CN104155492A - Probe card device - Google Patents
Probe card device Download PDFInfo
- Publication number
- CN104155492A CN104155492A CN201410412328.4A CN201410412328A CN104155492A CN 104155492 A CN104155492 A CN 104155492A CN 201410412328 A CN201410412328 A CN 201410412328A CN 104155492 A CN104155492 A CN 104155492A
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- China
- Prior art keywords
- probe
- packaging structure
- radio
- frequency identification
- identification card
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- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention provides a probe card device. A probe card is provided with a positioning hole with an internal thread, and a radio frequency identification card is arranged in a packaging structure made of non-conductive material. The packaging structure is provided with an external thread which is matched with the internal thread on the probe card, and one end of the packaging structure is provided with a bolt head structure suitable for a wrench operation so as to facilitate the fixation, adjustment and replacement of the packaging structure. The packaging structure with the radio frequency identification card is fixed on the probe card by the threads, the interference of equipment above the radio frequency identification card and the probe card in wafer electrical test is avoided, the installation, adjustment and replacement of the radio frequency identification card are facilitated, at the same time the problems of falling caused by external force are reduced, so according to the device, the error rate of the radio frequency identification card fixed on the probe card, the application range of RFID is increased, and a guarantee is provided for the reading and writing of the basic information of the probe card.
Description
Technical field
The present invention relates to the microelectronics electric performance test field of ic manufacturing technology, more particularly, relate to the probe card device of one used radio-frequency identification card that is fixed with RFID (radio frequency identification system) in WAT (wafer testing electrical property).
Background technology
In current WAT (wafer testing electrical property), can use probe, probe is a kind of test interface, by connecting test machine and chip, naked core parameter is tested; When concrete test, be that the probe in probe is directly directly contacted with weld pad or projection on chip, draw chip signal; Before probe is applied in chip and not yet encapsulates, do functional test for naked crystallographic system with probe, filter out defective products, and then encapsulation engineering after carrying out; Therefore, probe is one of important device reducing chip manufacturing cost; And carry out before wafer testing electrical property at every turn, the electrical surveying instrument of wafer can first be confirmed the essential information such as size and numbering of probe, these essential informations are all stored in the radio-frequency identification card of an external RFID, this radio-frequency identification card is fixed in probe, and RFID card reader can be carried out read-write operation to the radio-frequency identification card of RFID by wireless signal.
In the prior art, fixing to radio-frequency identification card in probe, the advanced method of industry is at present: radio-frequency identification card sticks in probe surface by seccotine or double sticky tape; Refer to Fig. 1, Fig. 1 is the structural representation that radio-frequency identification card is installed in former technology in probe, and in Fig. 1, radio-frequency identification card 2 use seccotines or double sticky tape stick in the surface of probe 1.
But, it will be apparent to those skilled in the art that current this radio-frequency (RF) identification is stuck in the fixing means in probe, exists following shortcoming: radio-frequency (RF) identification is stuck in each fixed position in probe by manual control, if there is position deviation, can have influence on the normal read-write of radio-frequency identification card; When radio-frequency identification card is arranged on probe surface, raise up, occupy the space of probe surface, reduce the general expenditure of probe board, the position of some radio-frequency identification card can with the device location interference of probe board, even cause probe board cannot use RFID, so that reduced applying of RFID; And RFID sticks in probe surface by seccotine or double sticky tape, if while having the situation such as external force touching or probe maintenance baking, can cause the glue actual effect of fixed RF identification card, cause the loosening problem that even comes off of radio-frequency identification card; And if radio-frequency identification card breaks down, this fixed form of pasting makes troubles also can to the operation of changing radio-frequency identification card.
Therefore, those skilled in the art is devoted to develop the probe card device of the reliable fixed RF identification card of a kind of energy, to reduce the failure rate that is fixed on the radio-frequency identification card in probe, improve the range of application of RFID, for the read-write of probe essential information provides safeguard.
Summary of the invention
Because the above-mentioned defect of prior art, object of the present invention is developed the probe card device of the reliable fixed RF identification card of a kind of energy, thinks that the read-write of the essential information of probe provides safeguard.
