CN104214475B - A kind of installation device of sensor - Google Patents
A kind of installation device of sensor Download PDFInfo
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- CN104214475B CN104214475B CN201310218263.5A CN201310218263A CN104214475B CN 104214475 B CN104214475 B CN 104214475B CN 201310218263 A CN201310218263 A CN 201310218263A CN 104214475 B CN104214475 B CN 104214475B
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Abstract
The invention discloses a kind of installation device of sensor, relate to semiconductor equipment and manufacture field, the adjustment at the angle of inclination of sensor can be realized, and adjustment and locking synchronization complete, and simplify operating procedure.Described installation device of sensor, comprise: angular adjustment block, mobile adjustment block and Flexible Connector, wherein: angular adjustment block and mobile adjustment block be arranged in parallel, sensor is fixedly connected with one end of angular adjustment block, makes in the parallel space of sensor between angular adjustment block and mobile adjustment block; Flexible Connector perpendicular to angular adjustment block and mobile adjustment block, the two ends of Flexible Connector respectively with the side of the other end of angular adjustment block and the side fixed-link of mobile adjustment block, thus angular adjustment block and mobile adjustment block to be linked together; Bent by the direction making Flexible Connector produce towards or away from sensor, realize the adjustment at the sensor angle of depression or the elevation angle; By making the displacement in mobile adjustment block generation substantially horizontal, realize the adjustment of sensing station.
Description
Technical field
The present invention relates to semiconductor equipment and manufacture field, particularly relate to a kind of installation device of sensor.
Background technique
In various automation equipment, often need to use sensor detect the action of mechanism and position and feed back to control system, wherein, non-contacting optoelectronic induction type sensor, particularly laser opposite-radiation sensor, due to it possess non-contact, the advantage such as precision is high, response is fast, can detect at a distance, automation equipment obtains more and more extensive use.
Laser opposite-radiation sensor is made up of transmitter and receiver two-part, transmitter projection laser beam diameter little (diameter of phi is 0.5 ~ 3mm about) and highly collimation, but the light receiving window of receiver usually also smaller (diameter of phi is 5 ~ 8mm about), therefore both require accurately to aim at when mounted, this just claims to the erecting device of sensor: 1) the position-adjustable scope of sensor is comparatively large, various installation deviation such as energy offset angle, position etc.; 2) meticulous regulating power is possessed; 3) easy to operate, lock reliable etc.
Fig. 1 is a kind of common installation device of sensor, 101 is sensor mounts, set screw 103 passes the horizontal slotted hole on 101, the transmitting terminal 104 (transmitter) of laser-correlation sensor is arranged on sensor mount 101,102 is sensor window (or equipment can be used to other structure of fixation of sensor), and mounting screw 105 is fixed on 101 on 102 through longitudinal slotted hole of sensor mount 101 both sides.During adjustment, first unscrew set screw 103 and mounting screw 105, then adjust the position of sensor at level and vertical direction with the horizontal and vertical slotted hole on 101, adjust and tighten screw again.But inventor finds that existing installation device of sensor at least exists following defect:
1, can not direct compensation sensor install time augular offset, position regulation scope is also limited.Especially when the transmitting terminal of laser-correlation sensor and receiving terminal apart from each other time, even if the attachment face of both sides has the less not parallel light beam of transmitting terminal that all can cause to produce larger positional deviation.
2, inconvenient operation.Need during adjustment first to unscrew screw everywhere, keep motionless after manually mixing up position, tightening screw with another hand again completes fixing, there is secondary tightening operation, not only operation inconvenience but also easy generation cause the position of adjusting to change again because secondary is fastening, even need two personal synergics just can complete adjustment at some narrow station be awkward.
3, position regulation operation is that position by manually moving assembling set in both direction in length and breadth realizes completely, be difficult to realize meticulous, regulate accurately.
Summary of the invention
The invention provides a kind of installation device of sensor, the adjustment at the angle of inclination of sensor can be realized, and adjustment and locking synchronization complete, and simplify operating procedure.
