CN104296524A - A high vacuum sintering furnace - Google Patents
A high vacuum sintering furnace Download PDFInfo
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- CN104296524A CN104296524A CN201310296556.5A CN201310296556A CN104296524A CN 104296524 A CN104296524 A CN 104296524A CN 201310296556 A CN201310296556 A CN 201310296556A CN 104296524 A CN104296524 A CN 104296524A
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Abstract
The invention provides a high vacuum sintering furnace. The sintering furnace comprises a furnace body, a furnace door, a unit system, an inflation and deflation system, a pneumatic device, a heating and heat preservation device, a cooling system and a control cabinet. The furnace body is a double-walled water jacket with a horizontal cylinder structure. The furnace door is pivoted with one end of the furnace body. The furnace door comprises an external heat preservation layer and an internal molybdenum band heating layer. The furnace body is provided with a plurality of thermocouples, a deflation valve and an inflation valve. The inflation and deflation system is connected with an inner chamber of the furnace body through the deflation valve and the inflation valve. The control cabinet is provided with a touch screen and a control machine for a CPU. The thermocouples are connected with an input end of the CPU. The vacuum system comprises at least 3 stages of vacuum pumps connected with the inner chamber of the furnace body through a pipe joint and a valve. The total throughput of the vacuum pumps is at least twice the air flow of the inner chamber of the furnace body. The limit vacuum degree of the vacuum pumps is one order of magnitude higher than the vacuum degree requirement of the inner chamber of the furnace body. The cooling system comprises a water delivery device connected with the double-walled water jacket through a heat exchanger, and a matched air blower. The sintering furnace of the invention is used for sintering rare earth permanent magnet, saves time and electricity and has high efficiency.
Description
technical field
The invention belongs to vacuum sintering furnace technical field, be specifically related to a kind of high vacuum sintering furnace for rare-earth permanent magnet sintering.
background technology
The vacuum sintering furnace of prior art is in the system of selection of selecting all routinely of vavuum pump, the configuration of its vavuum pump generally selects single-stage, at most be two-stage, and the final vacuum of its vavuum pump selected is only higher than vacuum half order of magnitude that vacuum equipment requires, at most also less than an order of magnitude.Learnt by retrieval, the existing patent about sintering furnace fails to relate to the collocation of how appropriately selecting vavuum pump rate of air sucked in required and dissimilar vavuum pump, have ignored it for energy-and time-economizing and the huge meaning improving work efficiency, the selection principle of this traditional " half to one order of magnitude ", introduces mistaken ideas by the technical staff of the industry.
Such as China Patent No. 201220279397.9, name is called the utility model patent of " vacuum sintering furnace ", disclose a kind of vacuum sintering furnace, comprise grate, body of heater, vavuum pump, heater is provided with in described body of heater, be separated with heat-insulation layer between described heater and body of heater, described body of heater be provided with passage and communicate with vavuum pump, described body of heater is also provided with the hydraulic jack of the passage closure or openness described in control.How appropriately this patent does not relate to selects vavuum pump rate of air sucked in required, and as can be seen from its Figure of description, it only selects a vavuum pump.
And for example China Patent No. 201110254857.2, name is called the patent of invention of " a kind of vertical type vacuum sintering furnace ", disclose a kind of vertical type vacuum sintering furnace, it comprises body of heater, grate, bell, elevating mechanism, vacuum system, cooling system, and electric-control system, elevating mechanism wherein comprises multi-filament bar, keeper, keeper moves up and down along screw mandrel length direction, vertical type vacuum sintering furnace also comprises many struts, strut has the first duty and the second duty, when being in the first duty, strut support is located at the flange place of bell oral area, support bell and bell and body of heater disengaged position, when in the second state, screw mandrel drives keeper to move upward, and strut departs from the flange place of bell oral area, on the pallet that keeper is conflicted bottom bell, thus by furnace cover lifting or be sealed on body of heater.This patent has been done to study and design for the bell transmission of body of heater, and for vavuum pump rate of air sucked in required and type collocation fail equally to concern.
In fact, the performance complement configuration for the dissimilar vavuum pump under the different operating mode of the specified rate of air sucked in required of the vavuum pump for sintering furnace, operating point and Different periods is all worth further investigated.