For achieving the above object, the invention provides a kind of probe card device, first be in probe, to have a female pilot hole of tool, then be that radio-frequency identification card is built in the packaging structure of a non-conductive material, this packaging structure has the external thread matching with the internal thread in probe, and have outer-hexagonal bolt head structure or the interior hexagonal countersunk bolts header structure of the power tools such as applicable spanner in one end of this packaging structure, with facilitate be built-in with radio-frequency identification card packaging structure fixing, adjust and change; In this probe, be fixedly built-in with the packaging structure of radio-frequency identification card with screw thread, the interference of radio-frequency identification card and probe top device while having avoided wafer testing electrical property, installation, adjustment and the replacing of radio-frequency identification card are facilitated, also reduced the problem that causes it to come off because of external force simultaneously, so this device has reduced the failure rate that is fixed on the radio-frequency identification card in probe, improve the range of application of RFID, for the read-write of probe essential information provides guarantee.Technical scheme of the present invention is as follows:
A kind of probe card device, the radio-frequency identification card of radio frequency identification system is housed, further also have, the radio-frequency identification card installed position of described probe is provided with a pilot hole, described pilot hole inwall has internal thread, described radio-frequency identification card is built in the packaging structure of a non-conductive material, described packaging structure has external thread, described packaging structure matches with the described internal thread in described probe by described external thread, so that described radio-frequency identification card is fixed in described probe.
The object of design is herein, and the packaging structure of non-conductive material is to keep the wireless signal input and the stability of exporting of radio-frequency identification card; Described packaging structure matches to be fixed in described probe with the described internal thread in described probe by the described external thread of described packaging structure, the interference of radio-frequency identification card and probe top device while having avoided wafer testing electrical property, has also reduced the problem that causes it to come off because of external force simultaneously; One end of described packaging structure can have outer-hexagonal bolt head structure or interior hexagonal countersunk bolts header structure, to facilitate installation, adjustment and the replacing of radio-frequency identification card.
Preferably, described non-conductive material refers to plastic material or wooden material.
Preferably, the described externally threaded length of described packaging structure is not more than the length of the described pilot hole in described probe.
Preferably, the axis of the described pilot hole in described probe is perpendicular to the surface of described probe.
Preferably, at least 1/3 length of the described pilot hole of described probe, having internal thread, is unthreaded hole structure in all the other length.
Preferably, described packaging structure is full-closed structure, and described radio-frequency (RF) identification is arranged in the hollow inside of described packaging structure.
Preferably, the screw that described packaging structure is hollow or screw-rod structure, described radio-frequency (RF) identification is arranged in the hollow bulb of described screw or screw-rod structure.
Preferably, to be stuck in the described hollow bulb of described packaging structure and between described packaging structure be wringing fit relation to described radio-frequency (RF) identification.
Preferably, also comprise plug, described plug has external thread, and one end of described packaging structure has the loading port structure of described radio-frequency identification card, and described loading port structure has the internal thread matching with the described external thread of described plug.
The object of design is herein, and the described externally threaded length of described packaging structure is not more than the length of the described pilot hole in described probe, outstanding to avoid described packaging structure to have in described probe; The axis of the described pilot hole in described probe is perpendicular to the surface of described probe, to avoid probe that the installation of described packaging structure affected described probe welding space or the link position in described probe; In at least 1/3 length of the described pilot hole of described probe, there is internal thread, it in all the other length, is unthreaded hole structure, because only have the through-hole structure of part screw thread, the length of fit of the described internal thread in described external thread and the described probe of the described packaging structure of energy minimizing, facilitate installation, adjustment and the replacing of radio-frequency identification card, and reduced described external thread and described internal thread coordinate the power of overstocking on the impact in described packaging structure and described probe; Also include externally threaded plug, match with described packaging structure loading port structure, to facilitate packing into and changing of described radio-frequency identification card.
