CN104197923A - Micro-capacitance gyroscope signal detecting method based on carrier wave detection - Google Patents
Micro-capacitance gyroscope signal detecting method based on carrier wave detection Download PDFInfo
- Publication number
- CN104197923A CN104197923A CN201410390484.5A CN201410390484A CN104197923A CN 104197923 A CN104197923 A CN 104197923A CN 201410390484 A CN201410390484 A CN 201410390484A CN 104197923 A CN104197923 A CN 104197923A
- Authority
- CN
- China
- Prior art keywords
- signal
- gyro
- electrode
- detecting
- carrier wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
Abstract
The invention provides a micro-capacitance gyroscope signal detecting method based on carrier wave detection. The method is characterized in that multi-frequency carrier waves are superposed on each electrode couple, at the moment, differential capacitance between a control electrode couple or a detection electrode couple and a gyroscope resonator changes correspondingly in accordance with the vibration state of a gyroscope, and a signal of the gyroscope can be detected by means of detecting the changes of the differential capacitance or can be detected by a frequency division multiplexing signal transmission process. According to the method, a differential capacitance detection process is adopted, and metal imaging of an electrode lead does not need to be performed on a resonator body; a frequency division multiplexing signal detection mode is adopted, and the identification of signal detection on the gyroscope is ensured; electrodes are arranged on a substrate, no resonator lead is required, the processing technology is simplified greatly and the difficulty in gyroscope design and processing is reduced.
Description
Technical field
The present invention relates to micro electronmechanical (MEMS) systems technology field, particularly, relate to a kind of micro-capacitance top signal detecting method detecting based on carrier wave.
Background technology
Gyroscope is as the responsive inertial sensor of a kind of carrier angular velocity, in the attitude in the traditional industry fields such as Aeronautics and Astronautics, boats and ships, controls and there is very important effect the aspect such as navigator fix.The micro-gyro of MEMS has that size quality is little, low in energy consumption, cost is low, good environmental adaptability, integrated level advantages of higher.
Along with China's expanding economy, China is just becoming day by day urgent in fields such as military affairs, industry and consumer electronics to the demand of the micro-gyro of MEMS of high-performance, small size, high reliability.
Patent publication No. CN102305627B provides a kind of all solid dual spindle gyroscopes of discoid piezoelectric vibrator, in the technology of this scheme, its discoid piezoelectric vibrator lower surface is connected with support cylinder, the support cylinder other end is fixed on matrix, drive electrode, signal detection electrode and Modal detection electrode are positioned at the upper surface of discoid piezoelectric vibrator, and potential reference electrode is positioned at the lower surface of discoid piezoelectric vibrator.
In above-mentioned technology, do not provide concrete signal detecting method, its electrode is positioned on discoid piezoelectric vibrator, the in the situation that of piezoelectric vibrator dither, has certain instability, and reliability is not high; Meanwhile, because needs are done contact conductor on piezoelectric vibrator, its processing technology more complicated, processing cost is higher, implements and acquires a certain degree of difficulty, and is not suitable for producing in enormous quantities.
Summary of the invention
For defect of the prior art, the object of this invention is to provide a kind of micro-capacitance top signal detecting method detecting based on carrier wave, utilize differential capacitor to detect gyro state, thereby configured electrodes on gyroscope base, without harmonic oscillator, go between, thereby simplified processing process, reduces hemispherical reso nance gyroscope design difficulty.
For realizing above object, the present invention by the following technical solutions:
According to an aspect of the present invention, a kind of micro-capacitance top signal detecting method detecting based on carrier wave is provided, described method is superimposed upon on each electrode pair by multi-frequency carrier wave, now, each electrode pair (at least comprises that drive electrode is to, detecting electrode pair, can further include monitoring electrode pair, counter electrode pair; These electrode pairs are all the structures that general gyro has) and gyro harmonic oscillator between differential capacitor can there is corresponding variation according to the vibrational state of gyro, by detecting this differential capacitor, change the input that can complete gyro.
