CN104317136A - Picosecond and light-second pulse laser output switching device and control method thereof - Google Patents
Picosecond and light-second pulse laser output switching device and control method thereof Download PDFInfo
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- CN104317136A CN104317136A CN201410541817.XA CN201410541817A CN104317136A CN 104317136 A CN104317136 A CN 104317136A CN 201410541817 A CN201410541817 A CN 201410541817A CN 104317136 A CN104317136 A CN 104317136A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
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Abstract
The invention discloses a picosecond and light-second pulse laser output switching device and a control method thereof. The output switching device comprises a light source, a picosecond laser oscillator, an adjustable filter, an optical fiber amplifier and an enoscope which are sequentially arranged along a light path, wherein the enoscope comprises a high-reflection mirror which is used for switching the light path to two different output ports; one of the ports is sequentially connected with a pulse compressor and a femtosecond frequency multiplier, and the other port is connected with a picosecond frequency multiplier and is used for outputting picosecond pulse; when the adjustable filter selects the picosecond laser oscillator to output an edge part of a spectrum, the picosecond pulse of the spectrum passes through the enoscope without deflection and then enters the picosecond frequency multiplier due to the position of the high-reflection mirror; when the adjustable filter selects the picosecond laser oscillator to output a central part of the spectrum, the high-reflection mirror rotates to another position, so that the picosecond pulse of the spectrum deflects for 90 degrees and then enters the pulse compressor and the femtosecond frequency multiplier. By virtue of the picosecond and light-second pulse laser output switching device and the control method thereof, quick switching output of narrow-band picosecond laser or wide-band femtosecond laser is realized.
Description
Technical field
The present invention relates to laser technology field, particularly relate to output switching device and the control method thereof of a kind of picosecond pulse laser of high power narrow-band spectrum and the femtosecond pulse of broadband spectral.
Background technology
Ultrashort pulse is the general name of the class pulse of pulse width between femtosecond to picosecond magnitude.Utilize high power psec and femtosecond laser, can realize carrying out high precision processing to industrial materials such as metal, metal carbide, silicon chips.Compared with nanosecond pulse, the time width of femtosecond and picopulse short, can reach rapidly the peak energy denisty melted required for critical point of material, and effectively reduces the thermal effect that laser emission brings.The duration of femtosecond laser is far smaller than lattice heat conduction time, and when itself and matter interaction, energy absorption is limited in minimum scope, and electronics reaches high temperature, and material becomes ionic state from solid-state thereupon, sprays rapidly from machining area.Therefore, the drawback utilizing femtosecond and picopulse can overcome laser thermal effect to bring, realizes high-precision processing.
Mention the production method of High power ultra-short pulse, generally have two large classes.One class adopts solid state laser, semiconductor laser diode or fiber laser as the seed source of narrow-band spectrum, and spectral width is generally less than 1nm, and pulse width is that several psec is to hundreds of psec.Compare the picosecond laser of broadband spectral, although the picopulse of this narrow-band spectrum cannot be compressed to femtosecond pulse, a main advantage of the picopulse light source of this narrow-band spectrum has higher shg efficiency, is conducive to the Laser output realizing more short wavelength.
Another kind of is using the picosecond laser of the femtosecond laser of broadband spectral or broadband spectral as seed source, through chirped pulse amplification or master oscillation power amplification, finally adopts pulse compression to reach femtosecond magnitude, realizes higher peak power.This technology can use broadband spectral device to guarantee that final Output of laser spectrum has enough bandwidth, realizes narrower femtosecond pulse.
Although the power amplification process of above two class ultrashort pulses seems close, up to the present, and cannot realize inside a set of laser system simultaneously these two kinds of spectral form (broadband spectral or narrow-band spectrum) ultra-short pulse laser export.Its subject matter is performance and the characteristic that the output parameter in pulse laser seeds source determines this laser system substantially.If desired realize multi-form spectrum to export, pulse seed source must be changed.This will inevitably increase laser system complexity, and and then improves manufacturing cost.