Can find out from technique scheme, a kind of probe card device of the present invention, first be in probe, to have a female pilot hole of tool, then be that radio-frequency identification card is built in the packaging structure of a non-conductive material, this packaging structure has the external thread matching with the internal thread in probe, and have outer-hexagonal bolt head structure or the interior hexagonal countersunk bolts header structure of the power tools such as applicable spanner in one end of this packaging structure, with facilitate be built-in with radio-frequency identification card packaging structure fixing, adjust and change; In this probe, be fixedly built-in with the packaging structure of radio-frequency identification card with screw thread, the interference of radio-frequency identification card and probe top device while having avoided wafer testing electrical property, installation, adjustment and the replacing of radio-frequency identification card are facilitated, also reduced the problem that causes it to come off because of external force simultaneously, so this device has reduced the failure rate that is fixed on the radio-frequency identification card in probe, improve the range of application of RFID, for the read-write of probe essential information provides guarantee.
Below with reference to accompanying drawing, the technique effect of design of the present invention, idiographic flow and generation is described further, to understand fully object of the present invention, feature and effect.
Brief description of the drawings
Fig. 1 is the structural representation that radio-frequency identification card is installed in former technology in probe;
Fig. 2 is provided with radio-frequency (RF) identification card packaging structures schematic diagram in probe in the present invention;
Fig. 3 is the enlarged drawing that the A-A sectional view of radio-frequency (RF) identification card packaging structures schematic diagram is installed in the present invention shown in Fig. 2 in probe;
Fig. 4 is for the enlarged drawing of schematic diagram of radio-frequency (RF) identification card packaging structures is installed in the probe in the present invention;
Fig. 5 is the enlarged drawing of the packaging structure schematic diagram that is built-in with radio-frequency identification card in the present invention;
Fig. 6 is the enlarged drawing of the hollow bulb schematic diagram of the packaging structure in the present invention;
Fig. 7 is the enlarged drawing of the end cap schematic diagram in the present invention.
In figure, 1 is probe, and 2 is radio-frequency identification card, and 3 is packaging structure, and 4 is pilot hole, and 5 is plug.
Embodiment
Below in conjunction with accompanying drawing 2～5, the specific embodiment of the present invention is described in further detail.
Embodiment:
Refer to Fig. 2 and Fig. 3, Fig. 2 is provided with radio-frequency (RF) identification card packaging structures schematic diagram in probe in the present invention, and Fig. 3 is the enlarged drawing that the A-A sectional view of radio-frequency (RF) identification card packaging structures schematic diagram is installed in the present invention shown in Fig. 2 in probe, Fig. 2 and Fig. 3 have illustrated that a kind of probe 1 with screw thread fixed RF identification card 2 installs, comprise probe 1 and radio-frequency identification card 2, further also have, radio-frequency identification card 2 installed positions of described probe 1 are provided with a pilot hole 4, described pilot hole 4 inwalls have internal thread, described radio-frequency identification card 2 is built in the packaging structure 3 of a plastic material, described packaging structure 3 has external thread, described packaging structure 3 matches with the described internal thread in described probe 1 by described external thread, so that described radio-frequency identification card 2 is fixed in described probe 1, plug 5 in Fig. 2 plays the effect of the opening of shutoff packaging structure 3, described opening is installation and the replacing at packaging structure 3 for radio-frequency identification card 2.
Refer to Fig. 5, Fig. 5 is the enlarged drawing of the packaging structure schematic diagram that is built-in with radio-frequency identification card in the present invention, in Fig. 5, the inside of described packaging structure 3 is built-in with radio-frequency identification card 2, described packaging structure 3 is full-closed structure, and there is outer-hexagonal bolt head structure one end of described packaging structure 3, and in an embodiment, the thickness of the described outer-hexagonal bolt head structure of described packaging structure 3 one end is less than thickness and the height of described radio-frequency identification card 2, plug 5 in Fig. 5 plays the effect of the opening of shutoff packaging structure 3, described opening is installation and the replacing at packaging structure 3 for radio-frequency identification card 2.
The packaging structure 3 of non-conductive material is to keep the wireless signal input and the stability of exporting of radio-frequency identification card 2; Described packaging structure 3 matches to be fixed in described probe 1 with the described internal thread in described probe 1 by the described external thread of described packaging structure 3, the interference of radio-frequency identification card 2 and probe 1 top device while having avoided wafer testing electrical property, has also reduced the problem that causes it to come off because of external force simultaneously; There is outer-hexagonal bolt head structure one end of described packaging structure 3, has facilitated installation, adjustment and the replacing of radio-frequency identification card 2.
