CN104165615B - A kind of detection method of the micro-texture in surface - Google Patents
A kind of detection method of the micro-texture in surface Download PDFInfo
- Publication number
- CN104165615B CN104165615B CN201410413943.7A CN201410413943A CN104165615B CN 104165615 B CN104165615 B CN 104165615B CN 201410413943 A CN201410413943 A CN 201410413943A CN 104165615 B CN104165615 B CN 104165615B
- Authority
- CN
- China
- Prior art keywords
- micro
- texture
- micromorphology
- detection
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention is the detection method of the micro-texture in a kind of surface, for size at the micro-texture features in the surface of micron dimension, obtains its three-dimensional dimension by two-dimensional detection device.Testing result contains the degree of depth of micro-texture features, diameter, cross section profile, volume parameter.Concrete steps include: obtained one section of contour curve of micro-texture surface by two-dimensional detection device；Contour curve data are imported computer, through except making an uproar, split, extract, obtain single pattern three-dimension curved surface after interpolation and process of fitting treatment.The testing result of this method is some micro-texture features concentration, the performance of homogenizing, reflects the crudy that the micro-texturing process in surface is overall.Finally provide the benefit that: reducing the detection equipment requirements of the micro-texture in surface, testing result is the most objective, and detection efficiency is substantially improved, it is adaptable to surface micro-texture detection of plane and internal surface of column.
Description
Technical field
The present invention relates to the detection method of the micro-texture in a kind of surface, it is adaptable to surface micro-texture detection of single shape array, belong to
Field of micro-Na manufacture.
Background technology
Surface micro-texture technology, across multiple subjects, is applied increasingly extensive.It forms size at micron to nanometer amount at material surface
The micromorphology of level, micromorphology mostly is cavity and projection, makes a significant impact the macro property of material.At mechanical engineering field,
Surface micro-texture technology is applied to cylinder sleeve-piston, mould, cutter, roll, cam, sealing ring, bearing etc., makes parts
Surface rubs, wipe the performances such as, mechanics is substantially improved.In materialogy field, surface micro-texture technology answering on solar power silicon plate
With, the S. E. A. of solar panels is greatly improved；For polycrystalline material so that it is internal each crystal grain is orientated close to monocrystalline
Unique microstructure, gives full play to the performance of polycrystalline material.
The three-D space structure of micromorphology determines the external performance of micro-textured surfaces, and the judge of the most micro-texturing process effect is not
Obtain and be not conceived to the accurate measurement to micromorphology three-dimensional dimension.The detection equipment of current micro-textured surfaces, by Cleaning Principle substantially
It is divided into optical detection apparatus and contact pin type detection equipment.Optical detection apparatus utilizes the principle such as diffraction of light, reflection, in conjunction with calculating
Machine pattern analysis obtains the three-dimensional appearance of micro-texture, and result is accurate, and precision is up to nanometer.Contact pin type detection equipment utilization probe or
Contact contacts with measured surface, obtains the pattern of measured surface via mechanics, displacement transducer.Because probe or contact are once being surveyed
Sweeping along a straight line during amount, so surface inspection apparatus based on this principle can only obtain the two-dimensional silhouette on sweeping straight line
Information.The difference (three peacekeeping two dimensions) of dimension is there is owing to optical detection apparatus and contact pin type detect device measuring result, and
Three-dimensional testing result comprised more crosses quantity of information and the most directly perceived, the therefore detection oriented three dimensional stress Developing Tendency to micro-textured surfaces
Gesture.More and more optical detection apparatus is used rather than contact pin type detection equipment in theoretical research.
Optical detection apparatus has testing result accurately and intuitively advantage, but there is also deficiency.First it is expensive, is same
5～10 times of the contact pin type detection equipment of sample accuracy of detection；Secondly, most optical detection apparatus to the fineness of measured surface,
Flatness requirement is high, it is difficult to detection curved surface；When micro-textured surfaces of cylinder holes inwall is measured, cylinder holes need to be cut, prepare
Plane sample, cumbersome, do not catch up with the detection beat of large-scale production.Compared with optical detection apparatus, contact pin type detection sets
Standby measure quickly, precision still can, but the metering system of its two dimension easily causes the loss of surface information, more cannot accurately detect micro-
The three-dimensional dimension of pattern；Meanwhile, testing result is the two-dimensional curve of surface profile, the most intuitively.Therefore contact pin type detection equipment is same
Sample can not meet the detection operation of micro-textured surfaces.
