CN104313683A - Automatic cooling water temperature control device for kyropoulos method sapphire crystal growth equipment - Google Patents
Automatic cooling water temperature control device for kyropoulos method sapphire crystal growth equipment Download PDFInfo
- Publication number
- CN104313683A CN104313683A CN201410669894.3A CN201410669894A CN104313683A CN 104313683 A CN104313683 A CN 104313683A CN 201410669894 A CN201410669894 A CN 201410669894A CN 104313683 A CN104313683 A CN 104313683A
- Authority
- CN
- China
- Prior art keywords
- temperature sensor
- cooling water
- flow valve
- plc
- water temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
The invention discloses an automatic cooling water temperature control device for kyropoulos method sapphire crystal growth equipment. The automatic cooling water temperature control device comprises a water inlet temperature sensor, a water outlet temperature sensor, an electronic flow valve and a PLC, wherein the water inlet temperature sensor is arranged on a cooling water inlet pipe arranged on the crystal growth equipment, the water outlet temperature sensor and the electronic flow valve are arranged on a cooling water outlet pipe, and the PLC is used for centralized control; the water inlet temperature sensor, the water outlet temperature sensor and the electronic flow valve are connected and communicated with the PLC through signal lines; precision of the water inlet temperature sensor and precision of the water outlet temperature sensor are higher than 0.1 degree, the water inlet temperature sensor and the water outlet temperature sensor are each provided with a digital interface, and the water inlet temperature sensor and the water outlet temperature sensor can carry out digital communication with the PLC through the digital interfaces; the minimum adjusting range of the electronic flow valve is 1 liter/minute, and the electronic flow valve is provided with a digital interface and can carry out digital communication with the PLC through the digital interface. By using the device, change of the water outlet temperature of a cooling water system of the kyropoulos method sapphire crystal growth equipment can be controlled within 0.1 degree, influences of water temperature fluctuation on a crystal growth process are reduced, and crystal growth quality is improved.
Description
?
Technical field
This patent relates to kyropoulos sapphire crystal and manufactures field, particularly relates to a kind of temperature of cooling water automatic control device of kyropoulos sapphire crystallization equipment, is applicable to other similar field simultaneously.
Background technology
Sapphire is also known as white stone, that hardness is only second to adamantine crystalline material in the world, owing to having excellent physics, machinery, chemistry and infrared light transmission performance, it is the material that the fields such as microelectronics, aerospace, military project are badly in need of always, especially optical grade large-size sapphire material, because it has stable performance, the huge market demand, comprehensive utilization ratio and added value of product high, become in recent years research and development and industrialization focus both at home and abroad.
The general process of sapphire crystal manufacture is the seed crystal and melt contacts of catching a cold one, if the temperature at interface is lower than zero pour, then seed crystal starts growth, constantly grow up to make crystal, just need the temperature reducing melt gradually, simultaneously rotating crystal, to improve the temperature distribution of melt.Also slowly (or stage by stage) can carry crystal, to expand radiating surface.Crystal does not contact with sidewall of crucible in process of growth or at the end of growth, this greatly reduces the stress of crystal.But, when crystal and remaining melt depart from, usually larger thermal shocking can be produced.Pyrosol top-seeded solution growth conventional is at present improvement and the development of this kyropoulos.
Because thermograde is very little, kyropoulos sapphire crystal growth process is one and temperature-fall period slowly, and the power range of decrease hourly is lower than 50W, and heating power is then up to 50KW.Fluctuation small in process of growth just has an impact to crystal growing process.The factor of power is affected except thermal field in long brilliant equipment, also has water-cooling system, unnecessary caloric requirement is taken away by water-cooled, because the water yield of water-cooling system is very large, generally can reach 6000 ls/h, because inflow temperature is generally constant, so the little deviation of leaving water temperature(LWT) just means the obvious increase of the heat that water-cooling system is carried, the deviation of general 1 degree just can have the impact of 1KW, this will have significant impact to crystal growing process, adopt a kind of device that is that automatically can control leaving water temperature(LWT) and then that control Inlet and outlet water temperature head extremely important for the crystal of growing high-quality for this reason, automatic control process is also highly beneficial for increasing work efficiency.
Summary of the invention
(1) technical problem that will solve
Main purpose of the present invention is the temperature of cooling water automatic control device providing a kind of kyropoulos sapphire crystallization equipment, suppresses fluctuating temperature, improves the quality of crystal growth.
