CN104199580A - Touch screen, manufacturing method of touch screen and touch display device - Google Patents
Touch screen, manufacturing method of touch screen and touch display device Download PDFInfo
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- CN104199580A CN104199580A CN201410437054.4A CN201410437054A CN104199580A CN 104199580 A CN104199580 A CN 104199580A CN 201410437054 A CN201410437054 A CN 201410437054A CN 104199580 A CN104199580 A CN 104199580A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
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Abstract
The invention discloses a touch screen, a manufacturing method of the touch screen and a touch display device. A bridging layer of a touch structure of the touch screen is made of grephene, and due to the fact that the grephene has a high charge migration rate, and the resistance value in the visible light wave band has nothing to do with the light wave length, the grephene plays a very good bridging role on adjacent touch control drive electrodes or adjacent touch control induction electrodes in a touch control structure. In addition, compared with a bridging layer made of ITO materials in the prior art, the bridging layer made of grephene has a very high antistatic property. Compared with a bridging layer made of metal materials in the prior art, the defects of metal climbing and bridge point visibility can be overcome, and the transmittance of the touch screen can be improved.
Description
Technical field
The present invention relates to touch technology field, relate in particular to a kind of touch-screen, its method for making and touch display unit.
Background technology
Along with the develop rapidly of display technique, touch-screen (Touch Screen Panel) spreads all in people's life gradually.At present, touch-screen can be divided into according to principle of work: resistance-type, condenser type, infrared-type and surface acoustic wave type, electromagnetic type, ripple induction type and frustrated total internal reflection optical induction type etc. shake.Wherein, capacitive touch screen, with its unique touch-control principle, relies on the advantages such as high sensitivity, long-life, high transmission rate, is pursued in the industry as new lover.
Application is at present one chip (OGS more widely, One Glass Solution) touch module, on substrate, directly to form touch-control conducting film and the sensor of individual layer, as shown in Fig. 1 a and Fig. 1 b, the structure of OGS touch module specifically comprises: the bridge layer being cascading on underlay substrate 01 (Bridge) 02, insulation course (Overcoat is called for short OC) 03 and touch control electrode layer 04; Wherein, touch control electrode layer 04 specifically comprises and intersects and put and touch-control sensing electrode 041 and the touch-control drive electrode 042 of mutually insulated, touch-control sensing electrode 041 and touch-control drive electrode 042 are argyle design, touch-control drive electrode 042 adjacent and that mutually disconnect is by bridge layer 02 bridge joint, touch-control sensing electrode 041 and touch-control drive electrode 042 are connected at the non-touch area of touch module and corresponding periphery cabling (Fig. 1 a is with not shown in Fig. 1 b), and periphery cabling can be transferred to the signal on touch control electrode layer corresponding IC chip and carry out analyzing and processing.
In OGS touch module, the material of bridge layer is selected very important, and at present, in prior art, the material of bridge layer is generally metal material or tin indium oxide (Indium Tin Oxide, ITO) material.But the bridge layer of metal material has metal climbing, bridge point is visible and the lower shortcoming of touch-screen transmitance, and antistatic (Electro-Static Discharge, ESD) poor-performing of the bridge layer of ITO material.Therefore, providing a kind of new bridge layer is the technical matters that those skilled in the art need solution badly.
Summary of the invention
The embodiment of the present invention provides a kind of touch-screen, its method for making and touch display unit, in order to avoid the problem that in prior art, bridge layer bridge point is visible, metal is climbed, touch-screen transmitance is lower and antistatic property is poor.
A kind of touch-screen that the embodiment of the present invention provides, comprises substrate and the touch-control structure that is positioned at the touch area of described touch-screen; Wherein, described touch-control structure comprises with layer and arranges, intersects and put and touch-control sensing electrode and the touch-control drive electrode of mutually insulated, the bridge layer of the described touch-control drive electrode that bridge joint is adjacent or adjacent described touch-control sensing electrode, and at the described touch-control sensing electrode arranging with layer and the insulation course between described touch-control drive electrode and described bridge layer;
The material of described bridge layer is Graphene.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, described bridge layer comprises single-layer graphene or double-layer graphite alkene.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, the material of described touch-control sensing electrode and described touch-control drive electrode is transparent conductive material.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, described transparent conductive material is tin indium oxide or indium zinc oxide.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, the thickness of described touch-control sensing electrode and touch-control drive electrode is 20nm-80nm.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, the thickness of described substrate is 0.3mm-1.0mm.