Prior art, when micro-textured surfaces carries out detecting operation, have ignored the array shape of the micromorphology forming micro-textured surfaces
Formula is the most controlled.As Chinese patent 200810155787.3 discloses a kind of laser surface micro forming device and method,
By controlling transmitting and the active position of laser pulse, it is achieved the processing of micro-textured surfaces.
Summary of the invention
Present invention aim to address the test problems of micro-textured surfaces, particularly curved surface.This method is to micro-textured surfaces
Detect and completed, when detecting the curved surfaces such as cylinder holes by contact pin type detection equipment, it is not necessary to preparation plane sample, testing result includes
Whole three-dimensional dimension information of micromorphology.
A kind of surface micro-texture detection method of the inventive method is adopted the technical scheme that: obtained by two-dimensional surface detection device
Taking the contour curve of one section of micro-textured surfaces, by the anti-calculate to contour curve, Mathematical Fitting goes out the three-dimensional shaped of micromorphology
Looks.
The concrete technical scheme of a kind of surface micro-texture detection method of the inventive method is: for launching with column direction in the row direction
Micro-textured surfaces of array of micromorphology, the column pitch phase on the micromorphology of its array line space in the row direction and column direction
With, the angle of line direction and column direction 30 °～90 °.By two-dimensional surface detection device in micro-textured surfaces, along specific
Detection direction, it is thus achieved that the sampling contour curve on one section of this surface, sampling contour curve comprises more than or equal to three in the row direction or
The cross section profile of column direction continuous arrangement micromorphology, above-mentioned cross section profile comprises the profile information of each micromorphology particular cross section position.
The sectional profile curve lin of every micromorphology in sampling contour curve is extracted, above-mentioned sectional profile curve lin is all considered as reverse shape
Looks contour curve under different cross section.According to column pitch and angle, determine the spacing of each sectional profile curve lin place plane.Logical
The method crossing Mathematical Fitting, is obtained the three-dimensional space of reverse pattern by sectional profile curve lin, by three-dimensional space reverse shape
The volume of looks.
The inventive method provides the benefit that:
1, acquisition that can be cheap accurately, the testing result of the micro-textured surfaces of three dimensional stress intuitively, significantly reduce three-dimensional values
Cost.
2, being applicable to the detection of micro-textured surfaces of plane and curved surface, detection is quick, success rate 100%, is suitable for extensive raw
Detection beat needed for product.
3, the testing result of reverse pattern derives from multiple micromorphology, be concentrated expression and the homogenizing of multiple micromorphology, it is to avoid people
For choosing the possibility of detection micromorphology, therefore this method is the most accurate and objective to the detection of micro-textured surfaces.
Accompanying drawing explanation
Fig. 1 is line direction and column direction out of plumb array schematic diagram.
Fig. 2 is line direction and column direction out of plumb array measurement track schematic diagram.
Fig. 3 is sampling profile tracing analysis schematic diagram.
Fig. 4 is extracted feature interpolation and matching schematic diagram.
Fig. 5 is line direction and column direction orthogonal array schematic diagram.
Fig. 6 is line direction and column direction orthogonal array measurement track schematic diagram.
In figure, 1, micro-textured surfaces；2, micromorphology；3, pattern border；4, diameter；5, column pitch；6, line space；
10, preferably measuring route；11, actual measurement first path；12, error angle；13, secondary series direction；14 actual measurements
Second path；15, angle.
Detailed description of the invention
Below in conjunction with the accompanying drawings the detailed description of the invention of the present invention is described in further detail.
Fig. 1, Fig. 2, Fig. 5 and Fig. 6 are the schematic diagram having intercepted the micro-texture of part surface.Surface outline curves in Fig. 3 is
The T1000 contact pin type detection equipment of the Mearl Corporation suddenly of Germany obtains, and other detection equipment with identical function all can acquisition figure
Surface outline curves shown in 3.Fig. 4 is Matlab running software sectional drawing.