(2) technical scheme
For achieving the above object, the invention provides a kind of temperature of cooling water automatic control device of kyropoulos sapphire crystallization equipment, comprise the inflow temperature sensor on the cooling water inlet pipe being arranged on the brilliant equipment of described length, be arranged on the leaving water temperature sensors on the cooling water outlet pipe of the brilliant equipment of described length, be arranged on the electronic flow valve on the cooling water outlet pipe of the brilliant equipment of described length, carry out central controlled PLC, described inflow temperature sensor, leaving water temperature sensors, electronic flow valve and described PLC are connected by signal wire and communicate, described PLC inside arranges coolant water temperature automatic control algorithm, described automatic control algorithm comprises the following steps:
Step one: the inflow temperature sensor described in detection, obtains inflow temperature T
0, the flow of the electronic flow valve described in adjustment is Q, makes the output of described leaving water temperature sensors be leaving water temperature(LWT) T
1;
Step 2: the leaving water temperature sensors described in detection, obtains leaving water temperature(LWT) t
1, and accounting temperature deviation △ T=t
1-T
1if △ T is zero, then repeating step two; If △ T is non-vanishing, then enter step 3;
Step 3: the flow of the electronic flow valve described in adjustment, regulated quantity △ Q=Q* △ T/ (T
1-T
0), then return step 2.
Described inflow temperature sensor and the precision of leaving water temperature sensors are greater than 0.1 degree, and having digital interface can carry out digital communication with described PLC.
The minimal adjustment scope of described electronic flow valve is 1 liter/min, and having digital interface can carry out digital communication with described PLC.
(3) beneficial effect
As can be seen from technique scheme, the present invention has following beneficial effect: utilize this temperature of cooling water automatic control device, the cooling water system leaving water temperature(LWT) of kyropoulos sapphire crystallization equipment can be made to change to be controlled within 0.1 degree, decrease the impact of fluctuating temperature on crystal growing process, improve the quality of crystal growth.
Accompanying drawing explanation
Fig. 1 is the functional block diagram of long brilliant equipment;
Fig. 2 is the schema of coolant water temperature automatic control algorithm.
Embodiment
Below in conjunction with specific embodiment, the present invention is further expanded description, but it is pointed out that the present invention's structure required for protection is not limited to the concrete structure in embodiment and Figure of description.For other structure formations that those of ordinary skill in the art can know by inference, also belong within the present invention's scope required for protection.
A kind of temperature of cooling water automatic control device of kyropoulos sapphire crystallization equipment 1, comprise the inflow temperature sensor 4 on the cooling water inlet pipe 2 being arranged on the brilliant equipment 1 of described length, be arranged on the leaving water temperature sensors 5 on the cooling water outlet pipe 3 of the brilliant equipment of described length 1, the electronic flow valve 6 be arranged on the cooling water outlet pipe 3 of the brilliant equipment 1 of described length, carry out central controlled PLC, described inflow temperature sensor 4, leaving water temperature sensors 5, electronic flow valve 6 and described PLC are connected by signal wire and communicate.Described PLC can measure inflow temperature and the leaving water temperature(LWT) of water coolant by described inflow temperature sensor 4 and leaving water temperature sensors 5, can the flow of controlled cooling model water by described electronic flow valve 6.
Described inflow temperature sensor 4 and the precision of leaving water temperature sensors 5 are greater than 0.1 degree, and having digital interface can carry out digital communication with described PLC.The minimal adjustment scope of described electronic flow valve 6 is 1 liter/min, and having digital interface can carry out digital communication with described PLC.
Described PLC inside arranges coolant water temperature automatic control algorithm.Described automatic control algorithm comprises the following steps:
Step one: the inflow temperature sensor 4 described in detection, obtains inflow temperature T
0, the flow of the electronic flow valve 6 described in adjustment is Q, until the output of described leaving water temperature sensors 5 is leaving water temperature(LWT) T
1;
In step one, establish thermal equilibrium: take away thermal power W=C* (T
1-T
0) * Q* ρ, wherein, ρ is the density of water, and C is that specific heat of water holds;
Step 2: the leaving water temperature sensors 5 described in detection, obtains leaving water temperature(LWT) t
1, and accounting temperature deviation △ T=t
1-T
1if △ T is non-vanishing, then enter step 3;
Step 3: the flow of the electronic flow valve 6 described in adjustment, regulated quantity △ Q=Q* △ T/ (T
1-T
0), then return step 2.