Correspondingly, the embodiment of the present invention also provides the method for making of above-mentioned any touch-screen, comprising:
On substrate, form graphene layer, by composition technique, form the figure of bridge layer;
Be formed with the figure that forms insulation course on the substrate of described bridge layer;
On described insulation course, form intersection and put and the touch-control sensing electrode of mutually insulated and the figure of touch-control drive electrode; And the described touch-control drive electrode that described bridge layer bridge joint is adjacent or adjacent described touch-control sensing electrode.
Particularly, in the above-mentioned touch-screen providing in the embodiment of the present invention, the described graphene layer that forms on substrate, specifically comprises:
Adopt transfer method that preformed single-layer graphene or double-layer graphite alkene are transferred on substrate.
Particularly, in the above-mentioned touch-screen providing in the embodiment of the present invention, the described figure that forms bridge layer by composition technique, specifically comprises:
On described graphene layer, spin coating covers the photoresist layer of described graphene layer;
The base board to explosure, development, etching and the lift-off processing that spin coating are had to described photoresist layer, the figure of formation bridge layer.
Correspondingly, the embodiment of the present invention also provides a kind of touch display unit, comprises above-mentioned any touch-screen that the embodiment of the present invention provides.
The above-mentioned touch-screen that the embodiment of the present invention provides, its method for making and touch display unit, in touch-screen, the material of the bridge layer of touch-control structure is Graphene, because Graphene has higher charge mobility, and resistance value is irrelevant at visible light wave range and light wavelength, therefore can play good bridge joint effect to touch-control drive electrode adjacent in touch-control structure or adjacent touch-control sensing electrode.In addition, the bridge layer that adopts Graphene to make is compared and is also had very strong antistatic behaviour ability with the bridge layer of ITO material in prior art; Compare passablely with the bridge layer of metal material in prior art, can also avoid the shortcoming of metal climbing, bridge visibility of a point and improve the transmitance of touch-screen.
Accompanying drawing explanation
Fig. 1 a is the schematic top plan view of OGS touch-control structure of the prior art;
Fig. 1 b be in Fig. 1 a A-A to schematic cross-section;
Fig. 2 a and Fig. 2 b are respectively the structural representation of the touch-screen that the embodiment of the present invention provides;
The schematic flow sheet of the method for making of the touch-screen that Fig. 3 provides for the embodiment of the present invention;
Fig. 4 a to Fig. 4 f is respectively the method for making of the touch-screen shown in Fig. 2 a of the present invention and carries out the structural representation after each step;
The schematic diagram to the positive photoresist layer place exposure-processed on graphene layer that Fig. 5 a provides for the embodiment of the present invention;
The schematic diagram to the negative photoresist layer place exposure-processed on graphene layer that Fig. 5 b provides for the embodiment of the present invention;
The photoresist layer on graphene layer that Fig. 5 c provides for the embodiment of the present invention expose and development treatment after structural representation;
Fig. 5 d carries out the structural representation after etching processing for what the embodiment of the present invention provided to the photoresist layer on graphene layer.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the touch-screen that the embodiment of the present invention is provided, its method for making and touch display unit is described in detail.
In accompanying drawing, each layer film thickness and area size shape do not reflect true ratio, and object is signal explanation content of the present invention just.
A kind of touch-screen that the embodiment of the present invention provides, as shown in Figure 2 a and 2 b, comprises substrate 10 and the touch-control structure that is positioned at the touch area of touch-screen; Wherein, touch-control structure comprises with layer and arranges, intersects and put and touch-control sensing electrode 11 and the touch-control drive electrode 12 of mutually insulated, the bridge layer 13 of the touch-control drive electrode 12 that bridge joint is adjacent or adjacent touch-control sensing electrode 11, and at the touch-control sensing electrode 11 arranging with layer and the insulation course 14 between touch-control drive electrode 12 and bridge layer 13;
The material of bridge layer is Graphene.
