CN104266790A - Double-diaphragm type underwater pressure sensor with limiting structure - Google Patents
Double-diaphragm type underwater pressure sensor with limiting structure Download PDFInfo
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- CN104266790A CN104266790A CN201410517873.XA CN201410517873A CN104266790A CN 104266790 A CN104266790 A CN 104266790A CN 201410517873 A CN201410517873 A CN 201410517873A CN 104266790 A CN104266790 A CN 104266790A
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- diaphragm
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- type underwater
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- limiting structure
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Abstract
The invention discloses a double-diaphragm type underwater pressure sensor with a limiting structure, and belongs to the technical field of sensors. The double-diaphragm type underwater pressure sensor comprises a shell and a partition plate which divides the inner part of the shell into an upper oil liquid cavity and a lower cavity. A sensitive diaphragm is provided with a piezoresistor used for sensing the diaphragm stress, a protecting plate is arranged outside the sensitive diaphragm, and through holes are distributed in the protecting plate. A pressed diaphragm which divides the lower cavity into a compression cavity and a water inlet cavity and is in sealing connection with the inner wall of the shell is arranged in the lower cavity. A pressure sensor mounted on the partition plate is arranged in the compression cavity, and a storage battery used for supplying power to the pressure sensor is mounted on the partition plate. A limiting plate is arranged on the side, close to the pressed diaphragm, in the compression cavity, through holes are distributed in the limiting plate, and a water inlet hole is formed in the shell wall of the water inlet cavity. The pressure of water is transmitted to the inside of the sensor through the two diaphragms, big measuring pressure can be borne, and small water pressure variation can also be measured.
Description
Technical field
The present invention relates to sensor technical field, in particular to a kind of two diaphragm type Underwater Pressure sensors with position limiting structure.
Background technology
Underwater Pressure sensor is widely used in the hydrospace detections such as tide detection, underwater robot job position mensuration; to the detection of the Underwater Pressures such as ocean; especially the detection of large pressure under deep-marine-environment; sensor must bear and measure the large hydraulic pressure at deep-sea; the change of hydraulic pressure can be measured again; this is that existing subsea pressure detects the difficult problem faced, and existing sensor is larger for the measuring error of the change of hydraulic pressure.
Summary of the invention
The object of the present invention is to provide one to bear and measure large pressure, again can two diaphragm type Underwater Pressure sensors of band position limiting structure of requiring of Measurement accuracy slight pressure change, to solve the problem.
For realizing the object of the invention, the technical scheme adopted is: a kind of two diaphragm type Underwater Pressure sensors with position limiting structure, comprise housing and enclosure interior is divided into the dividing plate of fluid chamber, top and lower chamber, the top in fluid chamber, top is open end, open end is provided with sensitive diaphragm, sensitive diaphragm is provided with the voltage dependent resistor (VDR) of reaction diaphragm stress, sensitive diaphragm is outside equipped with fender, and fender is distributed with through hole; Lower chamber be provided with lower chamber is divided into compression chamber and intake antrum and with inner walls be tightly connected by pressuring film plate, the pressure transducer be arranged on dividing plate is provided with in compression chamber, and dividing plate is installed the accumulator that promising pressure transducer powers, in compression chamber, the side by pressuring film plate is provided with limiting plate, limiting plate is placed with through hole, the housing wall of intake antrum offers inlet opening.
Further, the through hole on described limiting plate is evenly arranged.
Further, described sensitive diaphragm is circular film.
Further, sensitive diaphragm is arranged on sensor housing by fender.
The invention has the beneficial effects as follows, the pressure of water is delivered to sensor internal by two diaphragms, slight pressure change is measured by sensitive diaphragm, internal pressure sensor measures large pressure, achieve to bear and measure large pressure, the requirement of slight pressure change can be measured again, there is the protective device by water two diaphragm outsides of sensor, so neither affect water pressure to measure, diaphragm can be protected again injury-free, and the motion deformation by pressuring film plate limits within the specific limits by limiting plate, better prevent and damaged under large pressure reduction by pressuring film plate.
Accompanying drawing explanation
Fig. 1 is the cut-open view of two diaphragm type Underwater Pressure sensors of band position limiting structure provided by the invention.
Embodiment
Also by reference to the accompanying drawings the present invention is described in further detail below by specific embodiment.
Fig. 1 shows two diaphragm type Underwater Pressure sensors of band position limiting structure provided by the invention, comprise housing 1 and be the dividing plate 6 of fluid chamber, top 13 and lower chamber by housing 1 interior separation, fluid chamber, top 13 is full of fluid, the top in fluid chamber, top 13 is open end, open end is provided with sensitive diaphragm 2, and sensitive diaphragm 2 is circular film, sensitive diaphragm 2 is provided with the voltage dependent resistor (VDR) of reaction diaphragm stress, sensitive diaphragm 2 is outside equipped with fender 4, and fender 4 is distributed with through hole; Lower chamber be provided with lower chamber is divided into compression chamber 12 is connected with intake antrum 11 and with housing 1 inner wall sealing by pressuring film plate 3, the pressure transducer 5 be arranged on dividing plate 6 is provided with in compression chamber 12, and dividing plate 6 is installed the accumulator 7 of promising pressure transducer 5 power supply, in compression chamber 12, the side by pressuring film plate 3 is provided with limiting plate 8, limiting plate 8 is evenly placed with through hole, the housing wall of intake antrum 11 offers inlet opening 14.