For solving the problems of the technologies described above, embodiments of the invention adopt following technological scheme:
A kind of installation device of sensor, comprising: angular adjustment block, mobile adjustment block and Flexible Connector, wherein:
Described angular adjustment block and mobile adjustment block be arranged in parallel, sensor is fixedly connected with one end of described angular adjustment block, make in the parallel space of described sensor between described angular adjustment block and mobile adjustment block, described angular adjustment block is for adjusting the angle of described sensor; Described mobile adjustment block is for adjusting the position of described sensor;
Described Flexible Connector is perpendicular to described angular adjustment block and mobile adjustment block, the two ends of described Flexible Connector are fixedly connected with the side of described mobile adjustment block with the side of the other end of described angular adjustment block respectively, thus described angular adjustment block and mobile adjustment block are linked together;
Bent by the direction making described Flexible Connector produce towards or away from described sensor, realize the adjustment at the described sensor angle of depression or the elevation angle; By making the displacement in described mobile adjustment block generation substantially horizontal, realize the adjustment of described sensing station.
In the first embodiment of the present embodiment, described mobile adjustment block is provided with mounting hole, in order to adjust the fixed position of described sensor,
Described angular adjustment block is provided with through hole and tapped through hole in the one end away from described Flexible Connector, described mobile adjustment block is provided with tapped hole in the position corresponding with described through hole, fastening screw trip bolt passes described through hole and is screwed in described tapped hole, jacking screw passes described tapped through hole immediate roof in described mobile adjustment block, described angular adjustment block is pulled to make described Flexible Connector produce bending towards described sensor by screwing fastening screw trip bolt, bending by what screw that jacking screw comes that angular adjustment block described in jack-up makes described Flexible Connector produce away from described sensor.
Particularly, described mobile adjustment block forms attachment face at the downward reflexed in one end away from described Flexible Connector, and described mounting hole is arranged on described attachment face.
Further, described installation device of sensor, also comprises: sensor window frame, and described sensor window frame is provided with the installation tapped hole that a row equidistantly arranges, and described installation tapped hole is used for fixing described mobile adjustment block.
Preferably, described Flexible Connector is made up of spring steel.
Alternatively, described Flexible Connector is spring sheet, and the thickness of described spring sheet is 0.5mm.
In the second embodiment of the present embodiment, installation device of sensor also comprises: sensor window frame, described mobile adjustment block is provided with and with on described sensor window frame, mounting hole corresponding to tapped hole is installed, for described mobile adjustment block is fixed on described sensor window frame; Described angular adjustment block is provided with the jut of through hole and reflexed in the one end away from described Flexible Connector, the jut of reflexed is provided with the tapped through hole parallel with described sensor window frame, described mobile adjustment block is provided with the tapped hole vertical with described sensor window frame in the position corresponding with described through hole, fastening screw trip bolt passes described through hole and is screwed in described tapped hole, and jacking screw passes described tapped through hole immediate roof on described sensor window frame;
Bending by what screw that fastening screw trip bolt pulls described angular adjustment block to make described Flexible Connector produce towards described sensor, bending by what screw that jacking screw comes that angular adjustment block described in jack-up makes described Flexible Connector produce away from described sensor.
Particularly, described mobile adjustment block forms attachment face at the downward reflexed in one end away from described Flexible Connector, and described mounting hole is arranged on described attachment face.
Preferably, described mounting hole is slotted hole;
Length, the spacing of described slotted hole are equal with the spacing of described installation tapped hole.
Preferably, described Flexible Connector is made up of spring steel.
The embodiment of the present invention provides a kind of installation device of sensor, angular adjustment block and mobile adjustment block be arranged in parallel, the side of angular adjustment block and mobile adjustment block arranges Flexible Connector and the two is linked together, sensor is fixedly connected on the other end away from Flexible Connector of angular adjustment block, bent by the direction making Flexible Connector produce towards or away from sensor, realize the adjustment at the sensor angle of depression or the elevation angle; By making the displacement in mobile adjustment block generation substantially horizontal, realize the adjustment of sensing station.And, adjust and utilized the elastic deformation force of Flexible Connector to automatically lock afterwards, without the need to tightening operation, so the installation device of sensor that the embodiment of the present invention provides can realize the adjustment of sensor perturbations angle, in order to the error of direct compensation setting angle, and it is large to have adjustment range, can realize meticulous adjustment, to regulate and locking synchronization such as to complete at the advantage.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technological scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of existing installation device of sensor;
The structural representation of the first installation device of sensor that Fig. 2 provides for the embodiment of the present invention;
Fig. 3 is the structural representation of sensor window frame in the embodiment of the present invention;
The structural representation of the second installation device of sensor that Fig. 4 provides for the embodiment of the present invention;
Fig. 5 (a) and (b) are respectively the schematic diagram that embodiment of the present invention installation device of sensor carries out elevation angle adjustment and angle of depression adjustment;
Fig. 6 (a) and (b) are respectively the structural representation of the second installation device of sensor back side that the embodiment of the present invention provides and side.