The vacuum sintering furnace of prior art also exists a bit not enough, it often adopts less furnace cavity structure, therefore single carrying capacity is few, average power consumption is large, the present invention adopts larger furnace cavity structure and the high-strength air extractor of configuration, in pumping speed single stove than existing equipment shorten about 2 little time, the original-pack carrying capacity of high vacuum sintering furnace is 550kg, and present useful load is 800kg;
On power consumption, the every stove of each electrical appliance of former vacuum sintering furnace is 145kW+9kW+15kW+11kW=180kW, adds up to 11115kW.h;
The every stove of present high vacuum sintering furnace adds up to 145kW+9kW+7.5kW=161.5kW, adds up to 7579.2kW.h, tempering 145kW+7.5kW=152.5kW, adds up to 2260.05kW.h, amounts to 7579.2kW.h+2260.05kW.h=9839.25kW.h.
The electricity consumption of original every stove production institute is 11115kW.h, the electricity that can save produced by existing every stove is 1275.75kW.h, 1 year economize on electricity 1275.75kW.h × 300=382725kW.h, amounts to the electricity charge 382725 × 2.47 yuan=945330.75 yuan, 1 year power cost saving 945330.75 yuan altogether.
summary of the invention
The technical issues that need to address of the present invention are, the vacuum sintering furnace overcoming prior art matches unbalance selecting the deficient and dissimilar vavuum pump of the rate of air sucked in required allowance that vavuum pump exists, so that time-consumingly in practical application take the large defect of the low waste of electrical efficiency, the vavuum pump allocation plan of sufficient, the efficient power saving of a kind of vavuum pump allowance is provided.
The object of the invention is to be achieved by following technical proposals: a kind of high vacuum sintering furnace, comprise body of heater, fire door, machine set system, vacuum system, inflation blow-off system, pneumatic means, heating and attemperator, cooling system and switch board, body of heater is the horizontal cylinder structure being provided with double wall water jacket, fire door is articulated in one end of cylindrical structure, fire door comprises the molybdenum ribbon zone of heating being positioned at outer field heat-insulation layer He being positioned at internal layer, and the internal layer of fire door is the structure of boss shape; Body of heater is distributed with several thermocouples, a vent valve and a charge valve, inflation blow-off system is by the inner space of vent valve and charge valve and body of heater; Switch board is provided with touch-screen and take CPU as the controller of core, and thermocouple is connected with the input of CPU respectively; Vacuum system comprises at least 3 grades of vavuum pumps of the inner space by pipe joint and valve and body of heater, and total rate of air sucked in required of vavuum pump is at least twice than body of heater inner chamber tolerance and vavuum pump final vacuum higher than the requirement of body of heater inner chamber vacuum more than an order of magnitude, the type of vavuum pump comprises diffusion pump and oil-sealed rotary pump; The action of vent valve, charge valve and fire door is controlled by pneumatic means; Cooling system comprises the cooling water conveying device and the cooling blower supporting with heat exchanger that are connected with double wall water jacket by heat exchanger.
The body of heater of horizontal cylinder structure is convenient to laterally load and take out workpiece and make cooling even by double wall water jacket conveying cooling water, and the temperature of several thermocouple monitoring different parts controls to heat by controller automatically, air-charging and air-discharging system protects workpiece in certain technique period to body of heater inner chamber applying argon gas, vacuum system vacuumizes body of heater inner chamber, and this is the necessary condition of rare-earth permanent magnet sintering, cooling system heats up for body of heater carry out Conduction cooled due to the outer heat output in rare-earth permanent magnet sintering, as key point, the present invention selects at least 3 grades of vavuum pumps, and total rate of air sucked in required of vavuum pump is at least twice than the tolerance of body of heater inner chamber, and vavuum pump final vacuum higher than the requirement of body of heater inner chamber vacuum more than an order of magnitude, its beneficial effect is described as follows: draw an analogy, if be considered as a war vacuumizing body of heater inner chamber, the air then taking out light body of heater inner chamber can be compared to annihilates enemy, extraneous gas leaks the reinforcements that can be compared to enemy to body of heater inner chamber, use said " the often concentrated absolute predominance troops of the war (twice of ten major principles of operation, three times, four times, sometimes or even five times or six times to the troops of enemy), completely encircle enemy, make every effort to annihilate, do not make to slip through the net.Make every effort to avoid play that lose more than gain or that gains and losses balance each other attrition operation " theory, adopt the vavuum pump that at least 3 grades are dissimilar, comprise for slightly the vacuumizing of sintering process different phase, draw vacuum, pumping high vacuum, and gas ballasting stage, automatically start dissimilar or whole vavuum pump targetedly by controller, this is comparable is intended to be large troop formation's many arm of the services cooperation, because because the inside and outside differential pressure of body of heater inner chamber is constantly expanding while bleeding, the speed of obviously leaking to body of heater inner chamber also constantly can increase along with the increase of pressure reduction, prior art is because the selected general allowance of vavuum pump rate of air sucked in required is very little and the type of configuration is very imappropriate, make pumpdown time at double or several times delay, the total amount of leakage is caused to increase, become genuine " attrition operation that gains and losses balance each other ", compared to prior art, the present invention utilizes the principle of " concentrating strength on fighting a war of annihilation ", can reach and make short work of, take out the air of bare hull intracoelomic cavity fast, its direct significance is the total amount significantly reducing leakage, significantly save time, therefore also electric power can be saved in a large number, described various advantage by inventor by practice test confirm, relevant experimental data can see described in the embodiment of the present invention 1.