Refer to Fig. 4, Fig. 4 is for the enlarged drawing of schematic diagram of radio-frequency (RF) identification card packaging structures is installed in the probe in the present invention, in Fig. 4, the described pilot hole 4 of described probe 1 is through hole, and there is internal thread in 1/2 length of described pilot hole 4, in all the other length, be unthreaded hole structure, and described female thread structure is positioned at the middle part of described pilot hole 4; And in an embodiment, the axis of the described pilot hole 4 in described probe 1 is perpendicular to the surface of described probe 1, and the described externally threaded length of described packaging structure 3 equals the length of the described pilot hole 4 in described probe 1.
Refer to Fig. 6, Fig. 6 is the enlarged drawing of the hollow bulb schematic diagram of the packaging structure in the present invention; In Fig. 6, the bolt structure that described packaging structure 3 is hollow, described radio-frequency identification card 2 is located at the hollow bulb of described bolt structure.And in an embodiment, described radio-frequency identification card 2 is wringing fit relation in the described hollow bulb of described packaging structure 3 and between described packaging structure 3; And one end of described packaging structure 3 has the loading port structure of described radio-frequency identification card 2, described loading port structure has internal thread.
Refer to Fig. 7, Fig. 7 is the enlarged drawing of the end cap schematic diagram in the present invention; Described plug 5 has external thread, and the described external thread of described plug 5 matches with the described internal thread of described loading port structure.
The described externally threaded length of described packaging structure 3 equals the length of the described pilot hole 4 in described probe 1, outstanding to avoid described packaging structure 3 to have in described probe 1; The axis of the described pilot hole 4 in described probe 1 is perpendicular to the surface of described probe 1, to avoid probe that the installation of described packaging structure 3 affected described probe 1 welding space or the link position in described probe 1; In 1/2 length of the described pilot hole 4 of described probe 1, there is internal thread, it in all the other length, is unthreaded hole structure, because only have the through-hole structure of part screw thread, the length of fit of the described internal thread in described external thread and the described probe 1 of the described packaging structure 3 of energy minimizing, facilitate installation, adjustment and the replacing of radio-frequency identification card 2, and reduced described external thread and described internal thread coordinate the power of overstocking on the impact in described packaging structure 3 and described probe 1; There is externally threaded plug 5, match with described packaging structure 3 loading port structures, to facilitate packing into and changing of described radio-frequency identification card 2.
Can find out from above-described embodiment, a kind of probe 1 with screw thread fixed RF identification card 2 of the present invention is installed, first be in probe 1, to have a female pilot hole 4 of tool, then be that radio-frequency identification card 2 is built in the packaging structure 3 of a non-conductive material, this packaging structure 3 has the external thread matching with the internal thread of the pilot hole 4 in probe 1, and have the outer-hexagonal bolt head structure of the power tools such as applicable spanner in one end of this packaging structure 3, with facilitate be built-in with radio-frequency identification card 2 packaging structure 3 fixing, adjust and change; In this probe 1, be fixedly built-in with the packaging structure 3 of radio-frequency identification card 2 with screw thread, the interference of radio-frequency identification card 2 and probe 1 top device while having avoided wafer testing electrical property, installation, adjustment and the replacing of radio-frequency identification card 2 are facilitated, also reduced the problem that causes it to come off because of external force simultaneously, so this device has reduced the failure rate of the radio-frequency identification card 2 being fixed in probe 1, improve the range of application of RFID, for the read-write of probe 1 essential information provides guarantee.
Above-described is only the preferred embodiments of the present invention; described embodiment is not in order to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization instructions of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.
Claims (9)
1. a probe card device, the radio-frequency identification card of radio frequency identification system is housed, it is characterized in that, the radio-frequency identification card installed position of described probe is provided with a pilot hole, described pilot hole inwall has internal thread, described radio-frequency identification card is built in the packaging structure of a non-conductive material, described packaging structure has external thread, described packaging structure matches with the described internal thread in described probe by described external thread, so that described radio-frequency identification card is fixed in described probe.
2. probe card device as claimed in claim 1, is characterized in that, described non-conductive material refers to plastic material or wooden material.
3. probe card device as claimed in claim 1, is characterized in that, the described externally threaded length of described packaging structure is not more than the length of the described pilot hole in described probe.
