CN104267556B - It can compensate for the optical fiber phase changer of optical path difference - Google Patents
It can compensate for the optical fiber phase changer of optical path difference Download PDFInfo
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- CN104267556B CN104267556B CN201410491343.2A CN201410491343A CN104267556B CN 104267556 B CN104267556 B CN 104267556B CN 201410491343 A CN201410491343 A CN 201410491343A CN 104267556 B CN104267556 B CN 104267556B
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- fiber coupler
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- optical fiber
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
Abstract
A kind of optical fiber phase changer that can compensate for optical path difference, including base, it is separately fixed at the first fiber coupler module and the second fiber coupler module at the base both ends, first fiber coupler module and the second fiber coupler module mutually collimate, first fiber coupler module includes the first optical fiber transmission line, the first five degree of freedom the is put english whole fiber coupler of modulation and first support, the first five degree of freedom whole fiber coupler of modulation of putting english is fixed on base by first support, and the first optical fiber transmission line and the first five degree of freedom whole fiber coupler of modulation of putting english connect.The present invention produces phase shift measure beyond imaging system light path, eliminates systematic error caused by traditional phase, can compensate for special optical path difference, simplifies measuring system overall structure, and with it is simple in construction, assemble the advantages of easy.
Description
Technical field
It is particularly a kind of phase shift is produced beyond imaging system light path to mend measuring the present invention relates to interferometry field
Repay the optical fiber phase changer of optical path difference.
Background technology
The phase of control light beam, including point-diffraction interference are all thirsted in the various experiments based on interferometric optical and system
Instrument, lateral shear interferometer, phase outline determination method and holographic interference, fixed star interferometry etc., optical phase shift can be with differences
Mode introduce.
In general phase-shifted manner has piezoelectric ceramics (PZT) phase shift, grating phase shift, polarization phase-shifting etc..But these phase changers,
The phase shift stroke of several wavelength can only be produced.In the interferometer kind that some use short-coherence light source, high-precision phase is not only needed
Shifting movement, it is also necessary to the optical path compensation motion of big stroke, to realize the interference fringe of high interference contrast.Such as first technology (ginseng
See G.E.Sommargren, D.W.Phillion, M.A.Johnson, et al, " 100-picometer interferometry
For EUVL ", SPIE Vol.4688,316-328,2002) in phase realized by devices such as Amici prism, PZT, prism of corner cubes
Shifting and optical path compensation function, but phase shift and optical path compensation are divided into two light paths, it is complicated.
The content of the invention
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, there is provided a kind of optical fiber phase shift that can compensate for optical path difference
Device, to realize continuous phase shift, and the regulation of a wide range of light path can be realized.The phase changer has simple in construction, phase-shifting element
Not generation system error and the interference adjustable advantage of contrast.
The technical solution of the present invention is as follows：
A kind of optical fiber phase changer that can compensate for optical path difference, including base, the first light for being separately fixed at the base both ends
Fine Coupler Module and the second fiber coupler module, described the first fiber coupler module and the second fiber coupler module
Mutually collimation；The first described fiber coupler module includes the first optical fiber transmission line, the first five degree of freedom and put english the whole light of modulation
Fine coupler and first support, the first described five degree of freedom whole fiber coupler of modulation of putting english are fixed on institute by first support
On the base stated, the first described optical fiber transmission line and the first five degree of freedom whole fiber coupler of modulation of putting english connect；Described
Second fiber coupler module includes the second optical fiber transmission line, the second five degree of freedom and put english the whole fiber coupler of modulation and second
Frame, the second described five degree of freedom whole fiber coupler of modulation of putting english is fixed on by second support on described base, described
The second optical fiber transmission line and the second five degree of freedom whole fiber coupler of modulation of putting english connect；Its feature is, described second
Fiber coupler module also includes micro-displacement platform and grand dynamic displacement platform, and described fine motion moves displacement platform and is fixed on the grand dynamic displacement
On platform, the second described five degree of freedom whole fiber coupler of modulation of putting english passes through second support, micro-displacement platform and grand dynamic displacement
Platform is fixed on described base.
A kind of optical fiber phase changer that can compensate for optical path difference, including base, the first light for being separately fixed at the base both ends
Fine Coupler Module and the second fiber coupler module, described the first fiber coupler module and the second fiber coupler module
Mutually collimation；The first described fiber coupler module includes the first optical fiber transmission line, the first five degree of freedom and put english the whole light of modulation
Fine coupler and first support, the first described five degree of freedom whole fiber coupler of modulation of putting english are fixed on institute by first support
On the base stated, the first described optical fiber transmission line and the first five degree of freedom whole fiber coupler of modulation of putting english connect；Described
Second fiber coupler module includes the second optical fiber transmission line, the second five degree of freedom and put english the whole fiber coupler of modulation and second
Frame, the second described five degree of freedom whole fiber coupler of modulation of putting english is fixed on by second support on described base, described
The second optical fiber transmission line and the second five degree of freedom whole fiber coupler of modulation of putting english connect；Its feature is, described first
Fiber coupling module also includes the grand dynamic displacement platform being fixed on described base, and the first described five degree of freedom modulation of putting english is whole
Fiber coupler is fixed on grand dynamic displacement platform by first support；The second described fiber coupler module also includes being fixed on institute
The micro-displacement platform on base stated, the second described five degree of freedom whole fiber coupler of modulation of putting english are fixed on by second support
In micro-displacement platform.