Summary of the invention
(1) goal of the invention
The object of this invention is to provide output switching device and the control method thereof of a kind of picosecond pulse laser of high power narrow-band spectrum or the femtosecond pulse of broadband spectral.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of psec and femtosecond pulse output switching device, comprise the light source, picosecond laser oscillator, adjustable filter, fiber amplifier and the enocscope that arrange in turn along light path, wherein, picosecond laser oscillator, for output spectrum; Adjustable filter, for choosing the spectral component of different wave length in picosecond laser oscillator output spectrum; Fiber amplifier, for promoting the average power of filtered for adjustable filter pulse; Enocscope, it comprises high reflective mirror, and for light path being switched to two different output ports, one of them output port is connected with pulse shortener and femtosecond frequency multiplier in turn, and pulse shortener is used for the picopulse of broadband spectral to be compressed to femtosecond pulse; Femtosecond frequency multiplier is used for the picopulse of broadband spectral to compress, and finally exports femtosecond pulse; And another output port is connected with psec frequency multiplier, for exporting picopulse, when picosecond laser oscillator output spectrum marginal portion chosen by adjustable filter, the position of high reflective mirror make spectrum picopulse without deviation by entering psec frequency multiplier after enocscope, when picosecond laser oscillator output spectrum core chosen by adjustable filter, high reflective mirror turns to another position, enters pulse shortener and femtosecond frequency multiplier after producing 90 degree of deviations to make spectrum picopulse.
Wherein, also comprise the femtosecond/psec switching driver be connected with adjustable filter and enocscope, for driving adjustable filter and enocscope, to realize the rotation with high reflective mirror of choosing of spectrum respectively.
Wherein, adjustable filter and enocscope are all automatically controlled.
Wherein, picosecond laser oscillator is the Totally positive dispersion fiber laser of nonlinear polarization rotation locked mode.
Wherein, adjustable filter is the wave filter based on the adjustable filter of F-P cavity or the wave filter of optical grating construction or interference filter chip architecture.
Wherein, fiber amplifier comprises predispersed fiber amplifier and optical fiber main amplifier.
Wherein, predispersed fiber amplifier is the fiber amplifier of fibre core pumping, for by the power ascension of 20mW to more than 200mW.
Wherein, optical fiber main amplifier is the fiber amplifier of cladding pumping, for by the power ascension of 200mW to more than 10W.
Present invention also offers the control method of a kind of psec and femtosecond pulse output switching device, the method comprises the following steps:
S1: when needs export picosecond pulse laser, adjustment adjustable filter, making it choose picosecond laser oscillator output spectrum marginal portion, the position of high reflective mirror being adjusted to spectrum picopulse without the position of deviation ground by entering psec frequency multiplier after enocscope simultaneously;
S2: when needs export femtosecond pulse, adjustment adjustable filter, make it choose picosecond laser oscillator output spectrum core, the position of high reflective mirror is adjusted to the position entering pulse shortener and femtosecond frequency multiplier after spectrum picopulse produces 90 degree of deviations simultaneously.
Wherein, the method is further comprising the steps of: the adjustment being controlled adjustable filter and enocscope by femtosecond/psec switch controller.
(3) beneficial effect
1. the present invention adopts a laser system can realize high power arrowband psec or Broadband Femtosecond Laser output, and structure is simple, and manufacturing cost is little.Adopt drives, adjustable filter and light path control can realize the switching of high power arrowband psec or Broadband Femtosecond Laser output.
2. adopt automatically controlled driving adjustable filter and automatically controlled enocscope, light path switch speed is fast, and not only control accuracy is high but also simple, effectively can reduce the manufacturing cost of Double passage laser output system.