Description of reference numerals
101-sensor mount, 103-set screw, 104-penetrates the transmitting terminal of sensor,
102-sensor window, 105-mounting screw;
201-sensor window frame, 202-fastening screw trip bolt, 203-screw, 204-jacking screw,
205-angular adjustment block, 2051-jut, 206-screw, 207-Flexible Connector,
208-mounting screw, 209-moves adjustment block, 2091-mounting hole, 2092-attachment face,
210-sensor.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technological scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.
Embodiment
The embodiment of the present invention provides a kind of installation device of sensor, and with reference to shown in Fig. 2, this device comprises: angular adjustment block 205, mobile adjustment block 209 and Flexible Connector 207, wherein:
Angular adjustment block 205 and mobile adjustment block 209 be arranged in parallel, sensor (not shown) is fixedly connected with one end of angular adjustment block 209, make in the parallel space of sensor between angular adjustment block 205 and mobile adjustment block 209, angular adjustment 205 pieces is for adjusting the angle of sensor; Mobile adjustment block 209 is for adjusting the position of sensor.
Flexible Connector 207 is perpendicular to angular adjustment block 205 and mobile adjustment block 209, the two ends of Flexible Connector 207 are fixedly connected with the side of mobile adjustment block 209 with the side of the other end (namely away from one end of sensor) of angular adjustment block 205 respectively, thus angular adjustment block 205 and mobile adjustment block 209 are linked together;
Bent by the direction making Flexible Connector 207 produce towards or away from sensor, realize the adjustment at the sensor angle of depression or the elevation angle; By making mobile adjustment block 209 produce displacement in substantially horizontal, realize the adjustment of sensing station.And, adjust and utilized the elastic deformation force of Flexible Connector to automatically lock afterwards, without the need to tightening operation, so the installation device of sensor that the embodiment of the present invention provides can realize the adjustment of sensor perturbations angle, in order to the error of direct compensation setting angle, and it is large to have adjustment range, can realize meticulous adjustment, to regulate and locking synchronization such as to complete at the advantage.
Concrete how to make Flexible Connector 207 produce direction towards or away from sensor is bending multiple implementation, do not describe one by one at this, only enumerate kind of the mode of two shown in Fig. 2 and Fig. 4 exemplarily.
As shown in Figure 2, in the first specific implementation of the present embodiment, mobile adjustment block 209 is provided with mounting hole 2091, in order to adjust the fixed position of installation device of sensor, angular adjustment block 205 is provided with through hole and tapped through hole in the one end away from Flexible Connector 207, mobile adjustment block 209 is provided with tapped hole in the position corresponding with the through hole on angular adjustment block 205, fastening screw trip bolt 202 is made to pass the through hole of angular adjustment block 205 and to be screwed in the tapped hole in mobile adjustment block 209, jacking screw 204 through the tapped through hole immediate roof on angular adjustment block 205 in mobile adjustment block 209.
During use, sensor is fixed on angular adjustment block 205 one end away from Flexible Connector 207, and such as sensor is fixed on the below of angular adjustment block 205 by screw 203; Angular adjustment block 205 is pulled to make Flexible Connector 207 produce bending towards the direction of sensor by screwing fastening screw trip bolt 202, carrying out jack-up angular adjustment block 205 by screwing jacking screw 204 (needing first to unclamp fastening screw trip bolt 202), making Flexible Connector 207 produce direction bending away from sensor.