As preferably, vacuum system comprises with the inner space of body of heater and the mutually main valve that is connected of parallel relationship and slightly take out valve each other, the port of export of main valve connects diffusion pump, the branch road slightly taking out valve outlet port end is connected with diffusion delivery side of pump by front step valve, and another branch road slightly taking out valve outlet port end is connected with oil-sealed rotary pump.
As preferably, vavuum pump is provided with 4-5 level, comprise one-level diffusion pump and 3-4 level oil-sealed rotary pump, diffusion pump is wherein oil diffusion pump, oil-sealed rotary pump comprises the mechanical pump group be made up of the lobe pump group that forms of lobe pumps of some series connection and some mechanical pumps in parallel, and lobe pump group and mechanical pump group are connected in series.Lobe pump group is particularly useful for drawing vacuum stages, and oil diffusion pump is mainly used in pumping high vacuum, and mechanical pump group focuses on each stage and vacuumizes, and multiple stage is in parallel embodies powerful meaning of bleeding especially.
As preferably, vavuum pump comprises 1 oil diffusion pump, 2 lobe pumps and at least 2 mechanical pumps, and the input and output side of lobe pump group is parallel with bypass valve.
As preferably, mechanical pump group is made up of the slide machine parallel connection of pumps that 2-5 platform specifications and characteristics is all identical.
As preferably, lobe pump group is composed in series by 2 lobe pumps that rate of air sucked in required is different.
As preferably, heat exchanger is composed in series by a large heat exchanger and the less little heat exchanger of capacity relative.
As preferably, inflation blow-off system comprises to be connected successively by GZ-25 diaphragm valve, GE-10 barrier film net and cylinder valve and by inflating the aerating device that high-voltage tube and argon bottle connect and compose, aerating device is connected with inflation gauge.
As preferably, body of heater is distributed with 3 thermocouples, one of them is laid on the upside of body of heater, and another is laid in the downside of body of heater, also has one and is laid in the other end relative with fire door on body of heater.
The invention has the beneficial effects as follows:
1, select during vavuum pump and have sufficient rate of air sucked in required allowance, be equipped with the vavuum pump that rate of air sucked in required has absolute predominance, the power saving efficiency that saves time is high;
2, dissimilar vavuum pump matches, for just vacuumizing, drawing vacuum, pumping high vacuum each stage and sintering different phase organic cooperation automatic program control, just right and avoid waste;
3, bypass valve is parallel with at the input and output side of lobe pump group, can in thick vacuumizing phase by lobe pump group short circuit;
4, large heat exchanger and the collocation of little heat exchanger, start as required, not only have the meaning of saving, also has needed for the optimum condition temperature met required by the different process stage precisely regulates;
5, mechanical pump group is made up of the parallel connection of pumps of 2-5 platform slide machine, optionally opens or standard-sized sheet, maneuverability, and brute force is bled;
6, stable performance of the present invention, operating cost is low, safety in production can be realized, effectively can improve the uniformity of the field distribution of stove internal gas pressure and thermo parameters method, actual measurement product percent of pass reaches more than 98%, there is high energy-saving significance, this enterprise try out 1 year for enterprise cost-saving reach more than 1,000,000 economic benefit.
accompanying drawing explanation
Fig. 1 is the structural principle schematic diagram of an embodiment of the present invention;
Fig. 2 is a kind of vavuum pump configuration of the present invention connection diagram;
Fig. 3 is the cooling system and the body of heater connection diagram that comprise air-cooled and water-cooled;
Fig. 4 is switch board and diffusion pump and body of heater connection diagram.