Particularly, the method for the invention comprises the steps:
Described method comprises the steps:
Step 1: controller produces the carrier wave actuation drive signals of certain frequency and amplitude, through A/D transformation in drive electrode to upper, with exciting gyro;
Step 2: now, gyro is in exciting state, detecting electrode to or monitoring electrode pair on differential capacitor coupled signal after C/V conversion and amplification, D/A conversion input control device so that the duty of gyro is now fed back;
Step 3: controller is according to the signal feedback in step 2, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 4: detecting electrode is to upper differential capacitor coupled signal, or detecting electrode to balance electrode pair on differential capacitor coupled signal, carry out after C/V conversion and follow-up amplification, coordinate monitoring electrode signal to carry out phase demodulation, after low-pass filtering, obtain the direct current signal corresponding to gyro turning rate input signal;
Step 5: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
Further, the present invention also can adopt frequency-division multiplex singal transmission method detecting signal, now method is specially: the carrier signal of applying respectively different frequency on each electrode pair of gyro, the carrier signal of these different frequencies is through described capacitance gap, can be real-time reflect gyro vibrational state now, on public electrode, to mixing multi-frequency carrier signal, detect, and it is carried out to demodulation, can obtain the corresponding vibration information shaking a little of gyro according to the characterization of different frequency carrier wave, thereby complete the detection of gyro vibrational state.
Particularly, described employing frequency-division multiplex singal transmission method detecting signal, method comprises the steps:
Step 1: controller produces the actuation drive signals of certain frequency and amplitude, through A/D transformation in drive electrode to upper, with exciting gyro;
Step 2: now, gyro, in exciting state, applies different frequency on each electrode pair, drives signal amplitude to the carrier (boc) modulated signals of 2 orders of magnitude when young relatively described in step 1;
Step 3: can detect a common signal that comprises a plurality of carrier signals on the public electrode of gyro, for this common electrode signal, the carrier signal of different frequency range is carried out respectively to the signal that demodulation can obtain each electrode pair of gyro, the vibrational state of known each electrode pair position;
Step 4: controller is according to the signal feedback of the monitoring electrode pair that in step 3, institute's solution is transferred to, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 5: carry out demodulation according to common signal carrier wave resulting in step 3, via controller can obtain one after processing and reflect the now direct current signal of gyro vibrational state;
Step 6: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
Preferably, the electric capacity between described electrode pair and described harmonic oscillator is differential capacitor, and by capacitive coupling output difference dynamic condenser detection signal.
Preferably, described differential capacitor detection signal changes with gyro turning rate input, and the variation of detected differential capacitor is in hundred fF magnitudes.
Preferably, the signal on every pair of described electrode pair is with amplitude reverse signal with frequently; Signal on the described electrode pair of two couples of relative position is with amplitude reverse signal with frequently.
More preferably, during driving, described drive electrode on apply the carrier voltage of different frequency.
More preferably, exchanging under carrier voltage driving, when described harmonic oscillator is affected by gyro turning rate input, described detecting electrode can change to upper alternating-current detection signal, and this variation can be reacted gyro angular velocity information.
Concerning most gyros, its drive end and test side are essential, in the present invention, monitoring electrode and counter electrode mainly provide system feedback and demodulation reference, effectively elevator system performance, but and nonessential, so method involved in the present invention is applicable to most gyros, special, the related gyro of frequency-division multiplexing method need detect by common electrode signal, and the characteristic that its single point signals detects also provides certain facility to the design of gyrosystem.
Compared with prior art, the present invention has following beneficial effect:
The present invention adopts differential capacitor detection method, without the enterprising row metal patterned electrodes lead-in wire of resonant body; Further, adopt the signal of frequency division multiplexing to detect mode, guarantee the identity of the detection signal of gyro; At substrate machined electrode, simplified processing process, reduces hemispherical reso nance gyroscope design and difficulty of processing to a great extent.
Accompanying drawing explanation
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1 is the vertical view of one embodiment of the invention;
Fig. 2 is the side-looking sectional drawing of one embodiment of the invention;
Fig. 3 is harmonic oscillator and the basal electrode equivalent capacity figure of one embodiment of the invention;
Fig. 4 is the method signal flow diagram of one embodiment of the invention;
Fig. 5 is the present invention harmonic oscillator and basal electrode equivalent capacity figure in one embodiment;
Fig. 6 is is the signal flow diagram of one embodiment of the invention.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art further to understand the present invention, but not limit in any form the present invention.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, can also make some distortion and improvement.These all belong to protection scope of the present invention.
