CN104165826B - Device for detecting particles and particle detecting method - Google Patents
Device for detecting particles and particle detecting method Download PDFInfo
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- CN104165826B CN104165826B CN201410206025.7A CN201410206025A CN104165826B CN 104165826 B CN104165826 B CN 104165826B CN 201410206025 A CN201410206025 A CN 201410206025A CN 104165826 B CN104165826 B CN 104165826B
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Abstract
The present invention provides a kind of device for detecting particles can being correctly detected particle and particle detecting method.This device for detecting particles has: housing (1)；It is configured at the chamber (2) of the inside of housing (1)；It is arranged at the importing nozzle (21) of chamber (2)；Sample introduction path (3), it is connected in first introducing port (11) of housing (1) and is arranged at the importing nozzle (21) of chamber (2), for the fluid comprising particle is imported chamber (2)；Guiding mechanism (5), it supplies the fluid eliminating particle in chamber (2) by adjustment path (4), and described adjustment path (4) is communicated to chamber (2) from second introducing port (12) different from the first introducing port (11) being arranged at housing (1)；And light is irradiated in from importing the fluid that nozzle (21) sprays, the particle comprised in convection cell carries out the testing agency (23) detected.
Description
Technical field
The present invention relates to environmental evaluation technology, particularly relate to device for detecting particles and particle detecting method.
Background technology
In the ultra-clean chambers such as general indoor or sterilizing room, sometimes use device for detecting particles to detect and record and comprise disperse micro-
Biological particle (for example, referring to patent documentation 1,2 and non-patent literature 1).Optical profile type device for detecting particles is such as inhaled
Draw on the gas that the gas in the room being configured with device being exposed to by light is attracted to.If containing particle in gas, then irradiate
The particle of light will send fluorescence, or produces scattered light, therefore, it is possible to detect the quantity of the particle comprised in gas or big
Little etc..
Prior art literature
Patent documentation
Patent documentation 1 Japanese Unexamined Patent Publication 2008-225539 publication
Patent documentation 2 Japanese Unexamined Patent Publication 2011-83214 publication
Non-patent literature
Non-patent literature 1 Chang Gu river human relations men etc., " middle microorganism リ ア Le タ イ system goes out skill と そ (gas
The real-time detection technique of middle microorganism and application thereof) ", Yamatake Corp, azbil Technical Review (A Zibei
Your technology summary) in December, 2009 number, the 2-7 page, 2009 years
Summary of the invention
The problem that invention is to be solved
An object of the present invention is, it is provided that a kind of device for detecting particles that can be correctly detected particle and detection of particles
Method.
For solving the means of problem
Form according to the present invention, it is provided that a kind of device for detecting particles, it has: (a) housing；B () is configured at housing
The chamber of inside；C () Sample introduction path, described Sample introduction path is used for the fluid comprising particle from being arranged at
First introducing port of housing imports in described chamber；D () guiding mechanism, described guiding mechanism passes through adjustment path will
The fluid eliminating particle is supplied in chamber, is adjusted the state of the fluid in chamber, and described adjustment path is from setting
Second introducing port different from the first introducing port being placed in housing is communicated to chamber；And (e) testing agency, described detection
The fluid that light is irradiated in chamber by mechanism, the particle comprised in convection cell detects.
Also, according to the form of the present invention, it is provided that a kind of particle detecting method, including: (a) will by Sample introduction stream
Step in the chamber of the inside that the fluid comprising particle imports to be configured at housing from the first introducing port being arranged at housing；
B the fluid eliminating particle is supplied in chamber by () by adjustment path, adjust the state of the fluid in chamber
Whole step, described adjustment path is communicated to chamber from second introducing port different from the first introducing port being arranged at housing；
And the fluid that light is irradiated in chamber by (c), the particle comprised in convection cell carries out the step detected.
Invention effect
In accordance with the invention it is possible to provide a kind of device for detecting particles that can be correctly detected particle and particle detecting method.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the device for detecting particles involved by the first embodiment of the present invention.
Fig. 2 is the schematic diagram of the device for detecting particles involved by the comparative example of the present invention.
Fig. 3 is the schematic diagram of the device for detecting particles involved by the second embodiment of the present invention.
Detailed description of the invention
Below the embodiment of the present invention is illustrated.In the record of following accompanying drawing, same or like part is used
Same or like symbol represents.But, accompanying drawing is schematically to scheme.Therefore, below concrete size etc. should compare
Explanation judge.Also, certainly also include the part that size relationship each other, ratio are different between accompanying drawing.