In figure, body of heater 1; Bypass valve 10; Fire door 11; Vent valve 12; Charge valve 13; Argon bottle 14; Switch board 2; Diffusion pump 3; Large heat exchanger 4; Little heat exchanger 41; Recovery tank 42; Cooling blower 5; Main valve 6; Slightly take out valve 7; Front step valve 8; Large lobe pump 91; Little lobe pump 92; Sliding valve vacuum pump 93.
detailed description of the invention
Below in conjunction with accompanying drawing and specific embodiments, the invention will be further described.
Embodiment 1: as shown in Figure 1, a kind of high vacuum sintering furnace, comprise body of heater 1, fire door 11, machine set system, vacuum system, inflation blow-off system, pneumatic means, heating and attemperator, cooling system and switch board, body of heater 1 is for being provided with the horizontal cylinder structure of double wall water jacket, fire door 11 is articulated in one end of cylindrical structure, fire door 11 comprises the molybdenum ribbon zone of heating being positioned at outer field heat-insulation layer He being positioned at internal layer, heat-insulation layer alumina silicate asbestos material; The internal layer of fire door 11 is the structure of boss shape, and boss periphery is provided with the gear ring be connected with body of heater; Body of heater 1 is distributed with 3 thermocouples, one of them is laid on the upside of body of heater 1, another is laid in the downside of body of heater 1, also have one and be laid in the other end relative with fire door 11 on body of heater 1, thermocouple forms by having two platinum rhodium platinum thermo wires, body of heater 1 is also provided with a vent valve 12 and a charge valve 13, inflation blow-off system passes through the inner space of vent valve 12 and charge valve 13 and body of heater 1; Switch board 2 is provided with touch-screen and take CPU as the controller of core, and thermocouple is connected with the input of CPU respectively; Vacuum system comprises at least 3 grades of vavuum pumps of the inner space by pipe joint and valve and body of heater 1, more large-minded than body of heater inner chamber 1.5 times of total rate of air sucked in required of vavuum pump, vavuum pump final vacuum is higher than requirement 2 orders of magnitude of body of heater inner chamber vacuum, and the type of vavuum pump comprises diffusion pump 3 and oil-sealed rotary pump; The action of vent valve 12, charge valve 13 and fire door 11 is controlled by pneumatic means; Cooling system comprises the cooling water conveying device and the cooling blower 5 supporting with heat exchanger 4 that are connected with double wall water jacket by heat exchanger 4.
Vacuum system comprises with the inner space of body of heater 1 and the mutually main valve 6 that is connected of parallel relationship and slightly take out valve 7 each other, the port of export of main valve 6 connects diffusion pump 3, the branch road slightly taking out valve 7 port of export is connected with the output of diffusion pump 3 by front step valve 8, and another branch road slightly taking out valve 7 port of export is connected with oil-sealed rotary pump.
Vavuum pump is provided with 4 grades, comprises 1 grade of diffusion pump, 3,2 grades of lobe pumps that rate of air sucked in required is different and is in series, and 1 grade of mechanical pump, and diffusion pump is wherein oil diffusion pump, model KT-600,8-9KW/ platform; The little lobe pump 92 of large lobe pump 91 and EJ-300 that 2 bench-types number are respectively EJ-1200P forms lobe pump group, 2 identical mechanical pumps compose in parallel mechanical pump group, lobe pump group and mechanical pump group are connected in series, and the input of lobe pump group and output are parallel with bypass valve 10.The concrete model of mechanical pump is 2H-70B sliding valve vacuum pump 93, two-stage structure, separate unit pumping speed 70 liters/second, limiting pressure: 5 × 10
-2pa, motor rated power 7.5 kilowatts/platform, as shown in Figure 2.
Lobe pump group is particularly useful for drawing vacuum stages, and oil diffusion pump is mainly used in pumping high vacuum, and mechanical pump group vacuumized for each stage, and multiple stage parallel connection embodies the advantage of all kinds of pump, the special meaning embodying brute force and bleed.Taking out low vacuum need not by lobe pump, and have splayed configuration rotor because of in the middle of it, the gap of rotor and pump chamber only has 0.15mm.2H-70B pump can cut out one during pumping high vacuum, EJ-300 and EJ-1200P lobe pump need not be opened.Extracted out the general gas in stove or containing a small amount of coercibility steam gas by it.
Heat exchanger is composed in series by a large heat exchanger 4 and the less little heat exchanger 41 of capacity relative, and heat exchanger is furnished with recovery tank 42, as shown in Figure 3.