As shown in Figure 1, the system vertical view relating to for one embodiment of the invention, wherein:
100 is micro-gyro base;
101 is micro-gyro and base capacity gap, and wherein, the differential capacitor that the change of distance of this gap when detecting can be reflected as between micro-gyro harmonic oscillator and electrode pair changes;
102 is hemispherical resonator;
103 for to be fixed on the support column on base by hemispherical resonator;
104 (AB), 108 (AB) are drive electrode pair, and 105 (AB), 109 (AB) are detecting electrode pair, and 106 (AB), 110 (AB) are monitoring electrode pair, and 107 (AB), 111 (AB) are counter electrode pair.
In said structure, its base electrode to and the harmonic oscillator of corresponding gyro between differential capacitor change can corresponding gyro harmonic oscillator vibrational state change, the drive electrode of take is example to 104,104 (A) electrodes and 104 (B) electrode can be applied in a pair of sinusoidal signal of single spin-echo when system starts, on its effect and 104 electrodes, by the capacitance gap between itself and harmonic oscillator, act on gyro so that gyro starting of oscillation, drive electrode 108 in like manner.
In system described in Fig. 1, its input flow process is as follows:
Step 1: controller produces the carrier wave actuation drive signals of certain frequency and amplitude, acts on respectively drive electrode through A/D conversion upper to 104 (AB), 108 (AB), with exciting gyro;
Step 2: now, gyro is in exciting state, the differential capacitor coupled signal on monitoring electrode pair 106 (AB), 110 (AB) after C/V conversion and amplification, D/A conversion input control device so that the duty of gyro is now fed back;
Step 3: controller is according to the signal feedback in step 2, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 4: detecting electrode carries out after C/V conversion and follow-up amplification the differential capacitor coupled signal on 107 (AB), 111 (AB) 105 (AB), 109 (AB) and counter electrode, coordinate monitoring electrode pair 106 (AB), 110 (AB) signal to carry out phase demodulation, after low-pass filtering, obtain the direct current signal corresponding to gyro turning rate input signal;
Step 5: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
In gyroscope structure shown in following Fig. 2,3,4, can similarly adopt above-mentioned signal detecting method to carry out signal and detect, using the present embodiment as basis, can make some distortion and improvement for different gyros.
As shown in Figure 2, the hemispherical reso nance gyroscope system side-looking sectional drawing relating to for one embodiment of the invention, wherein:
200 is micro-gyro base;
201 is micro-gyro and base capacity gap;
202 is hemispherical resonator;
203 for to be fixed on the support column on base by hemispherical resonator;
204 is optional, for symmetrical drive electrode to, detecting electrode to, monitoring electrode pair, counter electrode pair.
In system described in Fig. 2, its input flow process is as follows:
Step 1: controller produces the carrier wave actuation drive signals of certain frequency and amplitude, acts on respectively drive electrode to upper through A/D conversion, with exciting gyro;
Step 2: now, gyro is in exciting state, the differential capacitor coupled signal on monitoring electrode pair after C/V conversion and amplification, D/A conversion input control device so that the duty of gyro is now fed back;
Step 3: controller is according to the signal feedback in step 2, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 4: detecting electrode to and counter electrode upper differential capacitor coupled signal is carried out after C/V conversion and follow-up amplification, coordinate monitoring electrode pair signal to carry out phase demodulation, after low-pass filtering, obtain the direct current signal corresponding to gyro turning rate input signal;
Step 5: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
As shown in Figure 3, the quality of waving relating to for one embodiment of the invention strengthens solid micro-gyro vertical view that fluctuates, wherein:
301 is micro-gyro base;
302 is micro-gyro and base capacity gap;
303 strengthen solid micro-gyro harmonic oscillator that fluctuates for waving quality;
304 (AB), 306 (AB) are drive electrode pair;
305 (AB), 307 (AB) are detecting electrode pair;
In system described in Fig. 3, its input flow process is as follows:
Step 1: controller produces the carrier wave actuation drive signals of certain frequency and amplitude, acts on respectively drive electrode through A/D conversion upper to 304 (AB), 306 (AB), with exciting gyro;