The above-mentioned touch-screen that the embodiment of the present invention provides, the material of the bridge layer in touch-control structure is Graphene, because Graphene has higher charge mobility, and resistance value is irrelevant at visible light wave range and light wavelength, therefore can play good bridge joint effect to touch-control drive electrode adjacent in touch-control structure or adjacent touch-control sensing electrode.In addition, the bridge layer that adopts Graphene to make is compared and is also had very strong antistatic behaviour ability with the bridge layer of ITO material in prior art; Compare passablely with the bridge layer of metal material in prior art, can also avoid the shortcoming of metal climbing, bridge visibility of a point and improve the transmitance of touch-screen.
Preferably, in order to guarantee the transmitance of bridge layer, in the above-mentioned touch-screen providing in the embodiment of the present invention, bridge layer comprises single-layer graphene or double-layer graphite alkene.This is because the transmitance of individual layer or double-layer graphite alkene can reach on 95%.
Particularly, concrete enforcement, be that, in the above-mentioned touch-screen providing in the embodiment of the present invention, the material of touch-control sensing electrode and touch-control drive electrode is transparent conductive material.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, transparent conductive material is tin indium oxide or indium zinc oxide, in this no limit.
Particularly, in the specific implementation, in the above-mentioned touch-screen providing in the embodiment of the present invention, THICKNESS CONTROL effect between 20nm-80nm of touch-control sensing electrode and touch-control drive electrode is better, in this no limit.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, the THICKNESS CONTROL of touch-control sensing electrode and touch-control drive electrode is in 50nm left and right best results.
Further, in the specific implementation, in the above-mentioned touch-screen providing in the embodiment of the present invention, the material of substrate can be chosen glass or polyethylene terephthalate (Polythylene terephthalate, PET), in this no limit.
Preferably, in the above-mentioned touch-screen providing in the embodiment of the present invention, the THICKNESS CONTROL of substrate effect between 0.3mm-1.0mm is better.
Further, in order to protect touch-control sensing electrode and touch-control drive electrode, in the above-mentioned touch-screen providing in the embodiment of the present invention, can also comprise the passivation layer that covers touch-control drive electrode and touch-control sensing electrode.
It should be noted that, the above-mentioned touch screen that the embodiment of the present invention provides, compares with existing touch-screen, and the material that is mainly bridge layer is Graphene, and therefore, said structure is applicable to all touch-screens that prior art comprises OGS touch module.And then, in the above-mentioned touch-screen providing in inventive embodiments, can also include other parts in existing touch-screen, therefore not to repeat here.
Based on same inventive concept, the embodiment of the present invention also provides the method for making of above-mentioned any touch-screen, as shown in Figure 3, can comprise the following steps:
S101, on substrate, form graphene layer, by composition technique, form the figure of bridge layer;
S102, be formed with the figure that forms insulation course on the substrate of bridge layer;
S103, on insulation course, form to intersect and put and the touch-control sensing electrode of mutually insulated and the figure of touch-control drive electrode; And the touch-control drive electrode that bridge layer bridge joint is adjacent or adjacent touch-control sensing electrode.
Particularly, in the above-mentioned touch-screen providing in the embodiment of the present invention, in step S101, on substrate, form graphene layer, specifically can comprise:
Adopt transfer method that preformed single-layer graphene or double-layer graphite alkene are transferred on substrate.
Particularly, in the specific implementation, in the said method providing in the embodiment of the present invention, the several different methods that preformed individual layer or double-layer graphite alkene can pass through obtains.Main Means has at present: mechanical phonograph recorder separation, oxidation-reduction method and chemical vapour deposition technique (Chemical Vapor Deposition, CVD).And CVD method can be prepared larger area Graphene and be widely used than machinery separation and oxidation-reduction method.CVD method is mainly to utilize the hydrocarbon gas such as methane, ethene to be at high temperature adsorbed on catalyst metals substrate surface, and the method for decomposing, recombinating formation Graphene under metal catalytic effect.General CVD method is carried out in high temperature furnace, and after growth finishes, the Graphene of growth is attached on catalyst metals completely.Therefore the Graphene that this method will be prepared is formed at also needs an extra transfer step on substrate.Shift and conventionally need in FeCl3 solution, soak more than ten hour to etch away catalyst metals substrate, and then be that substrate of the present invention is fished for by target substrate, then dry and can on substrate, form Graphene.Particularly, the method for preparing single or multiple lift Graphene is all same as the prior art with the method that shifts Graphene, and therefore not to repeat here.