The lens that described five degree of freedom is put english built in the whole fiber coupler of modulation are aligned by 5 frees degree：Be respectively
X, Y and Z axis linear alignment, pitching and deflection angle alignment, and control pitching and deflection angle to be aligned and carry out Z-direction simultaneously
Regulation.
Described grand dynamic displacement platform is the grand dynamic displacement platform of automatically controlled piezoelectric ceramics or other accurate grand dynamic displacement platforms.
Compared with prior art, the present invention has advantages below：
(1) generation system error, the special optical path difference of energy compensation system do not produce high interference visibility；
(2) it is simple in construction beyond tested imaging system images light path, flexibly；Such as the phase changer is applied to
In interferometer, it is not necessary to increase extra displacement platform, be easy to simplify interferometer measuration system structure, realize interferometry process.
Brief description of the drawings
Fig. 1 is the structural representation for the optical fiber phase changer first embodiment that the present invention can compensate for optical path difference；
Fig. 2 is the structural representation for the optical fiber phase changer second embodiment that the present invention can compensate for optical path difference.
Embodiment
The present invention will be further described with embodiment below in conjunction with the accompanying drawings, but should not limit the present invention's with this embodiment
Protection domain.
Embodiment 1：As shown in figure 1, a kind of optical fiber phase changer that can compensate for optical path difference includes the first fiber coupler mould
Block, the second fiber coupler module and base 3 form.First fiber coupler module by the first optical fiber transmission line 101, five from
It is made up of the put english whole fiber coupler 102 of modulation, first support 103 of degree, fiber coupler 102 is by the fixed bit of first support 103
Put, the first optical fiber transmission line 101 connects with fiber coupler 102；Second fiber coupler module is by the second optical fiber transmission line
201st, five degree of freedom is put english the whole fiber coupler 202 of modulation, second support 203, micro-displacement platform 204 and grand dynamic displacement platform 205
Composition, fine motion are moved displacement platform 204 and are fixed on grand dynamic displacement platform 205, and fiber coupler 202 is fixed on micro- by second support 203
On dynamic displacement platform 204, the second optical fiber transmission line 201 connects with fiber coupler 202.
The position annexation of each component is as follows：
First fiber coupler module is fixed on the side of base, and the second fiber coupler module is fixed on base in addition
Side, the first fiber coupler module and the second fiber coupler module mutually collimate.
The operation principle and the course of work of the present invention is as follows：The direction of advance of the output light of first optical fiber transmission line 101 is institute
The diverging light that optical fiber transmission is come in is pooled collimation by the first fiber coupler module stated, the first fiber coupler module
The collimated light beam is coupled into the second optical fiber transmission line 201 by light beam, the second fiber coupler module, and grand dynamic displacement platform 205 moves
The a wide range of regulation special optical path difference of optical path compensation, regulation interference contrast, the motion of micro-displacement platform 204 produce phase shift.
Embodiment 2：As shown in Fig. 2 a kind of optical fiber phase changer that can compensate for optical path difference, including the first fiber coupler mould
Block, the second fiber coupler module and base 6 form.First fiber coupler module is by optical fiber transmission line 401, five degree of freedom
The whole fiber coupler 402 of modulation of putting english, support 403 and grand dynamic displacement platform 404 are formed, and fiber coupler 402 is fixed by support 403
On grand dynamic displacement platform 404, optical fiber transmission line 401 connects with fiber coupler 402；Second fiber coupler module is passed by optical fiber
The put english whole fiber coupler 502 of modulation, support 503 and micro-displacement platform 504 of defeated line 501, five degree of freedom forms, fiber coupler
502 are fixed in micro-displacement platform 504 by support 503, and optical fiber transmission line 501 connects with fiber coupler 502.
The position annexation of each component is as follows：
First fiber coupler module is fixed on the side of base 6, and the second fiber coupler module is fixed on the another of base 6
Outer side, the first fiber coupler module and the second fiber coupler module mutually collimate.
The operation principle and the course of work of the present invention is as follows：The direction of advance of the output light of optical fiber transmission line 401 is described
The diverging light that optical fiber transmission is come in is pooled collimated light beam by the first fiber coupler module, the fiber coupler module, and second
Fiber coupler module is by the collimated light beam coupled into optical fibres transmission line 501, wherein grand dynamic displacement platform 404 moves a wide range of regulation
The special optical path difference of optical path compensation, regulation interference contrast, the motion of micro-displacement platform 504 produce phase shift.