Step 2: now, gyro is in exciting state, detecting electrode is to the differential capacitor coupled signal on 305 (AB), 307 (AB) after C/V conversion and amplification, D/A conversion, and input control device, can confirm the now duty of gyro;
Step 3: the driving signal described in set-up procedure 1, so that gyro is under operation mode natural frequency;
Step 4: detecting electrode carries out after C/V conversion and follow-up amplification the differential capacitor coupled signal on 305 (AB), 307 (AB), before coordinating, the described driving signal of step carries out demodulation, obtains the direct current signal corresponding to gyro turning rate input signal after low-pass filtering;
Step 5: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
As shown in Figure 4, the disc sound wave solid designing for one embodiment of the invention micro-gyro side-looking sectional drawing that fluctuates, wherein
400 is micro-gyro base;
401 is micro-gyro and base capacity gap;
402 is hemispherical resonator;
403 for to be fixed on the support column on base by hemispherical resonator;
404 is optional, for symmetrical drive electrode to, detecting electrode to, monitoring electrode pair, counter electrode pair
In system described in Fig. 4, its input flow process is as follows:
Step 1: controller produces the carrier wave actuation drive signals of certain frequency and amplitude, acts on respectively drive electrode to upper through A/D conversion, with exciting gyro;
Step 2: now, gyro is in exciting state, the differential capacitor coupled signal on monitoring electrode pair after C/V conversion and amplification, D/A conversion input control device so that the duty of gyro is now fed back;
Step 3: controller is according to the signal feedback in step 2, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 4: detecting electrode to and counter electrode upper differential capacitor coupled signal is carried out after C/V conversion and follow-up amplification, coordinate monitoring electrode pair signal to carry out phase demodulation, after low-pass filtering, obtain the direct current signal corresponding to gyro turning rate input signal;
Step 5: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
In another embodiment, the input of gyro can adopt the signal of frequency division multiplexing to detect mode, the corresponding control electrode of gyro pair and detecting electrode on apply respectively the carrier signal of different frequency, the carrier signal of these different frequencies is through described capacitance gap.Can be real-time reflect gyro vibrational state now, on public electrode, to mixing multi-frequency carrier signal, detect, and it is carried out to demodulation, can obtain the corresponding vibration information shaking a little of gyro according to the characterization of different frequency carrier wave, thereby complete the detection of gyro vibrational state.
As shown in Figure 5, be the present invention harmonic oscillator and basal electrode equivalent capacity figure in one embodiment, wherein: Cd represents to drive, Cs represents to detect, Cm represents that monitoring, Cb represent balance, and 1-4 represents that two pairs become the right sequence numbers of bipolar electrode.In corresponding Fig. 1, Cd represents the equivalent capacity between 104 (AB) and 108 (AB) and harmonic oscillator; Cs represents the equivalent capacity between 105 (AB) and 109 (AB) and harmonic oscillator; Cm represents the equivalent capacity between 106 (AB) and 110 (AB) and harmonic oscillator; Cb represents the equivalent capacity between 107 (AB) and 111 (AB) and harmonic oscillator; The AC sine wave of the amplitudes such as the A of each electrode pair, B signal are, with same frequency and reversed-phase; Distinctive, in regulation electrode pair, A represents that electrode signal is 0 degree, and B represents electrode contraposition 180 degree; Take 104A, 104B, 108A, 108B is example, and its frequency and amplitude are identical, and 104 (A), 108 (A) are 0 degree signal; 104 (B), 108 (B) are 180 degree signals.
I 104 (AB) and 108 (AB);
Ii 105 (AB) and 109 (AB);
Iii 106 (AB) and 110 (AB);
Iv 107 (AB) and 111 (AB);
The carrier signal of four groups of corresponding different frequencies of difference.
Step 1: controller produces the actuation drive signals of certain frequency and amplitude, through A/D transformation in drive electrode to 104 (AB) and 108 (AB); Upper, with exciting gyro;
Step 2: now, gyro, in exciting state, at each electrode pair, exists respectively:
I 104 (AB) and 108 (AB);
Ii 105 (AB) and 109 (AB);
Iii 106 (AB) and 110 (AB);
Iv 107 (AB) and 111 (AB);
On apply different frequency, relatively described in step 1, drive signal amplitude to the carrier (boc) modulated signals of 2 orders of magnitude when young.