(the first embodiment)
Device for detecting particles involved by first embodiment is as it is shown in figure 1, include: housing 1；It is configured at the interior of housing 1
The chamber 2 in portion；It is arranged at the importing nozzle 21 of chamber 2；Sample introduction path 3, the connection of described Sample introduction path 3 sets
It is placed in the first introducing port 11 of housing 1 and is arranged at the importing nozzle 21 of chamber 2, for the fluid comprising particle is imported
In chamber 2；Guiding mechanism 5, described guiding mechanism 5 is supplied in chamber 2 by adjustment path 4 and eliminates particle
Fluid, described adjustment path 4 is communicated to from second introducing port 12 different from the first introducing port 11 being arranged at housing 1
Chamber 2；And testing agency 23, light is irradiated in from importing the fluid that nozzle 21 sprays, convection current by described testing agency 23
The particle comprised in body detects.
The shape of housing 1 is arbitrary.Can use metal and resin etc. as the material of housing 1, but be not limited to
These.The shape of chamber 2 and material are arbitrary.But, chamber 2 preferably has resistance to pressure.Sample introduction path
3 have the conduit being such as made up of metal and resin etc..
It has been oppositely disposed nipple 22 with importing nozzle 21 in chamber 2.Also, be additionally provided with discharge within the case 1
Mouth 13 and discharge path 6, described discharge path 6 connects the nipple 22 of chamber 2 and the outlet 13 of housing 1, uses
In the outside that the fluid in chamber 2 is discharged to housing 1.Discharge path 6 has and is such as made up of metal and resin etc.
Conduit.Discharge path 6 is provided with the air draft pump 62 as exhaust blower.
The fluid of the gas etc. outside the housing 1 come is attracted to pass through from the first introducing port 11 of housing 1 by air draft pump 62
Sample introduction path 3 and importing nozzle 21 are ejected in chamber 2.The fluid being ejected in chamber 2 passes through and leads
Enter the nipple 22 that nozzle 21 is oppositely disposed to be discharged from chamber 2, further across discharge path 6 from being arranged at shell
The outlet 13 of body 1 is discharged to the outside of housing 1.
Light is irradiated in the flowing importing the fluids such as the air-flow that formed between nozzle 21 and nipple 22 by testing agency 23,
Such as, by the scattered light produced by the particle comprised in fluid is detected, the quantity of particle is detected.Or, inspection
The fluorescence that survey mechanism 23 is sent by the particle comprised in convection cell detects, and detects and is imported from the first introducing port 11
The quantity of the particle comprised in the fluid in chamber 2.Further, testing agency 23 detects with time per unit
The volume of the fluid that the quantity of particle is attracted to from the first introducing port 11 divided by time per unit, calculates the particle in fluid
Concentration.
Here, particle includes: comprise the dirt of the biological substance of microorganism etc., chemical substance, dust, dust and dust etc.
Angstrom etc..As the example of microorganism, comprise antibacterial and fungus.As the example of antibacterial, there are gram negative bacteria with
And gram positive bacteria.As an example of gram negative bacteria, there are escherichia coli.As the example of gram positive bacteria,
There are staphylococcus epidermidis, spores of bacillus subtilin, micrococcus luteus and corynebacterium.As the example of fungus, there are black
The aspergillosis such as mycete.But, microorganism is not limited to this.
If including the fluorescence particles such as microorganism in a fluid, then particle is irradiated by light to attend the meeting and sends fluorescence.Micro-life
The riboflavin (riboflavin) that comprises in thing, flavin mononucleotide (FMN) (FMN), flavin adenine dinucleotide (FAD) (FAD),
NADP (NAD (P) H), pyridoxamine (pyridoxamine), 5 '-pyridoxal 5-phosphate
(pyridoxal-5'-phosphate), pyridoxol (pyridoxine), tryptophan (tryptophan), tyrosine
And phenylalanine (phenylalanine) etc. can send fluorescence (tyrosine).
Such as, there are in the case of device for detecting particles is configured in ultra-clean chamber etc., the outlet arranged from housing 1
13 fluids discharged outside housing 1 the most do not comprise the situation of particle.In this case, it is also possible in discharge path 6
The exhaust-air filter 61 of such as HEPA filter (high efficiency particle air filter) etc. is set.
