CN104215208A - Lifting type evaporator table centering rapid testing mechanism and testing method thereof - Google Patents
Lifting type evaporator table centering rapid testing mechanism and testing method thereof Download PDFInfo
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- CN104215208A CN104215208A CN201410506296.4A CN201410506296A CN104215208A CN 104215208 A CN104215208 A CN 104215208A CN 201410506296 A CN201410506296 A CN 201410506296A CN 104215208 A CN104215208 A CN 104215208A
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- thickness measuring
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Abstract
The invention discloses a lifting type evaporator table centering rapid testing mechanism and a testing method thereof and belongs to the field of evaporator table testing. The lifting type evaporator table centering rapid testing mechanism comprises a thickness measuring cover, a cloche, a triangular support, a fixed triangular support seat, an electron gun, a transparent offset plate and an emitting point light source adjusting device. The thickness measuring cover is arranged at the top of the cloche, and a sensor probe for testing thickness is arranged inside the thickness measuring cover; the middle of cloche is provided with the fixed triangular support seat, the outer side surface of the cloche is provided with a guide rod, the bottom of the guide rod is connected with the bottom of the cloche, and the guide rod is provided with a positioning clamp; the emitting point light source adjusting device is arranged at the crucible of the electron gun and composed of a light source device and a fixing jacket; the transparent offset plate is arranged above the triangular support or the thickness measuring cover and provided with a thickness measuring cover positioning point mark and a triangular support positioning point. The lifting type evaporator table centering rapid testing mechanism can help find errors generated during usage of equipment intuitively and avoid deviation of testing points from a central line, and accordingly, is high in accuracy, convenient and rapid.
Description
Technical field
The present invention relates to evaporation board field tests, more particularly, relate to a kind of lift evaporation quick mechanism for testing of board centering and method of testing thereof.
Background technology
Along with evaporation board is in the application of microelectronic industry, and the requirement of the microelectric technique day by day developed rapidly is more and more higher, and the shortcoming of evaporation coating is also affecting the quality of product.Evaporation coating is fast in film speed, and while purity advantages of higher, the repeatability of technique is good not, and the uppity shortcoming of thickness also more and more governs the development of this technique.In elimination technological process, the defect of equipment design itself causes the impact of technique is the more practicable approach of one solving and improve evaporation technique.
Metallic atom motion is straight line substantially under vacuo, the evaporation characteristic of evaporation source is that tool is directive, if atom traffic direction and vertical direction are θ, test surfaces vertical point and atom traffic direction are φ, be then directly proportional to COS θ in the quality of θ angular direction evaporating materials.dm＝m/π×COSθ×dω。The thickness that test surfaces is formed is t=(m/ π ρ) × (COS θ COS φ/r
2)=(mh2)/[π ρ (h
2+ x
2)
2].H is the vertical range of evaporation source to test surfaces, and x is the distance that test surfaces departs from vertical parallax.Test maximum gauge t
0=m/ (π ρ h
2), actual test thickness t=t
0/ [1+ (x/h)
2].According to computing formula, it is larger to depart from center, and actual (real) thickness can be thinner, is carrying out the thickness that can affect actual evaporation coating in technological process.
The shortcoming of evaporation masking embodies obvious in lift evaporation board, because needing to promote bell jar at every turn, the position often fallen may offset, but can not find timely, when only having generation Quality Accident, just likely find that thickness test monitoring point departs from center.
Be at present determine at 3 whether on same straight line by means of leading pole visual method at this lifting evaporator, this method needs cavity to promote one end distance, and object inside needs light.Because chamber is risen, certain angle can be there is, different with position during real work.The easy disalignment of test point, easily produces error in use procedure, poor accuracy.
Summary of the invention
1. the technical matters that will solve
Often promote cavity for the needs existed in prior art, the easy disalignment of test point, error be high, poor accuracy, unhandy problem, the invention provides a kind of lift evaporation quick mechanism for testing of board centering and method of testing thereof.The error that it can intuitively produce in discovering device use procedure, avoids test point disalignment, accuracy high, convenient and swift.
2. technical scheme
The quick mechanism for testing of a kind of lift evaporation board centering, comprise thickness measuring lid, bell jar, tripod, fixed triangle stand, electron gun, transparent hectograph and launching site light source adjustment device, described thickness measuring lid is positioned at bell jar top, thickness measuring lid is built-in with the sensor probe of test thickness, fixed triangle stand is installed in the middle part of described bell jar, described tripod is installed on fixed triangle stand top, tripod central authorities are porose, be provided with electron gun bottom bell jar, in electron gun, be placed with crucible; Bell jar exterior lateral sides is provided with guide pole, is connected, guide pole is provided with locating clip bottom guide pole with bottom bell jar, and locating clip is connected to the side of bell jar.