Step 3: can detect a common signal that comprises a plurality of carrier signals on the public electrode of gyro, for this common signal, the carrier signal of different frequency range is carried out respectively to the signal that demodulation can obtain each electrode pair of gyro, the vibrational state of known each electrode pair position.
Step 4: controller is according to the signal feedback of the monitoring electrode pair that in step 3, institute's solution is transferred to, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 5: carry out demodulation according to common signal carrier wave resulting in step 3, via controller can obtain one after processing and reflect the now direct current signal of gyro vibrational state.
Step 6: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
If described gyro detects 107 (AB) and 111 (AB) without monitoring electrode pair 106 (AB) and 110 (AB) and counter electrode, the method step is reduced to:
Step 1: controller produces the actuation drive signals of certain frequency and amplitude, through A/D transformation in drive electrode to 104 (AB) and 108 (AB); Upper, with exciting gyro;
Step 2: now, gyro, in exciting state, at described each electrode pair, exists respectively:
I 104 (AB) and 108 (AB);
Ii 105 (AB) and 109 (AB);
On apply different frequency, relatively described in step 1, drive signal amplitude to the carrier (boc) modulated signals of 2 orders of magnitude when young; .
Step 3: can detect a common signal that comprises a plurality of carrier signals on the public electrode of gyro, for this common signal, the carrier signal of different frequency range is carried out respectively to the signal that demodulation can obtain each electrode pair of gyro, the vibrational state of known each electrode pair position.
Step 4: the right signal of detecting electrode that controller is transferred to according to institute's solution in step 3, observe gyro vibrational state now, in set-up procedure 1, drive frequency and the amplitude of signal, to keep gyro under operation mode natural frequency;
Step 5: carry out demodulation according to resulting common signal carrier wave in step 3, via controller can obtain one after processing and reflect the now direct current signal of gyro vibrational state.
Step 6: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
As shown in Figure 6, be the signal flow diagram of another embodiment of the present invention, amplitude is identical, the two-way sinusoidal carrier signal of single spin-echo is applied to respectively a pair of drive electrode to upper, by capacitive coupling, exports the modulated wave that the vibration of reflection harmonic oscillator changes.First complete and C/V conversion, then exchange and amplify through differential amplification and secondary thereafter, after filtering with monitoring electrode pair Phase Processing after signal carry out phase demodulation, obtain after signal, after low-pass filtering and A/D conversion, feed back to controller.
The present embodiment charge amplifier used, charge amplifier is for the detection of feeble signal, the faint charge signal of gyro output can be converted into the voltage signal of amplification, the high impedance output of gyro can be converted again to Low ESR output simultaneously, charge amplifier used there are certain requirements resistance and electric capacity precision, therefore can utilize if desired, carries out preferably as devices such as electric impedance analyzers.
The differential amplification of the present embodiment and secondary amplify, and its enlargement factors at different levels are about 10 times of left and right, gain adjustable, to compensate gyrosystem mismachining tolerance.
The present embodiment phase demodulation scheme adopts analogue multiplication demodulation.In another embodiment, switch demodulation can be adopted, but compare this scheme of multiplication demodulation, larger noise can be produced.
In another embodiment, controller adopts dsp chip, and dsp chip is supported " taking advantage of-Jia " computing of single clock cycle, it is low that it has cost, low-power consumption, processing power advantages of higher, dsp chip is responsible for accepting carrier wave demodulation signal after A/D conversion to complete feedback, and as master controller functionating.
The present invention adopts differential capacitor detection method, without the enterprising row metal patterned electrodes lead-in wire of resonant body; Adopt the signal of frequency division multiplexing to detect mode, guarantee the identity of the detection signal of gyro; At substrate machined electrode, simplified processing process, reduces hemispherical reso nance gyroscope design and difficulty of processing to a great extent.
A kind of micro-capacitance top signal detecting method detecting based on carrier wave of the present invention is not limited to certain specific gyro, those skilled in the art can make various distortion or modification for different gyros within the scope of the claims, and this does not affect flesh and blood of the present invention.It should be noted that the implementation for the signal detection step adopting in said method can preferably adopt the mode of simulation+digital circuit to realize as required, is not limited to the concrete grammar adopting in each step.
