CN104269191B - 液压伺服***与压电陶瓷驱动器共同驱动的并联机构 - Google Patents
液压伺服***与压电陶瓷驱动器共同驱动的并联机构 Download PDFInfo
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- CN104269191B CN104269191B CN201410484446.6A CN201410484446A CN104269191B CN 104269191 B CN104269191 B CN 104269191B CN 201410484446 A CN201410484446 A CN 201410484446A CN 104269191 B CN104269191 B CN 104269191B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 48
- 230000008878 coupling Effects 0.000 claims abstract description 60
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- 238000005859 coupling reaction Methods 0.000 claims abstract description 60
- 238000006073 displacement reaction Methods 0.000 claims abstract description 32
- 238000005096 rolling process Methods 0.000 claims description 11
- 239000007787 solid Substances 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 15
- 238000005259 measurement Methods 0.000 abstract description 6
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- 238000010586 diagram Methods 0.000 description 3
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- 238000004377 microelectronic Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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CN201410484446.6A CN104269191B (zh) | 2014-09-19 | 2014-09-19 | 液压伺服***与压电陶瓷驱动器共同驱动的并联机构 |
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CN201410484446.6A CN104269191B (zh) | 2014-09-19 | 2014-09-19 | 液压伺服***与压电陶瓷驱动器共同驱动的并联机构 |
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CN104269191A CN104269191A (zh) | 2015-01-07 |
CN104269191B true CN104269191B (zh) | 2016-03-23 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105700360B (zh) * | 2015-09-18 | 2018-10-30 | 南京工程学院 | 一种宏微混合驱动的并联机构测控***的控制方法 |
CN106239534B (zh) * | 2016-09-30 | 2018-06-19 | 华南理工大学 | 有杆气缸驱动的平面三自由度并联平台控制装置及方法 |
CN106313013A (zh) * | 2016-10-25 | 2017-01-11 | 华南理工大学 | 一种宏微集成运动高精度并联机构装置及控制方法 |
US11389953B2 (en) | 2019-01-31 | 2022-07-19 | Caterpillar Inc. | Hydraulic delta robot control system |
CN111421526B (zh) | 2020-04-27 | 2023-10-20 | 无锡富瑞德测控仪器股份有限公司 | 一种大行程多自由度纳米级定位装置与控制方法 |
CN113238254B (zh) * | 2021-04-12 | 2022-12-13 | 上海卫星工程研究所 | 压电液压高精度定位平台装置 |
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JP2705696B2 (ja) * | 1996-12-25 | 1998-01-28 | 株式会社日立製作所 | 試料ステージ |
CN2466769Y (zh) * | 2001-02-23 | 2001-12-19 | 北京远泰通达科技开发有限责任公司 | 三自由度超精密自动定位平台 |
JP2003219665A (ja) * | 2002-01-17 | 2003-07-31 | Kanto Auto Works Ltd | パワーシリンダ |
CN100406750C (zh) * | 2004-02-23 | 2008-07-30 | 北京航空航天大学 | 一种压电陶瓷伺服阀 |
CN1305645C (zh) * | 2004-03-17 | 2007-03-21 | 哈尔滨工业大学 | 六自由度宏/微双重驱动纳米级定位大行程柔性并联机器人 |
CN1645518A (zh) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | 一种平面三自由度柔顺精密定位平台 |
CN1306247C (zh) * | 2005-08-26 | 2007-03-21 | 哈尔滨工业大学 | 宏/微双重驱动的大行程高速纳米级精度的平面定位*** |
CN1962209B (zh) * | 2006-12-08 | 2010-05-19 | 哈尔滨工业大学 | 一种三支链六自由度并联柔性铰链微动机构 |
CN101324227B (zh) * | 2007-06-12 | 2011-08-10 | 北京航空航天大学 | 一种高频四联组合液压泵及控制方法 |
CN101887761B (zh) * | 2010-06-29 | 2012-02-29 | 浙江大学 | 两自由度微动定位平台 |
CN103021472B (zh) * | 2012-12-03 | 2014-09-17 | 天津大学 | 平面并联式三自由度精密定位工作台 |
CN103714865B (zh) * | 2014-01-03 | 2015-11-18 | 天津大学 | 一种大行程两平动一转动精密定位平台 |
CN204087810U (zh) * | 2014-09-19 | 2015-01-07 | 南京工程学院 | 液压伺服***与压电陶瓷驱动器共同驱动的并联机构 |
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Application publication date: 20150107 Assignee: Nanjing University of Engineering Science Park Co.,Ltd. Assignor: NANJING INSTITUTE OF TECHNOLOGY Contract record no.: X2024980001093 Denomination of invention: Parallel Mechanism Driven by Hydraulic Servo System and Piezoelectric Ceramic Driver Granted publication date: 20160323 License type: Common License Record date: 20240122 |
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Application publication date: 20150107 Assignee: Nanjing Jinxi Yunchuang Technology Co.,Ltd. Assignor: NANJING INSTITUTE OF TECHNOLOGY Contract record no.: X2024980001805 Denomination of invention: Parallel Mechanism Driven by Hydraulic Servo System and Piezoelectric Ceramic Driver Granted publication date: 20160323 License type: Common License Record date: 20240202 |