3. adopt two pieces of frequency-doubling crystals to be conducive to improving the shg efficiency of laser respectively.Adopt shorter frequency-doubling crystal in femtosecond frequency multiplier, be conducive to the femtosecond laser frequency multiplication of broadband spectral.Adopt longer frequency-doubling crystal in psec frequency multiplier, be conducive to the picosecond laser frequency multiplication of narrow-band spectrum.
Accompanying drawing explanation
Fig. 1 is the general structure schematic diagram of psec of the present invention and light pulse per second (PPS) Laser output switching device shifter;
Fig. 2 is the laser spectrum that picosecond laser oscillator exports, and it illustrates the position of spectral edges and spectral centroid;
Fig. 3 a shows the pulse width that automatically controlled adjustable filter selects the center spectrum of picosecond laser oscillator, and Fig. 3 b shows the spectral shape of the broadband spectral picopulse after amplifying;
Fig. 4 a shows the pulse width that automatically controlled adjustable filter selects the edge spectrum of picosecond laser oscillator, and Fig. 4 b shows the spectral shape of the narrow-band spectrum picopulse after amplifying;
Fig. 5 is the schematic diagram of predispersed fiber amplifier;
Fig. 6 is the schematic diagram of optical fiber main amplifier; And
Fig. 7 is the schematic diagram of automatically controlled enocscope.
Embodiment
Below in conjunction with accompanying drawing, for the Yb dosed optical fiber laser of 1 mu m waveband, the present invention is described in detail.It will be appreciated by those skilled in the art that embodiment described below is only to exemplary illustration of the present invention, but not for making any restriction to it.In all of the figs, identical Reference numeral represents same or analogous parts.
As shown in Figure 1, this device comprises the light source L, picosecond laser oscillator 100, adjustable filter 200, fiber amplifier, enocscope 500, pulse shortener 600, femtosecond frequency multiplier 800, psec frequency multiplier 700 and the femtosecond/psec switching driver 900 that is connected with electronic adjustable filter 200 and enocscope 500 that arrange in turn along light path.
Particularly, light source L all adopt 1 mu m waveband be suitable for optical device and optical fiber.
Picosecond laser oscillator 100 for output spectrum, and is preferably the Totally positive dispersion fiber laser of nonlinear polarization rotation locked mode, and it can be all optical fibre structure, also can be semispace half optical fiber structure.Typical repetition rate is 60MHz, average power 20mW, and pulse width is 10ps.The typical spectral range of picosecond laser oscillator 100 as shown in Figure 2, covers 1025-1035nm, spectral width Δ λ=10nm.The type fiber laser loop inside is all made up of positive dispersion fiber, effect due to Self-phase modulation to make near this pulse center warbling as linear and be positive in a big way, and the frequency distribution namely exporting pulse increases along with the increase of time (above warbling).And the spectral change on pulse both sides is less.Therefore, in picosecond laser oscillator 100 output spectrum, the spectral component of diverse location has different pulse widths, the pulse width of spectral centroid (as shown in the dotted ellipse on right side in Fig. 2) is less, the larger feature of pulse width of spectrum both sides (as shown in the dotted ellipse in left side in Fig. 2).
Electronic adjustable filter 200 is for choosing the spectral component of different wave length in picosecond laser oscillator 100 output spectrum, it can for the adjustable filter (regulating chamber length to select wavelength) based on F-P cavity, or the wave filter of optical grating construction (regulating grating and incident light angle to select wavelength), also can be the wave filter (regulating optical filter and incident light angle to select wavelength) of interference filter chip architecture.This automatically controlled adjustable filter 200 is all coupling fiber mode.
Picosecond laser oscillator 100 output spectrum carries out spectrum by electronic adjustable filter 200 and chooses, and filter range is greater than 10nm (covering picosecond laser oscillator 100 output spectrum); Filtering bandwidth is less than 1/10th of picosecond laser oscillator 100 spectral width, is namely less than Δ λ/10 (<1nm).