Above specific embodiments of the invention are described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and those skilled in the art can make various distortion or modification within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (8)
1. the micro-capacitance top signal detecting method detecting based on carrier wave, it is characterized in that, described method is superimposed upon on each electrode pair by multi-frequency carrier wave, now, can there is corresponding variation according to the vibrational state of gyro in the differential capacitor between each electrode pair and gyro harmonic oscillator, by detecting this differential capacitor, change the input that can complete gyro.
2. the micro-capacitance top signal detecting method detecting based on carrier wave according to claim 1, is characterized in that, described method comprises the steps:
Step 1: controller produces the carrier wave actuation drive signals of certain frequency and amplitude, through A/D transformation in drive electrode to upper, with exciting gyro;
Step 2: now, gyro is in exciting state, monitoring electrode pair or detecting electrode to upper differential capacitor coupled signal after C/V conversion and amplification, D/A conversion input control device so that the duty of gyro is now fed back;
Step 3: controller is according to the signal feedback in step 2, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 4: detecting electrode is to upper differential capacitor coupled signal, or detecting electrode to balance electrode pair on differential capacitor coupled signal, carry out after C/V conversion and follow-up amplification, coordinate monitoring electrode signal to carry out phase demodulation, after low-pass filtering, obtain the direct current signal corresponding to gyro turning rate input signal;
Step 5: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
3. the micro-capacitance top signal detecting method detecting based on carrier wave according to claim 1, it is characterized in that, described method adopts frequency-division multiplex singal transmission method to detect gyro signal, on each electrode pair of gyro, apply respectively the carrier signal of different frequency, the carrier signal of these different frequencies is through capacitance gap, the real-time gyro vibrational state now that reflects, on public electrode, to mixing multi-frequency carrier signal, detect, and carry out demodulation to mixing multi-frequency carrier signal, can obtain the corresponding vibration information shaking a little of gyro according to the characterization of different frequency carrier wave, thereby complete the detection of gyro vibrational state.
4. the micro-capacitance top signal detecting method detecting based on carrier wave according to claim 3, is characterized in that, described method comprises the steps:
Step 1: controller produces the actuation drive signals of certain frequency and amplitude, through A/D transformation in drive electrode to upper, with exciting gyro;
Step 2: now, gyro, in exciting state, applies different frequency on each electrode pair, drives signal amplitude to the carrier (boc) modulated signals of 2 orders of magnitude when young relatively described in step 1;
Step 3: can detect a common signal that comprises a plurality of carrier signals on the public electrode of gyro, for this common signal, the carrier signal of different frequency range is carried out respectively to the signal that demodulation can obtain each electrode pair of gyro, the vibrational state of known each electrode pair position;
Step 4: controller is according to the monitor signal feedback that in step 3, institute's solution is transferred to, to driving frequency and the amplitude of signal to adjust in real time in step 1, to keep gyro under operation mode natural frequency;
Step 5: jointly carry out demodulation according to the signal of resulting each electrode pair in step 3, via controller can obtain one after processing and reflect the now direct current signal of gyro vibrational state;
Step 6: obtain the corresponding gyro turning rate input of this direct current signal value through follow-up test and calibration.
5. according to the micro-capacitance top signal detecting method detecting based on carrier wave described in claim 1-4 any one, it is characterized in that, in step 1, drive electrode to time, drive electrode on apply the carrier voltage of different frequency.
6. according to the micro-capacitance top signal detecting method detecting based on carrier wave described in claim 1-4 any one, it is characterized in that, the signal on every pair of described electrode pair is with amplitude reverse signal with frequently; Signal on the described electrode pair of two couples of relative position is with amplitude reverse signal with frequently.
7. according to the micro-capacitance top signal detecting method detecting based on carrier wave described in claim 1-4 any one, it is characterized in that, described differential capacitor detection signal changes with gyro turning rate input, and the variation of detected differential capacitor is in hundred fF magnitudes.