4. the probe card device as described in claim 1 or 3, is characterized in that, the axis of the described pilot hole in described probe is perpendicular to the surface of described probe.
5. the probe card device as described in claim 1 or 3, is characterized in that, at least 1/3 length of the described pilot hole of described probe, has internal thread, is unthreaded hole structure in all the other length.
6. probe card device as claimed in claim 1, is characterized in that, described packaging structure is full-closed structure, and described radio-frequency (RF) identification is arranged in the hollow inside of described packaging structure.
7. probe card device as claimed in claim 6, is characterized in that, the screw that described packaging structure is hollow or screw-rod structure, and described radio-frequency (RF) identification is arranged in the hollow bulb of described screw or screw-rod structure.
8. probe card device as claimed in claim 7, is characterized in that, it is wringing fit relation that described radio-frequency (RF) identification is stuck in the described hollow bulb of described packaging structure and between described packaging structure.
9. the probe card device as described in claim 6 or 7 or 8, it is characterized in that, also comprise plug, described plug has external thread, one end of described packaging structure has the loading port structure of described radio-frequency identification card, and described loading port structure has the internal thread matching with the described external thread of described plug.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410412328.4A CN104155492A (en) | 2014-08-20 | 2014-08-20 | Probe card device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410412328.4A CN104155492A (en) | 2014-08-20 | 2014-08-20 | Probe card device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104155492A true CN104155492A (en) | 2014-11-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410412328.4A Pending CN104155492A (en) | 2014-08-20 | 2014-08-20 | Probe card device |
Country Status (1)
| Country | Link |
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| CN (1) | CN104155492A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112394274A (en) * | 2019-08-13 | 2021-02-23 | 芯恩（青岛）集成电路有限公司 | Wafer test equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101322035A (en) * | 2005-12-05 | 2008-12-10 | 日本发条株式会社 | Probe card |
| JP2010231667A (en) * | 2009-03-27 | 2010-10-14 | Nec Personal Products Co Ltd | Rfid printer, and method and program for reading and writing of rfid printer |
| CN202257636U (en) * | 2011-10-08 | 2012-05-30 | 四川鼎天电子标识技术***有限公司 | RFID hook recognition device for an animal slaughtering line |
| CN202512611U (en) * | 2011-12-23 | 2012-10-31 | 上海大学 | RFID electronic tag capable of tracing and monitoring PC component |
| CN103324973A (en) * | 2012-03-23 | 2013-09-25 | 江苏曙光华阳钻具有限公司 | Petroleum drilling tool built-in chip identification structure |
| CN103558425A (en) * | 2013-11-13 | 2014-02-05 | 上海华力微电子有限公司 | Prober card with radio frequency identification device |
| CN203772909U (en) * | 2014-02-21 | 2014-08-13 | 上海华力微电子有限公司 | Test probe card |
-
2014
- 2014-08-20 CN CN201410412328.4A patent/CN104155492A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101322035A (en) * | 2005-12-05 | 2008-12-10 | 日本发条株式会社 | Probe card |
| JP2010231667A (en) * | 2009-03-27 | 2010-10-14 | Nec Personal Products Co Ltd | Rfid printer, and method and program for reading and writing of rfid printer |
| CN202257636U (en) * | 2011-10-08 | 2012-05-30 | 四川鼎天电子标识技术***有限公司 | RFID hook recognition device for an animal slaughtering line |
| CN202512611U (en) * | 2011-12-23 | 2012-10-31 | 上海大学 | RFID electronic tag capable of tracing and monitoring PC component |
| CN103324973A (en) * | 2012-03-23 | 2013-09-25 | 江苏曙光华阳钻具有限公司 | Petroleum drilling tool built-in chip identification structure |
| CN103558425A (en) * | 2013-11-13 | 2014-02-05 | 上海华力微电子有限公司 | Prober card with radio frequency identification device |
| CN203772909U (en) * | 2014-02-21 | 2014-08-13 | 上海华力微电子有限公司 | Test probe card |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112394274A (en) * | 2019-08-13 | 2021-02-23 | 芯恩（青岛）集成电路有限公司 | Wafer test equipment |
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Application publication date: 20141119 |
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