CN104155477A - Method of tracking atomic force acoustical microscopy probe contact resonant frequency - Google Patents
Method of tracking atomic force acoustical microscopy probe contact resonant frequency Download PDFInfo
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- CN104155477A CN104155477A CN201410397783.1A CN201410397783A CN104155477A CN 104155477 A CN104155477 A CN 104155477A CN 201410397783 A CN201410397783 A CN 201410397783A CN 104155477 A CN104155477 A CN 104155477A
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Abstract
The present invention relates to a method of tracking an atomic force acoustical microscopy probe contact resonant frequency. The method enables the single frequency square wave excitation to substitute for the sine wave frequency sweep based on a spectrum analysis method and by the fast Fourier transform (FFT), thereby avoiding the influence of a frequency sweep process to the imaging speed of the atomic force acoustical microscopy, and realizing the fast tracking of the atomic force acoustical microscopy probe contact resonant frequency.
Description
Technical field
The present invention relates to a kind of method for tracing of atomic-force acoustic microscopy probe contact resonance frequency.
Background technology
Atomic-force acoustic microscopy is to develop and the near field acoustic imaging technology of formation on atomic force microscope basis, normally on atomic force microscope, increasing a sound excites with detection system and forms, it can observe and research material surface and the microstructural acoustic imaging technology of subsurface with sound wave us on nanoscale, quite extensive in biological field application prospect.
Atomic-force acoustic microscopy is mainly started with from end of probe, utilizes scanning probe tip (radius-of-curvature 20nm left and right) to have the feature of high Imaging Resolution, and acoustical signal detection space precision is brought up to nanometer scale.According to the difference of acoustical signal energisation mode, atomic-force acoustic microscopy generally can be divided into sample energisation mode, probe excitation mode and probe and sample difference frequency energisation mode.Similar with atomic force microscope, atomic-force acoustic microscopy can be divided into the operating distance of sample according to probe again contact, half contact and away from mode of operation.In order to overcome the impact of the acoustic wave diffraction limit on Imaging Resolution, and obtain surface, the microstructural mechanical characteristics that simultaneously obtains sample surface of subsurface, generally adopting the vibration of ultrasonic transducer excitation sample, the mode of probe and sample contact scanning imaging.
When with atomic-force acoustic microscopy scanning imagery, along with the variation of sample surface and subsurface structural property, the contact resonance frequency of probe and sample also can change.In order to keep probe to survey in high sensitivity the acoustical signal passing over from sample subsurface, need to dynamically adjust according to the variation of probe contact resonance frequency the excitation frequency of sample acoustical signal.Chinese patent 201010194831.9 proposes the variation of following the trail of probe contact resonance frequency by the mode of sinusoidal wave frequency sweep, but the method for frequency sweep needs controller to send a series of sine waves continuously, different frequency, and the responsive state of probe under each driving frequency of need to reading back, this certainly will bring adverse effect by the image taking speed of giving atomic-force acoustic microscopy.
Summary of the invention
The present invention seeks to overcome the existing frequency sweep of utilizing and carry out the slow-footed shortcoming of tracer atom power acoustic microscope probe contact resonance frequency, propose a kind of method of quick tracer atom power acoustic microscope probe contact resonance frequency.
The present invention is based on frequency spectrum analysis method, utilize fast fourier transform (FFT), single-frequency square wave excitation is replaced to sinusoidal wave frequency sweep, realize the quick tracking of atomic-force acoustic microscopy probe contact resonance frequency.
The concrete steps of the inventive method are:
1) the surface topography information of the probe of tracking response atomic-force acoustic microscopy and the current contact point of sample;
2) determine the probe contact resonance frequency of atomic-force acoustic microscopy;
3) excitation frequency of setting sample ultrasonic transducer is probe contact resonance frequency;
4) separation and extraction picture signal, moves to next contact point by the probe of atomic-force acoustic microscopy.
The hardware system of described atomic-force acoustic microscopy and atomic force microscope forms basic identical, mainly comprises probe, laser instrument, photoelectric sensor, Z scanner feedback controller, XY scanner, Z scanner, stepper motor and master controller.Atomic-force acoustic microscopy is introduced probe ultrasonic transducer, sample ultrasonic transducer and lock-in amplifier on the basis of atomic force microscope, probe ultrasonic transducer and probe mechanical connection excitation probe vibration under the driving of AC signal; Sample ultrasonic transducer and sample mechanical connection also encourage sample vibration under the driving of AC signal; Lock-in amplifier is using the signal that drives sample vibration as with reference to signal, using the output signal of photoelectric sensor as input signal, thus the Weak Ultrasonic signal of detector probe induction.