Sensitive diaphragm 2 is arranged on sensor housing 1 by fender 4, and fender 4 can protect sensitive diaphragm 2, and effect of water pressure can be made again in sensitive diaphragm 2.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. the two diaphragm type Underwater Pressure sensors with position limiting structure, it is characterized in that, comprise housing and enclosure interior is divided into the dividing plate of fluid chamber, top and lower chamber, the top in fluid chamber, top is open end, open end is provided with sensitive diaphragm, sensitive diaphragm is provided with the voltage dependent resistor (VDR) of reaction diaphragm stress, sensitive diaphragm is outside equipped with fender, and fender is distributed with through hole; Lower chamber be provided with lower chamber is divided into compression chamber and intake antrum and with inner walls be tightly connected by pressuring film plate, the pressure transducer be arranged on dividing plate is provided with in compression chamber, and dividing plate is installed the accumulator that promising pressure transducer powers, in compression chamber, the side by pressuring film plate is provided with limiting plate, limiting plate is placed with through hole, the housing wall of intake antrum offers inlet opening.
2. two diaphragm type Underwater Pressure sensors of band position limiting structure according to claim 1, it is characterized in that, the through hole on described limiting plate is evenly arranged.
3. two diaphragm type Underwater Pressure sensors of band position limiting structure according to claim 1, it is characterized in that, described sensitive diaphragm is circular film.
4. two diaphragm type Underwater Pressure sensors of band position limiting structure according to claim 1, it is characterized in that, sensitive diaphragm is arranged on sensor housing by fender.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410517873.XA CN104266790B (en) | 2014-09-30 | 2014-09-30 | A kind of double diaphragm type Underwater Pressure sensors with position limiting structure |
Applications Claiming Priority (1)
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CN201410517873.XA CN104266790B (en) | 2014-09-30 | 2014-09-30 | A kind of double diaphragm type Underwater Pressure sensors with position limiting structure |
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CN104266790A true CN104266790A (en) | 2015-01-07 |
CN104266790B CN104266790B (en) | 2016-11-23 |
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CN201410517873.XA Active CN104266790B (en) | 2014-09-30 | 2014-09-30 | A kind of double diaphragm type Underwater Pressure sensors with position limiting structure |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017084232A1 (en) * | 2015-11-20 | 2017-05-26 | 深圳大学 | Zero-strain soil pressure sensor |
CN112985314A (en) * | 2019-12-17 | 2021-06-18 | 中国科学院沈阳自动化研究所 | Indirect measurement type depth gauge for underwater robot |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0553725A2 (en) * | 1992-01-24 | 1993-08-04 | The Foxboro Company | Apparatus and method of manufacture of pressure sensor having a laminated substrate |
CN1540301A (en) * | 2003-10-29 | 2004-10-27 | 中国科学院力学研究所 | Device of combined sensor in use for measuring dynamical pressure and static pressure in deep sea |
CN101339086A (en) * | 2007-07-05 | 2009-01-07 | 上海威尔泰工业自动化股份有限公司 | Pressure sensor possessing high pressure overload protection |
CN201607264U (en) * | 2010-02-07 | 2010-10-13 | 王学良 | Pressure balance film device |
CN204085776U (en) * | 2014-09-30 | 2015-01-07 | 成都卓微科技有限公司 | A kind of two diaphragm type Underwater Pressure sensors with position limiting structure |
-
2014
- 2014-09-30 CN CN201410517873.XA patent/CN104266790B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0553725A2 (en) * | 1992-01-24 | 1993-08-04 | The Foxboro Company | Apparatus and method of manufacture of pressure sensor having a laminated substrate |
CN1540301A (en) * | 2003-10-29 | 2004-10-27 | 中国科学院力学研究所 | Device of combined sensor in use for measuring dynamical pressure and static pressure in deep sea |
CN101339086A (en) * | 2007-07-05 | 2009-01-07 | 上海威尔泰工业自动化股份有限公司 | Pressure sensor possessing high pressure overload protection |
CN201607264U (en) * | 2010-02-07 | 2010-10-13 | 王学良 | Pressure balance film device |
CN204085776U (en) * | 2014-09-30 | 2015-01-07 | 成都卓微科技有限公司 | A kind of two diaphragm type Underwater Pressure sensors with position limiting structure |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017084232A1 (en) * | 2015-11-20 | 2017-05-26 | 深圳大学 | Zero-strain soil pressure sensor |
US10451492B2 (en) | 2015-11-20 | 2019-10-22 | Shenzhen University | Zero-strain soil pressure sensor |
CN112985314A (en) * | 2019-12-17 | 2021-06-18 | 中国科学院沈阳自动化研究所 | Indirect measurement type depth gauge for underwater robot |
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CN104266790B (en) | 2016-11-23 |
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