CN104157539A - Intelligent electronic scanning mirror - Google Patents
Intelligent electronic scanning mirror Download PDFInfo
- Publication number
- CN104157539A CN104157539A CN201410353413.8A CN201410353413A CN104157539A CN 104157539 A CN104157539 A CN 104157539A CN 201410353413 A CN201410353413 A CN 201410353413A CN 104157539 A CN104157539 A CN 104157539A
- Authority
- CN
- China
- Prior art keywords
- scanner
- scanning mirror
- sampler
- lens
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention provides an intelligent electronic scanning mirror. The intelligent electronic scanning mirror is mainly composed of an electron emission gun (1), a condensing lens (2), a lens (3), a scanner (4), a sampler (5), a scintillator (6), a multiplier tube (7) and an imaging instrument (8), wherein the condensing lens (2), the lens (3) and the scanner (4) are sequentially arranged in the emission direction of the electron emission gun (1); the scanner (4) is connected with a generator (9); the sampler (5) is connected with an amplifier (10); the scintillator (6) and the multiplier tube (7) are respectively arranged between the sampler (5) and the imaging instrument (8). The intelligent electronic scanning mirror adopts the intelligent control to control the scanning frequency and intensity of an electron probe through feedback, and realize high-precision development of a material, so as to conduct surface observation and analysis on various types of materials.
Description
Technical field
The present invention relates to micro-field, relate in particular to a kind of smart electronics scanning mirror.
Background technology
In material science, along with the development of the high-tech such as semiconductor device and new material, often require the fine structure of effects on surface can observe the size of molecule or atom magnitude.Particularly nano material, because its size is limited in below 100nm, therefore needs the equipment that can carry out high accuracy video picture to this undersized material further to support the development of nano material.The present invention proposes a kind of smart electronics scanning mirror, controls scanning frequency and the intensity of electron microprobe by the feedback of amplifier is set, and realizes the high accuracy video picture to material, thereby can carry out to various materials surperficial observation and the analysis of various ways.
Summary of the invention
In view of this, the invention provides a kind of smart electronics scanning mirror, mainly formed by electron emission rifle, condenser, lens, scanner, sampler, scintillator, multiplier tube and imager, described condenser, lens and scanner are successively set on the transmit direction of electron emission rifle, described scanner is connected with generator, described sampler is connected with amplifier, is respectively arranged with scintillator and multiplier tube between described sampler and imager.
Preferably, above-mentioned scanner comprises scanning coil and electron microprobe.
Preferably, in above-mentioned intelligence sampler, be provided with sampling bench, place sample on sampling bench, described sample surfaces is coated with heavy metal particle layer.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or scheme of the prior art, to the accompanying drawing of required use in embodiment be briefly described below, apparently, accompanying drawing in the following describes is some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The structural representation of the smart electronics scanning mirror that Fig. 1 provides for one embodiment of the invention.
Reference numeral: 1-electron emission rifle; 2-condenser; 3-lens; 4-scanner; 5-sampler; 6-scintillator; 7-multiplier tube; 8-imager; 9-generator; 10-amplifier; 11-sample; 12-sampling bench.
Embodiment
For making object, technical scheme and the advantage of the embodiment of the present invention clearer, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is carried out to clear, complete description, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite of not making creative work, belongs to the scope of protection of the invention.
The structural representation of the smart electronics scanning mirror that Fig. 1 provides for one embodiment of the invention, as shown in Figure 1, the smart electronics scanning mirror of the present embodiment is mainly by electron emission rifle 1, condenser 2, lens 3, scanner 4, sampler 5, scintillator 6, multiplier tube 7 and imager 8 form, condenser 2, lens 3 and scanner 4 are successively set on the transmit direction of electron emission rifle 1, described scanner 4 is connected with generator 9, described sampler 5 is connected with amplifier 10, between described sampler 5 and imager 8, be respectively arranged with scintillator 6 and multiplier tube 7, scanner 4 comprises scanning coil and electron microprobe.In intelligence sampler 5, be provided with sampling bench 12, place sample 11 on sampling bench 12, described sample 11 surface sprayings have heavy metal particle layer.
By the interaction of electronics and sample, various images that can show sample.The electron gun divergent bundle of the smart electronics scanning mirror 1 of the present embodiment, is focused on by condenser 2 and lens 3, forms beam spot, is then irradiated to sample 11 surfaces.Electron microprobe does raster-like scanning on sample 11 surfaces, in the time that incident electron is got to sample 11 surface, to there is more than 99% incident electron energy to be transformed into sample heat energy, approximately 1% incident electron energy, excited sample is produced to various Useful Informations, comprise secondary electron, backscattered electron and X ray etc., different information, from sample 11, the factor such as some physical propertys (as electrical property, magnetic property etc.) of the intensity of the various information that obtain and distribute same sample surface morphology, composition, crystal orientation and surface state is relevant.The secondary electron inspiring number relevant with the fluctuating on electron beam incident angle degree and sample 11 surfaces, the place that secondary electron is more, on image, corresponding point is just brighter, otherwise dark.Secondary electron is collected by gatherer, then changes light signal into by scintillator 6, then changes the signal of telecommunication into and control the intensity of electron beam on picture tube through photomultiplier 7, demonstrates the scan image of synchronizeing with electron beam.