Described step 1) method of the probe of tracking response atomic-force acoustic microscopy and the surface topography information of the current contact point of sample is:
The surface topography information of the probe of atomic-force acoustic microscopy and the current contact point of sample is low frequency signal, and this low frequency signal, after photoelectric sensor detects, exports Z scanner feedback controller to.Z scanner feedback controller relatively draws this signal and reference value error signal and after ratio and integral operation, exports Z scanner, as the driving signal of Z scanner, Z scanner carries out corresponding Z direction stretching motion under this drive, makes the interaction force of probe and the current contact point of sample remain on reference value.It is consistent that the stroke of Z scanner and sample are touched surface topography information a little, and the driving signal of Z scanner is sample surface pattern signal.
Described step 2) determine that the method for the probe contact resonance frequency of atomic-force acoustic microscopy is:
Apply single-frequency square wave excitation signal by probe ultrasonic transducer to the probe of atomic-force acoustic microscopy, excitation probe vibration; The response of photoelectric sensor detector probe to this square wave excitation, and this response voltage signal is input to master controller.Master controller carries out fast fourier transform, corresponding frequency information while determining amplitude maximum, and this frequency is probe contact resonance frequency.
Described step 4) method of separation and extraction picture signal is:
Step 1) the driving signal of described Z scanner is sample surface pattern signal, and this signal is low frequency signal.Using step 2) definite probe contact resonance frequency is as with reference to signal input lock-in amplifier, and the probe deflection signal simultaneously photoelectric sensor being detected is as the input signal of lock-in amplifier.In the time of the probe scanning initial contact point of atomic-force acoustic microscopy, adjust the phase place of lock-in amplifier, make the output valve maximum of lock-in amplifier, and in the time that atomic-force acoustic microscopy scans the contact point of remaining probe and sample, keep the phase value of lock-in amplifier constant, the output of lock-in amplifier is sample subsurface acoustic imaging signal.
The principle of the invention is: apply single-frequency square-wave signal by the ultrasonic transducer of giving probe, drive probe oscillation, photoelectric sensor detects this vibration, and oscillator signal is transported to master controller carries out fast fourier transform, wherein corresponding frequency information is probe contact resonance frequency when amplitude maximum.
Tool of the present invention has the following advantages:
Utilize existing electronics technology can complete rapidly fast fourier transform, replace sinusoidal wave frequency sweep with single-frequency square wave excitation, avoid the impact of frequency sweep process on atomic-force acoustic microscopy image taking speed, realize the quick tracking of atomic-force acoustic microscopy probe contact resonance frequency.According to the variation of probe contact resonance frequency, dynamically adjust the pumping signal of sample ultrasonic transducer, make its frequency consistent with probe contact resonance frequency, thus the high sensitivity that keeps probe to survey weak acoustic signal.Ensureing under the prerequisite of atomic-force acoustic microscopy high sensitivity detection that the raising of image taking speed will further promote its application to dynamic process observation in cell body.
Brief description of the drawings
Fig. 1 is the quick method for tracing schematic diagram of atomic-force acoustic microscopy probe contact resonance frequency;
Fig. 2 is the inventive method FB(flow block);
In figure: 1 laser instrument, 2 probes, 3 photoelectric sensors, 4 samples, 5 sample ultrasonic transducers, 6XY scanner, 7Z scanner feedback controller, 8Z scanner, 9 probe ultrasonic transducers, 10 master controllers, 11 lock-in amplifiers, 12 image displays.
Embodiment
Further illustrate the present invention below in conjunction with the drawings and specific embodiments.
Be illustrated in figure 1 the quick method for tracing schematic diagram of atomic-force acoustic microscopy probe contact resonance frequency.Laser instrument 1 from sample 4 tops transmittings beam of laser bundles through probe 2 backside reflection the photoelectric sensor 3 to sample 4 tops, probe 2 contacts with the upper surface of sample 4, the bonding sample ultrasonic transducer 5 in below of sample 4.Sample 4 is stacked on XY scanner 6 together with sample ultrasonic transducer 5.Photoelectric sensor 3 outputs voltage signal to feedback controller 7, master controller 10 and lock-in amplifier 11 simultaneously.After feedback controller 7 receives the signal of photoelectric sensor 3, voltage is controlled in output, and this control voltage drives Z scanner 8 to drive probe 2 to move up and down in Z direction on the one hand, is shown as highly and looks like on the other hand for image display 12.Master controller 10 is exported single-frequency square-wave signal to probe ultrasonic transducer 9, and the probe 2 that makes to be adhered on probe ultrasonic transducer 9 vibrates.Simultaneously, the vibration signal of 10 probes 2 that monitor by photoelectric sensor 3 of master controller is through fast fourier transform, after determining that frequency corresponding to amplitude maximum is probe contact resonance frequency, the driving signal frequency of sample ultrasonic transducer 5 is set as to probe contact resonance frequency.Lock-in amplifier 11, using probe contact resonance frequency as with reference to signal, extracts acoustical signal probe 2 oscillator signals of monitoring from photoelectric sensor 3, outputs to image display 12 and is shown as subsurface acoustic imaging.