Fiber amplifier is used for the average power of the filtered pulse of electronic adjustable filter 200 to promote, and it comprises predispersed fiber amplifier 300 and optical fiber main amplifier 400.When picosecond laser oscillator 100 output spectrum core chosen by automatically controlled adjustable filter 200, namely filtered pulse width is less, is about 1-2ps, as shown in Figure 3 a.Via in predispersed fiber amplifier 300 and optical fiber main amplifier 400 amplification process, obvious Spectral Broadening will be produced, along with the lifting of amplifying laser power, spectral width is constantly widened, its spectral width meets or exceeds the spectral width of picosecond laser oscillator 100, more than 10nm, as shown in Figure 3 b.When picosecond laser oscillator 100 output spectrum marginal portion chosen by automatically controlled adjustable filter 200, namely filtered pulse width is comparatively large, is about 10-30ps, as shown in fig. 4 a.Via in predispersed fiber amplifier 300 and optical fiber main amplifier 400 amplification process, spectral width will remain unchanged, as shown in Figure 4 b.Therefore, when namely choosing the spectrum of picosecond laser oscillator 100 diverse location by automatically controlled adjustable filter 200, through fiber amplifier, the picosecond laser of broadband spectral can be obtained, also can obtain the picosecond laser of narrow-band spectrum.
Predispersed fiber amplifier 300 is the amplifier of fibre core pumping, for the average power of picosecond laser oscillator 100 is promoted to 200mW from 20mW.As shown in Figure 5, predispersed fiber amplifier 300 is made up of the pumping source 302 of laser isolator 301, Single-Mode Fiber Coupling, wavelength division multiplexer 303 and gain fibre 304.
Optical fiber main amplifier 400 is the fiber amplifier of cladding pumping, for by the power ascension of 200mW to more than 10W.As shown in Figure 6, optical fiber main amplifier 400 is made up of laser isolator 401, multimode optical fiber coupling pumping source, optical-fiber bundling device 402, first multimode optical fiber coupling pumping source 403, second 404, gain fibre 405 and output coupler 406.
Enocscope 500 is connected with the output terminal of optical fiber main amplifier 400.As shown in the figure, a high reflective mirror 501 is contained in automatically controlled enocscope 500.When picosecond laser oscillator 100 output spectrum marginal portion chosen by electronic adjustable filter 200, namely filtered pulse width is larger, for narrow-band spectrum picopulse exports, meanwhile, high reflective mirror 501 is driven to remain on to make narrow-band spectrum picopulse without the initial position A place of deviation ground by entering psec frequency multiplier 700 after automatically controlled enocscope 500 straight by femtosecond/psec switching driver 900.When picosecond laser oscillator 100 output spectrum core chosen by electronic adjustable filter 200, namely filtered pulse width is less, for narrow-band spectrum picopulse exports, simultaneously, high reflective mirror 501 is driven to turn to B place, another location by femtosecond/psec switching driver 900, make broadband spectral picopulse produce the deviation of 90 degree, enter pulse shortener 600 and femtosecond frequency multiplier 800, realize Broadband Femtosecond pulse and export.
Pulse shortener 600 can be made up of, for the picopulse of broadband spectral is compressed to femtosecond pulse a pair reflective gratings or a pair transmission-type grating and a catoptron.
Femtosecond frequency multiplier 800 adopts frequency-doubling crystal by Broadband Femtosecond pulse frequency multiplication extremely more short wavelength, produces second harmonic or third harmonic.Psec frequency multiplier 700 adopts frequency-doubling crystal by arrowband picopulse frequency multiplication extremely more short wavelength, produces second harmonic or third harmonic.The length that the frequency-doubling crystal adopted in femtosecond frequency multiplier 800 compares the frequency-doubling crystal adopted in psec frequency multiplier 700 is shorter, is conducive to the femtosecond laser frequency multiplication of broadband spectral.The length that the frequency-doubling crystal adopted in femtosecond frequency multiplier 800 compares the frequency-doubling crystal adopted in psec frequency multiplier 700 is longer, is conducive to the picosecond laser frequency multiplication of narrow-band spectrum.