Described launching site light source adjustment device is arranged at electron gun bushing position, and launching site light source adjustment device is made up of pointolite device and fixing chuck; Fixing chuck is positioned in the middle part of launching site light source adjustment device, and pointolite device is fixed on the top of fixing chuck, is provided with three equally distributed lower margins bottom fixing chuck, and wherein two is fixing lower margin, and one for regulating lower margin; Described transparent hectograph is arranged at above tripod or above thickness measuring lid, transparent hectograph is provided with thickness measuring lid anchor point mark and tripod anchor point.
Further, described adjustment lower margin is screw-type knob, can carry out height up and down regulate by positive and negative rotation knob.
Further, be annulus bottom described fixed triangle stand, annulus is connected with tripod by support.
Further, the sensor probe that described thickness measuring lid is built-in, the medium pore of tripod and the electron gun interior crucible central authorities heart are the repeatability of straight line, guarantee production technology from top to bottom.
Further, described transparent hectograph take central point as the center of circle, there are two respectively with the concentric circles that the medium pore aperture on thickness measuring lid diameter and tripod is diameter, concentric circles diameter corresponding to thickness measuring lid is greater than the concentric circles diameter corresponding to triangle frame aperture, thickness measuring lid anchor point is marked on the concentric circles corresponding to thickness measuring lid, and tripod anchor point is on the concentric circles corresponding to tripod medium pore.
Adopt a method of testing for the described quick mechanism for testing of lift evaporation board centering, its step is as follows:
A launching site light source adjustment device is placed in the crucible of electron gun by (), launching site light source adjustment device requires on the central vertical position of crucible, opens pointolite device;
B transparent hectograph lies in a horizontal plane on tripod by (), tripod anchor point is corresponding with the bore edges position of tripod medium pore, the projection of observation point light source on transparent hectograph, by regulating the adjustment lower margin bottom launching site light source adjustment device to drop in transparent hectograph in the heart by pointolite projection, this position is the center of tripod medium pore;
(c), take out transparent hectograph, put down bell jar, open the thickness measuring lid that measuring thickness device is placed at bell jar top, transparent hectograph is placed in above thickness measuring lid, by corresponding with thickness measuring lid edge for thickness measuring lid anchor point mark, the center of transparent hectograph is that proving installation finally needs to receive the confirmation point position put in place;
(d), by determining the position of pointolite on transparent hectograph, regulating the guide pole of bell jar side, often adjusting once, rise and fall are once again to need bell jar, ensure the validity of adjustment, until pointolite is positioned at transparent hectograph center, locking positioning presss from both sides;
(e), raised bell jar 3-5 time, whether at every turn test observes the position of pointolite all at the over center position, if all fall at the over center position, carry out next step, do not need at the over center position to re-start (a)-(d) step, until success;
(f), install the thickness measuring lid of measuring thickness device, the launching site light source adjustment device of taking-up, completes and this time regulates test.
3. beneficial effect
Compared to prior art, the invention has the advantages that:
(1) this experimental provision uses, and uses centering mechanism for testing by cloche direct vision test evaporation source position, can to adjust and have intuitive, convenient more rapidly;
(2) this experimental provision uses adjustable triangular positioned light source emitter calibration board crucible, tripod and thickness test point at same straight line, realize the displacement error that minimizing equipment daily exercise produces, the repeatability of the technique of product is improved, facilitates the object of the inspection of regular equipment performance;
(3) bell jar exterior lateral sides is provided with guide pole and locating clip, be connected with bottom bell jar bottom guide pole, can rapid adjustment bell jar angle by guide pole and locating clip, repeatedly adjust, the validity adjusted can be ensured, ensure the repeatability as periodic check equipment;
(4) use launching site light source adjustment device, can carry out moving adjustment, convenient and swift, can in the enterprising enforcement use of multiple mechanism for testing, cost reduces;
(5) launching site light source adjustment device uses the adjustment lower margin of screw-type knob, height can be carried out up and down by positive and negative rotation knob and regulate, simple to operate, quick, raise the efficiency, make test more convenient;
(6) use the transparent hectograph with thickness measuring lid anchor point mark and tripod anchor point, can confirm device anchor point accurately, mobility is strong, can the adjustment of direct vision device put in place, accurate quick.
Accompanying drawing explanation
A kind of lift evaporation board centering of Fig. 1 quick mechanism for testing one-piece construction schematic diagram;
Fig. 2 launching site light source adjustment device enlarged diagram;
The transparent hectograph enlarged diagram of Fig. 3;
Number in the figure illustrates:
1, thickness measuring lid; 2, bell jar; 3, tripod; 4, fixed triangle stand; 5, electron gun; 6, locating clip; 7, guide pole; 8, pointolite device; 9, fixing chuck; 10, fixing lower margin; 11, lower margin is regulated; 12, thickness measuring lid anchor point mark; 13, tripod anchor point; 14, transparent hectograph.
Embodiment
Below in conjunction with Figure of description and specific embodiment, the present invention is described in detail.
Embodiment 1
The quick mechanism for testing of a kind of lift evaporation board centering, as Fig. 1, comprises thickness measuring lid 1, bell jar 2, tripod 3, fixed triangle stand 4, electron gun 5, transparent hectograph 14 and launching site light source adjustment device.Bell jar 2 is made for clear glass, and thickness measuring lid 1 is positioned at bell jar 2 top, and thickness measuring lid 1 is built-in with the sensor probe of test thickness.Be provided with fixed triangle stand 4 in the middle part of bell jar 2, described tripod 3 is installed on fixed triangle stand 4 top, is annulus bottom fixed triangle stand 4, annulus is connected with tripod 3 by support, tripod 3 central authorities are porose, be provided with electron gun 5, be placed with crucible in electron gun 5 bottom bell jar 2.Bell jar 2 exterior lateral sides is provided with guide pole 7, is connected, guide pole 7 is provided with locating clip 6 bottom described guide pole 7 with bottom bell jar 2, and locating clip 6 is connected to bell jar 2 side.The medium pore of the built-in sensor probe of thickness measuring lid 1, tripod 3 and the electron gun 5 interior crucible central authorities heart are from top to bottom in straight line, this setup realizes the displacement error that minimizing equipment daily exercise produces, the repeatability of the technique of product is improved, facilitates the object of the inspection of regular equipment performance.
Launching site light source adjustment device advantage is used to be can carry out moving adjustment, convenient and swift, can use in the enterprising enforcement of multiple mechanism for testing, cost reduces, as Fig. 2, launching site light source adjustment device is arranged at electron gun 5 bushing position, and launching site light source adjustment device is made up of pointolite device 8 and fixing chuck 9; Fixing chuck 9 is positioned in the middle part of launching site light source adjustment device.Can rapid adjustment bell jar 2 angle by guide pole 7 and locating clip 6, repeatedly adjust, the validity adjusted can be ensured, ensure the repeatability as periodic check equipment.Pointolite device 8 is fixed on the top of fixing chuck 9, three equally distributed lower margins are provided with bottom fixing chuck 9, wherein two is fixing lower margin 10, one for regulating lower margin 11, regulate lower margin 11 to be screw-type knob, height can be carried out up and down by positive and negative rotation knob and regulate, simple to operate, quick, raise the efficiency, make test more convenient.
As Fig. 3, transparent hectograph 14 is arranged at above tripod 3 or above thickness measuring lid 1, transparent hectograph 14 is provided with thickness measuring lid anchor point mark 12 and tripod anchor point 13.Transparent hectograph 14 take central point as the center of circle, there are two respectively with the concentric circles that the medium pore aperture on thickness measuring lid 1 diameter and tripod 3 is diameter, concentric circles diameter corresponding to thickness measuring lid 1 is greater than the concentric circles diameter corresponding to tripod 3 hole, thickness measuring lid anchor point mark 12 is on the concentric circles corresponding to thickness measuring lid 1, and tripod anchor point 13 is on the concentric circles corresponding to tripod 3 medium pore.Can confirm device anchor point accurately, mobility is strong, can the adjustment of direct vision device put in place, accurate quick.This experimental provision uses, and uses centering mechanism for testing by glass bell jar 2 direct vision test evaporation source position, can to adjust and have intuitive, convenient more rapidly.
Use the method for testing of the quick mechanism for testing of above-mentioned a kind of lift evaporation board centering, its step is as follows:
A launching site light source adjustment device is placed in the crucible of electron gun 5 by (), launching site light source adjustment device requires on the central vertical position of crucible, opens pointolite device 8.
B transparent hectograph 14 lies in a horizontal plane on tripod 3 by (), tripod anchor point 13 is corresponding with the bore edges position of tripod 3 medium pore, the projection of observation point light source on transparent hectograph 14, regulate the adjustment lower margin 11 bottom launching site light source adjustment device, pointolite projection to drop in transparent hectograph 14 in the heart, and this position is the center of tripod 3 medium pore.
(c), take out transparent hectograph 14, put down bell jar 2, open the thickness measuring lid 1 that measuring thickness device is placed at bell jar 2 top, transparent hectograph 14 is placed in above thickness measuring lid 1, by corresponding with thickness measuring lid 1 edge for thickness measuring lid anchor point mark 12, the center of transparent hectograph 14 is that proving installation finally needs to receive the confirmation point position put in place.
(d), by determining the position of pointolite on transparent hectograph 14, regulating the guide pole 7 of bell jar 2 side, often adjusting once, rise and fall are once again for bell jar 2, ensure the validity of adjustment, until pointolite is positioned at transparent hectograph 14 center, locking positioning folder 6.
E (), bell jar 2 is elevated 5 times, whether at every turn test observes the position of pointolite all at the over center position, and the position of pointolite all falls at the over center position.
(f), install the thickness measuring lid 1 of measuring thickness device, the launching site light source adjustment device of taking-up, completes and this time regulates test.
Embodiment 2
Embodiment 2 is substantially the same manner as Example 1, difference is, whether at every turn the method for testing step e middle bell jar 2 of the quick mechanism for testing of a kind of lift evaporation board centering is elevated 3 tests and observes the position of pointolite all at the over center position, the position of pointolite does not all fall at the over center position, repeat (a)-(d) step, successfully make the position of pointolite fall all the time at the over center position.
Below be schematically described the invention and embodiment thereof, this description does not have restricted, and one of embodiment of the also just the invention shown in accompanying drawing, actual structure is not limited thereto.So, if those of ordinary skill in the art enlightens by it, when not departing from this creation aim, designing the frame mode similar to this technical scheme and embodiment without creationary, the protection domain of this patent all should be belonged to.
Claims (6)
1. the quick mechanism for testing of lift evaporation board centering, comprise thickness measuring lid (1), bell jar (2), it is characterized in that: also comprise tripod (3), fixed triangle stand (4), electron gun (5), transparent hectograph (14) and launching site light source adjustment device, described thickness measuring lid (1) is positioned at bell jar (2) top, thickness measuring lid (1) is built-in with the sensor probe of test thickness, described bell jar (2) middle part is provided with fixed triangle stand (4), described tripod (3) is installed on fixed triangle stand (4) top, tripod (3) central authorities are porose, bell jar (2) bottom is provided with electron gun (5), electron gun is placed with crucible in (5), described bell jar (2) exterior lateral sides is provided with guide pole (7), described guide pole (7) bottom is connected with bell jar (2) bottom, guide pole (7) is provided with locating clip (6), locating clip (6) is connected to bell jar (2) side,
Described launching site light source adjustment device is arranged at electron gun (5) bushing position, and launching site light source adjustment device is made up of pointolite device (8) and fixing chuck (9); Fixing chuck (9) is positioned in the middle part of launching site light source adjustment device, pointolite device (8) is fixed on the top of fixing chuck (9), fixing chuck (9) bottom is provided with three equally distributed lower margins, wherein two is fixing lower margin (10), and one for regulating lower margin (11); Described transparent hectograph (14) is arranged at tripod (3) top or thickness measuring lid (1) top, transparent hectograph (14) is provided with thickness measuring lid anchor point mark (12) and tripod anchor point (13).
2. the quick mechanism for testing of a kind of lift evaporation board centering according to claim 1, is characterized in that: described adjustment lower margin (11) is screw-type knob, can carry out height up and down regulate by positive and negative rotation knob.
3. the quick mechanism for testing of a kind of lift evaporation board centering according to claim 1, is characterized in that: described fixed triangle stand (4) bottom is annulus, and annulus is connected with tripod (3) by support.
4. the quick mechanism for testing of a kind of lift evaporation board centering according to claim 1 and 2, is characterized in that: the medium pore of the built-in sensor probe of described thickness measuring lid (1), tripod (3) and electron gun (5) the interior crucible central authorities heart are from top to bottom in straight line.