The upper figure of Fig. 3 is original pattern, and it contains some scales and label information；Pattern after figure is preliminary treatment in Fig. 3,
Scale information and labelling are removed；Fig. 3 figure below is the cross section profile pattern extracted, and comprises only the cross section of micromorphology 2 in this pattern
Profile information, and plane information is removed.
It is significant to note that, all carry out with circular nick chamber for object for ease of narration embodiment one and embodiment two,
The inventive method is suitable for the inspection of micro-textured surfaces 1 of the array micromorphology 2 including having any cavity or projection with protection domain
Survey.
Embodiment one.
The inventive method detailed description of the invention in embodiment one comprises the steps:
Micro-textured surfaces 1 of the array of a micromorphology 2 that () processing launches with column direction in the row direction, its array pattern is by row
Spacing 6, column pitch 5 and line direction determine jointly with the angle of column direction.
B one section of sampling profile that () is obtained in above-mentioned micro-textured surfaces 1 vertical direction in the row direction by two-dimensional detection device is bent
Line, is the direction vertical with line direction for the array pattern of embodiment one, the preferably direction of measuring route 10, as
Fig. 2；There is error angle 12 with preferred measuring route 10 in actual first path 11 of measuring, error angle 12 is less than 10
Degree；The original pattern of sampling contour curve is shown in the upper figure of Fig. 3.
C the original pattern of sampling contour curve is imported computer by (), through except making an uproar, split, extract, acquisition list after interpolation and matching
The three-dimensional space curved surface of individual pattern.The above-mentioned process except feature of making an uproar, split, extract is as it is shown on figure 3, the upper figure of Fig. 3 is
Original pattern, comprises 3 cross section profiles at the micromorphology 2 of column direction contact arrangement, the cross section profile degree of depth in pattern
Change in gradient.Have been able to read roughly the degree of depth of single pattern by original pattern, its degree of depth is more than or equal to former
The maximum cavity degree of depth in beginning pattern.The above-mentioned degree of depth is the maximum of the miniature looks degree of depth.The original pattern of sampling contour curve
Through except making an uproar and obtaining in Fig. 3 the pattern after the preliminary treatment of figure after dividing processing, the more extracted Fig. 3 of obtaining figure below only contains
There is the pattern of micromorphology 2 cross section profile.The above-mentioned method made an uproar and split of removing is artificially to determine that the coordinate of original pattern is former
Point, on it, each pixel changes into a two-dimensional coordinate, then view picture pattern forms a coordinate set, by non-micro-shape
The coordinate of looks 2 cross section profile is removed from coordinate set, i.e. these pixels are removed.The method of said extracted feature
For, each cross section profile in the cross section profile pattern that will extract is all as single micromorphology 2 that is some sections of reverse pattern
Facial contour.By array micromorphology 2 in the row direction with the spacing on column direction, determine each sectional profile curve lin place plane
Between spacing.In the present embodiment, the spacing of each sectional profile curve lin place plane is column pitch 5 and line direction and row
The product of angular separation cosine value.Above-mentioned some cross section profiles are repainted in three-dimensional system of coordinate, as left in Fig. 4
Figure.Interpolation and fit procedure are the 3 d space coordinate points supplemented by mathematical interpolation, form the three-dimensional of micromorphology 2
Testing result.First extract the point coordinates being positioned at material surface, above-mentioned point coordinates is carried out two dimension matching, acquired results
For actual measurement pattern border 3.Using pattern border 3 as boundary condition, collective fit to into reverse shape with some cross section profiles
The space curved surface of looks, shown in figure as right in Fig. 4.
D (), by above-mentioned space curved surface, obtains and finally detects parameter.Such as the volume by the integration of curved surface being tried to achieve reverse pattern, or
The degree of depth of miniature looks, diameter 4 and bottom irregularity degree.
Embodiment two.
Embodiment two is with the difference of embodiment one, and the line direction in embodiment two and secondary series direction 13 angle are 90 °.