Frequency-doubling crystal can be BBO, PPLN, KTP, PPKTP etc.
It should be noted that, in this embodiment, adjustable filter 200 and enocscope 500 are all automatically controlled, and to make light path switch speed fast, this control mode not only control accuracy is high but also simple, effectively can reduce the manufacturing cost of Double passage laser output unit.But, it will be appreciated by those skilled in the art that adjustable filter 200 and enocscope 500 also can adopt other control mode.Similarly, in this embodiment, adjustable filter 200 and enocscope 500 are driven by femtosecond/psec switching driver 900, but, it will be appreciated by those skilled in the art that adjustable filter 200 and enocscope 500 also can adopt alternate manner to control, such as manual operation.
Present invention also offers a kind of control method of the output switching device for above-mentioned picosecond pulse laser or femtosecond pulse, the method comprises the following steps:
S1: when needs export picosecond pulse laser, adjust electronic adjustable filter 200, making it choose picosecond laser oscillator 100 output spectrum marginal portion, the position of high reflective mirror 501 being adjusted to spectrum picopulse without the position of deviation ground by entering psec frequency multiplier 700 after enocscope 501 simultaneously;
S2: when needs export femtosecond pulse, adjust electronic adjustable filter 200, make it choose picosecond laser oscillator output spectrum core, the position of high reflective mirror 501 is adjusted to the position entering pulse shortener 600 and femtosecond frequency multiplier 800 after spectrum picopulse produces the deviation of 90 degree simultaneously.
Further, the method is further comprising the steps of: the adjustment being controlled electronic adjustable filter 200 and enocscope 500 by femtosecond/psec switch controller 900.
The structure of the output switching device of above-described and the picosecond pulse laser shown in figure or femtosecond pulse is all only exemplary, under the teachings of the present invention, those of ordinary skill in the art can carry out various change or modification, and all these modification do not depart from the scope of the present invention limited by claims.
Claims (10)
1. psec and a femtosecond pulse output switching device, comprise the light source, picosecond laser oscillator, adjustable filter, fiber amplifier and the enocscope that arrange in turn along light path, wherein, picosecond laser oscillator, for output spectrum; Adjustable filter, for choosing the spectral component of different wave length in picosecond laser oscillator output spectrum; Fiber amplifier, for promoting the average power of filtered for adjustable filter pulse; Enocscope, it comprises high reflective mirror, and for light path being switched to two different output ports, one of them output port is connected with pulse shortener and femtosecond frequency multiplier in turn, and pulse shortener is used for the picopulse of broadband spectral to be compressed to femtosecond pulse; Femtosecond frequency multiplier is used for the picopulse of broadband spectral to compress, and finally exports femtosecond pulse; And another output port is connected with psec frequency multiplier, for exporting picopulse, when picosecond laser oscillator output spectrum marginal portion chosen by adjustable filter, the position of high reflective mirror make spectrum picopulse without deviation by entering psec frequency multiplier after enocscope, when picosecond laser oscillator output spectrum core chosen by adjustable filter, high reflective mirror turns to another position, enters pulse shortener and femtosecond frequency multiplier after producing 90 degree of deviations to make spectrum picopulse.
2. output switching device according to claim 1, wherein also comprises the femtosecond/psec switching driver be connected with adjustable filter and enocscope, for driving adjustable filter and enocscope, to realize the rotation with high reflective mirror of choosing of spectrum respectively.
3. output switching device according to claim 2, wherein adjustable filter and enocscope are all automatically controlled.
4. output switching device according to claim 2, wherein picosecond laser oscillator is the Totally positive dispersion fiber laser of nonlinear polarization rotation locked mode.
