano metal nitride or nitrogen carbide ceramic blankets 4, this surface layer be titanium nitride or Containing nano amorphous phase (Si3N4) TiCN or containing nano amorphous phase (Si3N4) TiCN aluminum chromium pottery Layer, its thickness is 2-5 micron.
Embodiment material object photo is as in figure 2 it is shown, respectively painting is coated with titanium nitride (TiN), containing nano amorphous phase (Si3N4) TiCN (TiSiCN) and containing nano amorphous phase (Si3N4) TiCN aluminum (TiAlCrSiCN)。
Metal transfer bottom 2 on cold-rolling flying shear matrix 1 surface, rich metal intermediate layer 3 and nano metal Nitride or nitrogen carbide ceramic blankets 4.Example material object photo is as shown in Figure 2.
As it is shown on figure 3, the preparation method of the hard coat of a kind of cold rolling disc flying shear, with 6CrW2Si cold rolling strap Steel disc flying shear applies containing nano amorphous (Si3N4) composite Ti AlCrSiCN hard coat technique as a example by, should The step of method is as follows:
The exterior washings of the most cold rolling disc flying shear: with percentage by weight 5% sodium hydroxide aqueous alkali, at 40 DEG C Lower ultrasonic cleaning 20 minutes, clear water rinses 2 times, ultrasound wave alcohol washes 20 minutes again, and deionized water floats After washing 2 times, compressed air dries up, and 100 DEG C of drying baker is incubated 60 minutes, and work piece hoisting enters coater;
The internal washing of the most cold rolling disc flying shear: coater base vacuum is evacuated to 2x10-3Below Pa, vacuum chamber adds Heat, to 180-200 DEG C, is incubated 60 minutes, removes residual gas in vacuum chamber, to vacuum chamber covering argon extremely 1-1.2Pa, opens tungsten filament, to heater current 16-20A, and applying pulsed bias on matrix: pulsation process Parameter is 300W power, 60KHz frequency, 50% dutycycle;Tungsten filament biasing 80-100V, produces enhancing etc. Gas ions;Strengthen plasma to implement to clean 30 minutes to disc flying shear.
C. on cold rolling disc flying shear, hard coat is applied: this coating is divided into three layers, i.e. at the bottom of metal transfer Layer, rich metal intermediate layer and nano metal nitrogen carbide ceramic blankets, use magnetron sputtering and etc. from Daughter strengthens magnetically controlled sputter method, and specific implementation process is as follows:
(1) cold rolling disc flying shear is after internal washing, reduces argon flow amount in vacuum chamber, to vacuum pressure is 0.5~0.7Pa.Set workpiece rotary speed 30 revs/min, open matrix Dc bias 50~80V;
(2) metal transfer bottom (2) is applied cold rolling disc flying shear end face (1): open titanium, aluminum, chromium magnetic control Target power supply, two of which titanium target power set is 5KW, aluminum target 2KW, chromium 2KW, 60KHz frequency and 80% account for Empty ratio, plated film 5 minutes;
(3) rich metal intermediate layer (3) is applied at metal transfer bottom (2) end face: open nitrogen and front three Two passages of base silane, make nitrogen intake 7sccm, trimethyl silane 15~20sccm, continue plated film 30 Minute;
(4) apply containing nano amorphous nanometer (Si at rich metal intermediate layer (3) end face3N4) compound TiAlCrSiCN surface layer (4): increase nitrogen flow 20-25sccm, continues plated film 5 hours;
(5) close all power supplys and gas, keep vacuum cooled more than 3 hours.Open coater, take out Cold rolling disc flying shear after plated film.
In above-mentioned technique, as it is shown in figure 1, the hard coat applied on cold rolling disc flying shear includes: with matrix The 1 metal transfer bottom TiAlCr2 being connected;At metal transfer bottom 2 end face containing nano amorphous Si3N4Phase Rich metal TiAlCrCN intermediate layer 3;And at rich metal intermediate layer 3 end face containing nano amorphous Si3N4Metal carbonitrides (TiAlCrSiCN) the ceramic hard coating 4 of phase.
When applying TiSiCN coating, four targets all use titanium, and reacting gas is nitrogen and trimethyl silane; When applying TiN coating, four targets all use titanium, and reacting gas is nitrogen.Other technique is ibid.To circle The use result of the detection of dish flying shear hard coat and the disc flying shear of band hard coat is summed up, and is shown in Table 1:
The hard coat mechanical performance index of 1 one kinds of cold rolling disc flying shears of table and use result
Above-mentioned specific embodiment shows, uses the disc flying shear surface of the band coating of this technical method and equipment production Bright and clean, matrix obdurability height, case hardness improve 2-5 times, in the case of cost improves 0.3-0.5 times, The cycle that is intended for single use improves 5-8 times.