In the importing nozzle 21 of chamber 2, the sectional area of fluid is tightened, and flow velocity increases, and pressure reduces.Therefore, exist
The surrounding of the flowing being formed at the fluid imported between nozzle 21 and nipple 22 can produce convection current.Also, due to chamber 2
Interior pressure reduces, and the discharge from the fluid of nipple 22 cannot be smoothed out sometimes.If it is right to produce in chamber 2
If stream, or the pressure decline in chamber 2, then particle will remain in chamber 2 inside.If particle is trapped in chamber 2
Inside, then carry out repeated detection due to testing agency 23 to identical particle, be the most just difficult to be correctly detected out fluid
The quantity of the particle comprised in per unit volume.
To this, the device for detecting particles involved by the first embodiment has guiding mechanism 5, and described guiding mechanism 5 is by adjusting
The fluid eliminating particle is supplied in chamber 2 by whole path 4, and the pressure of chamber 2 is carried out pressurization etc., or to chamber
Fluid in 2 carries out rectification, thus adjusts the state of the fluid in chamber 2, and described adjustment path 4 is from being arranged at housing
Second introducing port 12 different from the first introducing port 11 of 1 is communicated to chamber 2.Thus, it becomes possible to the stream of particle will be comprised
Body is smoothly discharged out from nipple 22.
Adjustment path 4 has the conduit being such as made up of metal and resin etc..Such as it is provided with on adjustment path 4
One filter 51, adjustment pump 52, effusion meter 53 and the second filter 54.By adjusting pump 52, from the second introducing port
The particle comprised in the fluid outside housing 1 that 12 are attracted to is removed by the first filter 51 and the second filter 54.
The volume of fluid that effusion meter 53 is such as fed into chamber 2 to time per unit by adjustment pump 52, that eliminate particle
Measure Deng flow.
Here, in the reference example of the present invention, as in figure 2 it is shown, be provided with single introducing port 111 within the case 1,
It is connected on the co-route 103 of single introducing port 111, connects adjustment path 104 and the sample having guiding mechanism 105
Product lead-in path 3.Adjust pump 152 and a part for fluid is attracted to adjustment path 104 from co-route 103, attract
To fluid in the particle that comprises be removed by the first filter 151 and the second filter 154.Eliminate the stream of particle
Body is fed into chamber 2 in order to the pressure in chamber 2 is carried out pressurization etc. adjust.
The quantity of the particle that testing agency 123 detects with time per unit attracted to Sample introduction road divided by time per unit
The volume of the fluid in footpath 3, calculates the concentration of particle in fluid.Such as, time per unit has the fluid of 40L by from list
One introducing port 111 attracts, and in bifurcation point 200, the fluid of 10L is assigned to adjustment path 104, and the fluid of 30L is divided
Dispensing Sample introduction path 3.In this case, the quantity of the particle that testing agency 123 detects with time per unit divided by
Distribute to the volume of the fluid in Sample introduction path 3, i.e. 30L, calculate the concentration of particle.
But, in bifurcation point 200, go to the quantity of the particle in adjustment path 104 and the grain going to Sample introduction path 3
Son quantity ratio not necessarily and be assigned to adjustment path 104 fluid volume be assigned to Sample introduction path 3
The ratio of volume of fluid consistent.Such as, the fluid of 10L is had to be assigned to adjustment path 104, every at time per unit
In the case of unit interval has the fluid of 30L to be assigned to Sample introduction path 3, it is assigned to the stream in adjustment path 104
The volume of body is 1:3 with the ratio of the volume of the fluid being not assigned to Sample introduction path 3.But, in bifurcation point 200, as
Really co-route 103 and Sample introduction path 3 are configured on straight line, then have particle due to inertia force, compared to
Adjustment path 104 flow to the tendency in Sample introduction path 3 more.Therefore, present inventors found that, if
The quantity of the particle detected with testing agency 123 is divided by the volume of the fluid being assigned to Sample introduction path 3, thus counts
If calculating the concentration of particle in fluid, will be higher than actual concentration.