5. output switching device according to claim 2, wherein adjustable filter is the wave filter based on the adjustable filter of F-P cavity or the wave filter of optical grating construction or interference filter chip architecture.
6. output switching device according to claim 2, wherein fiber amplifier comprises predispersed fiber amplifier and optical fiber main amplifier.
7. output switching device according to claim 6, wherein predispersed fiber amplifier is the fiber amplifier of fibre core pumping, for by the power ascension of 20mW to more than 200mW.
8. output switching device according to claim 6, wherein optical fiber main amplifier is the fiber amplifier of cladding pumping, for by the power ascension of 200mW to more than 10W.
9. a control method for the psec according to any one of claim 1-8 and femtosecond pulse output switching device, the method comprises the following steps:
S1: when needs export picosecond pulse laser, adjustment adjustable filter, making it choose picosecond laser oscillator output spectrum marginal portion, the position of high reflective mirror being adjusted to spectrum picopulse without the position of deviation ground by entering psec frequency multiplier after enocscope simultaneously;
S2: when needs export femtosecond pulse, adjustment adjustable filter, make it choose picosecond laser oscillator output spectrum core, the position of high reflective mirror is adjusted to the position entering pulse shortener and femtosecond frequency multiplier after spectrum picopulse produces 90 degree of deviations simultaneously.
10. control method according to claim 9, wherein further comprising the steps of:
The adjustment of adjustable filter and enocscope is controlled by femtosecond/psec switch controller.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017004473A1 (en) * | 2015-06-30 | 2017-01-05 | Cornell University | Multimodal imaging source based on femtosecond lasers for picosecond pulse generation |
| CN107017342A (en) * | 2017-04-11 | 2017-08-04 | 北京工业大学 | A kind of method of the ultrashort pulse picosecond laser induced phase transition materials film crystallization of use different wave length |
| CN108649418A (en) * | 2018-06-22 | 2018-10-12 | 天津欧泰激光科技有限公司 | Can self-starting Spectral Broadening and offset filtering mode-locked laser |
| CN109286119A (en) * | 2018-09-29 | 2019-01-29 | 深圳市大德激光技术有限公司 | The output switching device of ultrafast pulse optical fiber laser |
| CN111098034A (en) * | 2019-12-16 | 2020-05-05 | 大族激光科技产业集团股份有限公司 | Multilayer material product marking device and method |
| CN111129937A (en) * | 2019-12-25 | 2020-05-08 | 山东省科学院激光研究所 | Narrow-band picosecond mode-locked fiber laser |
| CN112271538A (en) * | 2020-10-12 | 2021-01-26 | 北京卓镭激光技术有限公司 | Laser and pulse width modulation method thereof |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017004473A1 (en) * | 2015-06-30 | 2017-01-05 | Cornell University | Multimodal imaging source based on femtosecond lasers for picosecond pulse generation |
| CN107017342A (en) * | 2017-04-11 | 2017-08-04 | 北京工业大学 | A kind of method of the ultrashort pulse picosecond laser induced phase transition materials film crystallization of use different wave length |
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| CN109286119A (en) * | 2018-09-29 | 2019-01-29 | 深圳市大德激光技术有限公司 | The output switching device of ultrafast pulse optical fiber laser |
| CN109286119B (en) * | 2018-09-29 | 2019-08-30 | 深圳市大德激光技术有限公司 | The output switching device of ultrafast pulse optical fiber laser |
| CN111098034A (en) * | 2019-12-16 | 2020-05-05 | 大族激光科技产业集团股份有限公司 | Multilayer material product marking device and method |
| CN111129937A (en) * | 2019-12-25 | 2020-05-08 | 山东省科学院激光研究所 | Narrow-band picosecond mode-locked fiber laser |
| CN112271538A (en) * | 2020-10-12 | 2021-01-26 | 北京卓镭激光技术有限公司 | Laser and pulse width modulation method thereof |
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