8. according to the micro-capacitance top signal detecting method detecting based on carrier wave described in claim 1-4 any one, it is characterized in that, exchanging under carrier voltage driving, when described harmonic oscillator is affected by gyro turning rate input, described detecting electrode can change to upper alternating-current detection signal, and this variation can be reacted gyro angular velocity information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410390484.5A CN104197923B (en) | 2014-08-08 | 2014-08-08 | A kind of micro- capacitance top signal detecting method based on carrier wave detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410390484.5A CN104197923B (en) | 2014-08-08 | 2014-08-08 | A kind of micro- capacitance top signal detecting method based on carrier wave detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104197923A true CN104197923A (en) | 2014-12-10 |
| CN104197923B CN104197923B (en) | 2017-06-09 |
Family
ID=52083251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410390484.5A Active CN104197923B (en) | 2014-08-08 | 2014-08-08 | A kind of micro- capacitance top signal detecting method based on carrier wave detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104197923B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897148A (en) * | 2015-05-29 | 2015-09-09 | 上海交通大学 | Cellular solid fluctuating micromechanical gyroscope and preparation method thereof |
| CN105547272A (en) * | 2016-01-26 | 2016-05-04 | 上海交通大学 | All-angle control signal detection system of piezoelectric hemispherical resonator gyroscope |
| CN106546232A (en) * | 2015-11-05 | 2017-03-29 | 中国科学院地质与地球物理研究所 | A kind of MEMS gyroscope and its manufacturing process |
| CN109596115A (en) * | 2018-12-17 | 2019-04-09 | 中国人民解放军国防科技大学 | Nested ring type vibration gyro nonlinear effect suppression method |
| CN114812533A (en) * | 2022-06-23 | 2022-07-29 | 中国船舶重工集团公司第七0七研究所 | Hemispherical resonant gyroscope sine wave amplitude phase detection method based on IIR filtering |
| CN115824182A (en) * | 2022-12-07 | 2023-03-21 | 中国船舶集团有限公司第七〇七研究所 | Hemispherical resonator gyro excitation detection method and system |
| CN115824181A (en) * | 2023-02-14 | 2023-03-21 | 中国船舶集团有限公司第七〇七研究所 | Resonance gyro time-sharing multiplexing capacitance detection method, control system and resonance gyro |
| CN117168428A (en) * | 2023-10-25 | 2023-12-05 | 四川图林科技有限责任公司 | Weak capacitance signal detection method for hemispherical resonator gyro plane detection electrode |
| CN117330044A (en) * | 2023-11-27 | 2024-01-02 | 四川图林科技有限责任公司 | Hemispherical harmonic oscillator standing wave output electric signal demodulation method of hemispherical harmonic oscillator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101476887A (en) * | 2009-02-05 | 2009-07-08 | 上海交通大学 | Inverse magnetic suspension vibrating micro-gyroscope |
| CN101476888A (en) * | 2009-02-05 | 2009-07-08 | 上海交通大学 | Inverse magnetic suspension vibrating micro-gyroscope |
| WO2013090724A1 (en) * | 2011-12-16 | 2013-06-20 | Analog Devices, Inc. | System and method of reducing noise in a mems device |
-
2014
- 2014-08-08 CN CN201410390484.5A patent/CN104197923B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101476887A (en) * | 2009-02-05 | 2009-07-08 | 上海交通大学 | Inverse magnetic suspension vibrating micro-gyroscope |
| CN101476888A (en) * | 2009-02-05 | 2009-07-08 | 上海交通大学 | Inverse magnetic suspension vibrating micro-gyroscope |
| WO2013090724A1 (en) * | 2011-12-16 | 2013-06-20 | Analog Devices, Inc. | System and method of reducing noise in a mems device |
Non-Patent Citations (2)
| Title |
|---|
| QIJUN XIAO ETC.: "Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope", 《MICROSYST TECHNOL》 * |
| 周海军: "静电悬浮转子微陀螺DSP测控技术相关问题研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897148A (en) * | 2015-05-29 | 2015-09-09 | 上海交通大学 | Cellular solid fluctuating micromechanical gyroscope and preparation method thereof |
| CN106546232A (en) * | 2015-11-05 | 2017-03-29 | 中国科学院地质与地球物理研究所 | A kind of MEMS gyroscope and its manufacturing process |
| CN105547272A (en) * | 2016-01-26 | 2016-05-04 | 上海交通大学 | All-angle control signal detection system of piezoelectric hemispherical resonator gyroscope |