The installation device of sensor that the present embodiment provides, by screwing or unclamp fastening screw trip bolt 202 and the jacking screw 204 of angular adjustment block 205 front end, can the angle of inclination of control angle adjustment block 205 relative movement adjustment block 209, thus realize the adjustment of sensor luffing angle, can direct compensation setting angle error, and it is large to have adjustment range, can realize meticulous adjustment, to regulate and locking synchronization such as to complete at the advantage.
Further, described installation device of sensor, also can comprise: sensor window frame 201, as shown in Figure 3, sensor window frame 201 is provided with the installation tapped hole 2010 that a row equidistantly arranges, tapped hole 2010 is installed corresponding with the mounting hole 2091 in mobile adjustment block 209, for fixing mobile adjustment block 209.
Particularly, mobile adjustment block 209 forms attachment face 2092 at the downward reflexed in one end away from Flexible Connector, and mounting hole 2091 is arranged on attachment face 2092.By screw, mobile adjustment block 209 is fixed on sensor window frame 201 together with angular adjustment block 205 and Flexible Connector 207.Note, the attachment face 2092 moving adjustment block 209 during installation is fitted on sensor window frame 201, and angular adjustment block 205 and sensor window frame 201 retain a gap b, the width of gap b is torqued-up in limit process to make fastening screw trip bolt 202, sensor window frame 201 does not hinder the skew of angular adjustment block 205 to be advisable, shown in Fig. 6 (b).
It is pointed out that the mounting screw in the present invention and the embodiment of the present invention, fastening screw trip bolt, jacking screw, screw all refer to the screw of common meaning, different names is convenient to distinguish in being only and describing.Sensor window frame in the present invention and the embodiment of the present invention, is interpreted as also comprising other structure equipment being used for fixing sensor.
In the second implementation of the present embodiment, as shown in Figure 4, installation device of sensor comprises: sensor window frame 201, also comprises:
The angular adjustment block 205 be arranged in parallel and mobile adjustment block 209, and perpendicular to the Flexible Connector 207 that angular adjustment block 205 and mobile adjustment block 209 are arranged, Flexible Connector 207 upper end is fixed on the side of angular adjustment block 205, lower end is fixed on the side (being fixed by screw 206) of mobile adjustment block 209, thus angular adjustment block 205 and mobile adjustment block 209 is linked together.
Mobile adjustment block 209 is provided with mounting hole 2091, sensor window frame 201 is provided with the installation tapped hole that a row is corresponding with mounting hole 2091, in order to adjust the fixed position of sensor.Particularly, mobile adjustment block 209 forms attachment face at the downward reflexed in one end away from Flexible Connector 207, and mounting hole 2091 is arranged on attachment face.Mobile adjustment block 209 is fixed on sensor window frame 201 through mounting hole 2091 by mounting screw 208.
Angular adjustment block 205 is provided with the jut 2051 of through hole and reflexed in the one end away from Flexible Connector 207, the jut 2051 of reflexed is provided with the tapped through hole vertical with sensor window frame 201, mobile adjustment block 209 is provided with tapped hole in the position corresponding with through hole on angular adjustment block 205, make fastening screw trip bolt 202 through this through hole and be screwed in the tapped hole of mobile adjustment block 209, jacking screw 204 through the tapped through hole immediate roof on jut 2051 on sensor window frame 201, during use, sensor to be fixed on angular adjustment block (such as, be fixed by screw 203), angular adjustment block 205 is pulled to make Flexible Connector 207 produce bending towards sensor by screwing fastening screw trip bolt 202, bending by what screw that jacking screw 204 comes that jack-up angular adjustment block 205 makes Flexible Connector 207 produce away from sensor, thus the angle of inclination of control angle adjustment block 205 relative movement adjustment block 209, thus realize the adjustment of sensor luffing angle, can direct compensation setting angle error, and it is large to have adjustment range, meticulous adjustment can be realized, the advantages such as adjustment and locking synchronization complete.
Preferably, the Flexible Connector 207 in the sensor erecting device is thin slices of thickness an about 0.5mm, selects the high spring steel of good springiness, toughness to make.
In addition, preferably, mounting hole 2091 can be slotted hole; Further preferably, the length a of slotted hole, the spacing of slotted hole are equal with the spacing of installing tapped hole, see Fig. 6 (a).