In step 3, △ T is non-vanishing, then illustrate that the power that water coolant takes away heat changes: W+ △ W=C* (T
1+ △ T-T
0) * Q* ρ, in order to stabilize the change of temperature, need the flow regulating water coolant, then W+ △ W=C* (T
1-T
0) * (Q+ △ Q) * ρ, two formulas are equal, obtain (T
1-T
0) * △ Q=Q* △ T, the regulated quantity therefore obtaining described electronic flow valve 6 is △ Q=Q* △ T/ (T
1-T
0).
Claims (3)
1. the temperature of cooling water automatic control device of a kyropoulos sapphire crystallization equipment, it is characterized in that: comprise the inflow temperature sensor on the cooling water inlet pipe being arranged on the brilliant equipment of described length, be arranged on the leaving water temperature sensors on the cooling water outlet pipe of the brilliant equipment of described length, be arranged on the electronic flow valve on the cooling water outlet pipe of the brilliant equipment of described length, carry out central controlled PLC, described inflow temperature sensor, leaving water temperature sensors, electronic flow valve and described PLC are connected by signal wire and communicate, described PLC inside arranges coolant water temperature automatic control algorithm, described automatic control algorithm comprises the following steps:
Step one: the inflow temperature sensor described in detection, obtains inflow temperature T
0, the flow of the electronic flow valve described in adjustment is Q, makes the output of described leaving water temperature sensors be leaving water temperature(LWT) T
1;
Step 2: the leaving water temperature sensors described in detection, obtains leaving water temperature(LWT) t
1, and accounting temperature deviation △ T=t
1-T
1if △ T is zero, then repeating step two; If △ T is non-vanishing, then enter step 3;
Step 3: the flow of the electronic flow valve described in adjustment, regulated quantity △ Q=Q* △ T/ (T
1-T
0), then return step 2.
2. the temperature of cooling water automatic control device of kyropoulos sapphire crystallization equipment according to claim 1, it is characterized in that: described inflow temperature sensor and the precision of leaving water temperature sensors are greater than 0.1 degree, having digital interface can carry out digital communication with described PLC.
3. the temperature of cooling water automatic control device of kyropoulos sapphire crystallization equipment according to claim 1, it is characterized in that: the minimal adjustment scope of described electronic flow valve is 1 liter/min, having digital interface can carry out digital communication with described PLC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410669894.3A CN104313683A (en) | 2014-11-21 | 2014-11-21 | Automatic cooling water temperature control device for kyropoulos method sapphire crystal growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410669894.3A CN104313683A (en) | 2014-11-21 | 2014-11-21 | Automatic cooling water temperature control device for kyropoulos method sapphire crystal growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104313683A true CN104313683A (en) | 2015-01-28 |
Family
ID=52368986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410669894.3A Pending CN104313683A (en) | 2014-11-21 | 2014-11-21 | Automatic cooling water temperature control device for kyropoulos method sapphire crystal growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104313683A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018129860A1 (en) * | 2017-01-13 | 2018-07-19 | 许昌天戈硅业科技有限公司 | Hierarchical closed-loop control cooling device for sapphire crystal growth furnace |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009120453A (en) * | 2007-11-16 | 2009-06-04 | Sumitomo Metal Mining Co Ltd | Method of manufacturing aluminum oxide single crystal |
| CN101533281A (en) * | 2008-05-28 | 2009-09-16 | 大连连城数控机器有限公司 | Multi-wire cutting machine mortar temperature intelligent PID control system |
| CN101571308A (en) * | 2008-04-28 | 2009-11-04 | 上海瀚艺冷冻机械有限公司 | PLC energy saving control method of frozen water pump and cooling water pump in central air-conditioning system |
| CN202323117U (en) * | 2011-11-28 | 2012-07-11 | 天通控股股份有限公司 | Cooling water system for sapphire production |
| CN103192047A (en) * | 2013-02-21 | 2013-07-10 | 内蒙古包钢钢联股份有限公司 | Automatic control system and control method for cooling water of crystallizer for novel continuous casting machine |
| CN103807156A (en) * | 2012-11-08 | 2014-05-21 | 何荣志 | Circulating water energy-saving control operation system |