To this, in the device for detecting particles involved by embodiment that figure 1 illustrates, adjustment path 4 is not led from sample
Enter path 3 branch, the fluid that pressure in chamber 2 adjusts by from be arranged at housing 1 with the first introducing port 11 not
The second same introducing port 12 attracts.Accordingly, because adjust with path 4 independent with Sample introduction path 3 phase, adjustment road
Footpath 4 is not from Sample introduction path 3 branch etc., though so testing agency 123 particle of detecting with time per unit
Quantity is attracted and is flow through the volume of fluid in Sample introduction path 3 divided by time per unit from the first introducing port 11, thus
Calculate the concentration of particle in fluid, also will not produce error.Therefore, examine according to the particle involved by the first embodiment
Survey device, it becomes possible to be correctly detected out quantity or the concentration of the particle comprised in fluid.
(the second embodiment)
The guiding mechanism 5 of the device for detecting particles involved by the second embodiment is as it is shown on figure 3, have the gas as fluid
The compressor 55 that body is compressed.As the pressure fluid sent from compressor 55 compressed gas through the first filter 51,
Pressure regulator 56, control valve 57 and the second filter 54, be admitted in chamber 2.First filter 51, pressure regulator 56,
Control valve 57 and the second filter 54 are arranged at the adjustment path 4 by the second introducing port 12.
The bypass path 71 part 70 between the pressure regulator 56 and control valve 57 in adjustment path 4 carries out branch, other
Path, road 71 is collaborated in discharge path 6.The particle that first filter 51 and the second filter 54 will comprise in compressed gas
Remove.The pressure of the compressed gas that pressure regulator 56 regulation is fed in chamber 2.Control valve 57 is used being assigned to adjust
The distribution ratio of the compressed gas of path 4 and bypass path 71 is adjusted.
Merging part at bypass path 71 and discharge path 6 is configured with ejector 63.Compressed gas is supplied from bypass path 71
Being given to ejector 63, thus, ejector 63 attracts the fluid in chamber 2.According to the particle involved by the second embodiment
Detection device, due to by compressor 55 to the supply of the compressed gas within chamber 2 with from the row within chamber 2
Gas both sides can be carried out, therefore, it is possible to realize the simplification of device and the reduction etc. of energy expenditure.
(other embodiments)
As it has been described above, the present invention is recorded according to embodiment, but, should not be construed and constitute the one of the disclosure
Description and the accompanying drawing of part limit this invention.According to the disclosure, various replacement embodiments, embodiment and
Application technology should be clearly to those skilled in the art.Such as, the testing machine shown in Fig. 1 and Fig. 3
Structure 23 by measuring the flight time by the particle between two laser beams, can also calculate the air of particle and move
Aerodynamic diameter.So, it should be appreciated that the present invention contains the various embodiments etc. being silent on herein.
Symbol description
1 housing
2 chambers
3 Sample introduction paths
4 adjustment paths
5 guiding mechanisms
6 discharge paths
11 first introducing ports
12 second introducing ports
13 outlets
21 import nozzle
22 nipples
23 testing agencies
51 first filters
52 adjust pump
53 effusion meters
54 second filters
55 compressors
56 pressure regulators
57 control valves
61 exhaust-air filters
62 air draft pumps
63 ejectors
70 parts
71 bypass paths
103 co-routes
104 adjustment paths
105 guiding mechanisms
111 introducing ports
123 testing agencies
151 first filters
152 adjust pump
154 second filters
200 bifurcation points.
Claims (14)
1. a device for detecting particles, it is characterised in that have:
Housing；
It is configured at the chamber of the inside of described housing；
Sample introduction path, described Sample introduction path is for leading the fluid comprising particle from be arranged at described housing first
Entrance imports in described chamber；
It is arranged at the importing nozzle being connected with described Sample introduction path of described chamber；
The nipple being oppositely disposed with described importing nozzle in the cavity；
Discharge path, described discharge path is connected in the outlet of described housing and described nipple, for by described
Fluid in chamber is discharged to the outside of described housing；
Guiding mechanism, the fluid eliminating particle is supplied in described chamber by described guiding mechanism by adjustment path, right
The state of the fluid in described chamber is adjusted, and described adjustment path is from being arranged at importing with described first of described housing
The second different introducing port of mouth is communicated to described chamber；
Bypass path, described bypass path from described adjustment path branches out, and collaborates with described discharge path,
Merging part at described bypass path and described discharge path is configured with ejector,
By supplying pressure fluid from described bypass path to described ejector, the fluid in described chamber is entered by described ejector
Row attracts；And
Testing agency, light is irradiated in the described fluid in described chamber by described testing agency, to the grain comprised in described fluid
Son detects.