Ensureing to comprise more than or equal to three in the row direction on sampling contour curve or the cross section profile of column direction continuous arrangement micromorphology 2
Under premise, there is angle 15 with secondary series direction 13 in actual measurement second path 14 of two-dimensional surface detection device, then each
The spacing of sectional profile curve lin place plane is the product of column pitch 5 and angle 15 sine value.Other step of embodiment two with
Embodiment one is identical.
Claims (5)
1. the detection method of the micro-texture in surface, it is characterised in that comprise the steps:
A) for micro-textured surfaces (1) of array of the micromorphology (2) launched with column direction in the row direction, micro-shape of described array
Looks (2) line space (6) in the row direction is identical with the column pitch (5) on column direction, line direction and the angle of column direction
45 °～90 °；Straight line direction in textured surfaces, obtains one section along described straight line side by two-dimensional surface detection device
To the sampling contour curve of corresponding micromorphology (2), described rectilinear direction includes more than or equal to three in the row direction or row side
To the cross section profile of continuous arrangement micromorphology (2), described cross section profile comprises each micromorphology (2) in described rectilinear direction not
Profile information with sectional position；
B) by step A) sectional profile curve lin of micromorphology (2) in the sampling contour curve that obtains extracts, by above-mentioned cross section
Contour curve is all considered as the micromorphology (2) contour curve under different cross section；
C) according to column pitch (5) and angle, determine step B) in the spacing of each sectional profile curve lin place plane；
D) by the method for Mathematical Fitting, by the three-dimensional space of sectional profile curve lin reverse one micromorphology (2) of acquisition, and with
The form of three-dimension curved surface shows, by the volume of three-dimensional space reverse pattern.
The detection method of the micro-texture in a kind of surface the most according to claim 1, it is characterised in that described step A) in two
Dimension surface detection apparatus is contact pin type surface profiler, and resolution is 0.01～0.001 μm.
The detection method of the micro-texture in a kind of surface the most according to claim 1, it is characterised in that described step A) in micro-shape
Looks (2) are that open top is circular cavity or bottom is circular projection, and the diameter (4) of described circular-shaped, concave cavity or projection is big
In 0.1 μm, the cavity degree of depth or height of projection more than 0.1 μm.
The detection method of the micro-texture in a kind of surface the most according to claim 1 and 2, it is characterised in that when line direction and row side
To angle be 90 ° time, there is angle (15) in detection direction and the column direction (13) of two-dimensional surface detection device, each cross section is taken turns
The product that spacing is column pitch (5) and angle (15) sine value of wide curve place plane.
5. according to claim 1 or the detection method of the described micro-texture in a kind of surface, it is characterised in that when line direction and column direction
In the case of angle is not 90 °, the detection direction of two-dimensional surface detection device is 90 ° with line direction, each sectional profile curve lin
The spacing of place plane is that column pitch (5) is multiplied by line direction and the cosine value of Lie Fang angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410413943.7A CN104165615B (en) | 2014-08-21 | 2014-08-21 | A kind of detection method of the micro-texture in surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410413943.7A CN104165615B (en) | 2014-08-21 | 2014-08-21 | A kind of detection method of the micro-texture in surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104165615A CN104165615A (en) | 2014-11-26 |
| CN104165615B true CN104165615B (en) | 2016-12-07 |
Family
ID=51909541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410413943.7A Expired - Fee Related CN104165615B (en) | 2014-08-21 | 2014-08-21 | A kind of detection method of the micro-texture in surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104165615B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783842B (en) * | 2016-03-25 | 2018-01-09 | 哈尔滨理工大学 | A kind of detection method of big pitch external screw thread milled surface topography distribution character |