| KR20140105166A (en) * | 2013-02-22 | 2014-09-01 | 비아이신소재 주식회사 | Growing method of long type sapphire single crystal and growing apparatus for the same |
| CN104131346A (en) * | 2013-05-02 | 2014-11-05 | 周黎 | Method for controlling temperature of cooling water used in growth of sapphire crystal through PLC |
-
2014
- 2014-11-21 CN CN201410669894.3A patent/CN104313683A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009120453A (en) * | 2007-11-16 | 2009-06-04 | Sumitomo Metal Mining Co Ltd | Method of manufacturing aluminum oxide single crystal |
| CN101571308A (en) * | 2008-04-28 | 2009-11-04 | 上海瀚艺冷冻机械有限公司 | PLC energy saving control method of frozen water pump and cooling water pump in central air-conditioning system |
| CN101533281A (en) * | 2008-05-28 | 2009-09-16 | 大连连城数控机器有限公司 | Multi-wire cutting machine mortar temperature intelligent PID control system |
| CN202323117U (en) * | 2011-11-28 | 2012-07-11 | 天通控股股份有限公司 | Cooling water system for sapphire production |
| CN103807156A (en) * | 2012-11-08 | 2014-05-21 | 何荣志 | Circulating water energy-saving control operation system |
| CN103192047A (en) * | 2013-02-21 | 2013-07-10 | 内蒙古包钢钢联股份有限公司 | Automatic control system and control method for cooling water of crystallizer for novel continuous casting machine |
| KR20140105166A (en) * | 2013-02-22 | 2014-09-01 | 비아이신소재 주식회사 | Growing method of long type sapphire single crystal and growing apparatus for the same |
| CN104131346A (en) * | 2013-05-02 | 2014-11-05 | 周黎 | Method for controlling temperature of cooling water used in growth of sapphire crystal through PLC |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018129860A1 (en) * | 2017-01-13 | 2018-07-19 | 许昌天戈硅业科技有限公司 | Hierarchical closed-loop control cooling device for sapphire crystal growth furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102289235B (en) | Heating control system and method based on top separated control polycrystalline silicon ingot casting furnace | |
| CN103290470B (en) | The pulling of silicon single crystal growing method of diameter transitions | |
| CN104651935B (en) | A kind of method that crucible rise method prepares high-quality sapphire crystal | |
| CN102691098B (en) | Growing method of sapphire crystal prepared by Kyropoulos method | |
| CN103215633A (en) | Method for casting ingots by polycrystalline silicon | |
| CN104131339A (en) | Preparation method of polysilicon chip | |
| CN103060913A (en) | Growth method of large-scale sapphire crystal | |
| CN103966668A (en) | Growth method for controlling diameter of rod-like sapphire crystal based on protective atmosphere | |
| CN102978687A (en) | Crystal growth method of polycrystalline silicon ingot | |
| CN102703970A (en) | Kyropous method growth of titanium doped sapphire crystals | |
| CN101597787B (en) | Method for casting nitrogen-doped monocrystalline silicon with controllable nitrogen concentration under nitrogen | |
| CN103924293A (en) | Bottom-enhanced cooling device and cooling method | |
| CN104711664A (en) | Method for increasing large diameter float zone silicon crystal production quality | |
| CN103343385A (en) | Special-shape size czochralski silicon and growth method thereof | |
| CN107313109A (en) | A kind of manufacture method of piezo-electric crystal | |
| CN104372407A (en) | Equipment and method for directional solidification growth of crystalline silicon | |
| CN103803955A (en) | Method for preparing silicon nitride/silicon oxide composite crucible | |
| CN110528067A (en) | A kind of temprature control method of czochralski silicon monocrystal | |
| CN102608913B (en) | System and method for controlling blowing out of reduction furnace in production of polycrystalline silicon | |
| CN101597788B (en) | Method for preparing cast nitrogen-doped monocrystalline silicon through melting polycrystalline silicon under nitrogen | |
| CN203530480U (en) | Equipment for growing sapphire single crystals | |
| CN104313683A (en) | Automatic cooling water temperature control device for kyropoulos method sapphire crystal growth equipment | |
| CN103255477A (en) | Molded sapphire crystal growth method and apparatus thereof | |
| CN204185591U (en) | A kind of temperature of cooling water automatic control device of kyropoulos sapphire crystallization equipment | |
| CN105239153A (en) | Single crystal furnace having auxiliary material adding mechanism and application thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150128 |
|
| WD01 | Invention patent application deemed withdrawn after publication |