For ease of understanding, how the installation device of sensor provided the present embodiment below realizes angle, position adjustment is described in detail, and be understandable that, following example only for the purpose of illustration, does not do any restriction to the present invention.
Specifically, the adjustment of the sensor luffing angle is divided into two kinds of situations, respectively as shown in Fig. 5 (a) He 5 (b), please also refer to shown in Fig. 4 for ease of understanding, when the needs elevation angle adjusts, first unclamp or remove fastening screw trip bolt 202, then screwing jacking screw 204 makes Flexible Connector 207 to the Direction distortion away from sensor, thus make sensor make elevation angle gamma adjustment, jacking screw 204 compresses, without the need to tightening operation by the elastic deformation force having adjusted rear Flexible Connector 207; When the needs angle of depression adjusts, first unclamp or remove jacking screw 204, then the fastening screw trip bolt 202 screwing both sides makes Flexible Connector 207 to the Direction distortion near sensor, thus make sensor make angle of depression β to adjust, fastening screw trip bolt 202 is strained, without the need to tightening operation by the elastic deformation force having adjusted rear Flexible Connector.
When carrying out the position adjustment in the substantially horizontal of sensor in concrete use as needed, first unclamp mounting screw 208, then mobile adjustment block 209 (together with 205 and 207) is to suitable position, and then tighten mounting screw 208, larger regulation range can also be obtained by slotted hole (mounting hole 2091) and the various combination installing tapped hole.
The maximum adjustment range of installation device of sensor provided by the invention can change according to actual needs, main variable parameter is as shown in Fig. 6 (a) He 6 (b), and the position adjustment range (when referring to that not changing slotted hole combines with installation tapped hole) wherein in substantially horizontal depends on the length a of slotted hole in mobile adjustment block 209; Angular adjustment scope divides pitching two kinds of situations, when being no more than Flexible Connector 207 elastic limit, elevation angle adjustment range depends on the distance e (being equivalent to depend on jacking screw 204 length) between jacking screw 204 and angular adjustment block 205, and angle of depression adjustment range depends on the gap b of angular adjustment block 205 and sensor window frame 201, and the distance c of angular adjustment block 205 and mobile adjusting module.
Introduce known installation device of sensor provided by the invention and can carry out translational adjustment by above-mentioned in a direction (transverse direction in Fig. 2), and another direction () can carry out angle adjustment in Fig. 2 longitudinally, during use, need the direction of angle of arrival error easy on the direction of angle adjustment and attachment face to be consistent.
In sum, compared with prior art, installation device of sensor tool provided by the invention has the following advantages:
1, energy direct compensation setting angle error, adjustment range is large.Installation device of sensor provided by the invention directly can realize the adjustment of angular error, and the sending and receiving end being specially adapted to sensor is apart from each other, and uneven scene easily appears in the attachment face of both sides.Installation device of sensor provided by the invention can angular error between direct compensation attachment face, and adjustment function ratio prior art is comprehensive, and adjustment range is also large than prior art.
2, meticulous adjustment capability is possessed.Installation device of sensor provided by the invention adopts slotted hole and different method of installing tapped hole combination in position regulation; Angle adjustment have employed threaded adjusting, carry out adjusting angle by the screw-in depth controlling screw, meticulousr adjustment can be realized.
3, adjustment operation is convenient.Installation device of sensor provided by the invention only needs rotary screw to adjust to the right place when angular adjustment, the pretension that the elastic force produced by Flexible Connector distortion during angular adjustment realizes screw is locking, do not need secondary tightening operation, very easy, it also avoid secondary fastening time impact on adjusted position.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (10)
1. an installation device of sensor, is characterized in that, comprising: angular adjustment block, mobile adjustment block and Flexible Connector, wherein:
Described angular adjustment block and mobile adjustment block be arranged in parallel, sensor is fixedly connected with one end of described angular adjustment block, make in the parallel space of described sensor between described angular adjustment block and mobile adjustment block, described angular adjustment block is for adjusting the angle of described sensor; Described mobile adjustment block is for adjusting the position of described sensor;
Described Flexible Connector is perpendicular to described angular adjustment block and mobile adjustment block, the two ends of described Flexible Connector are fixedly connected with the side of described mobile adjustment block with the side of the other end of described angular adjustment block respectively, thus described angular adjustment block and mobile adjustment block are linked together;
Bent by the direction making described Flexible Connector produce towards or away from described sensor, realize the adjustment at the described sensor angle of depression or the elevation angle; By making the displacement in described mobile adjustment block generation substantially horizontal, realize the adjustment of described sensing station.