As shown in Figure 2, concrete operation step of the present invention is:
1) the surface topography information of tracking response atomic-force acoustic microscopy probe and the current contact point of sample;
2) determine probe contact resonance frequency;
3) excitation frequency of setting sample ultrasonic transducer is probe contact resonance frequency;
4) separation and extraction picture signal, moves to next contact point by probe.
Described step 1) method of surface topography information of tracking response atomic-force acoustic microscopy probe and the current contact point of sample is:
Atomic-force acoustic microscopy probe 2 is low frequency signal with the surface topography information of sample 4 current contact points, and this low frequency signal, after photoelectric sensor 3 detects, exports Z scanner feedback controller 7 to.Z scanner feedback controller 7 is by this signal and reference value, as between-1V～1V, relatively draw error signal and export after ratio and integral operation, output to image display 12 as sample surface altitude signal is shown as height image to this output signal on the one hand, drive on the other hand Z scanner 8 to carry out Z direction stretching motion, make probe 2 constant with the interaction force of sample 4 current contact points, the magnitude of voltage that this constant acting force detects photoelectric sensor 3 equals above-mentioned reference value.
Described step 2) determine that the method for probe contact resonance frequency is:
Master controller 10 produces 1KHz square-wave signal and drives probe ultrasonic transducer 9 excitation probe 2 to vibrate, the response of photoelectric sensor 3 detector probe 2 to this square wave excitation also passed this response voltage signal back master controller 10, master controller 10 carries out fast fourier transform to this signal, determine its resonance frequency by finding amplitude maximum, this resonance frequency is probe contact resonance frequency, as 100KHz.
Described step 3) produce the driving signal of sample ultrasonic transducer 5 by master controller 10.
Described step 4) method of separation and extraction picture signal is:
By step 2) definite probe contact resonance frequency, as 100KHz, as inputting lock-in amplifier 11 with reference to signal, the probe deflection signal simultaneously photoelectric sensor 3 being detected is as the input signal of lock-in amplifier 11.In the time of probe scanning initial contact point, adjust the phase place of lock-in amplifier 11, make the output valve of lock-in amplifier 11
maximum, wherein A is amplitude,
for the phase differential of lock-in amplifier 11 reference signals and input signal.In the time continuing the next contact point of scan-probe and sample, keep the phase value of lock-in amplifier 11 constant, the output of lock-in amplifier 11
the subsurface structure-borne sound imaging signal that is sample 4, is shown as subsurface structural images by image display 12.
Above-mentioned master controller 10 produces 1KHz square-wave signal, 100KHz sine wave signal and fast fourier transform and all realizes by FPGA.
Claims (2)
1. an atomic-force acoustic microscopy probe contact resonance frequency method for tracing, it is characterized in that, described atomic-force acoustic microscopy probe contact resonance frequency method for tracing is based on frequency spectrum analysis method, pass through fast fourier transform, single-frequency square wave excitation is replaced to sinusoidal wave frequency sweep, realize the tracking of atomic-force acoustic microscopy probe contact resonance frequency.