2. device for detecting particles as claimed in claim 1, wherein, it is characterised in that
The described grain of the per unit volume of the described testing agency fluid to importing to from described first introducing port in described chamber
The quantity of son detects.
3. the device for detecting particles as described in claim 1 or 2, it is characterised in that described guiding mechanism has:
For the adjustment pump that described fluid is supplied in described chamber；With
For removing the filter of the particle comprised in described fluid.
4. the device for detecting particles as described in claim 1 or 2, it is characterised in that
Pressure in described chamber is adjusted by described guiding mechanism.
5. the device for detecting particles as described in claim 1 or 2, it is characterised in that
Described guiding mechanism is to carrying out rectification in described chamber.
6. the device for detecting particles as described in claim 1 or 2, it is characterised in that
The scattered light produced by described particle is detected by described testing agency.
7. the device for detecting particles as described in claim 1 or 2, it is characterised in that
The fluorescence that described particle is sent by described testing agency detects.
8. a particle detecting method, it is characterised in that including:
By be connected to Sample introduction path import nozzle by the fluid comprising particle from the first introducing port being arranged at housing
Importing to the step being configured in the chamber of the inside of described housing, described importing nozzle is arranged in described chamber；
Fluid in described chamber is discharged to the step of the outside of described housing by discharge path, and described discharge path connects
The nipple being oppositely disposed with described importing nozzle in the cavity and the outlet being arranged at described housing；
By adjustment path, the fluid eliminating particle is supplied to the state in described chamber, to the fluid in described chamber
The step being adjusted, described adjustment path is from second importing different from described first introducing port being arranged at described housing
Mouth is communicated to described chamber；
Pressure fluid is supplied to the step of bypass path, and described bypass path from described adjustment path branches out, passes through
Ejector collaborates with described discharge path；
Described ejector attracts the step of the fluid in described chamber；And
Light is irradiated in the described fluid in described chamber, the step detecting the particle comprised in described fluid.
9. the particle detecting method as described in claim 8, it is characterised in that
In the step that the particle comprised in described fluid detects, import to described chamber to from described first introducing port
The quantity of the described particle of the per unit volume of interior fluid detects.
10. the particle detecting method as described in claim 8 or 9, it is characterised in that
The fluid eliminating particle being supplied in the step in described chamber by described adjustment path, use and adjust
Pump,
Described adjustment path is provided for removing the filter of described particle.
11. particle detecting methods as described in claim 8 or 9, it is characterised in that
In the step that the state of the fluid in described chamber is adjusted, adjust the pressure in described chamber.
12. particle detecting methods as described in claim 8 or 9, it is characterised in that
In the step that the state of the fluid in described chamber is adjusted, to carrying out rectification in described chamber.
13. particle detecting methods as described in claim 8 or 9, it is characterised in that
In the step that described particle is detected, described particle the scattered light produced is detected.
14. particle detecting methods as described in claim 8 or 9, it is characterised in that
In the step detecting described particle, the fluorescence sending described particle detects.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013105318A JP2014228276A (en) | 2013-05-17 | 2013-05-17 | Particle detection device and particle detection method |
| JP2013-105318 | 2013-05-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104165826A CN104165826A (en) | 2014-11-26 |
| CN104165826B true CN104165826B (en) | 2016-11-30 |
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| FR1529083A (en) * | 1966-07-16 | 1968-06-14 | Scholven Chemie Ag | Sample divider device for gas analyzers |
| US3787122A (en) * | 1973-01-05 | 1974-01-22 | Wehr Corp | Light scattering particle analyzer |
| US8284398B2 (en) * | 2010-06-24 | 2012-10-09 | Met One Instruments, Inc. | Nephelometer with concentration-modulated sample flow |
| CN102770745A (en) * | 2010-02-26 | 2012-11-07 | 罗伯特·博世有限公司 | Device for measuring a particle concentration in motor vehicle exhaust gases |
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1529083A (en) * | 1966-07-16 | 1968-06-14 | Scholven Chemie Ag | Sample divider device for gas analyzers |
| US3787122A (en) * | 1973-01-05 | 1974-01-22 | Wehr Corp | Light scattering particle analyzer |
| CN102770745A (en) * | 2010-02-26 | 2012-11-07 | 罗伯特·博世有限公司 | Device for measuring a particle concentration in motor vehicle exhaust gases |
| US8284398B2 (en) * | 2010-06-24 | 2012-10-09 | Met One Instruments, Inc. | Nephelometer with concentration-modulated sample flow |
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