2. installation device of sensor according to claim 1, is characterized in that, described mobile adjustment block is provided with mounting hole, in order to adjust the fixed position of described sensor,
Described angular adjustment block is provided with through hole and tapped through hole in the one end away from described Flexible Connector, described mobile adjustment block is provided with tapped hole in the position corresponding with described through hole, fastening screw trip bolt passes described through hole and is screwed in described tapped hole, jacking screw passes described tapped through hole immediate roof in described mobile adjustment block, described angular adjustment block is pulled to make described Flexible Connector produce bending towards described sensor by screwing fastening screw trip bolt, bending by what screw that jacking screw comes that angular adjustment block described in jack-up makes described Flexible Connector produce away from described sensor.
3. installation device of sensor according to claim 2, is characterized in that,
Described mobile adjustment block forms attachment face at the downward reflexed in one end away from described Flexible Connector, and described mounting hole is arranged on described attachment face.
4. installation device of sensor according to claim 1, it is characterized in that, described installation device of sensor, also comprises: sensor window frame, described sensor window frame is provided with the installation tapped hole that a row equidistantly arranges, and described installation tapped hole is used for fixing described mobile adjustment block.
5. the installation device of sensor according to any one of claim 1-4, is characterized in that, described Flexible Connector is made up of spring steel.
6. installation device of sensor according to claim 5, is characterized in that, described Flexible Connector is spring sheet, and the thickness of described spring sheet is 0.5mm.
7. installation device of sensor according to claim 4, is characterized in that,
Described mobile adjustment block is provided with and with on described sensor window frame, mounting hole corresponding to tapped hole is installed, for described mobile adjustment block is fixed on described sensor window frame; Described angular adjustment block is provided with the jut of through hole and reflexed in the one end away from described Flexible Connector, the jut of reflexed is provided with the tapped through hole vertical with described sensor window frame, described mobile adjustment block is provided with tapped hole in the position corresponding with described through hole, fastening screw trip bolt passes described through hole and is screwed in described tapped hole, and jacking screw passes described tapped through hole immediate roof on described sensor window frame;
Bending by what screw that fastening screw trip bolt pulls described angular adjustment block to make described Flexible Connector produce towards described sensor, bending by what screw that jacking screw comes that angular adjustment block described in jack-up makes described Flexible Connector produce away from described sensor.
8. installation device of sensor according to claim 7, is characterized in that,
Described mobile adjustment block forms attachment face at the downward reflexed in one end away from described Flexible Connector, and described mounting hole is arranged on described attachment face.
9. the installation device of sensor according to any one of claim 7 or 8, is characterized in that,
Described mounting hole is slotted hole;
Length, the spacing of described slotted hole are equal with the spacing of described installation tapped hole.
10. installation device of sensor according to claim 7, is characterized in that, described Flexible Connector is made up of spring steel.
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CN105415096B (en) * | 2015-11-03 | 2017-08-04 | 清华大学 | Drilling operation device |
CN108075427A (en) * | 2016-11-15 | 2018-05-25 | 江苏天南电力器材有限公司 | A kind of damper with monitoring function |
CN108918255B (en) * | 2018-09-14 | 2020-11-03 | 中国航发湖南动力机械研究所 | Sensor auxiliary mounting device |
CN110522368B (en) * | 2019-09-03 | 2023-08-11 | 珠海一微半导体股份有限公司 | Angle and distance adjusting device, sensor module and cleaning robot |
CN110604514B (en) * | 2019-09-03 | 2023-09-05 | 珠海一微半导体股份有限公司 | Angle-based adjusting device, sensor module and cleaning robot |
CN111220141B (en) * | 2020-02-25 | 2021-06-25 | 北京航空航天大学 | Shaft aligning method for direct coupling of polarization maintaining optical fiber ring terminal and integrated optical chip |
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100026 Jiuxianqiao East Road, Chaoyang District, building, No. 1, M5 Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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