The optical fiber phase changer provided by the invention that can compensate for optical path difference, can realize continuous phase shift, and can realize big model
Enclose the regulation of light path.The phase changer has simple in construction, phase-shifting element, and generation system error and interference contrast be not adjustable
The advantages of section.
Claims (4)
1. a kind of optical fiber phase changer that can compensate for optical path difference, including base (3), it is separately fixed at the of base (3) both ends
One fiber coupler module and the second fiber coupler module, the first described fiber coupler module and the second fiber coupler
Module mutually collimates；
The first described fiber coupler module includes the first optical fiber transmission line (101), the first five degree of freedom and put english the whole light of modulation
Fine coupler (102) and first support (103), the first described five degree of freedom whole fiber coupler of modulation (102) of putting english pass through
First support (103) is fixed on described base (3), and described the first optical fiber transmission line (101) adds with the first five degree of freedom
Rotation adjustment fiber coupler (102) connects；
The second described fiber coupler module includes the second optical fiber transmission line (201), the second five degree of freedom and put english the whole light of modulation
Fine coupler (202) and second support (203), described the second optical fiber transmission line (201) and the second five degree of freedom are put english modulation
Whole fiber coupler (202) connects, it is characterised in that
The second described fiber coupler module also includes micro-displacement platform (204) and grand dynamic displacement platform (205), described fine motion
Displacement platform (204) is fixed on the grand dynamic displacement platform (205), and the second described five degree of freedom is put english the whole fiber coupler of modulation
(202) it is fixed on by second support (203), micro-displacement platform (204) and grand dynamic displacement platform (205) on described base (3).
2. a kind of optical fiber phase changer that can compensate for optical path difference, including base (6), it is separately fixed at the of base (6) both ends
One fiber coupler module and the second fiber coupler module, the first described fiber coupler module and the second fiber coupler
Module mutually collimates；
The first described fiber coupler module includes the first optical fiber transmission line (401), the first five degree of freedom and put english the whole light of modulation
Fine coupler (402) and first support (403), described the first optical fiber transmission line (401) and the first five degree of freedom are put english modulation
Whole fiber coupler (402) connects；
The second described fiber coupler module includes the second optical fiber transmission line (501), the second five degree of freedom and put english the whole light of modulation
Fine coupler (502) and second support (503), described the second optical fiber transmission line (501) and the second five degree of freedom are put english modulation
Whole fiber coupler (502) connects, it is characterised in that the first described fiber coupling module also includes being fixed on described base
(6) the grand dynamic displacement platform (404) on, the first described five degree of freedom put english the whole fiber coupler of modulation (402) by first support
(403) it is fixed on grand dynamic displacement platform (404)；
The second described fiber coupler module also includes the micro-displacement platform (504) being fixed on described base (6), described
The second five degree of freedom whole fiber coupler of modulation (502) of putting english micro-displacement platform (504) is fixed on by second support (503)
On.
3. according to any described optical fiber phase changers that can compensate for optical path difference of claim 1-2, it is characterised in that described five
The lens that the free degree is put english built in the whole fiber coupler of modulation are aligned by 5 frees degree：Be respectively in X, Y and Z axis it is linear right
Standard, pitching and deflection angle alignment, and control pitching and deflection angle to be aligned and carry out Z-direction regulation simultaneously.
4. the optical fiber phase changer according to claim 3 that can compensate for optical path difference, it is characterised in that described grand dynamic displacement
Platform is the grand dynamic displacement platform of automatically controlled piezoelectric ceramics or other accurate grand dynamic displacement platforms.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410491343.2A CN104267556B (en) | 2014-09-24 | 2014-09-24 | It can compensate for the optical fiber phase changer of optical path difference |
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| CN201410491343.2A CN104267556B (en) | 2014-09-24 | 2014-09-24 | It can compensate for the optical fiber phase changer of optical path difference |
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| CN104267556A CN104267556A (en) | 2015-01-07 |
| CN104267556B true CN104267556B (en) | 2018-01-12 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106707501A (en) * | 2016-12-20 | 2017-05-24 | 中国科学院长春光学精密机械与物理研究所 | Phase-shifting device and calibration method |
| CN108844454A (en) * | 2018-06-25 | 2018-11-20 | 中国科学院上海光学精密机械研究所 | A kind of interferometer phase changer |
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| JP2003131179A (en) * | 2001-10-26 | 2003-05-08 | Nippon Telegr & Teleph Corp <Ntt> | Thermooptic phase shifter |
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| CN1372155A (en) * | 2002-03-20 | 2002-10-02 | 燕山大学 | Laser optical fibre coupler |
| CN101825740A (en) * | 2010-03-11 | 2010-09-08 | 哈尔滨工程大学 | Rotary writing method of multi-core fiber grating |
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| CN104267556A (en) | 2015-01-07 |
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