Claims (6)

1. a hard coat for cold rolling disc flying shear, is characterized in that this coating is divided into three layers: one layer and is and substrate The metal transfer bottom connected, thickness is 0.001-1 micron;Two layers for be deposited on metal transfer bottom end face Comprising the rich metal intermediate layer of at least two kinds of elements in V Me and IV V Me race elements, thickness is 0.001-1 micron;Three layers for being deposited on the nano metal nitride on rich metal intermediate layer end face or nitrogen carbon Compound ceramic blankets, surface layer includes V Me or the IV V Me race elements comprising nano amorphous phase, nanometer Metal nitride or nitrogen carbide ceramic surface layer thickness are 0.1-10 micron;IV described group Ⅴ element be carbon, In silicon or nitrogen a kind or the combination of 2-3 kind;Me is a kind in the titanium in metal material, aluminum or chromium or 2-3 Plant combination.
The hard coat of a kind of cold rolling disc flying shear the most according to claim 1, is characterized in that described gold Belonging to transition bottom is the one in Ti, Al or Cr.
The hard coat of a kind of cold rolling disc flying shear the most according to claim 1, is characterized in that described richness Metal intermediate layer is: when the reacting gas of interpolation is nitrogen, for rich titanium nitride layer;The reaction gas added When body is nitrogen and silane, for rich titanium containing nano amorphous Si3N4The nitrogen carbide layer of phase;The reaction added Gas is nitrogen and silane, when the metal of use is titanium, aluminum and chromium, for rich Titanium, aluminum and chromium containing nanometer Amorphous Si3N4The metal carbonitrides layer of phase.
The hard coat of a kind of cold rolling disc flying shear the most according to claim 1, is characterized in that described receiving In rice metal nitride or nitrogen carbide ceramic blankets, V Me is T iN;Comprise nano amorphous Si3N4IV The V nano amorphous Si of Me element3N4IV V Me elements, for nanometer composite Ti SiCN layer or nano combined TiAlCrSiCN。
The hard coat of a kind of cold rolling disc flying shear the most according to claim 1, is characterized in that described containing Nano amorphous phase Si3N4In phase coating, C atom is from forming Si during plated film3N4Trimethyl silane required mutually (Si(CH3)3H) amount, forms atomic ratio 1% amorphous Si3N4Phase, produces the metal carbides phase of 12%, remaining For metal nitride phase.
6. a preparation method for the hard coat of cold rolling disc flying shear, is characterized in that the method includes following step Rapid:
The exterior washings of the most cold rolling disc flying shear: use percentage by weight 1-10% sodium hydroxide aqueous alkali, Ultrasonic cleaning 5-30 minute at 30 DEG C-50 DEG C, clear water rinses 2-3 time, and aerator is dried, the most ultrasonic Ripple alcohol washes 10-30 minute, after deionized water rinses 1-2 time, compressed air or nitrogen dry up, drying baker Interior 50 DEG C-200 DEG C are incubated 30-60 minute, and work piece hoisting enters coater;
The internal washing of the most cold rolling disc flying shear: coater base vacuum is evacuated to 3x10-3Below Pa, vacuum chamber It is heated to 100 DEG C-300 DEG C, is incubated 30-120 minute, remove residual gas in vacuum chamber, return to vacuum chamber Benefit argon, to 1-2Pa, opens tungsten filament, and to heater current 10-30A, pulsed bias power supply is biasing on matrix Pressure, Pulse Process Parameters is 100-300W power, 60KHz frequency, 50% dutycycle;Tungsten filament biasing 50~150V, produce and strengthen plasma, disc flying shear is implemented internal plasma and cleans 10-60 minute;
C. on cold rolling disc flying shear, hard coat is applied: this coating is divided into three layers, i.e. at the bottom of metal transfer Layer, rich metal intermediate layer and nano metal nitride or nitrogen carbide ceramic blankets, use magnetic control to spatter Penetrating and plasma enhancing magnetically controlled sputter method, specific implementation process is as follows:
(1), after cold rolling disc flying shear internal washing, reduce argon flow amount, be 0.2-1Pa to vacuum pressure, Set workpiece rotary speed 30-100 rev/min, open matrix Dc bias 25-150V, open magnetic control target electricity Source;
(2) metal transfer bottom is applied on cold rolling disc flying shear surface: target power set is 1-5KW, 60KHz Frequency and 50-80% dutycycle, plated film 1-10 minute;
(3) on metal transfer bottom end face, rich metal intermediate layer is applied: open reacting gas, reaction The GN 2 intake is 5-15sccm, trimethyl silane 15-40sccm, continues plated film 15-60 minute;
(4) in rich metal intermediate layer end face applying nano metal nitride or nitrogen carbide ceramic blankets: Increase nitrogen flow to 10-50sccm, continuation plated film 5 hours;
(5) close all power supplys and gas, keep vacuum cooled 2-3 hour, open coater, take out plating Cold rolling disc flying shear after film.
CN201410557025.1A 2014-10-20 2014-10-20 A kind of hard coat of cold rolling disc flying shear and preparation method thereof Active CN104325738B (en)

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CN104894512B (en) * 2015-06-24 2017-07-14 洛阳理工学院 A kind of CrTiAlCN scuff-resistant coatings of low-friction coefficient and preparation method thereof
CN105316634A (en) * 2015-11-16 2016-02-10 南京航空航天大学 Preparation method for Cr-B-C-N nanocomposite film
CN105274485A (en) * 2015-11-16 2016-01-27 南京航空航天大学 Preparation method for Cr-Si-C-N nano composite film
CN107354436A (en) * 2017-07-18 2017-11-17 西安热工研究院有限公司 A kind of TiSi base multilayer hard films of hobboing cutter cutter ring and preparation method thereof
CN109207938B (en) * 2018-09-28 2020-07-10 清华大学 Ti/TiN/TiAlSiN/TiAlCrSiN nano multilayer gradient film and preparation method thereof
CN109252140A (en) * 2018-10-19 2019-01-22 扬州大学 A kind of method that cold work die steel surface prepares AlCrCN coating
CN111139426A (en) * 2020-02-20 2020-05-12 辽宁科技大学 Ultrahigh-strength cold-rolled steel plate cutting tool coating layer and method

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CN102443772A (en) * 2010-09-30 2012-05-09 鸿富锦精密工业(深圳)有限公司 Coated article and its preparation method
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