| CN108253894B (en) * | 2018-02-06 | 2020-08-18 | 中原内配集团股份有限公司 | Detection method for surface convex structure of cylinder sleeve |
| CN109059838B (en) * | 2018-08-28 | 2020-08-11 | 沈阳建筑大学 | Method for characterizing rough surface parameters with surface microtexture |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101380692A (en) * | 2008-10-15 | 2009-03-11 | 江苏大学 | Laser surface micro forming device and method |
| CN101750044A (en) * | 2008-11-28 | 2010-06-23 | 红塔烟草(集团)有限责任公司 | Method for precisely measuring 3D profile by using measuring needle central coordinate and vector compensation technology |
| CN102507985A (en) * | 2011-11-01 | 2012-06-20 | 浙江大学 | Incline measuring method for STM (Scanning Tunneling Microscope) with vertical side wall micro structure |
| CN202994120U (en) * | 2012-12-04 | 2013-06-12 | 长春理工大学 | High-precision one-dimensional morphology detector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4794160B2 (en) * | 2004-03-31 | 2011-10-19 | 日東電工株式会社 | Surface shape measuring apparatus and surface shape measuring method |
-
2014
- 2014-08-21 CN CN201410413943.7A patent/CN104165615B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101380692A (en) * | 2008-10-15 | 2009-03-11 | 江苏大学 | Laser surface micro forming device and method |
| CN101750044A (en) * | 2008-11-28 | 2010-06-23 | 红塔烟草(集团)有限责任公司 | Method for precisely measuring 3D profile by using measuring needle central coordinate and vector compensation technology |
| CN102507985A (en) * | 2011-11-01 | 2012-06-20 | 浙江大学 | Incline measuring method for STM (Scanning Tunneling Microscope) with vertical side wall micro structure |
| CN202994120U (en) * | 2012-12-04 | 2013-06-12 | 长春理工大学 | High-precision one-dimensional morphology detector |
Non-Patent Citations (1)
| Title |
|---|
| 《激光表面微织构工艺试验及应用研究》;张培耘 等;《表面技术》;20131031;第42卷(第5期);第55-58页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104165615A (en) | 2014-11-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102032875B (en) | Image-processing-based cable sheath thickness measuring method | |
| CN103438824B (en) | A kind of large-scale wallboard class Components Digital quality determining method | |
| CN103644860A (en) | Large-scale spatial free curved surface measurement method | |
| CN104392476A (en) | Method of extracting three-dimensional axis of tunnel based on minimum bounding box algorithm | |
| CN103955939A (en) | Boundary feature point registering method for point cloud splicing in three-dimensional scanning system | |
| CN103292695A (en) | Monocular stereoscopic vision measuring method | |
| CN104897142A (en) | Three-dimensional target for binocular or multi-view vision dimension measuring | |
| CN102818523B (en) | Vision measurement method and measurement system of small workpiece | |
| CN104165615B (en) | A kind of detection method of the micro-texture in surface | |
| CN105823399B (en) | A kind of inner rings angle measurement device of bearing and measurement method | |
| CN106017319A (en) | Coordinate transformation tool and method of 3D laser scanning data based on high-precision point measurement | |
| CN104197837A (en) | Non-contact type optical measuring method and device for measuring volume of objects with complicated surfaces | |
| CN103486984A (en) | Detection method for coaxiality of inner molded surface of wind tunnel | |
| CN105043301A (en) | Grating strip phase solving method used for three-dimensional measurement | |
| CN103575190B (en) | A kind of measurement impeller blade profile gauge and measuring method thereof | |
| CN104050372A (en) | Method for automatically evaluating errors of three-dimensional geometrical shapes | |
| CN106568379A (en) | Plane part docking surface profile measurement method based on spatial positioning | |
| CN105519264B (en) | The method of contactless composite measurement large flat leaky antenna three-dimensional surface shape and gap size and system thereof | |
| CN106767481B (en) | A kind of half sub-district related optical measurement method of strain localization band internal strain field | |
| CN204301670U (en) | Adjustable air throttle board plane degree measuring instrument | |
| CN203704883U (en) | Three-dimensional measurement system | |
| CN112017181A (en) | Cylinder product surface detection method and related equipment thereof | |
| CN104279956B (en) | Determination method for rock structural surface reference plane | |
| CN104121864B (en) | A kind of gap evaluation methodology of rock changing of the relative positions fracture surface | |
| CN103769975B (en) | A kind of marker method for optical polishing process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161207 Termination date: 20200821 |