| CN105547272B (en) * | 2016-01-26 | 2019-01-25 | 上海交通大学 | The full angle of piezoelectricity hemispherical resonant gyro controls signal detection system |
| CN109596115A (en) * | 2018-12-17 | 2019-04-09 | 中国人民解放军国防科技大学 | Nested ring type vibration gyro nonlinear effect suppression method |
| CN114812533A (en) * | 2022-06-23 | 2022-07-29 | 中国船舶重工集团公司第七0七研究所 | Hemispherical resonant gyroscope sine wave amplitude phase detection method based on IIR filtering |
| CN114812533B (en) * | 2022-06-23 | 2022-09-23 | 中国船舶重工集团公司第七0七研究所 | Hemispherical resonant gyroscope sine wave amplitude phase detection method based on IIR filtering |
| CN115824182A (en) * | 2022-12-07 | 2023-03-21 | 中国船舶集团有限公司第七〇七研究所 | Hemispherical resonator gyro excitation detection method and system |
| CN115824182B (en) * | 2022-12-07 | 2024-01-16 | 中国船舶集团有限公司第七〇七研究所 | Hemispherical resonator gyroscope excitation detection method and hemispherical resonator gyroscope excitation detection system |
| CN115824181A (en) * | 2023-02-14 | 2023-03-21 | 中国船舶集团有限公司第七〇七研究所 | Resonance gyro time-sharing multiplexing capacitance detection method, control system and resonance gyro |
| CN117168428A (en) * | 2023-10-25 | 2023-12-05 | 四川图林科技有限责任公司 | Weak capacitance signal detection method for hemispherical resonator gyro plane detection electrode |
| CN117330044A (en) * | 2023-11-27 | 2024-01-02 | 四川图林科技有限责任公司 | Hemispherical harmonic oscillator standing wave output electric signal demodulation method of hemispherical harmonic oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104197923B (en) | 2017-06-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104197923A (en) | Micro-capacitance gyroscope signal detecting method based on carrier wave detection | |
| US8042393B2 (en) | Arrangement for measuring a rate of rotation using a vibration sensor | |
| US9080852B2 (en) | Displacement sensor and a magnetic bearing system using the same | |
| CN102944230B (en) | A kind of constant frequency driving method of tunable micromechanical gyroscope and device thereof | |
| CN101968360B (en) | Circuit system for bell-shaped vibrator angular rate gyro | |
| EP2447671A1 (en) | Angular velocity sensor, and synchronous detection circuit used therein | |
| JP2007240518A (en) | Angular velocity sensor | |
| CN106370172B (en) | Micro gyroscope driving and detecting device and method based on digital embedded system | |
| CN101900554A (en) | Method for digitally driving and detecting multi-gauge head gyroscope | |
| CN105716597B (en) | Using micro- hemispherical reso nance gyroscope control of DSP and FPGA and signal detection system and method | |
| CN107830851A (en) | The digital driving control integrated circuit of angular-rate sensor | |
| CN115824181A (en) | Resonance gyro time-sharing multiplexing capacitance detection method, control system and resonance gyro | |
| CN103791897A (en) | Circuit for promoting micromechanical gyroscope to start vibrating rapidly | |
| CN103344228A (en) | Shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit | |
| CN104897148A (en) | Cellular solid fluctuating micromechanical gyroscope and preparation method thereof | |
| US10309783B2 (en) | Physical quantity detection system, electronic apparatus, and moving object | |
| CN210639247U (en) | Weak voltage signal detection system based on power isolation | |
| CN104197908A (en) | Concave annular piezoelectric resonance gyroscope and production method thereof | |
| CN105698847A (en) | Sensor device, electronic apparatus, and moving object | |
| CN106840145A (en) | A kind of micromechanics speed integrates the control system of ring gyro | |
| CN104848847B (en) | A kind of gyro sensor control circuit and electronic installation | |
| CN102136830B (en) | Frequency-up drive control method for micromechanical resonant device | |
| CN108387755B (en) | Resonant mode velocity of flow sensor measurement and control device based on hair structure | |
| US20170254645A1 (en) | Angular velocity detection circuit, angular velocity detection device, electronic apparatus, and moving object | |
| CN113639734A (en) | Digital feed-through cancellation system of MEMS capacitive gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |