CN104297211A - Surface light scattering measuring device - Google Patents
Surface light scattering measuring device Download PDFInfo
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- CN104297211A CN104297211A CN201410603630.8A CN201410603630A CN104297211A CN 104297211 A CN104297211 A CN 104297211A CN 201410603630 A CN201410603630 A CN 201410603630A CN 104297211 A CN104297211 A CN 104297211A
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- amplifier
- surface light
- integrating sphere
- light scattering
- chopper
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Abstract
The invention discloses a surface light scattering measuring device comprises a laser, a chopper, an attenuator, an integrating sphere, a phase locking amplifier, a receiver and a digital voltmeter, wherein the light emitted by the laser passes the chopper, then passes the attenuator, enters the integrating sphere and illuminates the surface of a sample; the light is reflected by the sample and received by the receiver; a detector and a pre-amplifier are arranged on the integrating sphere; the chopper is connected with the phase locking amplifier; the phase locking amplifier is connected with the detector and the pre-amplifier; the phase locking amplifier is further connected with the digital voltmeter. According to the surface light scattering measuring device, as the laser light source is adopted, the surface light scattering measuring device is especially useful and the procession is high; the laser light source is particularly suitable for providing high-quality monochromatic source, the surface light scattering can be measured quickly and effectively; surface light scattering measuring device has the advantages that the structure is simple, the measurement result is accurate, the operation is simple and the applicability is high.
Description
Technical field
The present invention relates to a kind of surface sensing device, particularly a kind of surface light scatterometry device.
Background technology
The uneven agglomerate existed in material makes the light entering material depart from incident direction and to all the winds scatter, and this phenomenon is called the scattering of light, and the light to all the winds scattered is exactly scattered light.The same with the absorption of light, the scattering of light also can make the remitted its fury of the light by material.Be the particulate owing to there are other materials in medium, or due to the unevenness (i.e. density fluctuation) of the density of medium own, the scattering phenomenon of light is widely used in each branch of science and technology.The concentration of scattering particle, size, shape and orientation etc. can be recognized by the measurement of scattered light, be permitted to be applied in many-sided research in physics, chemistry, meteorology etc.Scattering spectrum can be used for again the characteristic determining material molecule and atom.Utilize light laser can obtain Stimulated Light scattering in recent years, be more convenient for carrying out this research and apply.Therefore measured surface light scattering becomes problem to be solved.
Summary of the invention
In order to overcome above-mentioned defect, the invention provides a kind of can the surface light scatterometry device of Quick Measurement surface light scattering.
The present invention in order to the technical scheme solving its technical matters and adopt is: a kind of surface light scatterometry device, comprise laser instrument, chopper, attenuator, integrating sphere, lock-in amplifier, receiver and digital voltmeter, the light that described laser instrument is launched is after chopper, enter integrating sphere through attenuator again and expose to sample surfaces, and be received by the receiver after sample reflection, described integrating sphere is provided with a detector and prime amplifier, described chopper connects lock-in amplifier, described lock-in amplifier connects detector and prime amplifier, described lock-in amplifier also with digital voltage list catenation.
As a further improvement on the present invention, described integrating sphere is positioned at detector and prime amplifier place is also provided with a gate.
The invention has the beneficial effects as follows: surface light scatterometry device of the present invention utilizes LASER Light Source can especially effectively and implement with high degree of accuracy, LASER Light Source is particularly suited for providing high-quality monochromatic source, can fast and effeciently measure surface light scattering, apparatus structure of the present invention is simple, measurement result is accurate, operate simple and easy, applicability light.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Indicate in figure: 1-laser instrument; 2-chopper; 3-attenuator; 4-integrating sphere; 5-lock-in amplifier; 6-receiver; 7-digital voltmeter; 8-sample; 9-detector and prime amplifier; 10-gate.
Embodiment
In order to deepen the understanding of the present invention, below in conjunction with embodiment and accompanying drawing, the invention will be further described, and this embodiment only for explaining the present invention, does not form limiting the scope of the present invention.
Fig. 1 shows a kind of embodiment of a kind of surface light of the present invention scatterometry device, comprise laser instrument 1, chopper 2, attenuator 3, integrating sphere 4, lock-in amplifier 5, receiver 6 and digital voltmeter 7, the light that described laser instrument 1 is launched is after chopper 2, enter integrating sphere 4 through attenuator 3 again and expose to sample 8 surface, and received device 6 receives after sample 8 reflects, described integrating sphere 4 is provided with a detector and prime amplifier 9, described chopper 2 connects lock-in amplifier 5, described lock-in amplifier 5 connects detector and prime amplifier 9, described lock-in amplifier 5 is also connected with digital voltmeter 7.Described integrating sphere 4 is positioned at detector and prime amplifier 9 place is also provided with a gate 10.