In order to make sample 11 surface emitting go out secondary electron, sample 11, after fixing, dewatering, spray last layer heavy metal particle, and heavy metal sends secondary electron signal under the bombardment of electron beam.
Finally it should be noted that: above embodiment only, in order to technical scheme of the present invention to be described, is not intended to limit; Although the present invention is had been described in detail with reference to previous embodiment, those of ordinary skill in the art is to be understood that: its technical scheme that still can record aforementioned each embodiment is modified, or part technical characterictic is wherein equal to replacement, and these amendments or replacement do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (3)
1. a smart electronics scanning mirror, mainly by electron emission rifle (1), condenser (2), lens (3), scanner (4), sampler (5), scintillator (6), multiplier tube (7) and imager (8) form, it is characterized in that: described condenser (2), lens (3) and scanner (4) are successively set on the transmit direction of electron emission rifle (1), described scanner (4) is connected with generator (9), described sampler (5) is connected with amplifier (10), between described sampler (5) and imager (8), be respectively arranged with scintillator (6) and multiplier tube (7).
2. a kind of smart electronics scanning mirror according to claim 1, is characterized in that, described scanner (4) comprises scanning coil and electron microprobe.
3. a kind of smart electronics scanning mirror according to claim 2, it is characterized in that, in described intelligence sampler (5), be provided with sampling bench (12), the upper sample (11) of placing of sampling bench (12), described sample (11) surface spraying has heavy metal particle layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410353413.8A CN104157539A (en) | 2014-07-18 | 2014-07-18 | Intelligent electronic scanning mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410353413.8A CN104157539A (en) | 2014-07-18 | 2014-07-18 | Intelligent electronic scanning mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
CN104157539A true CN104157539A (en) | 2014-11-19 |
Family
ID=51883014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410353413.8A Pending CN104157539A (en) | 2014-07-18 | 2014-07-18 | Intelligent electronic scanning mirror |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104157539A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101383261A (en) * | 2007-09-04 | 2009-03-11 | 采钰科技股份有限公司 | Scanning electron microscope |
CN103718268A (en) * | 2011-08-03 | 2014-04-09 | 株式会社日立高新技术 | Charged particle beam apparatus |
CN203967027U (en) * | 2014-07-18 | 2014-11-26 | 奉化市宇创产品设计有限公司 | Smart electronics scanning mirror |
-
2014
- 2014-07-18 CN CN201410353413.8A patent/CN104157539A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101383261A (en) * | 2007-09-04 | 2009-03-11 | 采钰科技股份有限公司 | Scanning electron microscope |
CN103718268A (en) * | 2011-08-03 | 2014-04-09 | 株式会社日立高新技术 | Charged particle beam apparatus |
CN203967027U (en) * | 2014-07-18 | 2014-11-26 | 奉化市宇创产品设计有限公司 | Smart electronics scanning mirror |
Non-Patent Citations (2)
Title |
---|
何大澄等: "扫描电镜及其在生物学研究中的应用", 《生物学通报》 * |
刘耀忠等: "扫描电子显微镜及其在汽车材料研究中的应用", 《测试设备及应用》 * |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7119010B2 (en) | Method for imaging a substrate surface using a multi-beam imaging system and system for imaging a substrate surface using multiple electron beamlets | |
KR102454320B1 (en) | Apparatus and method for inspecting a sample using a plurality of charged particle beams | |
JP5449679B2 (en) | Electron beam observation apparatus and sample observation method | |
Brouard et al. | The application of the fast, multi-hit, pixel imaging mass spectrometry sensor to spatial imaging mass spectrometry | |
JP2685501B2 (en) | Direct imaging monochromatic photoelectron microscope | |
CN109411320B (en) | Diffraction pattern detection in transmission charged particle microscopy | |
CN104956461A (en) | Composite charged particle beam detector, charged particle beam device, and charged particle beam detector | |
CN108604522A (en) | The method of adjustment of charged particle beam apparatus and charged particle beam apparatus | |
EP2343726B1 (en) | Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method | |
CN104520963A (en) | Composite charged particle beam device | |
JP2006260957A (en) | Electron beam device | |
CN203967027U (en) | Smart electronics scanning mirror | |
CN108013891A (en) | A kind of radiographic apparatus | |
Hilsabeck et al. | Picosecond imaging of inertial confinement fusion plasmas using electron pulse-dilation | |
US9029768B2 (en) | Detector and charged particle beam instrument | |
JPS5918553A (en) | Method and device for correcting aberration of electron beam device | |
CN104157539A (en) | Intelligent electronic scanning mirror | |
CN101308103B (en) | Microbeam micro- zone X ray detecting probe analyzer | |
Kannan | Transmission electron microscope—Principle, components and applications | |
CN204809184U (en) | Scanning electron microscope | |
JP2016170015A (en) | Electron spectrometer and measurement method | |
JP2013065484A (en) | Charged particle device and electron microscope comprising magnetic lens and magnetic lens control means | |
JP4217565B2 (en) | Imaging device for electron microscope | |
Browning | Vector potential photoelectron microscopy | |
CN204905206U (en) | Scanning electron microscope is used in teaching |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141119 |
|
WD01 | Invention patent application deemed withdrawn after publication |