Particularly, in the above-mentioned touch-screen providing in the embodiment of the present invention, in step S101, by composition technique, form the figure of bridge layer, specifically can comprise:
On graphene layer, spin coating covers the photoresist layer of graphene layer;
The base board to explosure, development, etching and the lift-off processing that spin coating are had to photoresist layer, the figure of formation bridge layer.
Particularly, in the specific implementation, photoresist layer can be positive photoresist, can be also negative photoresist, in this no limit.
Further, in the specific implementation, in the above-mentioned method for making providing in the embodiment of the present invention, step S102 is being formed with the figure that forms insulation course on the substrate of bridge layer, specifically can comprise:
Can form insulation material layer being formed with on the substrate of bridge layer by sputtering method, then this insulation material layer be carried out to composition processing, form the figure of insulation course.
The structure of the touch-screen shown in Fig. 2 a of take below particularly, can comprise the following steps the preparation method of the above-mentioned touch-screen that the embodiment of the present invention provides as example illustrates:
(1) utilize transfer method on substrate 10, to form graphene layer 15, as shown in Fig. 4 a;
(2) spin coating photoresist layer 16 on graphene layer 15, as shown in Figure 4 b;
Particularly, in the specific implementation, photoresist layer can be positive photoresist, can be also negative photoresist, in this no limit.
(3) first to photoresist layer 16 expose, development treatment, then graphene layer 15 is carried out to etching and lift-off processing, form the figure of bridge layer 13, as shown in Fig. 4 c;
Particularly, in the specific implementation, when photoresist layer is positive photoresist: adopt 20 pairs of photoresist layers 16 of positive mask plate to expose and development treatment, as shown in Figure 5 a; Retain the region a not being exposed in photoresist layer 16, remove the region b being exposed in photoresist layer 16, thereby in photoresist layer 16, define the figure of bridge layer, as shown in Figure 5 c.Or, when photoresist layer is negative photoresist: adopt negative 21 pairs of photoresist layers 16 of mask plate to expose and development treatment, as shown in Figure 5 b; Retain the region b being exposed in photoresist layer 16, remove the region a not being exposed in photoresist layer 16, thereby in photoresist layer 16, define the figure of bridge layer, as shown in Figure 5 c.Then, take this photoresist layer 16 with the figure of bridge layer is mask, along the pattern etching graphene layer 15 of the bridge layer defining to exposing substrate 10, as shown in Fig. 5 d; The photoresist layer 16 being retained on graphene layer 15 is peeled off, thus the figure of formation bridge layer 13, as shown in Fig. 4 c.
(4) by mode deposition of insulative material layer 17 on bridge layer 13 of sputter, as shown in Fig. 4 d;
(5) insulation material layer 17 is carried out to the figure that composition technique forms insulation course 14, as shown in Fig. 4 e;
Particularly, in the specific implementation, can on insulation course, deposit photoresist layer by the mode of spin coating, then by after exposure, development, etching and lift-off processing, form the figure of insulation course.
(6) on insulation course 14, form ito thin film 18; As shown in Fig. 4 f;
Particularly, in the specific implementation, generally the mode by sputter deposits ito thin film on insulation course.
(7) ito thin film 18 is carried out to the figure that composition technique forms touch-control sensing electrode 11 and touch-control drive electrode 12, as shown in Figure 2 a.
Particularly, in the specific implementation, generally on ito thin film, apply photoresist, to photoresist expose, after development and etching processing, stripping photoresist, forms the figure of touch-control sensing electrode 11 and touch-control drive electrode 12.