5. the quick mechanism for testing of a kind of lift evaporation board centering according to Claims 2 or 3, it is characterized in that: described transparent hectograph (14) take central point as the center of circle, two are had to be the concentric circles of diameter with the medium pore aperture on thickness measuring lid (1) diameter and tripod (3) respectively, concentric circles diameter corresponding to thickness measuring lid (1) is greater than the concentric circles diameter corresponding to tripod (3) hole, thickness measuring lid anchor point mark (12) is on the concentric circles corresponding to thickness measuring lid (1), tripod anchor point (13) is on the concentric circles corresponding to tripod (3) medium pore.
6. adopt a method of testing for the quick mechanism for testing of lift according to claim 1 evaporation board centering, its step is as follows:
A launching site light source adjustment device is placed in the crucible of electron gun (5) by (), launching site light source adjustment device requires on the central vertical position of crucible, opens pointolite device (8);
B transparent hectograph (14) lies in a horizontal plane on tripod (3) by (), tripod anchor point (13) is corresponding with the bore edges position of tripod (3) medium pore, the projection of observation point light source on transparent hectograph (14), to allow pointolite project by regulating the adjustment lower margin (11) bottom launching site light source adjustment device to drop in transparent hectograph (14) in the heart, this position is the center of tripod medium pore;
(c), take out transparent hectograph (14), put down bell jar (2), open the thickness measuring lid (1) that measuring thickness device is placed at bell jar (2) top, transparent hectograph (14) is placed in thickness measuring lid (1) top, by corresponding with thickness measuring lid (1) edge for thickness measuring lid anchor point mark (12), the center of transparent hectograph (14) is that proving installation finally needs to receive the confirmation point position put in place;
(d), by determining the position of pointolite on transparent hectograph (14), regulate the guide pole (7) of bell jar (2) side, often adjust once, rise and fall are once again to need bell jar (2), ensure the validity of adjustment, until pointolite is positioned at transparent hectograph (14) center, locking positioning folder (6);
(e), raised bell jar (2) 3-5 time, whether at every turn test observes the position of pointolite all at the over center position, if all fall at the over center position, carry out next step, do not need at the over center position to re-start (a)-(d) step, until success;
(f), install the thickness measuring lid (1) of measuring thickness device, the launching site light source adjustment device of taking-up, completes and this time regulates test.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59145043A (en) * | 1983-02-07 | 1984-08-20 | Konishiroku Photo Ind Co Ltd | Vapor deposition method |
| CN1077501A (en) * | 1992-04-04 | 1993-10-20 | 西铁城钟表株式会社 | Apparatus for ionically plating |
| JP2548387B2 (en) * | 1989-07-07 | 1996-10-30 | 松下電器産業株式会社 | Liquid crystal alignment film manufacturing equipment |
| CN1431339A (en) * | 2003-01-28 | 2003-07-23 | 吉林大学 | Crucible type evaporator source used for film plating machines in organic electrofluorescence type |
| CN101314842A (en) * | 2008-07-22 | 2008-12-03 | 四川大学 | Method for producing boron carbide film with electron beam evaporation technique |
| CN102110592A (en) * | 2010-12-02 | 2011-06-29 | 南京大学扬州光电研究院 | Early-stage production method for machining surface of sapphire substrate for dry etching |
| CN204064284U (en) * | 2014-09-26 | 2014-12-31 | 桑德斯微电子器件（南京）有限公司 | The quick mechanism for testing of a kind of lift evaporation board centering |
-
2014
- 2014-09-26 CN CN201410506296.4A patent/CN104215208B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59145043A (en) * | 1983-02-07 | 1984-08-20 | Konishiroku Photo Ind Co Ltd | Vapor deposition method |
| JP2548387B2 (en) * | 1989-07-07 | 1996-10-30 | 松下電器産業株式会社 | Liquid crystal alignment film manufacturing equipment |
| CN1077501A (en) * | 1992-04-04 | 1993-10-20 | 西铁城钟表株式会社 | Apparatus for ionically plating |
| CN1431339A (en) * | 2003-01-28 | 2003-07-23 | 吉林大学 | Crucible type evaporator source used for film plating machines in organic electrofluorescence type |
| CN101314842A (en) * | 2008-07-22 | 2008-12-03 | 四川大学 | Method for producing boron carbide film with electron beam evaporation technique |
| CN102110592A (en) * | 2010-12-02 | 2011-06-29 | 南京大学扬州光电研究院 | Early-stage production method for machining surface of sapphire substrate for dry etching |
| CN204064284U (en) * | 2014-09-26 | 2014-12-31 | 桑德斯微电子器件（南京）有限公司 | The quick mechanism for testing of a kind of lift evaporation board centering |
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| CN104215208B (en) | 2017-01-18 |
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