Inflation blow-off system comprises to be connected successively by GZ-25 diaphragm valve, GE-10 barrier film net and cylinder valve and pass through the aerating device that inflation high-voltage tube and argon bottle 14 connect and compose, and aerating device is connected with inflation gauge, as shown in Figure 4.
sintering furnace operating procedure process is as follows:
1. open fire door 11 by pneumatic means, product is contained on the charging tray be placed on truck, truck pushes in body of heater 1, closes fire door.
2. start mechanical pump 2H-70B, when pipeline valve lamp is bright, opens after spending 1 minute and slightly take out valve 7, vacuumize, Program time delay 5 minutes, start large lobe pump 91 and little lobe pump 92, carry out drawing vacuum; Corresponding is director's sintering process curve, comprises A
#b
#c
#f
#curve, this partially-working has been inputted in advance by technique person, operation A
#b
#c
#f
#article 1 curve be sintering, Article 3 curve is 900 DEG C of tempering, and Article 2 curve is 540 DEG C of tempering, B
#c
#that curve connects that digital switch is just; At A
#c
#after touch-screen opened by sintering Nagqu line, connect editing curve key, follow procedure step sets several sections, press acknowledgement key again and press and call curve key, amendment curve number, by calling in acknowledgement key in screen, then press curve input and is called the acknowledgement key of MR13, press on key frame reverse side key frame again, observe input program right.
3. sintering furnace technique: be evacuated down to 9.0E1-1pa, start heating, now do not drive diffusion pump; Be incubated 20 points of kinds when being heated to 300 DEG C, open gas ballast valve and carry out gas ballasting 20 minutes, then close gas ballast valve through about 5 minutes, open fuel outlet valve, the water of calmness below oil is discharged, when temperature is between 580 DEG C of ∽ 880 DEG C, if it is very fast that vacuum is fallen, lower.Must play maintenance during about 5.0E1 ∽ 8.0E1pa, vacuum continues to heat up again.Between 880 DEG C of ∽ 900 DEG C, main valve must be opened, can continue when vacuum reaches 5.0E-2pa to heat up, heating is closed when 1090 DEG C of insulations terminate within first 20 minutes, to survey after Pressure Rise Rate completes, when Temperature fall is to less than 860 DEG C, drive diffusion pump 3, drive by-passing valve 10, stop lobe pump group and continue to be heated to 900 DEG C, when 900 DEG C of end cool.Shift to an earlier date inflation in 15 minutes, when noting applying argon gas, bottle pressure must leave 1mpa pressure, uses during 540 DEG C of tempering such as remaining argon gas again.Notice that the every stove of operative employee all wants running check loading line not have gas leakage, can use washing powder water during inspection, confirm that pipeline is air tight, shut after argon bottle 14 is opened pressurising again, observing gauge hand can or can not make a clean sweep of toward low; When temperature drops to below 80 DEG C, do not vacuumize guarantor's argon pressure, continue to be heated to 540 DEG C of insulations, be then cooled to less than 70 DEG C to come out of the stove by 540 DEG C.
4. product is come out of the stove, and opens mechanical pump, opens and slightly takes out valve, blow-on front tooth circle, when fire door gear ring is opened, closes and slightly takes out valve, open air valve or venting diaphragm valve.After product is come out of the stove, close fire door, carry out taking out low vacuum protection, be extracted into Pressure gauge-0.1pa just, if sintering furnace for a long time need not, must drive lobe pump vacuum meter, be extracted into 2.0E0pa just, last button is all shut, whole EP (end of program).
Embodiment 2: total rate of air sucked in required of vavuum pump is than large-minded 2 times of body of heater inner chamber, and vavuum pump final vacuum is higher than high 2 orders of magnitude of requirement of body of heater inner chamber vacuum, and all the other structures are with embodiment 1.
The parallel connection of embodiment 3:2H-70B mechanical pump is provided with 3, and all the other structures are with embodiment 1.
The present invention is applicable to the high vacuum sintering furnace of rare-earth permanent magnet sintering, there is vavuum pump deposit and have sufficient rate of air sucked in required allowance, dissimilar vavuum pump science is matched and automatic program control, the advantage that the power saving efficiency that saves time is high, if those skilled in the art does simple amendment to foregoing invention content or replaces, such change can not be thought to depart from the scope of the present invention, all like this to the apparent amendment of those skilled in the art by be included in claim of the present invention scope within.