Particularly, through above-mentioned steps (1) to (7) afterwards, obtain the touch-screen as shown in Figure 2 a that the embodiment of the present invention provides.
Particularly, similar to the method for making of the touch-screen of structure shown in Fig. 2 a for the method for making of the touch-screen of structure shown in Fig. 2 b, do not repeat them here.
Based on same inventive concept, the embodiment of the present invention also provides a kind of touch display unit, comprise the above-mentioned touch-screen that the embodiment of the present invention provides, this touch display unit can be: any product or parts with Presentation Function such as mobile phone, panel computer, televisor, display, notebook computer, digital album (digital photo frame), navigating instrument.The enforcement of this touch display unit can, referring to the embodiment of above-mentioned touch-screen, repeat part and repeat no more.
The embodiment of the present invention provides a kind of touch-screen, its method for making and touch display unit, in touch-screen, the material of the bridge layer of touch-control structure is Graphene, because Graphene has higher charge mobility, and resistance value is irrelevant at visible light wave range and light wavelength, therefore can play good bridge joint effect to touch-control drive electrode adjacent in touch-control structure or adjacent touch-control sensing electrode.In addition, the bridge layer that adopts Graphene to make is compared and is also had very strong antistatic behaviour ability with the bridge layer of ITO material in prior art; Compare passablely with the bridge layer of metal material in prior art, can also avoid the shortcoming of metal climbing, bridge visibility of a point and improve the transmitance of touch-screen.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.
Claims (10)
1. a touch-screen, comprises substrate and the touch-control structure that is positioned at the touch area of described touch-screen; Wherein, described touch-control structure comprises with layer and arranges, intersects and put and touch-control sensing electrode and the touch-control drive electrode of mutually insulated, the bridge layer of the described touch-control drive electrode that bridge joint is adjacent or adjacent described touch-control sensing electrode, and at the described touch-control sensing electrode arranging with layer and the insulation course between described touch-control drive electrode and described bridge layer; It is characterized in that:
The material of described bridge layer is Graphene.
2. touch-screen as claimed in claim 1, is characterized in that, described bridge layer comprises single-layer graphene or double-layer graphite alkene.
3. touch-screen as claimed in claim 1, is characterized in that, the material of described touch-control sensing electrode and described touch-control drive electrode is transparent conductive material.
4. touch-screen as claimed in claim 3, is characterized in that, described transparent conductive material is tin indium oxide or indium zinc oxide.
5. touch-screen as claimed in claim 4, is characterized in that, the thickness of described touch-control sensing electrode and touch-control drive electrode is 20nm-80nm.
6. the touch-screen as described in claim 1-5 any one, is characterized in that, the thickness of described substrate is 0.3mm-1.0mm.
7. a method for making for the touch-screen as described in claim 1-6 any one, is characterized in that, comprising:
On substrate, form graphene layer, by composition technique, form the figure of bridge layer;
Be formed with the figure that forms insulation course on the substrate of described bridge layer;
On described insulation course, form intersection and put and the touch-control sensing electrode of mutually insulated and the figure of touch-control drive electrode; And the described touch-control drive electrode that described bridge layer bridge joint is adjacent or adjacent described touch-control sensing electrode.
8. method for making as claimed in claim 7, is characterized in that, the described graphene layer that forms on substrate, specifically comprises:
Adopt transfer method that preformed single-layer graphene or double-layer graphite alkene are transferred on substrate.
9. method for making as claimed in claim 7, is characterized in that, the described figure that forms bridge layer by composition technique, specifically comprises:
On described graphene layer, spin coating covers the photoresist layer of described graphene layer;
The base board to explosure, development, etching and the lift-off processing that spin coating are had to described photoresist layer, the figure of formation bridge layer.
10. a touch display unit, is characterized in that, comprises the touch-screen as described in claim 1-6 any one.
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CN201410437054.4A CN104199580A (en) | 2014-08-29 | 2014-08-29 | Touch screen, manufacturing method of touch screen and touch display device |
PCT/CN2014/090514 WO2016029548A1 (en) | 2014-08-29 | 2014-11-06 | Touch screen panel, manufacturing method thereof and touch display device |
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