2. according to atomic-force acoustic microscopy probe contact resonance frequency method for tracing claimed in claim 1, it is characterized in that, the concrete steps of described method for tracing are:
1) the surface topography information of the probe of tracking response atomic-force acoustic microscopy (2) and the current contact point of sample (4);
2) determine the probe contact resonance frequency of atomic-force acoustic microscopy;
3) the probe contact resonance frequency that the excitation frequency of setting sample ultrasonic transducer is atomic-force acoustic microscopy;
4) separation and extraction picture signal, moves to next contact point by the probe of atomic-force acoustic microscopy (2);
Described step 1) method of the probe (2) of tracking response atomic-force acoustic microscopy and the surface topography information of the current contact point of sample (4) is:
The probe (2) of atomic-force acoustic microscopy is low frequency signal with the surface topography information of the current contact point of sample (4), this low frequency signal, after photoelectric sensor (3) detects, exports Z scanner feedback controller (7) to; Z scanner feedback controller (7) is by this signal and reference value comparison, draw error signal and export after ratio and integral operation, output to image display (12) as sample surface altitude signal is shown as height image to this output signal on the one hand, drive on the other hand Z scanner (8) to carry out Z direction stretching motion, make probe (2) constant with the interaction force of the current contact point of sample (4), the magnitude of voltage that this constant acting force detects photoelectric sensor (3) equals above-mentioned reference value;
Described step 2) determine that the method for the probe contact resonance frequency of atomic-force acoustic microscopy is:
Apply single-frequency square wave excitation signal by probe ultrasonic transducer to the probe (2) of atomic-force acoustic microscopy, excitation probe (2) vibration; The response of photoelectric sensor (3) detector probe (2) to this square wave excitation, and this response voltage signal is input to master controller (10); Master controller (10) carries out fast fourier transform, corresponding resonance frequency information while determining amplitude maximum, and this resonance frequency is the probe contact resonance frequency of atomic-force acoustic microscopy;
Described step 4) method of separation and extraction picture signal is:
Using step 2) definite probe contact resonance frequency is as with reference to signal input lock-in amplifier (11), and the probe deflection signal simultaneously photoelectric sensor (3) being detected is as the input signal of lock-in amplifier (11); In the time of probe (2) the scanning initial contact point of atomic-force acoustic microscopy, adjust the phase place of lock-in amplifier (11), make the output valve maximum of lock-in amplifier (11); In the time that atomic-force acoustic microscopy continues all the other contact points of scan-probe (2) and sample (4), keep the phase value of lock-in amplifier (11) constant, lock-in amplifier (11) is the subsurface structure-borne sound imaging signal of sample (4), is shown as subsurface structural images by image display (12).
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Cited By (6)
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| CN106469241A (en) * | 2016-09-26 | 2017-03-01 | 华南理工大学 | The frequency sweep modeling method of Electromagnetic-drivmicro micro mirror and system |
| CN107188116A (en) * | 2016-03-14 | 2017-09-22 | 中国科学院沈阳自动化研究所 | A kind of ultrasonic AFM closed loops nanometer processing device and method based on phase feedback |
| CN107192857A (en) * | 2016-03-14 | 2017-09-22 | 中国科学院沈阳自动化研究所 | A kind of nano film thickness detection means and its method based on ultrasonic AFM |
| CN107462745A (en) * | 2016-06-03 | 2017-12-12 | 中国科学院沈阳自动化研究所 | A kind of apparatus and method of the quadrature amplitude scanning imagery pattern of SICM |
| CN108408685A (en) * | 2018-02-05 | 2018-08-17 | 杭州电子科技大学 | A kind of ultrasonic vibration etching device and nanoprocessing system |
| CN108802433A (en) * | 2018-03-15 | 2018-11-13 | 中国科学院苏州纳米技术与纳米仿生研究所 | Atomic force microscope probe, preparation method based on surface acoustic wave and characterizing method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107188116A (en) * | 2016-03-14 | 2017-09-22 | 中国科学院沈阳自动化研究所 | A kind of ultrasonic AFM closed loops nanometer processing device and method based on phase feedback |
| CN107192857A (en) * | 2016-03-14 | 2017-09-22 | 中国科学院沈阳自动化研究所 | A kind of nano film thickness detection means and its method based on ultrasonic AFM |
| CN107188116B (en) * | 2016-03-14 | 2019-03-22 | 中国科学院沈阳自动化研究所 | A kind of ultrasonic AFM closed loop nanometer processing device and method based on phase feedback |
| CN107462745A (en) * | 2016-06-03 | 2017-12-12 | 中国科学院沈阳自动化研究所 | A kind of apparatus and method of the quadrature amplitude scanning imagery pattern of SICM |
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| CN108408685A (en) * | 2018-02-05 | 2018-08-17 | 杭州电子科技大学 | A kind of ultrasonic vibration etching device and nanoprocessing system |
| CN108802433A (en) * | 2018-03-15 | 2018-11-13 | 中国科学院苏州纳米技术与纳米仿生研究所 | Atomic force microscope probe, preparation method based on surface acoustic wave and characterizing method |
| CN108802433B (en) * | 2018-03-15 | 2020-12-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Atomic force microscope probe based on surface acoustic wave, preparation method and characterization method |
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Application publication date: 20141119 |