Claims (2)
1. a surface light scatterometry device, it is characterized in that: comprise laser instrument (1), chopper (2), attenuator (3), integrating sphere (4), lock-in amplifier (5), receiver (6) and digital voltmeter (7), the light that described laser instrument (1) is launched is after chopper (2), enter integrating sphere (4) through attenuator (3) again and expose to sample (8) surface, and received device (6) receives after sample (8) reflection, described integrating sphere (4) is provided with a detector and prime amplifier (9), described chopper (2) connects lock-in amplifier (5), described lock-in amplifier (5) connects detector and prime amplifier (9), described lock-in amplifier (5) is also connected with digital voltmeter (7).
2. surface light scatterometry device according to claim 1, is characterized in that: described integrating sphere (4) is positioned at detector and prime amplifier (9) place is also provided with a gate (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410603630.8A CN104297211A (en) | 2014-11-03 | 2014-11-03 | Surface light scattering measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410603630.8A CN104297211A (en) | 2014-11-03 | 2014-11-03 | Surface light scattering measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104297211A true CN104297211A (en) | 2015-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410603630.8A Pending CN104297211A (en) | 2014-11-03 | 2014-11-03 | Surface light scattering measuring device |
Country Status (1)
| Country | Link |
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| CN (1) | CN104297211A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760684A (en) * | 2018-05-03 | 2018-11-06 | 太原理工大学 | A kind of sensor measuring fluid boundary property |
| CN109975319A (en) * | 2019-03-18 | 2019-07-05 | 四川大学 | A kind of planar optical elements surface quality device for fast detecting and its method |
| CN111579062A (en) * | 2020-05-11 | 2020-08-25 | 武汉锐科光纤激光技术股份有限公司 | Integrating sphere type laser power meter and using method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10281990A (en) * | 1997-04-04 | 1998-10-23 | Nikon Corp | Measuring device and method for inside scattering of optical material |
| CN101539511A (en) * | 2009-04-24 | 2009-09-23 | 中国科学院上海光学精密机械研究所 | Device and method for measuring optical characteristic parameters of nanoparticle system |
| CN102507500A (en) * | 2011-10-14 | 2012-06-20 | 西安工业大学 | Laser environment scattering power measuring device |
| CN102565005A (en) * | 2010-12-24 | 2012-07-11 | 株式会社堀场制作所 | Optical measuring apparatus and optical measuring method |
| CN203025084U (en) * | 2012-12-12 | 2013-06-26 | 成都莱普科技有限公司 | Scattering coefficient measuring system |
-
2014
- 2014-11-03 CN CN201410603630.8A patent/CN104297211A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10281990A (en) * | 1997-04-04 | 1998-10-23 | Nikon Corp | Measuring device and method for inside scattering of optical material |
| CN101539511A (en) * | 2009-04-24 | 2009-09-23 | 中国科学院上海光学精密机械研究所 | Device and method for measuring optical characteristic parameters of nanoparticle system |
| CN102565005A (en) * | 2010-12-24 | 2012-07-11 | 株式会社堀场制作所 | Optical measuring apparatus and optical measuring method |
| CN102507500A (en) * | 2011-10-14 | 2012-06-20 | 西安工业大学 | Laser environment scattering power measuring device |
| CN203025084U (en) * | 2012-12-12 | 2013-06-26 | 成都莱普科技有限公司 | Scattering coefficient measuring system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760684A (en) * | 2018-05-03 | 2018-11-06 | 太原理工大学 | A kind of sensor measuring fluid boundary property |
| CN109975319A (en) * | 2019-03-18 | 2019-07-05 | 四川大学 | A kind of planar optical elements surface quality device for fast detecting and its method |
| CN109975319B (en) * | 2019-03-18 | 2022-04-15 | 四川大学 | Device and method for rapidly detecting surface quality of planar optical element |
| CN111579062A (en) * | 2020-05-11 | 2020-08-25 | 武汉锐科光纤激光技术股份有限公司 | Integrating sphere type laser power meter and using method thereof |
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| WD01 | Invention patent application deemed withdrawn after publication | ||
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Application publication date: 20150121 |