Claims (9)
1. a high vacuum sintering furnace, comprise body of heater, fire door, machine set system, vacuum system, inflation blow-off system, pneumatic means, heating and attemperator, cooling system and switch board, it is characterized in that, body of heater is the horizontal cylinder structure being provided with double wall water jacket, fire door is articulated in one end of cylindrical structure, fire door comprises the molybdenum ribbon zone of heating being positioned at outer field heat-insulation layer He being positioned at internal layer, and the internal layer of fire door is the structure of boss shape; Body of heater is distributed with several thermocouples, a vent valve and a charge valve, inflation blow-off system is by the inner space of vent valve and charge valve and body of heater; Switch board is provided with touch-screen and take CPU as the controller of core, and thermocouple is connected with the input of CPU respectively; Vacuum system comprises at least 3 grades of vavuum pumps of the inner space by pipe joint and valve and body of heater, and total rate of air sucked in required of vavuum pump is at least twice than body of heater inner chamber tolerance and vavuum pump final vacuum higher than the requirement of body of heater inner chamber vacuum more than an order of magnitude, the type of vavuum pump comprises diffusion pump and oil-sealed rotary pump; The action of vent valve, charge valve and fire door is controlled by pneumatic means; Cooling system comprises the cooling water conveying device and the cooling blower supporting with heat exchanger that are connected with double wall water jacket by heat exchanger.
2. a kind of high vacuum sintering furnace according to claim 1, it is characterized in that, vacuum system comprises with the inner space of body of heater and the mutually main valve that is connected of parallel relationship and slightly take out valve each other, the port of export of main valve connects diffusion pump, the branch road slightly taking out valve outlet port end is connected with diffusion delivery side of pump by front step valve, and another branch road slightly taking out valve outlet port end is connected with oil-sealed rotary pump.
3. a kind of high vacuum sintering furnace according to claim 2, it is characterized in that, vavuum pump is provided with 4-5 level, comprise one-level diffusion pump and 3-4 level oil-sealed rotary pump, diffusion pump is wherein oil diffusion pump, oil-sealed rotary pump comprises the mechanical pump group be made up of the lobe pump group that forms of lobe pumps of some series connection and some mechanical pumps in parallel, and lobe pump group and mechanical pump group are connected in series.
4. a kind of high vacuum sintering furnace according to claim 3, is characterized in that, vavuum pump comprises 1 oil diffusion pump, 2 lobe pumps and at least 2 mechanical pumps, and the input and output side of lobe pump group is parallel with bypass valve.
5. a kind of high vacuum sintering furnace according to claim 3, is characterized in that, mechanical pump group is made up of the slide machine parallel connection of pumps that 2-5 platform specifications and characteristics is all identical.
6. a kind of high vacuum sintering furnace according to claim 4 or 5, is characterized in that, lobe pump group is composed in series by 2 lobe pumps that rate of air sucked in required is different.
7. a kind of high vacuum sintering furnace according to claim 1,2,3,4 or 5, is characterized in that, heat exchanger is composed in series by a large heat exchanger and the less little heat exchanger of capacity relative.
8. a kind of high vacuum sintering furnace according to claim 7, it is characterized in that, inflation blow-off system comprises is connected and the aerating device connected and composed by inflation high-voltage tube and argon bottle successively by GZ-25 diaphragm valve, GE-10 barrier film net and cylinder valve, and aerating device is connected with inflation gauge.
9. a kind of high vacuum sintering furnace according to claim 8, is characterized in that, body of heater is distributed with 3 thermocouples, one of them is laid on the upside of body of heater, and another is laid in the downside of body of heater, also has one and is laid in the other end relative with fire door on body of heater.
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| CN108131946A (en) * | 2017-12-22 | 2018-06-08 | 湖南太子新材料科技有限公司 | A kind of high temperature sintering system |
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| CN203443321U (en) * | 2013-07-16 | 2014-02-19 | 东阳市和顺磁业有限公司 | High-vacuum sintering furnace |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106086767A (en) * | 2016-08-23 | 2016-11-09 | 吴忠仪表有限责任公司 | Circulation evacuation, the sprayed coating vacuum deposition techniques of pressurising recovery and device thereof |
| CN106086767B (en) * | 2016-08-23 | 2018-05-08 | 吴忠仪表有限责任公司 | The sprayed coating vacuum deposition techniques that circulation vacuumizes, pressurising recovers |
| CN108131946A (en) * | 2017-12-22 | 2018-06-08 | 湖南太子新材料科技有限公司 | A kind of high temperature sintering system |
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